From lsmoore at stanford.edu Tue Jun 1 15:17:56 2004 From: lsmoore at stanford.edu (Lindsay Moore) Date: Tue, 01 Jun 2004 15:17:56 -0700 Subject: raith free 6:30-10 Message-ID: <5.1.1.5.2.20040601151702.01af1a20@lsmoore.pobox.stanford.edu> everything is going wrong today. I can't write. sorry! Lindsay From jwson at stanford.edu Wed Jun 2 09:53:40 2004 From: jwson at stanford.edu (Ji-Won Son) Date: Wed, 2 Jun 2004 09:53:40 -0700 Subject: Question on GDSII file Message-ID: <000201c448c2$28049220$416140ab@stanford.edu> Hi, all, I am sorry to clog your mail box, but I would like to ask a question. I use a 900 nm period grating as a pattern (GDSII file from Ledit) and write it directly on an insulating surface. The resulting period is always bigger than 900 nm, around 1.1 um. I suspect this came from charging, but want to make sure if I did it right when I write the pattern. Do I need any special calibration to make the e-beam writing to match GDSII pattern? I would appreciate your help and comment. Thank you. ==================== Sincerely, Ji-Won Son (Office) 650-723-4940 (Fax) 650-725-3459 ==================== -------------- next part -------------- An HTML attachment was scrubbed... URL: From charley at snf.stanford.edu Thu Jun 3 09:30:19 2004 From: charley at snf.stanford.edu (Charley) Date: Thu, 03 Jun 2004 09:30:19 -0700 Subject: Status update, 6/3/2004 Message-ID: <40BF521B.1050006@snf.stanford.edu> Raith fans, We're down due to the breakage of the drive belt in the airlock. It moves the worktable onto the stage and removes it. This is due to 'norma' wear, not the result of some error by a user. I did make it complicated to figure out what was going on! I've talked to Joe Klingfus and he has a service guy scheduled for tomorrow, Friday the 4th. If he has the belt with him, this should be a coupleof hours work, so maybe we're back up by Friday evening, hence the weekend. I'll be his contact here, and I'll update here and on Coral as soon as I hear anything. For the latest, check your mail/Coral status 'board'. chw3 From charley at snf.stanford.edu Fri Jun 4 16:06:24 2004 From: charley at snf.stanford.edu (Charley) Date: Fri, 04 Jun 2004 16:06:24 -0700 Subject: Now Up For Use Message-ID: <40C10070.7070204@snf.stanford.edu> Yup, our guy replaced the drive belt and retuned all the little goodies in the load lock. We still don't see how the belt got broken, but it did and it's fine now. I wrote this to advise you that you will have to restart "Raith" and "Leo", since they were left in the Service login so I could test the airlock manually. Conway has taken my login off both "halves" of the machine, again, so I can't put it back into "normal'" user status. But the vacuum and gun are on, so you should be able to jump right in and run. chw3 From edo at stanford.edu Sun Jun 6 22:02:57 2004 From: edo at stanford.edu (Edo Waks) Date: Sun, 6 Jun 2004 22:02:57 -0700 Subject: reservation cancelled, today 11pm-7am Message-ID: <1086584577.40c3f70142b2b@webmail.stanford.edu> Sorry for the late notice. From grupp at snowmass.Stanford.EDU Mon Jun 7 17:42:04 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 7 Jun 2004 17:42:04 -0700 (PDT) Subject: [raith]: res removed Mon night 10pm-2am sick Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From grupp at snowmass.Stanford.EDU Mon Jun 7 19:06:44 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 7 Jun 2004 19:06:44 -0700 (PDT) Subject: RAITH: no one is using it now, until ALi's res at 10! Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From jwc at snf.stanford.edu Tue Jun 8 18:41:58 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 08 Jun 2004 18:41:58 -0700 Subject: Raith chuck position In-Reply-To: References: Message-ID: <40C66AE6.6020206@snf.stanford.edu> Greetings: Just to clarify this issue and as a general guideline: If the next User is soon to come onto the system, say within the next 60 minutes, leave the std. sample holder for the RAITH 150 in the Load Lock. However if the next user is not to come into the lab within 60 minutes -- load the std. sample holder back into the system so it stays under vacuum and is less likely for the aluminum surface to become contaminated and oxidized. Be sure to stay enabled until after the