Reservation removed from 5:00-9:00pm Wed
jwc at snf.stanford.edu
Thu Aug 12 09:08:25 PDT 2004
Greetings Raith people:
I will be scuffing off and cleaning the contact clips in the Std.
Sample Holder and checking resistivity to see if this will improve
grounding of the samples on this assembly.
Certainly things seemed to have declined over the course of the last
week. I have recently come to the conclusion that some contamination if
evident in the column. I will be encouraging ZEISS to consider
performing another Preventative Maintenance routine on the column and
blanker assemblies. RAITH has also been informed.
Charis Quay Huei Li wrote:
>Arvind, I saw that too on Friday but not today. I think it may be sample
>dependent. I have highly-doped Si substrates with 1 micron of oxide. The
>only difference between Friday and today is the fact that the sample was
>better grounded today. What are your samples and how is the grounding?
>Have you seen this problem before? Let me know. Thanks. Charis.
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