From hungtao at stanford.edu Mon Aug 2 10:17:13 2004 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Mon, 2 Aug 2004 10:17:13 -0700 Subject: raith free from 6:30pm -10:30pm today Message-ID: <1091467033.410e77191f4f9@webmail.stanford.edu> my sample is not ready From bjeletic at ece.ucdavis.edu Mon Aug 2 12:53:43 2004 From: bjeletic at ece.ucdavis.edu (Peter Bjeletich) Date: Mon, 2 Aug 2004 12:53:43 -0700 (PDT) Subject: Raith free today 1pm to 6 pm In-Reply-To: <1091467033.410e77191f4f9@webmail.stanford.edu> References: <1091467033.410e77191f4f9@webmail.stanford.edu> Message-ID: I am so sorry for the late notice. I got to Palo Alto and realized that I left my samples in Davis, so I will not be able to make it to my reservation. Sorry for the inconvenience, Peter From jwc at snf.stanford.edu Mon Aug 2 13:34:44 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 02 Aug 2004 13:34:44 -0700 Subject: raith free from 6:30pm -10:30pm today In-Reply-To: <1091467033.410e77191f4f9@webmail.stanford.edu> References: <1091467033.410e77191f4f9@webmail.stanford.edu> Message-ID: <410EA564.4030507@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Aug 2 13:44:33 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 02 Aug 2004 13:44:33 -0700 Subject: Please bring me all the dongles today... Message-ID: <410EA7B1.4020600@snf.stanford.edu> Greetings: WE have a new software version Version 3.0 SP5 in place and I need to testing with the off line dongles we have. I am also teaching RAITH Group X Tuesday through Friday in another four day intensive short course. PLEASE BRING ME ALL THE DONGLES TO MY DESK TODAY FOR THESE PURPOSES. Thank you for your support! James Conway From jwc at snf.stanford.edu Mon Aug 2 15:28:59 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 02 Aug 2004 15:28:59 -0700 Subject: 2ND CALL FOR DONGLES: Please bring me all the dongles today... Message-ID: <410EC02B.1030207@snf.stanford.edu> Greetings: WE have a new software version Version 3.0 SP5 in place and I need to testing with the off line dongles we have. I am also teaching RAITH Group X Tuesday through Friday as a another four day intensive short course. PLEASE BRING ME ALL THE DONGLES TO MY DESK TODAY FOR THESE PURPOSES. You are holding up the show... Thank you for your support! James Conway From jwc at snf.stanford.edu Tue Aug 3 09:50:16 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 03 Aug 2004 09:50:16 -0700 Subject: Raith Group X -- intensive short course this week. Message-ID: <410FC248.800@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: RAITH Group X.doc Type: application/msword Size: 22016 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed Aug 4 15:15:02 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 04 Aug 2004 15:15:02 -0700 Subject: Problem raith SNF 2004-08-04 14:23:28: Mag Range Three amplifier blown on Electron Optics board Message-ID: <41115FE6.40304@snf.stanford.edu> Raith Users: A 30 keV EHT Trip event on the system last night resulted in damage to the Electron Optics board on the LEO SEM package. Specifically the Magnification Amplifier for Magnification Range Three was blown on Electron Optics board and we cannot perform imaging above 13,250 X magnification. This will make SEM column alignment and stigmation adjustments difficult in not impossible for most users. LEO & Raith was updated on this at 7 AM 8-04-04. I followed up with them escalating to 'system down' in need of immediate response at 1315 hours 080404 through both LEO and Raith Service desk. We will update to this list tomorrow afternoon if more information presents itself. Currently the system is in YELLOW MODE and still available to users wishing to attempt exposures on the system. Thank you for your support! James W. Conway From jwc at snf.stanford.edu Fri Aug 6 09:31:41 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 06 Aug 2004 09:31:41 -0700 Subject: Improtant: Check your CORAL reservations!!!! Message-ID: <4113B26D.2030106@snf.stanford.edu> Greetings Coral Computer people and RAITH Users: I had placed a reservation from Tuesday August 10, 2004 10 am to 12:00 midnight (WED.) on the CORAL system last week to complete a long pattern write. This reservation was on the system. I come into work today and see that and all my other reservations for next week have disappeared. Could this have been from something done by the computer people working on CORAL? RSVP... Users are requested to check their reservations to ensure they are still in place. I will still need an overnight session next week. Thank you, James Conway From jwc at snf.stanford.edu Fri Aug 6 13:29:15 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 06 Aug 2004 13:29:15 -0700 Subject: Cancelling my session for Friday overnight to SAT AM -- Please utilize the system now avail.1830 - 0900 SAT. Message-ID: <4113EA1B.5010100@snf.stanford.edu> An HTML attachment was scrubbed... URL: From chquay at MtHolyoke.edu Sat Aug 7 01:01:06 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Sat, 7 Aug 2004 04:01:06 -0400 (EDT) Subject: raith issues? Message-ID: (1) beam drift/settling right after beam is unblanked, same as has been seen before. several hundred nm. (2) stigmation varies from place to place on sample by several %. (3) focus also drifts over time. problem (3) could be due to the fact that i'm using carbon dots but i've bever seen (2) when i'm not near a clip. what was the problem the last time we saw (1)? charis. From lgx at stanford.edu Sat Aug 7 23:02:07 2004 From: lgx at stanford.edu (Guanxiong Li) Date: Sat, 7 Aug 2004 23:02:07 -0700 Subject: Reservation 1:30 - 6:30 pm, Sunday (8/8) cancelled Message-ID: <001801c47d0d$3c843280$05a70c80@stanford.edu> An HTML attachment was scrubbed... URL: From altug at stanford.edu Tue Aug 10 11:09:16 2004 From: altug at stanford.edu (Hatice