vent signal to the solenoid occurs -- otherwise you will trip the now infamous Load Lock Error No. 6. PLEASE: Always handle this sample holder with latex gloves and use teflon tweezers to reduce scratches on the surface. It can be cleaned and wiped with a lint free wiper with several drops of methanol added. Never spray onto the holder with the squeeze bottle! Thank you, JWC Scott D. Andrews wrote: >Hello, > >I just want to confirm with everyone that the community decided to leave >the chuck in the load lock at the end of user writes. If this is not the >case, please let me know. When I arrived this morning I found the chuck >inside the machine, which took me precious time to unload. I just want to >make sure that leaving the chuck unloaded was one of the new policies >meant to reduce needed machine time. > >-Scott > > > From atalasaz at stanford.edu Tue Jun 8 22:34:59 2004 From: atalasaz at stanford.edu (Amir Ali Haj Hossein Talasaz) Date: Tue, 8 Jun 2004 22:34:59 -0700 Subject: Sick-Cancel session tonight 10:30pm-2am and Wed 10am-1pm Message-ID: <1086759299.40c6a18311e43@webmail.stanford.edu> Sorry for late notice. From jwc at snf.stanford.edu Thu Jun 10 18:41:00 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 10 Jun 2004 18:41:00 -0700 Subject: Please report if you are seeing star shaped or trillium shaped patterns at the end of your exposures. Message-ID: <40C90DAC.7030309@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_0287.jpg Type: image/jpeg Size: 233921 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Jun 10 18:51:26 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 10 Jun 2004 18:51:26 -0700 Subject: The New bottle of 5% 495K MW Microchem PMMA is now missing, please return immediately! Message-ID: <40C9101E.80505@snf.stanford.edu> Greetings: I have noticed and exceptional increase in the usage of 5% 495K MW Microchem PMMA recently -- nearly double the usage of the last quarter over the last three weeks. There has been enough PMMA used to coat nearly 200 wafers!!! Yesterday I replaced the bottle with the last bottle of 5% 495K MW Microchem PMMA we had in stock and in the LAB with bottle number 4. It has a red sticker 5% 495K PMMA on the top and is in a brown blue capped bottle. This was placed into the solvent cabinet at about 7:30 PM Wednesday evening by me. THIS BOTTLE IS NOW MISSING WE DO NOT HAVE QUALIFIED 5% 495K MW Microchem PMMA MATERIAL IN THE LAB. I WISH FOR THIS BOTTLE TO BE RETURNED IMMEDIATELY -- PERIOD. THESE HIGH QUALITY AND VERY EXPENSIVE MATERIALS SHOULD NOT BE TAKEN OUT OF THE SNF LAB --USED IN OTHER SU FACILITIES NOR USED TO PROVIDE PERSONAL STOCK OF PMMA MATERIAL. I DO NOT WISH TO LOCK UP ALL THE EBEAM ENGINEERING MATERIALS... Your immediate response is requested. There are other lab members wishing to use this material this evening and their work and mine has now been delayed. Thank you, James Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: E-beam resist handling.doc Type: application/msword Size: 34816 bytes Desc: not available URL: From altug at stanford.edu Fri Jun 11 03:08:29 2004 From: altug at stanford.edu (Hatice Altug) Date: Fri, 11 Jun 2004 03:08:29 -0700 Subject: Reservation removed: 19:00-24:00 on Friday Message-ID: <012101c44f9c$0bb94440$6e5440ab@hatice> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jun 11 09:08:37 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 11 Jun 2004 09:08:37 -0700 Subject: Cancelled Reservations on the RAITH 150. Message-ID: <40C9D905.8020700@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jun 11 18:06:52 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 11 Jun 2004 18:06:52 -0700 Subject: Blanking artifact has been resolved -- please inspect your next patterns carefully to confirm. Message-ID: <40CA572C.7040308@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 06092004_BLANKING ARTIFACT.bmp Type: image/bmp Size: 787510 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri Jun 11 18:14:29 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 11 Jun 2004 18:14:29 -0700 Subject: 'Come Take a Spin With Me' Ebeam resist handling on the Headway Spinner. Monday 1 - 4 PM. Message-ID: <40CA58F5.3000708@snf.stanford.edu> greetings, I will be doing some spinning of thin PMMA