PMMA 495K needs refill
James Conway
jwc at snf.stanford.edu
Fri Apr 23 09:22:43 PDT 2004
Greetings:
I have replaced the 5% 495K MW PMMA with a new bottle and placed this
into the Cleanroom.
This material is from the same manufacturing batch as the last 4 bottles
of this material.
Please minimize waste and be careful in handling all of our resist
materials.
Ebeam Resist Handling Guidelines.
<http://snf.stanford.edu/Process/Lithography/EBResist/EBResistHandling.html>
In addition, I have placed a small stock of Microchem MaN-2403 into the
ebeam resist solvent storage cabinet and E-beam users interested in
trying this Negative tone material are encouraged to to give it a try.
Please report your results back to me and aid in our evaluation of this
material for addition to our standard stock or resist materials we
maintain here at SNF.
Thank you for your support!
James Conway
Jien Cao wrote:
>Hi, James,
>
>The 495K PMMA for lab use is empty now. Could you please refill it at your
>earliest convenience? Thanks!
>
>Jien
>
>
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