Altug) Date: Tue, 10 Aug 2004 11:09:16 -0700 Subject: Raith is free on Wed 17:00-21:00 Message-ID: <023401c47f05$26226990$419a0c80@hatice> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Aug 10 19:12:06 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 10 Aug 2004 19:12:06 -0700 Subject: raith issues? In-Reply-To: References: Message-ID: <41198076.1060803@snf.stanford.edu> Charis and others: RE: Questions 1 and 2 sound like charging or artifacts of sample surface charging. You can see charging on your samples on the picoammeter as changes to Specimen Current over a short time frame say ~ ten seconds. CARBON DOTS -- NOT: I would not recommend placing carbon dots into the raith system. This will result in so much out gassing as to negatively impact the cleanliness of the chamber and column upon said out gassing event. If you must secure your samples and are not using the clips on the sample holder I would recommend using very small pieces of the thin spectrographic grade carbon dots from ted pella.com. WARM UP TIME to Stability: Do allow enough time for the system to reach thermal equilibrium (~50 minutes) I have found that in one hour it meets the beam drift specification of < 10 nm per minute of dot shot time. I do this check every time I qualify the system. BE CLEAN AND ALWAYS Bake your samples: It is important that everyone strives to maintain a clean UHV environment in the chamber. This means gloves always, solvent clean and bake all apparatus or holders that are placed into the chamber every time. Every sample must be soft baked either oven or hot plate temp > 150 degrees Celsius. I recommend 170 degree C. for 90 second on the hot plate or 2 hours in the Blue M oven. It is strongly recommended for samples after exposure/ development to bake at 90 C for 2 min. them load ASAP. We have a hot plate that is always on in the Ebeam Lab for your usage. Please be sure to return this hot plate to 130 degrees Celsius after doing your bakes for the UVN-30 people. RE: 3: Focus drift ?!! I am not sure how or why the focus could be drifting. I have not observed this in my recent runs. This would be a huge problem and I am sure everyone would be having poor writes if this is the case. I will check it out the next time I am on the system. Follow the Step by Step Procedures: Follow closely the procedures I have laid out and you should get consistent results each and every time on the RAITH system. If you are not getting the results you desire ten please set up a daytime session to work together with me so we can resolve your issues of concern. Thank you for your inputs! James Conway SNF Charis Quay Huei Li wrote: >(1) beam drift/settling right after beam is unblanked, same as has been >seen before. several hundred nm. > >(2) stigmation varies from place to place on sample by several %. > >(3) focus also drifts over time. > >problem (3) could be due to the fact that i'm using carbon dots but i've >never seen (2) when i'm not near a clip. what was the problem the last >time we saw (1)? > >charis. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Tue Aug 10 21:33:23 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 10 Aug 2004 21:33:23 -0700 (PDT) Subject: raith free tonight due to problems Message-ID: I found problems (I reported on coral): beam shape (=burnt spot shape) is deformed at low mag, but very good at high mag. Since I'm writing at 600X I decided not to write. Free overnight if someone wants to try. Evrything else was fine. Gigi From jwc at snf.stanford.edu Wed Aug 11 10:08:27 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 11 Aug 2004 10:08:27 -0700 Subject: I would like to access the system at 1300 hours today for testing. Message-ID: <411A528B.5000108@snf.stanford.edu> Charis and Raith groups: I would like to access the system to check out the problems that gigi reported last night. I will be available at 13:00 hours and will be on the system about 2 hours... Thank you, JWC From chquay at MtHolyoke.edu Wed Aug 11 10:59:28 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Wed, 11 Aug 2004 13:59:28 -0400 (EDT) Subject: I would like to access the system at 1300 hours today for testing. In-Reply-To: <411A528B.5000108@snf.stanford.edu> Message-ID: James, would it be possible for you to look at the Raith tomorrow morning instead? I am in a bit of a hurry as I am trying to get samples prepared for a trip to the East Coast. Also, the problem that Gigi described will not significantly affect the patterns I'm trying to write. Let me know. Thanks! Charis. From jwc at snf.stanford.edu Wed Aug 11 13:41:42 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 11 Aug 2004 13:41:42 -0700 Subject: Problem raith SNF 2004-08-10 21:26:15: beam distorsion -- cleared issue on coral] Message-ID: <411A8486.1060300@snf.stanford.edu> Hello Raith Users: I tested the system at high (15000/ 150000) and low magnification (600 X) and could not find any image distortion or field perturbations at any mag. range. Imaging Field at 600X is uniform and in fine focus from the center shot dot to the edges of the write field. I will follow up tomorrow with Gigi and try to determine if this effect is from charging artifacts or sample dependent. I was unable to reproduce the problem Gigi was having last evening. JWC 08112004_1335 hrs James Conway Raith Discussions = http://snf.stanford.edu/cgi-bin/ezmlm-cgi/2160 Raith Problem comments list = http://snf.stanford.edu/cgi-bin/ezmlm-cgi/2170 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Aug 11 13:43:22 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 11 Aug 2004 13:43:22 -0700 Subject: ZEISS scheduled to visit Thursday AM for service call on the computer issues Message-ID: <411A84EA.6000905@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Aug 11 17:07:20 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 