Double layer PMMA dose
jwc at snf.stanford.edu
Thu Jan 29 16:45:26 PST 2004
Hitachi 30 KeV:
Threshold to clear large areas: 350 uC/cm2
Normal area dose I use: 500 uC/cm2
Line dose to 100 - 150 nm: 650 - 800 uC/cm2 Jing Kong used 900 uC/cm2
You will have to adjust your dose for 10 keV downward divide by 2.5.
10 keV gave me ~ 0.2 um of undercut.
I will be running more samples in late February.
All the best,
Scott D. Andrews wrote:
>Does anyone have recent data on the proper dot and line dose for the
>bilayer PMMA process? If you also know the undercut you achieved, could
>you let me know that as well?
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