RAITH back in yellow mode -- possible column contamination. INSPECT YOUR PATTERNS AND report!!!
jwc at snf.stanford.edu
Wed Aug 11 17:07:20 PDT 2004
Greetings Raith Users:
Gigi first reported elongation in V of the beam spot below 5000X mag.
with the spot size reaching nearly 100 x 25 nm.
The LEO beam blanker when unblanked shows a very slight drift upon
This is not be confused with surface sample charge up as experienced by
some users over the course of the last few weeks.
Rx: The column may have become contaminated with HC residues and we will
possibly be needing to perform another PM on the system to resolve this
issue. ZEISS will be here tomorrow morning on this and several other
Note: NO Users have reported problems during their writes! This problem
should not influence your results in pattern writes at the normal beam
Everyone is requested to carefully inspect their pattern writes
performed this week both optically and in any SEM and report their
results and if possible send me your images to raith at snf.stanford.edu
jwc 08112004_1657 hrs
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