11 Aug 2004 17:07:20 -0700 Subject: RAITH back in yellow mode -- possible column contamination. INSPECT YOUR PATTERNS AND report!!! Message-ID: <411AB4B8.9040707@snf.stanford.edu> Greetings Raith Users: Gigi first reported elongation in V of the beam spot below 5000X mag. with the spot size reaching nearly 100 x 25 nm. The LEO beam blanker when unblanked shows a very slight drift upon unblanking. This is not be confused with surface sample charge up as experienced by some users over the course of the last few weeks. Rx: The column may have become contaminated with HC residues and we will possibly be needing to perform another PM on the system to resolve this issue. ZEISS will be here tomorrow morning on this and several other issues. Note: NO Users have reported problems during their writes! This problem should not influence your results in pattern writes at the normal beam speeds. Everyone is requested to carefully inspect their pattern writes performed this week both optically and in any SEM and report their results and if possible send me your images to raith at snf.stanford.edu James Conway jwc 08112004_1657 hrs -------------- next part -------------- An HTML attachment was scrubbed... URL: From arvisun at stanford.edu Wed Aug 11 17:48:20 2004 From: arvisun at stanford.edu (Arvind Sundaramurthy) Date: Wed, 11 Aug 2004 17:48:20 -0700 Subject: Reservation removed from 5:00-9:00pm Wed Message-ID: <1092271700.411abe54f40a2@webmail.stanford.edu> The beam drifts significantly when it is blanked & unblanked. I am canceling my reservation. arvind From chquay at MtHolyoke.edu Wed Aug 11 17:58:02 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Wed, 11 Aug 2004 20:58:02 -0400 (EDT) Subject: Reservation removed from 5:00-9:00pm Wed In-Reply-To: <1092271700.411abe54f40a2@webmail.stanford.edu> Message-ID: Arvind, I saw that too on Friday but not today. I think it may be sample dependent. I have highly-doped Si substrates with 1 micron of oxide. The only difference between Friday and today is the fact that the sample was better grounded today. What are your samples and how is the grounding? Have you seen this problem before? Let me know. Thanks. Charis. From jwc at snf.stanford.edu Thu Aug 12 09:08:25 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Aug 2004 09:08:25 -0700 Subject: Reservation removed from 5:00-9:00pm Wed In-Reply-To: References: Message-ID: <411B95F9.7010902@snf.stanford.edu> Greetings Raith people: FYI: I will be scuffing off and cleaning the contact clips in the Std. Sample Holder and checking resistivity to see if this will improve grounding of the samples on this assembly. Certainly things seemed to have declined over the course of the last week. I have recently come to the conclusion that some contamination if evident in the column. I will be encouraging ZEISS to consider performing another Preventative Maintenance routine on the column and blanker assemblies. RAITH has also been informed. Thank you, James Conway Charis Quay Huei Li wrote: >Arvind, I saw that too on Friday but not today. I think it may be sample >dependent. I have highly-doped Si substrates with 1 micron of oxide. The >only difference between Friday and today is the fact that the sample was >better grounded today. What are your samples and how is the grounding? >Have you seen this problem before? Let me know. Thanks. Charis. > > From jwc at snf.stanford.edu Thu Aug 12 09:12:20 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Aug 2004 09:12:20 -0700 Subject: Out of 5% PMMA In-Reply-To: <1092300794.411b2ffa24ecf@webmail.stanford.edu> References: <1092300794.411b2ffa24ecf@webmail.stanford.edu> Message-ID: <411B96E4.3060705@snf.stanford.edu> Hello Everyone: I will bring out another bottle of 5% 495K MW PMMA this morning. In the future when you empty a bottle of PMMA, or any other resist material, please place the empty bottle into a plastic bag and label with a hazardous waste sticker, then place it into the left pass-thru cabinet in the hazardous waste section. This will alert David Cala and myself that another bottle needs to come in ASAP. Thank you. James Conway Jon Schuller wrote: >James, > I came in tonight to use the headway and spin coat a film of 5% PMMA. >There was less than 5 mL left in the bottle. I used that up and returned >the empty bottle to the flammables cabinet. > >-Jon > > From rohank at stanford.edu Thu Aug 12 12:43:26 2004 From: rohank at stanford.edu (Rohan Deodatta Kekatpure) Date: Thu, 12 Aug 2004 12:43:26 -0700 (PDT) Subject: Beam drift during wri. field. alignmt. Message-ID: Hi all, Josh and I tried a write yesterday night. Beam was stable through focus and stigmation. But we could not get through the write field alignment. We experienced a lot of beam drift when the beam was blanked and unblanked again. -Rohan From jwc at snf.stanford.edu Thu Aug 12 14:21:08 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Aug 2004 14:21:08 -0700 Subject: Shutdown Raith SNF 2004-08-12 13:54:23: LEO E/O BOARD FAILURE... Message-ID: <411BDF44.2020309@snf.stanford.edu> FWD'd from Raith-PCS. In addition to the E/O Board replacement mentioned below, it appears that the column has become contaminated recently. This is evidenced by the increasing number of reports and severity of the image drift after blanking and unblanking the beam which resulted in most of the recent difficulties that Users have reported when performing the align writefield routine. Once we get ZEISS back with a E/O Board we can continue to troubleshoot the system and effect further maintenance and repairs as necessary. Further updates as we have information. Thank you, James Conway -------- Original Message -------- Subject: Shutdown raith SNF 2004-08-12 13:54:23: LEO E/O BOARD FAILURE Date: Thu, 12 Aug 2004 13:54:24 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu The scan rotation calibration function used to maintain Orthogonality is failing -- slowly, and now has failed. This is the source of the misshaped shot spots in the V (Y) axis imaging plane. This will require replacement of the E/O Board. We are attempting to locate a calibrated and tested board from ZEISS. James Conway 08122004_1351 hours. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Aug 12 14:21:44 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Aug 2004 14:21:44 -0700 Subject: Shutdown Raith SNF 2004-08-12 13:54:23: LEO E/O BOARD FAILURE... Message-ID: <411BDF68.6080009@snf.stanford.edu> FWD'd from Raith-PCS: In addition to the E/O Board replacement mentioned below, it appears that the column has become contaminated recently. This is evidenced by the increasing number of reports and severity of the image drift after blanking and unblanking the beam which resulted in most of the recent difficulties that Users have reported when performing the align writefield routine. Once we get ZEISS back with a E/O Board we can continue to troubleshoot the system and effect further maintenance and repairs as necessary. Further updates as we have information. Thank you, James Conway -------- Original Message -------- Subject: Shutdown raith SNF 2004-08-12 13:54:23: LEO E/O BOARD FAILURE Date: Thu, 12 Aug 2004 13:54:24 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu The scan rotation calibration function used to maintain Orthogonality is failing -- slowly, and now has failed. This is the source of the misshapen shot spots in the V (Y) axis imaging plane. This will require replacement of the E/O Board. We are attempting to locate a calibrated and tested board from ZEISS. James Conway 08122004_1351 hours. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Aug 13 09:30:15 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Aug 2004 09:30:15 -0700 Subject: Discusion THREAD RE: raith scheduling reminder In-Reply-To: <000901c480e4$a0554c60$46d642ab@stanford.edu> References: <000901c480e4$a0554c60$46d642ab@stanford.edu> Message-ID: <411CEC97.2020805@snf.stanford.edu> Ofur, David's comment states the current policy well. This is a topic of continuous discussion at our Ebeam Town Meetings. Please keep individual reservation session below 8 hours. If you wish for a 10 hour writing session then you should not reserve the system again for within the next ten day period. I wish to stress to everyone that this pertains to reservations and not utilization on the system. Regarding the recent downtime: Please maintain your reservations on the system I am working hard to get this system up for the weekend and next week. All parties involved are doing their best to make this happen ASAP. Thank you, James David Goldhaber-Gordon wrote: >Dear Ofer, > >The reason that the Coral limit is 10 hours is because the Coral rules are >not sufficiently subtle to accommodate the agreements of the Raith >community. As John noted, the limit for reservations is 8 hours in the >rolling 10 day period. There is no limit on usage, provided the system isn't >fully booked -- if one books two four hour writes, then as soon as one >finishes the first of the two writes, one can book a new four hour write. > >The exception to the hour limit is that a few users need a long single >block of time for a write. They are allowed up to a 10 hour block. There's >some compensating agreement, which I forget, about not being allowed to >immediately book another 10 hour block. > >Thus, the Coral rules have been left looser to accommodate these different >needs, but the community does a good job about playing by the rules we've >agreed to together, and they've helped a lot in sharing a scarce resource. >We should find a better way to advertise these agreements to new users. > >Let me know if you have any questions. > >Best wishes, > >David > >---------------------------------------------------------------------------- >David Goldhaber-Gordon goldhaber-gordon at stanford.edu >Assistant Professor of Physics davidg at post.harvard.edu >Stanford University (permanent forwarding) > www.goldhaber-gordon.com >(650) 725-2047 (lab) (650) 724-3709 (office) > >Address for letters or packages: Administrative Associate: >David Goldhaber-Gordon Roberta Edwards >Geballe Laboratory for Advanced Materials McCullough, Rm. 338 >McCullough Building, Room 346 Phone: (650) 723-8028 >476 Lomita Mall Fax: (650) 724-3681 >Stanford, CA 94305-4045 email: redward at stanford.edu >-----Original Message----- >From: Ofer Levi [mailto:levi at snowmass.stanford.edu] >Sent: Thursday, August 12, 2004 8:05 PM >To: David Goldhaber-Gordon >Cc: cumings at stanford.edu >Subject: Fwd: raith scheduling reminder > >Dear David, >I recently started to use the Raith system for writing some photonic crystal >sensor structures that we would like to couple to our VCSELs. >Today one of your students suggested that the policies for the Raith usage >as shown in the Stanford Coral/policy section may not reflect what he >thinks/knows the policy is. I wanted to bring it to your attention since >generally Coral is very good in blocking you from booking any more time >above the allowed quota and I am not sure what the story is in this case. > >Regards, >Ofer > > > >Date: Thu, 12 Aug 2004 19:53:34 -0700 >To: cumings at stanford.edu >From: Ofer Levi >Subject: Re: raith scheduling reminder >Cc: James Conway_Stanford >Bcc: Ofer Levi > >Dear John, >I looked at the Raith guidelines as shown in the coral/policy system and >they suggest that the reservation period is 10 days, and in it you can >reserve up to 10 hours. This is why I reserved 9 hours in Coral for next >week. >In any case, if this information is incorrect, I suggest that James should >correct it on the coral system. >In addition, since it is on Monday morning and the system is down now, this >may be an irrelevant point since I guess it will take time to fix the EO >board. > >James, Please advise about the correct policy for reservation on the Raith >system. > >Regards, >Ofer > > >At 04:03 PM 8/12/04 -0700, you wrote: > >Hi Ofer, > >You currently have 9 hrs of Raith time booked, but the user limit is 8 hrs. > >Just a friendly reminder - ;) > >-John > >______________________________________________ > >Ofer Levi, Ph.D. >Department of Electrical Engineering, Stanford University >CIS-X Rm 310, Stanford, CA 94305-4075 > >Phone: (650)723-0464 or 725-6907 >Fax: (650)723-4659 >Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983 >E-Mail: levi at snow.stanford.edu >Web page: http://snow.stanford.edu/~levi/ >______________________________________________ >______________________________________________ > >Ofer Levi, Ph.D. >Department of Electrical Engineering, Stanford University >CIS-X Rm 310, Stanford, CA 94305-4075 > >Phone: (650)723-0464 or 725-6907 >Fax: (650)723-4659 >Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983 >E-Mail: levi at snow.stanford.edu >Web page: http://snow.stanford.edu/~levi/ >______________________________________________ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Aug 13 13:38:17 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Aug 2004 13:38:17 -0700 Subject: RAITH back in yellow mode -- up for testing use this weekend. Message-ID: <411D26B9.1080902@snf.stanford.edu> Greetings: For reasons undetermined, and this could just be for a short time, we were able to get the E/O board to function nearly normally this morning. RAITH Group X are in the process of writing their test patterns and will act as a system check for functionality. The column conditions have improved as well and imaging, shooting contamination dots, stigmation and focusing are better than the last two days. ALL Users are restricted from placing any holder apparatus, tapes, and carbon dots into the system. If you are not willing to mount your samples onto the Clips of the Standard sample holders do not access the system this weekend. WARNING: Blanker leakage was observed with the LEO Blanker -- so be sure to move off your sample before switching to TV mode or starting your unload procedure. No problems with the Raith Blanker section. I have placed the system back into Yellow Mode so you can enable the system and report to coral any problems you encounter. All Users are expected to report their results to this list. Anyone with questions call me on the cell phone anytime this weekend. UPDATE: A new E/O board has been shipped from Germany and will be installed Monday or Tuesday after it arrives here in CA. Raith is also likely to come in next week to support and facilitate a return to normal order on the system. Please write as much as you can and collect data for me until the time we take the system down for repairs and maintenance. This means that reservations for Monday afternoon, Tuesday and Wednesday DAYS may not be available for system access. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Sat Aug 14 19:04:10 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Sat, 14 Aug 2004 19:04:10 -0700 (PDT) Subject: Raith today Message-ID: Hi all, today I and John (Cumings) tried again alignment and write. The problem of the elongated spot is still there and here are some commetns about it, that will be useful (hopefully) for diagnosis: 1. The elongation is always along the Y direction and is more pronounced at low mag. It does not seem to depend directly on mag2/mag3, but starts to be apparent at ~4000-5000X. 2. It is directly correlated to the Y scan direction: if rotation scan is enabled on LEO, also the elongation rotates. 3. The elongation also seems to depends on how long you leave the beam in spot-size mode, when burning the spot at low-mag. 4. John wrote at 1200X and managed to do the align writefield. I tried to align at 600x (100um WF), but the slow-scanned images appear noisy in the Y direction, like broken. We have some pictures of this and of the elongated spot, but they are still on the raith computer, since it's not networked and had no time to burn a CD. I was not able to do an align writefiled procedure at 600X using 0.6x0.6um writefield (the image was very noisy), but I did it at 1200X. I gave it a shot and started writing at 1200X (50um WF), but I don't expect great results, but I'm convinced the system HAS a problem and something needs to be done. John has an interesting theory about that: there sould be some noise in Y scan deflector or somewhere else, but that affect only the Y direction. When going at low mag the gain is increased and so also the noise which gives rise to random displacement of the beam. This would be consistent with both elongated spot and noisy images during WF alignment. Anyway John can tell you more about this theory, on monday. More when I'll develop my sample. Gigi From chquay at MtHolyoke.edu Sun Aug 15 22:58:34 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Mon, 16 Aug 2004 01:58:34 -0400 (EDT) Subject: calcelled write tomorrow morning 4:30am Message-ID: sorry for very short notice. have become too unused to crazy raith hours, did not take usual precautions, do not think will have mental wherewithal to write. charis. From jwc at snf.stanford.edu Mon Aug 16 17:35:21 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 16 Aug 2004 17:35:21 -0700 Subject: [Fwd: Re: Shutdown raith SNF 2004-08-16 16:04:09: major system malfunction] UPDATE -- SYS will go offline Tuesday TBD. Message-ID: <412152C9.1030609@snf.stanford.edu> Hello Raith Users and Everyone CC'd : I was able to restore normal system functioning at least in Yellow Light mode. See below... Tomorrow afternoon, through the end of the week, I will be taking over the system to