material (1.25% 950K MW PMMA) onto Silicon this next Monday June 14, 2004. Wafer cleans will commence at 1:15 PM and we should be on the Headway about 2:00 - 4:00 PM. You should have your wafers in either the 150 degree Singe Oven or the HMDS oven and be ready to spin your substrates during and after this class. I have both the Headway and the Blue M oven reserved for this work. All interested parties are invited and upon completion you will be qualified on headway2. Thank you for your support! James Conway PS I likely will be spinning several flavors of PMMA that afternoon in addition to my custom 1.25% formally for 20 - 50 nm thin films. From ryantu at stanford.edu Sun Jun 13 18:02:10 2004 From: ryantu at stanford.edu (Ryan Huain Tu) Date: Sun, 13 Jun 2004 18:02:10 -0700 Subject: Raith at 8:30 pm tonight free Message-ID: <1087174930.40ccf912b9740@webmail.stanford.edu> All, My previous run turned out better than expected. Ryan From ajavey at stanford.edu Tue Jun 15 23:35:24 2004 From: ajavey at stanford.edu (Ali Javey) Date: Tue, 15 Jun 2004 23:35:24 -0700 (PDT) Subject: reservation removed Wed. 00:00 - 02:30 Message-ID: Sorry for the very late notice. Sample required an ebeam step by Hitachi EBL, which did it get done today due to Hitachi problems. Ali From jwc at snf.stanford.edu Wed Jun 16 18:02:57 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 16 Jun 2004 18:02:57 -0700 Subject: [Fwd: Re: Raith Problem -- went way...] Message-ID: <40D0EDC1.1060804@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 17 16:51:13 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 17 Jun 2004 16:51:13 -0700 Subject: Shades Users: Please celan up your files and create space on the system. Message-ID: <40D22E71.7060302@snf.stanford.edu> Greetings: Shades ran out of file system space in the /export/home2 directories where most users reside this afternoon I took the liberty of cleaning out all netscape caches to get the system back up enough to perform some file system maintenance. Note: Users are requested to set their Netscape cache space to zero. Users ar reminded that this host is not to be used for surfing on the WWW or for any email what so ever. Please take a moment to remove all excess files on the system, including all files with *.CPX as these are temp files from Caprox left over after aborts and crashes. Users on Shades whom can help me identify users whom have graduated and/or left SNF and Stanford, or will not be utilizing Shades to prepare their Ebeam files, are requested to point out these users to me so their directories can be queued for deletion. Thank you for your immediate action to this request. Many new users are or will be coming onto the system in coming weeks as we enter our summer busy period. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From grupp at snowmass.Stanford.EDU Fri Jun 18 18:35:13 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Fri, 18 Jun 2004 18:35:13 -0700 (PDT) Subject: raith: res canceled midnight fri to wee hours saturday Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From altug at stanford.edu Mon Jun 21 10:52:08 2004 From: altug at stanford.edu (Hatice Altug) Date: Mon, 21 Jun 2004 10:52:08 -0700 Subject: Reservation Cancelled Today Message-ID: <00f701c457b8$78e48e20$6e5440ab@hatice> Very very sorry for the late notice but I feel sick this morning. -hatice -------------- next part -------------- An HTML attachment was scrubbed... URL: From atalasaz at stanford.edu Thu Jun 24 20:47:10 2004 From: atalasaz at stanford.edu (Amir Ali Haj Hossein Talasaz) Date: Thu, 24 Jun 2004 20:47:10 -0700 Subject: Cancelled: Fri 2-6pm Message-ID: <1088135230.40dba03eb9069@webmail.stanford.edu> From grupp at snowmass.Stanford.EDU Thu Jun 24 22:30:10 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Thu, 24 Jun 2004 22:30:10 -0700 (PDT) Subject: [raith] moved my res tonight to open slot Fri. Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From kcrozier at stanford.edu Mon Jun 28 10:56:53 2004 From: kcrozier at stanford.edu (Kenneth Brian Crozier) Date: Mon, 28 Jun 2004 10:56:53 -0700 Subject: another new problem Message-ID: <5.2.0.9.2.20040628105413.02329788@kcrozier.pobox.stanford.edu> hi Everyone, This is to let you know of a new problem that has been occurring for the last 2 weeks (at least). The Raith exposes a large splotch (~200 um * 200 um) every time I try to write a photonic crystal pattern (100 um * 100 um). It doesn't do it with other patterns, though. I will post a picture to the Raith swiki website soon. Best wishes, Ken --------------------------------------------- Ken Crozier, Ph.D. room GL 51, Ginzton Laboratory, Stanford University, Stanford, CA 94305, USA tel : 650-723-1945 fax : 650-725-2533 From pcatryss at stanford.edu Mon Jun 28 10:58:22 2004 From: pcatryss at stanford.edu (Peter Catrysse) Date: Mon, 28 Jun 2004 10:58:22 -0700 Subject: Raith available to next user. Done early. Message-ID: <200406281758.i5SHwNpW022300@smtp1.Stanford.EDU> Peter B. Catrysse, Ph.D. Department of Electrical Engineering Edward L. Ginzton Laboratory, Box N-126 Stanford University Stanford, CA 94305-4088 Ph: (650) 736-2309 Fax: (650) 322-5379 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kcrozier at stanford.edu Mon Jun 28 10:59:17 2004 From: kcrozier at stanford.edu (Kenneth Brian Crozier) Date: Mon, 28 Jun 2004 10:59:17 -0700 Subject: Raith not working - res removed Tues 6pm-4am Message-ID: <5.2.0.9.2.20040628105742.02330940@kcrozier.pobox.stanford.edu> Hi again, The Raith is not working for my patterns (see previous email on the "splotch" problem) so I am removing my Tuesday evening reservation. thanks, Ken --------------------------------------------- Ken Crozier, Ph.D. room GL 51, Ginzton Laboratory, Stanford University, Stanford, CA 94305, USA tel : 650-723-1945 fax : 650-725-2533 From kcrozier at stanford.edu Tue Jun 29 09:23:49 2004 From: kcrozier at stanford.edu (Kenneth Brian Crozier) Date: Tue, 29 Jun 2004 09:23:49 -0700 Subject: Raith problem Message-ID: <5.2.0.9.2.20040629092212.02370188@kcrozier.pobox.stanford.edu> Hi everyone, Here is a link to a photo of the "splotch" I discussed in my email yesterday. http://elrey.stanford.edu:8080/Raith/34 This image has been forwarded to Raith for review and LEO has been called. It'd be great if anyone experiencing anything similar could let us know. thanks, Ken --------------------------------------------- Ken Crozier, Ph.D. room GL 51, Ginzton Laboratory, Stanford University, Stanford, CA 94305, USA tel : 650-723-1945 fax : 650-725-2533 From kcrozier at stanford.edu Wed Jun 30 15:29:16 2004 From: kcrozier at stanford.edu (Kenneth Brian Crozier) Date: Wed, 30 Jun 2004 15:29:16 -0700 Subject: Raith not working - beam blanking problem Message-ID: <5.2.0.9.2.20040630152500.02327840@kcrozier.pobox.stanford.edu> Hi everyone, James and I noticed that the specimen current was much higher than normal with the beam blanked by the Raith (1400 fA). This could be the cause of the "splotch" problem reported earlier and detailed on the Raith swiki at: http://elrey.stanford.edu:8080/Raith/34. Over a long exposure (e.g. the photonic crystal pattern shown takes about 90 min) this could lead to the large "splotch" being exposed when the beam is meant to be blanked. It'd be great if anyone who has experienced similar problems could let both James and I know about it. thanks, Ken --------------------------------------------- Ken Crozier, Ph.D. room GL 51, Ginzton Laboratory, Stanford University, Stanford, CA 94305, USA tel : 650-723-1945 fax : 650-725-2533 From ajavey at stanford.edu Wed Jun 30 17:18:23 2004 From: ajavey at stanford.edu (Ali Javey) Date: Wed, 30 Jun 2004 17:18:23 -0700 (PDT) Subject: Raith not working - beam blanking problem In-Reply-To: <5.2.0.9.2.20040630152500.02327840@kcrozier.pobox.stanford.edu> Message-ID: I did a write last night. The results came out pretty good. Didn't see any problems. I wrote over a 12x4 mm area with all sorts of features/feature sizes. Ali On Wed, 30 Jun 2004, Kenneth Brian Crozier wrote: > > > Hi everyone, > > James and I noticed that the specimen current was much higher than normal > with the beam blanked by the Raith (1400 fA). This could be the cause of > the "splotch" problem reported earlier and detailed on the Raith swiki at: > http://elrey.stanford.edu:8080/Raith/34. Over a long exposure (e.g. the > photonic crystal pattern shown takes about 90 min) this could lead to the > large "splotch" being exposed when the beam is meant