RAITH back in yellow mode -- possible column contamination. INSPECT YOUR PATTERNS AND report!!!

James Conway jwc at snf.stanford.edu
Wed Aug 11 17:07:20 PDT 2004


Greetings Raith Users:

Gigi first reported elongation in V of the beam spot below 5000X mag. 
with the spot size reaching nearly 100 x 25 nm.
 The LEO beam blanker when unblanked shows a very slight drift upon 
unblanking.
This is not be confused with surface sample charge up as experienced by 
some users over the course of the last few weeks.

Rx: The column may have become contaminated with HC residues and we will 
possibly be needing to perform another PM on the system to resolve this 
issue.  ZEISS will be here tomorrow morning on this and several other 
issues.

Note: NO Users have reported problems during their writes!  This problem 
should not influence your results in pattern writes at the normal beam 
speeds.

Everyone is requested to carefully inspect their pattern writes 
performed this week both optically and in any SEM and report their 
results and if possible send me your images to raith at snf.stanford.edu

James Conway
jwc 08112004_1657 hrs
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