effect repairs and adjustments to several sub-systems on the RAITH. There may be some overnight access to be determined for users if possible. Tomorrow late morning or just after lunch working with Zeiss and RAITH field service, we will be going through what is a large tasking list of things to replace, repair, adjust, and test. Users can have the system until the time ZEISS and RAITH have arrived. Please report all problems encountered and inspect your writes carefully. Thank you for your support! James Conway -------- Original Message -------- Subject: Re: Shutdown raith SNF 2004-08-16 16:04:09: major system malfunction Date: Mon, 16 Aug 2004 17:15:08 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu For reasons unknown and unidentified... It appears that we lost all vacuum and control funtion logic. I reset the entire LEO Platform and cycled the mechanical pump power switches. The system is now back up in yellow. JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From altug at stanford.edu Mon Aug 16 19:11:17 2004 From: altug at stanford.edu (Hatice Altug) Date: Mon, 16 Aug 2004 19:11:17 -0700 Subject: Lost pieces in 4" wafer box References: <412152C9.1030609@snf.stanford.edu> Message-ID: <002901c483ff$7ae6c620$675440ab@hatice> Hi all, On Sunday (yesterday-16 Aug 2004) I used Raith (e-beam tool) and put my 4" wafer box with pieces in it in the e-beam passage window, it has my login "ALTUG" written on it together with other notes. I found the rest of my boxes there except this one. Has anybody seen it around? Does anybody take it by mistake? The pieces are very valuable for me as they cost a lot of cleanroom work time. thanks, -hatice -------------- next part -------------- An HTML attachment was scrubbed... URL: From cwhicks at stanford.edu Mon Aug 16 21:11:23 2004 From: cwhicks at stanford.edu (Clifford Hicks) Date: Mon, 16 Aug 2004 21:11:23 -0700 (PDT) Subject: Raith shutdown Message-ID: We were unable to get an SEM image on either the LEO or RAITH computer. The image on the LEO computer was almost entirely black, save for some stripey garbage in a narrow strip at the top that did not change as we adjusted the brightness/contrast settings, attempted to change the magnification, blanked and unblanked the beam or rebooted the LEO computer. Until this is fixed the Raith is not usable. We had been attempting to do a write at 30 kV; we had received permission to do so as another test of the system before receiving a new imaging board. We got an EHT trip between 27 and 28 kV; it appears likely that this caused our inability to get an SEM image. Yours, Clifford Hicks From jwc at snf.stanford.edu Wed Aug 18 11:50:12 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 18 Aug 2004 11:50:12 -0700 Subject: hello! In-Reply-To: References: Message-ID: <4123A4E4.1060907@snf.stanford.edu> Hello Charis and RAITH Users: Many significant problems have presented themselves on the system this week-- but rest assured we are working hard to address them.... I will post to the RAITH list and CC back to you when I have all the facts and a plan of action has been developed. Both ZEISS and RAITH USA Field Service is ' in the house'. Expect the system to be in 'Red Light mode' in the least through Friday evening. Thank you for your support! James Conway Charis Quay Huei Li wrote: >hey james, just wondering how the raith was doing...have we found the >cause of the problem? good luck with the maintenance! charis. > > From jwc at snf.stanford.edu Thu Aug 19 10:31:48 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 19 Aug 2004 10:31:48 -0700 Subject: OFF TOPIC: JWC is desperately seeking a Nokia cell phone 110V charger unit for today... Message-ID: <4124E404.3050502@snf.stanford.edu> Hello All, I am desperately seeking a Nokia cell phone 110V charger unit for today... I have been on the road since Sunday and have not been able to make it home. My cell phone is almost out of electrons... Does anyone have a 110V NOKIA charger unit here at SNF I could charge my phone with? Thanks, James W Conway From chquay at MtHolyoke.edu Fri Aug 20 17:01:15 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Fri, 20 Aug 2004 20:01:15 -0400 (EDT) Subject: some data Message-ID: http://elrey.stanford.edu:8080/Raith/36 probably useless now, but just for the heck of it. charis. From jwc at snf.stanford.edu Fri Aug 20 17:19:36 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 20 Aug 2004 17:19:36 -0700 Subject: UPDATE Friday August 20, 2004 1730 hrs: System remains DOWN for repairs... Message-ID: <41269518.5080206@snf.stanford.edu> Hello Raith Users: It is with frustration and sadness that I must report that we have been unable to return the RAITH 150 to a usable state this week. I do not expect we will be able to resolve this situation promptly and expect we will remain DOWN through much of next week. There are a number of issues that have surfaced and we have been unable to effect repairs completely by days end Friday. While we had very capable people come to Stanford this week from both RAITH USA Inc. and Zeiss SMT Inc. to troubleshoot the system; we are dealing with multiple issues that must be resolved fully before we can perform quality E-beam writing and move back within normal specifications in order to qualify the system for user access. Overnight we baked out the column and vacuum levels were superb but upon bringing up the beam the problems we were having became even more acute. This indicated that the column and particularly the Field Emission Gun section (FE-Gun) section has become contaminated. We are repeating the bakeout in an attempt to improve beam conditions in the Gun area. It was expected that Zeiss would perform a full column PM today and bake out over the weekend, replacing the apertures and holder assembly in an effort that would being us back up for more testing on Monday. but we have been unable to complete this task today. We plan to continue knocking off the issues that have presented themselves in the coming days resuming our work on Monday. I am sorry and I sincerely apologize to everyone for the negative impact upon your work, for the many delays, and particularly the frustration that this situation has caused to you and to the people whom are depending on your work to be completed in a timely manner. Persons with acute project deadlines should see me during my office hour Monday and Tuesday, so we can consider either shifting the queue to accommodate your needs, or transfer your project onto other systems within NNIN. I do not expect we will be able to resolve this situation Monday or Tuesday and expect we will remain DOWN through the later part of next week at the very best. Thank you for your support! James Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 From jwc at snf.stanford.edu Thu Aug 26 19:37:52 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 26 Aug 2004 19:37:52 -0700 Subject: RAITH UPDATE: System in qualification and test status. Message-ID: <412E9E80.2090908@snf.stanford.edu> Greeting Raith Users: 19:35 hrs Thursday August 26, 2004 Good Progress was made over the last two days and nights of work, and we hope to return to operational status tomorrow. This evening we are performing several test and hope to be able to qualify the system tomorrow after examining writes I am doing this evening. Gigi and Arvind have the system overnight for testing. I will resume my test and do another qualification write after we complete adjustments to the calibrations of the E/O card and switch out the chiller unit with the repaired Thermo - Neslab chiller tomorrow morning. My plan is to resume the CORAL reservations schedule late Friday afternoon. Many Thanks to Mirwais Aktary and Sergey Reiderman for their great efforts to get us back into a quality state. Both will be here tomorrow to complete final adjustments on the system. Thank you for your support! James Conway Ebeam Technology Group Stanford Nanofabrication facility. From jwc at snf.stanford.edu Fri Aug 27 10:40:36 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 Aug 2004 10:40:36 -0700 Subject: Mirwais Aktary is at Stanford Nanofab. Users working with SU-8 with questions welcome late Users working with SU-8 with questions welcome late in the afternoon after 4:30 after 4:30 Message-ID: <412F7214.2000502@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Aug 27 23:27:27 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 Aug 2004 23:27:27 -0700 Subject: Raith UPDATE 8272004: 2245 hrs RAITH system returning to operational status, hopefully access starts SAT afternoon. Message-ID: <413025CF.4070403@snf.stanford.edu> Greetings Raith Users: We worked long into the evening today to ensure we reached operational status this weekend. A number of problems have been encountered and corrected. Please take a look at my white board ion my office if you wish to review the sequence of problems and how we fish boned out a solution. It was an 'interesting' exercise to say the least. Diagnosis: 1. Significant contamination was introduced into the system from Carbon dots, contaminated fixturing and user supplied hold downs, and possibly several instances of unbaked or poorly baked resist being placed into the system. These events occurred August 6, 10, and 11 on SNF users runs. Troubleshooting was complicated by users reports of charging and beam drift in the system but some of these reports came from users working with thick oxide, nitride, and SOI substrates and they were experiencing simple and normal sample surface charging. 2. A problem with the electrical circuit supplying the Neslab chiller unit in the service chase caused the chiller unit to go into a Low Temperature fault condition. The cooling lines to the Electron Optics Card and the turbo pump condensed water on their exterior surfaces and a drop or drop of water dripped into the E/O card loosing control of that subsystem particularly in the Y scan control. This may have been intermittent but the first alarm in the LEO server tripped on Monday August 16, 2004 at 11:37 AM. Repairs were effected to the column by performing another inspect, clean, and vacuuming of the upper section of the LEO column and over 50 hours of bake outs in three sequences to bake out the column and remove contamination, presumably hydrocarbon from this area. The E/O card was replaced. Three known good chiller units were exchanged before we identified the bad circuit in the chase leading to the chiller failures. Tonight we ran an independent AC cord to this last unit (#4) and this corrected the situation. A qualification run made last night on a standby jury rigged water recirculation unit after other repairs and calibrations were completed has met with my satisfaction and has passed High Power Microscope inspection. We appear to be within specifications for the system. We brought the FE-Gun back up at 9:00 PM and will allow it to run overnight and will recalibrate the E/O card and check out the system. We should be back up and available to users by mid afternoon. The following restrictions are in effect until my return September 13, 2004 with no exceptions whatsoever: As that Contamination caused the bulk of the problems we experienced in the last three weeks I am increasing the stringency of cleanliness requirements to normal practices for Ultra High Vacuum systems: ABSOLUTELY NO CARBON DOTS, TAPE, STRIPS OF CARBON OR ADHESIVE ARE TO BE PlACED INTO THE SYSTEM. NO EXCEPTIONS... ABSOLUTELY NO BRASS, BRONZE, OR OTHER HOLD DOWN FIXTURES IN THE SYSTEM. ABSOLUTELY NO ADDITIONAL FIXTURES, HOLDERS, OR MOUNTS ARE TO BE PLACES IN THE SYSTEM. NO RESIST THAT HAS NOT BEEN BAKED AT TEMPERATURES ABOVE 150 DEGREES CELSIUS WILL BE ALLOWED INTO THE SYSTEM. ALL PREVIOUS INDIVIDUAL PERMISSIONS OR EXCEPTIONS TO THESE RULES AR HEREBY REVOKED. IF YOU CANNOT FOLLOW THESE SIMPLE GUIDELINES TAKE YOUR PROJECT ELSEWHERE... UPON MY RETURN, WE WILL REVIEW THESE RESTRICTIONS AND MAY AMEND AND/OR MODIFY AS SUITS THE NEEDS OF THE LAB MEMBERS, AND THE NECESSITY TO MAINTAIN CLEANLINESS AND GOOD VACUUM PRACTICE FOR THE BETTER GOOD AND UTILITY OF THE RAITH USER COMMUNITY AND THE HEALTH OF THE RAITH 150 SYSTEM. Thank you to everyone for your support through this difficult time. I am going on leave and will return Monday September 13, 2004 resuming with my office hour at 8:30 AM. ARVIND and GIGI are in charge during my absence. If you run into problems follow the "Who are you going to call procedures..." posted in the Ebeam Lab and attached... Thank you, James Conway Ebeam Technology Group Stanford Nanofabrication Facility. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- An embedded and charset-unspecified text was scrubbed... Name: FAQ_PROBLEMS_Who_are_you_going_to_call.txt URL: From jwc at snf.stanford.edu Fri Aug 27 23:31:24 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 Aug 2004 23:31:24 -0700 Subject: ALL USERS READ ME NOW: RESTRICTIONS TO ACCESS AND USE OF RAITH 150 SYSTEM: Message-ID: <413026BC.7070803@snf.stanford.edu> GREETINGS RAITH USERS: The following restrictions are in effect until my return September 13, 2004 with no exceptions whatsoever: As that Contamination caused the bulk of the problems we experienced in the last three weeks I am increasing the stringency of cleanliness requirements to normal practices for Ultra High Vacuum systems: ABSOLUTELY NO CARBON DOTS, TAPE, STRIPS OF CARBON OR ADHESIVE ARE TO BE PlACED INTO THE SYSTEM. NO EXCEPTIONS... ABSOLUTELY NO BRASS, BRONZE, OR OTHER HOLD DOWN FIXTURES IN THE SYSTEM. ABSOLUTELY NO ADDITIONAL FIXTURES, HOLDERS, OR MOUNTS ARE TO BE PLACES IN THE SYSTEM. NO RESIST THAT HAS NOT BEEN BAKED AT TEMPERATURES ABOVE 150 DEGREES CELSIUS WILL BE ALLOWED INTO THE SYSTEM. NO EXCEPTIONS... ALL PREVIOUS INDIVIDUAL PERMISSIONS OR EXCEPTIONS TO THESE RULES AR HEREBY REVOKED. IF YOU CANNOT FOLLOW THESE SIMPLE GUIDELINES TAKE YOUR PROJECT ELSEWHERE... UPON MY RETURN, WE WILL REVIEW THESE RESTRICTIONS AND MAY AMEND AND/OR MODIFY AS SUITS THE NEEDS OF THE LAB MEMBERS, AND THE NECESSITY TO MAINTAIN CLEANLINESS AND GOOD VACUUM PRACTICE FOR THE BETTER GOOD AND UTILITY OF THE RAITH USER COMMUNITY AND THE HEALTH OF THE RAITH 150 SYSTEM. Thank you to everyone for your support through this difficult time. I am going on leave and will return Monday September 13, 2004 resuming with my office hour at 8:30 AM. ARVIND and GIGI are in charge during my absence. If you run into problems follow the "Who are you going to call procedures..." posted in the Ebeam Lab and attached... Thank you, James Conway Ebeam Technology Group Stanford Nanofabrication Facility. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- An embedded and charset-unspecified text was scrubbed... Name: FAQ_PROBLEMS_Who_are_you_going_to_call.txt URL: From jwc at snf.stanford.edu Fri Aug 27 23:33:09 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 Aug 2004 23:33:09 -0700 Subject: NO ACCESS THIS EVENING AND SAT THROUGH 3 PM. GUN IS RUNNING IN. Message-ID: <41302725.9030707@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Sat Aug 28 13:21:56 2004 From: jwc at snf.stanford.edu (James Conway) Date: Sat, 28 Aug 2004 13:21:56 -0700 Subject: RAITH UDATE2004-08-28 13:00:07: RESTRICTION: NO operations above 10 keV SYSTEM BACK ON LINE Message-ID: <4130E964.6030700@snf.stanford.edu> Greetings: It is my pleasure to announce that the system is back online in normal functionality. Today's qualification run is well within specifications with stitching below spec and superb overlay registration. The chip is in my dry box if you wish to inspect it. 06192003_6.chip QUAL8282004 red sticker on wafer box. 3.3 U 6.2 V position RESTRICTION: NO operations above 10 keV DO NOT operate above 10 keV. See below ... Should there be any problems or EHT trips immediately inform cole loomis at RAITH USA. Zeiss should return later this week to check adjustments made on the system after the system has had several more day to run in. I will be unavailable and will be away from the Lab returning September 13, 2004 Thank you for your support! Please play nicely together, James Conway -------- Original Message -------- Subject: Problem raith SNF 2004-08-28 13:00:07: NO operations above 10 keV Date: Sat, 28 Aug. 2004 13:00:08 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu we wish to allow the FE-gun two weeks of conditioning before we resume regular operations. This is to allow the FE-tip to condition itself and run in properly. System was tested repeatedly to 30 keV with no EHT trips or vacuum out gassing above normal levels. This is just a precaution to ensure a long bright FE-Gun tip life. Thank you for your support! JWC 08282004:1256 hrs -------------- next part -------------- An HTML attachment was scrubbed... URL: From zia at stanford.edu Sat Aug 28 18:50:18 2004 From: zia at stanford.edu (Rashid Zia) Date: Sat, 28 Aug 2004 18:50:18 -0700 Subject: Raith Free Monday 8am-4pm Message-ID: <5.2.0.9.2.20040828185013.00b6d120@zia.pobox.stanford.edu> Hi Everyone, My samples will probably not be ready by monday so I am canceling my session from 8am-Noon. It also appears that John Cummings cancelled his session from Noon-4pm....so the Raith is free from 8am to 4pm on Monday. cheers, rashid. From arvisun at stanford.edu Mon Aug 30 15:16:16 2004 From: arvisun at stanford.edu (Arvind Sundaramurthy) Date: Mon, 30 Aug 2004 15:16:16 -0700 Subject: Reservation Removed, Tue 2:00am-6:00am Message-ID: <1093904176.4133a73018b17@webmail.stanford.edu>