to be blanked. > > It'd be great if anyone who has experienced similar problems could let both > James and I know about it. > > thanks, > Ken > --------------------------------------------- > Ken Crozier, Ph.D. > room GL 51, Ginzton Laboratory, > Stanford University, Stanford, CA 94305, USA > tel : 650-723-1945 fax : 650-725-2533 > From jwc at snf.stanford.edu Wed Jun 30 18:31:50 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 30 Jun 2004 18:31:50 -0700 Subject: Raith not working - beam blanking problem Current Status WED. June 30, 2004 1815 hours. In-Reply-To: <5.2.0.9.2.20040630152500.02327840@kcrozier.pobox.stanford.edu> References: <5.2.0.9.2.20040630152500.02327840@kcrozier.pobox.stanford.edu> Message-ID: <40E36986.5080301@snf.stanford.edu> Greetings: The Raith is working... Note that Ken is writing on Si3N4 layers and this material will charge up if not coated with a charge compensation layer. No other users yet to report this particular defect being encountered. Nor have there been any further reports of 'comets' or 'trillium shaped' blanking artifacts or other strange features written, as we observed before I adjusted the LEO blanking spot position Thursday a week ago. Yesterday evening, I once again moved the position of the LEO Beam Blanking spot farther away from the apertures on the suggestion of CARL ZEISS SMT (formerly LEO). I observed a very small amount of leakage when the LEO is unblanked and the RAITH is blanked. This is below the noise threshold for the picoammeter and is only evident when you really bring up the gain of the In-Lens SED detector. It is well below the threshold of nearly all resist we are employing for EBL by a factor of ~20. This afternoon I ran several test that RAITH requested we try to evaluate this and we again confirmed that there is a very low level of "leakage" This is likely normal in the column as that even when the beam is blanked there will always be some scattering of electrons of which a very small amount will exit through the apertures. We are watching this problem carefully. I am doing writes on UV-N 30 at very low doses and did not any problems with this in last week's JPL NASA writes. I will be on the system tomorrow 10 - 6 too! This should clear up this issue. ACTION REQUESTED OF YOU: USERS ARE REQUESTED TO CAREFULLY INSPECT ALL WRITES PERFORMED SINCE LAST THURSDAY A WEEK AGO AND REPORT TO THIS LIST AND TO jwc at snf.stanford.edu Plz. Bring me some pictures... Today I also inspected 15 nm shots for charging and drift artifacts upon unblanking and did not observe any of these problems. If we observed drift in the image this would indicate that the column had become contaminated again and this would certainly contribute to the problem observed as the beam blanking position would also have been drifting or changed with the charging! Unfortunately the only way to reposition the RAITH blanking spot is to rotate the RAITH beam blanker mechanically and this would require we open up the column and gun section, move the beam blanker and then bake out the system for several days again. The gun vacuum is currently superb and I do not desire to open up the column unless absolutely necessary. Your comments and suggestions are invited. RAITH and LEO are working closely with me on this problem. Thank you for your support! James Conway Ebeam Technology Group Kenneth Brian Crozier wrote: > > > Hi everyone, > > James and I noticed that the specimen current was much higher than > normal with the beam blanked by the Raith (1400 fA). This could be > the cause of the "splotch" problem reported earlier and detailed on > the Raith swiki at: http://elrey.stanford.edu:8080/Raith/34. Over a > long exposure (e.g. the photonic crystal pattern shown takes about 90 > min) this could lead to the large "splotch" being exposed when the > beam is meant to be blanked. > > It'd be great if anyone who has experienced similar problems could let > both James and I know about it. > > thanks, > Ken > --------------------------------------------- > Ken Crozier, Ph.D. > room GL 51, Ginzton Laboratory, > Stanford University, Stanford, CA 94305, USA > tel : 650-723-1945 fax : 650-725-2533 -------------- next part -------------- An HTML attachment was scrubbed... URL: