From jwc at snf.stanford.edu Mon Mar 1 17:32:54 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 01 Mar 2004 17:32:54 -0800 Subject: RAITH status Monday March 1, 2004: 17:21 hours. Message-ID: <4043E446.8010103@snf.stanford.edu> Greetings, Neither Mike Santomango nor I were pleased with the emission and beam profiles of the FE-GUN Tip as we arrived in this morning. While the emission is near normal levels we had to drive the FE-gun far over specifications to achieve the normal level. EHT V at 6400 V instead of the normal 4400 - 5400 V. We have decided the best approach at this point is to simply replace the FE-GUN tip with a new clean unused tip and perform another bake out and run up sequence. While we were open we also cleaned the Extractor plate of Hydrocarbon residue that appeared over the weekend. We just started pumping and will perform an extended bake out until WEDNESDAY morning. Wednesday afternoon we will perform alignments and adjustments and will again attempt to qualify the systems for line width and stitching performance. I would expect access to reopen to users Thursday morning. Please adjust your plans accordingly. Thank you, James Conway Thank you, James Conway From jwc at snf.stanford.edu Wed Mar 3 18:25:22 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 03 Mar 2004 18:25:22 -0800 Subject: RAITH STATUS 03032004:19:45.00 SYSTEM Coming up tomorrow evening Message-ID: <40469392.5080500@snf.stanford.edu> Greetings, We are still running in and conditioning the FE-GUN, performing alignments and adjustments to the three magnification level amplifiers, establishing the default aperture positions, and finally the stigmation section alignments with LEO Field service. We checked out the E/O board and EHT power supplies and feel confident these sections are working properly. The ELPHY plus and image acquisition has been tested and appears just fine. I had hoped to complete qualifications of the system this afternoon, and bring on escorted users for test writes this evening. To ensure we do not run into further problems with the FE-Gun we will wait until tomorrow to complete these task; while allowing the system to run in as vacuum return to below 9 E-010 Torr level. It will likely be at least a day or two until we can test and run the system at higher acceleration voltages. I will need some time to test the system at 20 and 30 KeV when we have suitable vacuum and emission has stabilized. In fact, it may be prudent to operate the system at 10 keV for as long as a week. (Your comments are invited, particularly on the impact that this decision may have on your work.) All in all the entire picture is looking better than we were a week ago. We have another brand new FE-Gun tip and the bake out took us down to 3.4 E -010 Torr level before we started running the gun up. I have a cue of people whom are on standby and 'ready to go' as the system goes up and they will run in this order: JWC: Qualification for resolution, line width, and stitching. Gigi: Arvind S. Acremann -- stohr group team We hope to resume the CORAL schedule with Cvenky session at 1800 hours tomorrow -- Thursday. NO operations above 10 keV are allowed until I have completed testing at elevated acceleration voltages. Likely I will be checking the this out at 20 keV with jwson session Friday 0900. Users will be escorted on the system through the day Friday. Please adjust your schedules accordingly. Thank you for your support! James Conway From jwc at snf.stanford.edu Thu Mar 4 15:12:16 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 04 Mar 2004 15:12:16 -0800 Subject: RAITH STATUS 03042004:15:00.00 SYSTEM coming up for users tomorrow - Friday. In-Reply-To: References: Message-ID: <4047B7D0.7030208@snf.stanford.edu> Raith Community: The tip run in is going well... We will have to delay our plans and Hold Off until tomorrow afternoon before we can qualify and perform test writes on the system. I am hoping to get LEO in to make adjustments this evening -- but likely they will not be available to start until the morning. We will have to realign the gun mechanically, with LEO's assistance, as that I cannot center the gun in the 30 um Aperture using electronic GUN ALIGN X - Y controls. This is a normal issue as we condition and run in the new FE-GUN tip. Emission is stable and within specifications, the delta of emission between EHT 'off' and EHT 'on' is nearly perfect at 0.82. This is very close to optimal for the EBL system writes with reference to the normal doses we use with relation to the resulting beam speed obtained. We are targeting for EHT 'off' at 112 uA and EHT 'on' of ~90 uA. Nice brightness too! This is likely to get us all off to a very nice start with a very small beam spot, I hope. Please adjust your schedules accordingly, James Conway Luigi Scaccabarozzi wrote: >james, >I'm back but I see you are still conditioning. I'll be busy again from >1.30 to 2.30. After that I can write any time when available. >I'll check back later... >Gigi > >On Wed, 3 Mar 2004, James Conway wrote: > > > >>Greetings, >> >>We are still running in and conditioning the FE-GUN, performing >>alignments and adjustments to the three magnification level amplifiers, >>establishing the default aperture positions, and finally the stigmation >>section alignments with LEO Field service. >>We checked out the E/O board and EHT power supplies and feel confident >>these sections are working properly. The ELPHY plus and image >>acquisition has been tested and appears just fine. >> >>I had hoped to complete qualifications of the system this afternoon, and >>bring on escorted users for test writes this evening. To ensure we do >>not run into further problems with the FE-Gun we will wait until >>tomorrow to complete these task; while allowing the system to run in as >>vacuum return to below 9 E-010 Torr level. >> >>It will likely be at least a day or two until we can test and run the >>system at higher acceleration voltages. I will need some time to test >>the system at 20 and 30 KeV when we have suitable vacuum and emission >>has stabilized. In fact, it may be prudent to operate the system at 10 >>keV for as long as a week. (Your comments are invited, particularly on >>the impact that this decision may have on your work.) >> >>All in all the entire picture is looking better than we were a week ago. >>We have another brand new FE-Gun tip and the bake out took us down to >>3.4 E -010 Torr level before we started running the gun up. >> >>I have a cue of people whom are on standby and 'ready to go' as the >>system goes up and they will run in this order: >> >>JWC: Qualification for resolution, line width, and stitching. >>Gigi: >>Arvind S. >>Acremann -- stohr group team >> >>We hope to resume the CORAL schedule with Cvenky session at 1800 hours >>tomorrow -- Thursday. >>NO operations above 10 keV are allowed until I have completed testing at >>elevated acceleration voltages. Likely I will be checking the this out >>at 20 keV with jwson session Friday 0900. Users will be escorted on the >>system through the day Friday. Please adjust your schedules accordingly. >> >>Thank you for your support! >> >>James Conway >> >> >> >> >> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Mar 5 16:22:49 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 05 Mar 2004 16:22:49 -0800 Subject: Raith Briefing 1700 hours CIS 101 System coming back for users 8:00 AM SAT. Message-ID: <404919D9.8090704@snf.stanford.edu> Greetings Raith Community: LEO returned right on time this morning and together we realigned the mechanical alignment on the gun. All is good. I have several groups of users whom will help in final testing overnight. Qualifications are in progress and we are looking good at this point. We have a very nice LEO electron microscope set up now. Performance is much better than before we changed out the tip. Some minor fine tuning to the mag. and stigmation amplifiers may be required early next week. This is normal as the gun runs itself in. For interested parties that wish to use the system this weekend --we will be holding an update briefing at 1700 hours in CIS 101. This weekend LEO is not to exceed 10 keV. I would prefer if newer users be escorted by Raith Champions or groups working in Teams. Users are requested to report all concerns and report error and problems you encounter. We wish to maximize throughput this weekend and next week in order to "clear the deck" so to speak. Hopefully this will minimize the negative impact that this downtime has caused to your projects. Projects with very urgent dead lines are strongly encouraged to attend the briefing. Check your reservations on CORAL and remove them if you cannot perform your write at 10 keV. Think about if you really need all the time you have reserved. The Coral schedule will resume at 0800 hours SAT. March 6, 2004. Thanks to everyone on the RAITH and LEO teams for the extra efforts and support through the last three weeks. Yours, James Conway This should make everyone smile: "There was a little girl and she had a little curl right in the middle of here forehead. When she was good she was very very good, and when she was bad she was horrible." from Bill Niell, LEO Electron Microscopy which seemed fitting considering the last ten days in the Ebeam Lab. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Mar 5 17:53:11 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 05 Mar 2004 17:53:11 -0800 Subject: Raith Status 1730 hours Friday March Message-ID: <40492F07.4070204@snf.stanford.edu> Greetings: System has been working well through the afternoon. NO operations above 10 keV. All resist must be baked at temperatures above 140 C. Please see me if you have any question. Users, particularly those not experts at SEM operations, may experience some difficulties achieving good focus or stigmation initially. My suggestion is to say yes to the standard settings for 5 mm that I saved earlier today and will update again on my session coming up at 1800 hours today. If you encounter difficulties -- return to larger features re-focus and stigmate, and then move in three progressions to smaller and smaller features, carefully adjusting stigmation as you increase magnification. The mixture of latex spheres on the load station are very good features for this. Users are also reminded that much less translation will be needed to the mouse controls to achieve suitable focus and stigmate because after the PM was done less current is needed to achieve acceptable stigmation. Remember: Move the controls very slowly allowing the monitor to update as it scans across the sample. Reduced raster works best for this. A slight shift can be seen changing from Mag amplifier 1 to 2 but should not affect your write field alignment as that it is done in Mag. range 2 for most writefield sizes. Please feel free to call me if you encounter problems or have any concerns. Leo will return for final tweaking on Monday at a time to be determined and it is hoped that we can progress to 20 keV writes early next week. From jwc at snf.stanford.edu Fri Mar 5 23:36:51 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 05 Mar 2004 23:36:51 -0800 Subject: Raith Status 2330 hours Friday March 5, 2004 :: System is up -- operations are fine. Message-ID: <40497F93.3020200@snf.stanford.edu> Hello: We have finished operational testing of the LEO package and the Raith system. Gigi and I both have successfully written a number of patterns without problems. The system is set up very nicely and I saved all the best settings to the column.ini and microscope.ini files, so you can be comfortable accepting these values when prompted. The system is very clean and it will take a longer time to generate a suitable contamination dot. Short dwell dots (left button) ar only about 10 - 12 nm in size, Long dwell dots (30 seconds) are about 30 nm. (Vibration was diminished from 5 - 7 nm to 3 nm after about 7 PM. Latex at 250 kX.) Use the latex spheres, there are three sizes mixed together, and carefully work your way down to smaller and smaller spheres as you find your focus. Do your final focus and writefield alignment on a contamination dot. This will be a bit harder than normal, please be patient. Focus and Stigmation controls on the mouse in fine mode need only about 1 - 3 mm of translation so do this slowly and it will work fine. I will develop and inspect my structures Monday, evaluate stitching and resolution on single pixel lines and post results. I would appreciate reports from users from their inspections on this list for Monday to aid in the qualification data. Ample notes on the qualification procedure are in the FAQ - Tips and tricks notebook should you be interested. This will become a template for future qualifications. :-) Please be careful with the system and the materials placed into it. NO operations above 10 keV. All resist must be baked at temperatures above 140 C. Please see me if you have any questions or call me. THANK YOU FOR YOUR SUPPORT! Good Night, James Conway Ebeam Technology Group 415-412-4825 PS. We will need some time Monday AM to complete tuning and tweaking with LEO and to measure the qualification runs. - jwc Previous status message: +++++++++++++++++++++++++++++++++++++ Greetings: System has been working well through the afternoon. NO operations above 10 keV. All resist must be baked at temperatures above 140 C. Please see me if you have any question. Users, particularly those not experts at SEM operations, may experience some difficulties achieving good focus or stigmation initially. My suggestion is to say yes to the standard settings for 5 mm that I saved earlier today and will update again on my session coming up at 1800 hours today. If you encounter difficulties -- return to larger features re-focus and stigmate, and then move in three progressions to smaller and smaller features, carefully adjusting stigmation as you increase magnification. The mixture of latex spheres on the load station are very good features for this. Users are also reminded that much less translation will be needed to the mouse controls to achieve suitable focus and stigmate because after the PM was done less current is needed to achieve acceptable stigmation. Remember: Move the controls very slowly allowing the monitor to update as it scans across the sample. Reduced raster works best for this. A slight shift can be seen changing from Mag amplifier 1 to 2 but should not affect your write field alignment as that it is done in Mag. range 2 for most writefield sizes. Please feel free to call me if you encounter problems or have any concerns. Leo will return for final tweaking on Monday at a time to be determined and it is hoped that we can progress to 20 keV writes early next week. From scaccag at stanford.edu Sun Mar 7 21:32:45 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Sun, 7 Mar 2004 21:32:45 -0800 (PST) Subject: Raith Results? In-Reply-To: <007601c404bf$de654560$419a0c80@hatice> Message-ID: HI Hatice, yes, I found the same. Some patterns broken, some misplaced, and also stitching error (but I was expecting the stitching since I could not align properly: the system is too clean, it's hard to burn a spot @ 10 um ap.!). Sorry I meant to send an email earlier, but I was busy. In conclusion, I would not attempt any critical work with the system in this state, and if other people had the same problem I think there's really something wrong with the system, not with my sample. James? Gigi On Sun, 7 Mar 2004, Hatice Altug wrote: > Hi gigi, > > Have you had a chance to look at your patterns you write recently? All the people that I saw today are complaining about wierd results and I wonder what kind of results you have. > I have writing tomorrow and want to know if it worths wrting it... > > -hatice From sandrew at stanford.edu Sun Mar 7 22:22:36 2004 From: sandrew at stanford.edu (Scott D. Andrews) Date: Sun, 7 Mar 2004 22:22:36 -0800 (PST) Subject: Raith Results? In-Reply-To: Message-ID: I concur with everything said so far. Our results from last night show problems as well. We had area writes that were supposed to be squares which produced amazingly round circles (700 nm). Two dot shots spaced 200 nm apart in a dose test only appeared at twice the expected dose and were completely overlapped (single big blob). -Scott and Yves On Sun, 7 Mar 2004, Luigi Scaccabarozzi wrote: > HI Hatice, > yes, I found the same. Some patterns broken, some misplaced, and also > stitching error (but I was expecting the stitching since I could not align > properly: the system is too clean, it's hard to burn a spot @ 10 um ap.!). > Sorry I meant to send an email earlier, but I was busy. > In conclusion, I would not attempt any critical work with the system in > this state, and if other people had the same problem I think there's > really something wrong with the system, not with my sample. > James? > Gigi > > > On Sun, 7 Mar 2004, Hatice Altug wrote: > > > Hi gigi, > > > > Have you had a chance to look at your patterns you write recently? All the people that I saw today are complaining about wierd results and I wonder what kind of results you have. > > I have writing tomorrow and want to know if it worths wrting it... > > > > -hatice > > ----------------------- Scott Andrews Materials Science and Eng Stanford Univ. 650-497-3291 AIM: colonel1998 MSN: colonel1998 at hotmail.com From altug at stanford.edu Sun Mar 7 22:51:20 2004 From: altug at stanford.edu (Hatice Altug) Date: Sun, 7 Mar 2004 22:51:20 -0800 Subject: Raith pattern generator Problem again? Message-ID: <00bb01c404d9$c42a7e30$419a0c80@hatice> Hi, Gigi, do your broken patterns look like this? I got this results back in September when there was a problem with pattern generator. It showed up on random people and random writing sessions. For at least 2 weeks I suffered while nobady was having such a problem ( maybe my patterns are more complex than others) It has not been fixed untill james and other users also start to have same problem. If you also have same broken type pattrens I think it might be again same problem with pattern generator ?! Scott, also I remember now that I was getting overlaped patterns. It might be writing on the same spot so that you get one big blob instead of one (look at broken_pattern_1 in the attachment, overlaped area is overexposed and in some of them not even possible to resolve the pattern which is suppose to be 10 by 10 matrix of dots) Since last time it showed on random people and on random writing sessions it is possible that tomorrow some people can say that they have very good results. I think maybe James can check if pattern generator OK? hatice ----- Original Message ----- From: "Luigi Scaccabarozzi" To: "Hatice Altug" Cc: ; Sent: Sunday, March 07, 2004 9:32 PM Subject: Re: Raith Results? > HI Hatice, > yes, I found the same. Some patterns broken, some misplaced, and also > stitching error (but I was expecting the stitching since I could not align > properly: the system is too clean, it's hard to burn a spot @ 10 um ap.!). > Sorry I meant to send an email earlier, but I was busy. > In conclusion, I would not attempt any critical work with the system in > this state, and if other people had the same problem I think there's > really something wrong with the system, not with my sample. > James? > Gigi > > -------------- next part -------------- A non-text attachment was scrubbed... Name: broken_pattern_3.tif Type: image/tiff Size: 788571 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: broken_pattern_1.tif Type: image/tiff Size: 788606 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: broken_pattern_2.tif Type: image/tiff Size: 788606 bytes Desc: not available URL: From scaccag at stanford.edu Sun Mar 7 22:59:10 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Sun, 7 Mar 2004 22:59:10 -0800 (PST) Subject: Raith pattern generator Problem again? In-Reply-To: <00bb01c404d9$c42a7e30$419a0c80@hatice> Message-ID: Hatice, yes I guess it's the same problem with the pattern generator, we may have to exchange the board... but let's see what's James' opinion... Gigi On Sun, 7 Mar 2004, Hatice Altug wrote: > > Hi, > > Gigi, do your broken patterns look like this? I got this results back in > September when there was a problem with pattern generator. It showed up on > random people and random writing sessions. For at least 2 weeks I suffered > while nobady was having such a problem ( maybe my patterns are more complex > than others) It has not been fixed untill james and other users also start > to have same problem. If you also have same broken type pattrens I think it > might be again same problem with pattern generator ?! > > Scott, also I remember now that I was getting overlaped patterns. It might > be writing on the same spot so that you get one big blob instead of one > (look at broken_pattern_1 in the attachment, overlaped area is overexposed > and in some of them not even possible to resolve the pattern which is > suppose to be 10 by 10 matrix of dots) > > Since last time it showed on random people and on random writing sessions it > is possible that tomorrow some people can say that they have very good > results. I think maybe James can check if pattern generator OK? > > hatice > > > ----- Original Message ----- > From: "Luigi Scaccabarozzi" > To: "Hatice Altug" > Cc: ; > Sent: Sunday, March 07, 2004 9:32 PM > Subject: Re: Raith Results? > > > > HI Hatice, > > yes, I found the same. Some patterns broken, some misplaced, and also > > stitching error (but I was expecting the stitching since I could not align > > properly: the system is too clean, it's hard to burn a spot @ 10 um ap.!). > > Sorry I meant to send an email earlier, but I was busy. > > In conclusion, I would not attempt any critical work with the system in > > this state, and if other people had the same problem I think there's > > really something wrong with the system, not with my sample. > > James? > > Gigi > > > > > > From goldhaber-gordon at stanford.edu Sun Mar 7 23:07:14 2004 From: goldhaber-gordon at stanford.edu (David Goldhaber-Gordon) Date: Sun, 7 Mar 2004 23:07:14 -0800 Subject: Raith pattern generator Problem again? In-Reply-To: <00bb01c404d9$c42a7e30$419a0c80@hatice> Message-ID: <01b901c404db$fc6b83f0$d26a40ab@kondolam> Hi Hatice, I'm sorry that people are experiencing pattern generator problems again. It's great that you emailed pictures of broken patterns from September. It would be even better if you could: 1. Put them on the Raith Swiki: http://elrey.stanford.edu:8080/Raith Specifically, create a new page for your pictures under http://elrey.stanford.edu:8080/Raith/18 2. Include (in some form) not just the broken patterns but also the intended patterns. For example, you could include the GDS II file, a pdf, or a SEM image of ones that wrote correctly This would help everyone recognize the problems when they show up, and would give James images to show to Raith to convince them of what's going on. Best, David ---------------------------------------------------------------------------- David Goldhaber-Gordon goldhaber-gordon at stanford.edu Assistant Professor of Physics davidg at post.harvard.edu Stanford University (permanent forwarding) www.goldhaber-gordon.com (650) 725-2047 (lab) (650) 724-3709 (office) Address for letters or packages: Administrative Associate: David Goldhaber-Gordon Roberta Edwards Geballe Laboratory for Advanced Materials McCullough, Rm. 338 McCullough Building, Room 346 Phone: (650) 723-8028 476 Lomita Mall Fax: (650) 724-3681 Stanford, CA 94305-4045 email: redward at stanford.edu -----Original Message----- From: Hatice Altug [mailto:altug at stanford.edu] Sent: Sunday, March 07, 2004 10:51 PM To: James Conway; Luigi Scaccabarozzi; Scott Andrews; raith at snf.stanford.edu Subject: Raith pattern generator Problem again? Hi, Gigi, do your broken patterns look like this? I got this results back in September when there was a problem with pattern generator. It showed up on random people and random writing sessions. For at least 2 weeks I suffered while nobady was having such a problem ( maybe my patterns are more complex than others) It has not been fixed untill james and other users also start to have same problem. If you also have same broken type pattrens I think it might be again same problem with pattern generator ?! Scott, also I remember now that I was getting overlaped patterns. It might be writing on the same spot so that you get one big blob instead of one (look at broken_pattern_1 in the attachment, overlaped area is overexposed and in some of them not even possible to resolve the pattern which is suppose to be 10 by 10 matrix of dots) Since last time it showed on random people and on random writing sessions it is possible that tomorrow some people can say that they have very good results. I think maybe James can check if pattern generator OK? hatice ----- Original Message ----- From: "Luigi Scaccabarozzi" To: "Hatice Altug" Cc: ; Sent: Sunday, March 07, 2004 9:32 PM Subject: Re: Raith Results? > HI Hatice, > yes, I found the same. Some patterns broken, some misplaced, and also > stitching error (but I was expecting the stitching since I could not align > properly: the system is too clean, it's hard to burn a spot @ 10 um ap.!). > Sorry I meant to send an email earlier, but I was busy. > In conclusion, I would not attempt any critical work with the system in > this state, and if other people had the same problem I think there's > really something wrong with the system, not with my sample. > James? > Gigi > > From sandrew at stanford.edu Sun Mar 7 23:28:08 2004 From: sandrew at stanford.edu (Scott D. Andrews) Date: Sun, 7 Mar 2004 23:28:08 -0800 (PST) Subject: Raith free tonight 2:30 - 6:00 Message-ID: Hi all, In light of the apparent Raith problems, I have cancelled my reservation tonight. -Scott From ACREMANN at SSRL.SLAC.STANFORD.EDU Sun Mar 7 23:38:19 2004 From: ACREMANN at SSRL.SLAC.STANFORD.EDU (ACREMANN at SSRL.SLAC.STANFORD.EDU) Date: Sun, 07 Mar 2004 23:38:19 -0800 (PST) Subject: Raith problems Message-ID: <01L7GPEX7BZM92OP20@SSRL.SLAC.STANFORD.EDU> Hi All As Scott reported earlier, we also have a strange result from our last two writes. I also observed another strange thing that could be related to the strange write results. Our samples never showed any charging problems so far. Last night, we observed that the SEM image at high magnification is unstable after we unblank the beam. It looks like some strange charging problem to me (even our samples never showed charging as far). Could it be that something in the optics is not properly groulded? This thing also may lead to some stitching problems. Greetings Yves From jhemanth at stanford.edu Sun Mar 7 23:59:18 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Sun, 7 Mar 2004 23:59:18 -0800 Subject: Ratih free from 12:00am Message-ID: <000501c404e3$4299a7b0$c66340ab@JAGANNATHANPC> HI everyone, I just finished my write and was about to send an e-mail to the raith list about the machine being free and saw the thread of mails about problems in e-beam writes. I have not yet developed my samples. I will update James and fellow users about how the write turned out once I develop my sample. Regards, Hemanth -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtopinka at stanford.edu Mon Mar 8 05:02:57 2004 From: mtopinka at stanford.edu (Mark Topinka) Date: Mon, 08 Mar 2004 05:02:57 -0800 Subject: raith free now-9am Message-ID: <5.2.0.9.0.20040308050223.0219ea68@mtopinka.pobox.stanford.edu> Hi- I started early and finished early From jwc at snf.stanford.edu Mon Mar 8 09:18:06 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 08 Mar 2004 09:18:06 -0800 Subject: Raith Results? We are looking into the problem system back down. In-Reply-To: References: Message-ID: <404CAACE.8080701@snf.stanford.edu> Hello: It would have been nice if someone would have called me when these problems surfaced! I am not on email outside of work. I am taking the system over for the morning to evaluate this problem after I look at my samples from the run I did Friday evening. Did anyone get any normal results? We are on it. JWC Luigi Scaccabarozzi wrote: >HI Hatice, >yes, I found the same. Some patterns broken, some misplaced, and also >stitching error (but I was expecting the stitching since I could not align >properly: the system is too clean, it's hard to burn a spot @ 10 um ap.!). >Sorry I meant to send an email earlier, but I was busy. >In conclusion, I would not attempt any critical work with the system in >this state, and if other people had the same problem I think there's >really something wrong with the system, not with my sample. >James? >Gigi > > >On Sun, 7 Mar 2004, Hatice Altug wrote: > > > >>Hi gigi, >> >>Have you had a chance to look at your patterns you write recently? All the people that I saw today are complaining about weird results and I wonder what kind of results you have. >>I have writing tomorrow and want to know if it worths wrting it... >> >>-hatice >> >> From jwc at snf.stanford.edu Mon Mar 8 09:28:49 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 08 Mar 2004 09:28:49 -0800 Subject: Raith pattern generator Problem again? In-Reply-To: <00bb01c404d9$c42a7e30$419a0c80@hatice> References: <00bb01c404d9$c42a7e30$419a0c80@hatice> Message-ID: <404CAD51.6040601@snf.stanford.edu> Hello All, Yes this is a problem with the pattern generator. I will be also checking the LEO deflection section. More later, Jwc Hatice Altug wrote: >Hi, > >Gigi, do your broken patterns look like this? I got this results back in >September when there was a problem with pattern generator. It showed up on >random people and random writing sessions. For at least 2 weeks I suffered >while nobody was having such a problem ( maybe my patterns are more complex >than others) It has not been fixed until james and other users also start >to have same problem. If you also have same broken type patterns I think it >might be again same problem with pattern generator ?! > >Scott, also I remember now that I was getting overlapped patterns. It might >be writing on the same spot so that you get one big blob instead of one >(look at broken_pattern_1 in the attachment, overlaped area is overexposed >and in some of them not even possible to resolve the pattern which is >suppose to be 10 by 10 matrix of dots) > >Since last time it showed on random people and on random writing sessions it >is possible that tomorrow some people can say that they have very good >results. I think maybe James can check if pattern generator OK? > >hatice > > >----- Original Message ----- >From: "Luigi Scaccabarozzi" >To: "Hatice Altug" >Cc: ; >Sent: Sunday, March 07, 2004 9:32 PM >Subject: Re: Raith Results? > > > > >>HI Hatice, >>yes, I found the same. Some patterns broken, some misplaced, and also >>stitching error (but I was expecting the stitching since I could not align >>properly: the system is too clean, it's hard to burn a spot @ 10 um ap.!). >>Sorry I meant to send an email earlier, but I was busy. >>In conclusion, I would not attempt any critical work with the system in >>this state, and if other people had the same problem I think there's >>really something wrong with the system, not with my sample. >>James? >>Gigi >> >> >> >> > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From altug at stanford.edu Mon Mar 8 10:17:48 2004 From: altug at stanford.edu (Hatice Altug) Date: Mon, 8 Mar 2004 10:17:48 -0800 Subject: Reservation cancelled References: <00bb01c404d9$c42a7e30$419a0c80@hatice> <404CAD51.6040601@snf.stanford.edu> Message-ID: <019601c40539$a9496210$419a0c80@hatice> James said he need time for inspecting the system so I cancel my reservation starting from 13:00 pm today... -hatice ----- Original Message ----- From: James Conway To: Hatice Altug Cc: Luigi Scaccabarozzi ; Scott Andrews ; raith at snf.stanford.edu Sent: Monday, March 08, 2004 9:28 AM Subject: Re: Raith pattern generator Problem again? Hello All, Yes this is a problem with the pattern generator. I will be also checking the LEO deflection section. More later, Jwc -------------- next part -------------- An HTML attachment was scrubbed... URL: From dfattal at stanford.edu Mon Mar 8 12:12:00 2004 From: dfattal at stanford.edu (David Fattal) Date: Mon, 8 Mar 2004 12:12:00 -0800 Subject: Raith Results? In-Reply-To: Message-ID: Dirk and I did not observe any problem on our "honey" structures, composed of 150 nm holes. Note that each structure fits into one writefield. David From jwc at snf.stanford.edu Mon Mar 8 12:37:45 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 08 Mar 2004 12:37:45 -0800 Subject: RAITH is checking out OK. SEE THE NOTES... Message-ID: <404CD999.30603@snf.stanford.edu> An HTML attachment was scrubbed... URL: From edo at stanford.edu Mon Mar 8 16:17:17 2004 From: edo at stanford.edu (Edo Waks) Date: Mon, 8 Mar 2004 16:17:17 -0800 Subject: Reservation cancelled, 3-9-4 9:00-5:00 Message-ID: Sample not ready From cumings at stanford.edu Mon Mar 8 16:33:16 2004 From: cumings at stanford.edu (John Cumings) Date: Mon, 08 Mar 2004 16:33:16 -0800 Subject: Yellow light for <30kV? Message-ID: <200403090033.i290XGrN014857@elaine0.Stanford.EDU> All, I would like to see the Raith yellow-lighted any time there are "special instructions", such as "no operation above 10kV". Do other users agree with this? -John ------------------------------------------------------------ John Cumings cumings at stanford.edu Postdoctoral Scholar Physics Department Stanford University office (650) 725-1025 lab (650) 725-2047 fax (650) 724-3681 Geballe Laboratory for Advanced Materials 239 McCullough Building 476 Lomita Mall Stanford, CA 94305-4045 ------------------------------------------------------------ From lsmoore at stanford.edu Mon Mar 8 17:36:27 2004 From: lsmoore at stanford.edu (Lindsay Moore) Date: Mon, 08 Mar 2004 17:36:27 -0800 Subject: Yellow light for <30kV? In-Reply-To: <200403090033.i290XGrN014857@elaine0.Stanford.EDU> Message-ID: <5.1.1.5.2.20040308173611.01c810d8@lsmoore.pobox.stanford.edu> yes. I agree with this. Lindsay At 04:33 PM 3/8/2004 -0800, John Cumings wrote: >All, > >I would like to see the Raith yellow-lighted any time there are "special >instructions", such as "no operation above 10kV". > >Do other users agree with this? > >-John > >------------------------------------------------------------ > John Cumings > cumings at stanford.edu > Postdoctoral Scholar > Physics Department > Stanford University > > office (650) 725-1025 > lab (650) 725-2047 > fax (650) 724-3681 > > Geballe Laboratory for Advanced Materials > 239 McCullough Building > 476 Lomita Mall > Stanford, CA 94305-4045 >------------------------------------------------------------ From jwc at snf.stanford.edu Mon Mar 8 18:21:14 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 08 Mar 2004 18:21:14 -0800 Subject: Rx: Charging in the blanking aperture causing problems some users have seen... Message-ID: <404D2A1A.5030208@snf.stanford.edu> An HTML attachment was scrubbed... URL: From chquay at MtHolyoke.edu Tue Mar 9 10:05:33 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Tue, 9 Mar 2004 13:05:33 -0500 (EST) Subject: Raith pattern generator Problem again? In-Reply-To: <00bb01c404d9$c42a7e30$419a0c80@hatice> Message-ID: Guys, I have another suggestion. Instead of sending 3MB attachments to the whole raith list, how about we put them on the swiki and send people the link? As a reminder, http://elrey.stanford.edu:8080/Raith. Let me know if you have objections or problems. Thanks. Cheers, Charis. From jwc at snf.stanford.edu Tue Mar 9 20:23:01 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 09 Mar 2004 20:23:01 -0800 Subject: Raith is down. Back up late thursday at the earliest... Message-ID: <404E9825.2070501@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: MARK1.BMP Type: image/bmp Size: 91078 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: MARK2.BMP Type: image/bmp Size: 91078 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: MARK3.BMP Type: image/bmp Size: 91078 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: short spot dot 20nm3804.tif Type: image/tiff Size: 787028 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed Mar 10 17:59:40 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 10 Mar 2004 17:59:40 -0800 Subject: [Fwd: Comment ebeam 2003-11-20 16:48:34: Report etch rate ZEP520] Message-ID: <404FC80C.1010109@snf.stanford.edu> Greetings: Has anyone similar data on ZEP- 520 or 2% 950K MW PMMA on oxide and Silicon? Do tell - inquiring persons wish to know.... James Conway Ebeam Technology Group Subject: Comment ebeam 2003-11-20 16:48:34: Report etch rate ZEP520 Date: Thu, 20 Nov 2003 16:48:36 -0800 From: jnee at snf.stanford.edu To: ebeam-pcs at snf.stanford.edu I checked etch rate for ZEP520 for two etches: 1. Oxide etch in amtetcher (program3): 170A/min 2. Silicon etch in stsetch (SMOOSHAL): 195A/min The stsetch recipe used is a more gentle recipe, so etching using more standard recipes such as SMOODEEP and DEEP wiill have higher etch rates. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Mar 12 20:00:26 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 12 Mar 2004 20:00:26 -0800 Subject: RAITH SHUTDOWN for the weekend. RAITH Field service has been requested. Message-ID: <4052875A.8030004@snf.stanford.edu> An HTML attachment was scrubbed... URL: From altug at stanford.edu Mon Mar 15 02:13:52 2004 From: altug at stanford.edu (Hatice Altug) Date: Mon, 15 Mar 2004 02:13:52 -0800 Subject: Reservation Cancelled from 21:00pm-5:00am Message-ID: <01d401c40a76$377aa620$ea5540ab@hatice> I will not be ready by tomorrow. Time is available to you if machine is up. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Mar 15 09:29:47 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 15 Mar 2004 09:29:47 -0800 Subject: Reminder and Agenda EBEAM TOWN MEETING TODAY CIS 101 2 - 4 PM. Message-ID: <4055E80B.1080801@snf.stanford.edu> Greetings: This is a reminder that we will be holding the second EBEAM TOWN HALL MEETING today at 2 - 4 PM in CIS 101. During the last meeting we had excellent discussions. We hope that all interested parties will join us again and continue to contribute their opinions and express their ideas on helping us develop the best Ebeam community within NNIN and SU. Brief Agenda of Today's EBEAM TOWN HALL Meeting. 1. Introduction: James Conway 2 .RAITH UPDATE: Summary of problems encountered on the system after the recent Preventive Maintenance and FE-Gun tip replacement. Plan of action for bringing the system back up and on line to users this week. The importance of proper sample preparation for all samples and materials coming into the system. "To Bake or Not to Bake." A new procedure and FAQ: 'EHT trips and what to do and what not to do... ' Users community feedback regarding the performance and operational status of the RAITH 150 system here at SNF. Do we want another ebeam tools here at SNF? 2. RAITH Coral Scheduling, continuing where we left off February 2, 2004. The new RAITH Coral reservation policies were met with broad approval and we have received positive feedback from users. We will continue discussions on how to improve system utilization and access particularly during crunch and crisis periods. Users are encouraged to introduce their ideas on what we may consider to add to the current policies: - 24 hour reservation window on OPEN Slots that appear on the system? - Reserved Open Access time and day? - Restrictions on RAITH utilization? Any appropriate use? SEM Imaging and Metrology use? Just EBL Writes. - Migration from or restriction of access to users on the system? - Other ideas of interest and concern from the community? This is hoped to be a lively discussion with contributions from the RAITH Users Community. 3. Ebeam Discussions related to the Hitachi H-700 system. (3:40 - 4:00 PM) Report on recent activities and operational issues on the system. Paul Jerabek. - Please review the errors you encountered on the system and report your results in this session. We will be starting promptly at 2:00 PM in CIS 101. Thank you for your support! James Conway Paul Jerabek Ebeam Technology Group. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Ebeam_Town_Meeting_Minutes_February_2_2004.doc Type: application/msword Size: 32256 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon Mar 15 18:45:12 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 15 Mar 2004 18:45:12 -0800 Subject: RAITH DOWN FOR USER OVERNIGHT -- BAKING OUT ONE MORE TIME. Message-ID: <40566A38.4010508@snf.stanford.edu> Greetings, Raith Field Service and LEO are here and we attempted to qualify the system. Qualification failed due to field rotation and elliptic beam profiles evidenced in the single pixel shot writes. Tonight are baking out overnight to improve vacuum. In testing today we saw elevated vacuum levels as we ramped up towards 20 keV and observed one transient arc event. Full update tomorrow afternoon. Thank you, James Conway From jwc at snf.stanford.edu Tue Mar 16 22:09:44 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 16 Mar 2004 22:09:44 -0800 Subject: Raith Status 16 March 2004:2209 hrs :: Yellow Status-- test mode pending full qualification WED AM. Message-ID: <4057EBA8.2010803@snf.stanford.edu> Greetings, We are in the process of qualifying the system for performance and operations. All sub-systems are functioning and the system has been completely calibrated to my satisfaction. We are now troubleshooting several issues which we should be able to resolve in the morning. Special mention goes out to the fine field service people from Raith and LEO, Bernd Stegemann and Mike Santomango, whom have made exemplary efforts to get us up and running. Full report in the afternoon -- Wed. Thank you for your support! James Conway From jwc at snf.stanford.edu Wed Mar 17 12:36:30 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 17 Mar 2004 12:36:30 -0800 Subject: Raith is being qualified -- last nights users had good results... Message-ID: <4058B6CE.7060400@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Mar 17 12:52:28 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 17 Mar 2004 12:52:28 -0800 Subject: Please send me your best images and a slide or two on your project results. Message-ID: <4058BA8C.8080206@snf.stanford.edu> Greetings: I will be presenting in Dortmund, Germany next Tuesday 23MAR2004 at the Advanced Lithography Training Course and Users Meeting a report on "Recent Results on the Stanford RAITH 150 EBL system" I welcome your submissions of images and Power point content to add to my results. This is identical to presentations I have made in the past to CNF and various external presentations within the EBL community. You and your group will be given full credit for your work and exposure for your research groups to several researchers I am meeting with. I will also seek to use this content in internal presentations to SNF and SU, and possibly within the NNIN through the course of this year. Please feel free to submit your work, images, and examples of your results good and bad in any usable format with Power point being preferred. DO BE SURE TO HAVE YOUR NAME, YOUR GROUP, CONTACT INFORMATION, AND DESCRIPTION OF PROJECT GOAL AND RESULT OBTAIN IN YOUR MATERIALS. I have attached my power point template should you desire to enlist this, but if you have specific templates you use in your group that would be fine as well. For those few whom I have not spoken with of this in person, my apologies for the very short notice. I will be working on my presentation tomorrow afternoon, Thursday March 18, and submissions be received ASAP and certainly by 1800 hours tomorrow. Thank you for your support. James Conway -------------- next part -------------- A non-text attachment was scrubbed... Name: dortmund32204.pot Type: application/vnd.ms-powerpoint Size: 112640 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: LTC_IIABSTRACT.doc Type: application/msword Size: 20480 bytes Desc: not available URL: From cumings at stanford.edu Wed Mar 17 12:56:43 2004 From: cumings at stanford.edu (John Cumings) Date: Wed, 17 Mar 2004 12:56:43 -0800 Subject: Raith is being qualified -- last nights users had good results... In-Reply-To: Your message of "Wed, 17 Mar 2004 12:36:30 PST." <4058B6CE.7060400@snf.stanford.edu> Message-ID: <200403172056.i2HKuhIj026175@elaine33.Stanford.EDU> James, Green light means 30kV is okay. I presume you mean yellow light, because 30kV is not okay, correct? -John ------------------------------------------------------------ John Cumings cumings at stanford.edu Postdoctoral Scholar Physics Department Stanford University office (650) 725-1025 lab (650) 725-2047 fax (650) 724-3681 Geballe Laboratory for Advanced Materials 239 McCullough Building 476 Lomita Mall Stanford, CA 94305-4045 ------------------------------------------------------------ In message <4058B6CE.7060400 at snf.stanford.edu>you write: > > > > > > > >
>Greetings:
>
>I am most relieved to report that we are coming back into normal >operational status on the RAITH 150 system.
>
>This afternoon and evening we will be qualifying the system and working >with users whom are in crisis mode.
>
>We hope to go into green light mode in the next twelve hours.
>
>James Conway
> > > From scaccag at stanford.edu Wed Mar 17 14:04:32 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Wed, 17 Mar 2004 14:04:32 -0800 (PST) Subject: Raith is being qualified -- last nights users had good results... In-Reply-To: <4058B6CE.7060400@snf.stanford.edu> Message-ID: Hello, just want to thank James and the other Raith and LEO experts for their work the past weeks. I wrote yesterday night my pattern (at 10keV), and inspected it today. I couldn't detect any stitching error or other problem. Also the alignment and current yesterday were superb! Possibly better than any other time since it was installed! (at least for the aspects I was able to test yesterday) Thanks again a lot, it took some time but... great job! Luigi On Wed, 17 Mar 2004, James Conway wrote: > > Greetings: > > I am most relieved to report that we are coming back into normal > operational status on the RAITH 150 system. > > This afternoon and evening we will be qualifying the system and working > with users whom are in crisis mode. > > We hope to go into green light mode in the next twelve hours. > > James Conway > > From mtopinka at stanford.edu Wed Mar 17 14:37:20 2004 From: mtopinka at stanford.edu (Mark Topinka) Date: Wed, 17 Mar 2004 14:37:20 -0800 Subject: Raith: 5:30-8 pm tonight open Message-ID: <5.2.0.9.0.20040317143554.02231bc8@mtopinka.pobox.stanford.edu> hi. the write from this morning worked great - compliments to James, and Leo folks - and I won't be needing this evening's shift. There is an outside chance I won't need my 1am-4am slot tonight either- I will hopefully know soon. -Mark From jwc at snf.stanford.edu Wed Mar 17 20:24:45 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 17 Mar 2004 20:24:45 -0800 Subject: Raith is being qualified... Thread: Required Limits of keV operation through 6APRIL2004 on RAITH 150 In-Reply-To: <200403172056.i2HKuhIj026175@elaine33.Stanford.EDU> References: <200403172056.i2HKuhIj026175@elaine33.Stanford.EDU> Message-ID: <4059248D.4040000@snf.stanford.edu> Please Everyone: We would like to operate the system in a range between 10 - 15 KeV and/or at 20100 to 2100 kV only. NOT 20 kV or higher than 21 kV. When I return from Germany and with LEO field service we will perform further testing on the column. Things are in good order and tomorrow I plan to put the system back into green light mode as more measurements and imaging is completed Stitching Mean + 3 sigma was 19 nm. Thanks to everyone for your support during this challenging period, JWC John Cumings wrote: >James, > >Green light means 30 kV is okay. > >I presume you mean yellow light, because 30 kV is not okay, correct? > >-John > >------------------------------------------------------------ > John Cumings > cumings at stanford.edu > Postdoctoral Scholar > Physics Department > Stanford University > > office (650) 725-1025 > lab (650) 725-2047 > fax (650) 724-3681 > > Geballe Laboratory for Advanced Materials > 239 McCullough Building > 476 Lomita Mall > Stanford, CA 94305-4045 >------------------------------------------------------------ >In message <4058B6CE.7060400 at snf.stanford.edu>you write: > > >> >> >> >> >> >> >> >>
>>Greetings:
>>
>>I am most relieved to report that we are coming back into normal >>operational status on the RAITH 150 system.
>>
>>This afternoon and evening we will be qualifying the system and working >>with users whom are in crisis mode.
>>
>>We hope to go into green light mode in the next twelve hours.
>>
>>James Conway
>> >> >> >> >> -------------- next part -------------- An HTML attachment was scrubbed... URL: From goldhaber-gordon at stanford.edu Thu Mar 18 06:55:30 2004 From: goldhaber-gordon at stanford.edu (David Goldhaber-Gordon) Date: Thu, 18 Mar 2004 06:55:30 -0800 Subject: Important: High voltage clarification In-Reply-To: <4059248D.4040000@snf.stanford.edu> Message-ID: <00a501c40cf9$0f0ee180$d26a40ab@kondolam> Hi all, Thanks and congratulations are due to James for pushing so hard to get the system up before he leaves for Germany. I want to clarify one point: James probably meant that the voltages me may use are 10-15 kV or 20.1 to 21 kV (i.e. 20100 to 21000 V). I point this out since the actual numbers may be important and I?d hate for someone to misunderstand and jeopardize the system for him- or herself and others. James, please post a correction if I got this wrong. Also, could someone comment on the proper procedure for getting up to those voltages? I'm not sure that procedure has been uniformly agreed upon and communicated. Best, David ---------------------------------------------------------------------------- David Goldhaber-Gordon???????????????????????? goldhaber-gordon at stanford.edu Assistant Professor of Physics???????????????? davidg at post.harvard.edu Stanford University??????????????????????????? (permanent forwarding) ?????????????????????????????????????????????? www.goldhaber-gordon.com (650) 725-2047 (lab)?????????????????????????? (650) 724-3709 (office) Address for letters or packages:?????????????? Administrative Associate: David Goldhaber-Gordon???????????????????????? Roberta Edwards Geballe Laboratory for Advanced Materials????? McCullough, Rm. 338 McCullough Building, Room 346????????????????? Phone: (650) 723-8028 476 Lomita Mall??????????????????????????????? Fax: (650) 724-3681 Stanford, CA 94305-4045??????????????????????? email: redward at stanford.edu -----Original Message----- From: James Conway [mailto:jwc at snf.stanford.edu] Sent: Wednesday, March 17, 2004 8:25 PM To: John Cumings Cc: Raith SNF Mailing list Subject: Re: Raith is being qualified... Thread: Required Limits of keV operation through 6APRIL2004 on RAITH 150 Please Everyone: We would like to operate the system in a range between? 10 - 15 KeV and/or at 20100 to 2100 kV only. NOT 20 kV or higher than 21 kV. ?When? I return from Germany and with LEO field service we will perform further testing on the column.? Things are in good order and tomorrow I plan to put the system back into green light mode as more measurements and imaging is completed Stitching Mean + 3 sigma was 19 nm. Thanks to everyone for your support during this challenging period, JWC John Cumings wrote: James, Green light means 30 kV is okay. I presume you mean yellow light, because 30 kV is not okay, correct? -John ------------------------------------------------------------ John Cumings cumings at stanford.edu Postdoctoral Scholar Physics Department Stanford University office (650) 725-1025 lab (650) 725-2047 fax (650) 724-3681 Geballe Laboratory for Advanced Materials 239 McCullough Building 476 Lomita Mall Stanford, CA 94305-4045 ------------------------------------------------------------ In message <4058B6CE.7060400 at snf.stanford.edu>you write:
Greetings:

I am most relieved to report that we are coming back into normal operational status on the RAITH 150 system.

This afternoon and evening we will be qualifying the system and working with users whom are in crisis mode.

We hope to go into green light mode in the next twelve hours.

James Conway
From jwc at snf.stanford.edu Thu Mar 18 10:18:58 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Mar 2004 10:18:58 -0800 Subject: RAITH Is UP and working optimally. Green Light is on. Message-ID: <4059E812.5020406@snf.stanford.edu> Greetings to the Raith Community: With no small effort, we have completed the PM routine and returned the RAITH 150 to optimal operational status. The system and column are very clean with a very low HC background. Users will need to be patient when focusing, aligning apertures and stigmating as it now takes very little translation of the controls to run through their full range. Single shot dots are less than 20 nm. Resolution and stitching have been measured and I will be posting images to the RAITH swiki as I finish my analysis. Stitching XY mean+3 sigma was 19 nm. This is a three fold better result than the 60 nm acceptance specification. User reports since we resumed performance testing have been outstanding with all users reporting excellent results. All users are requested to be very careful with all materials that are introduced to the system to ensure that the column does not become contaminated. All materials placed into the system must be soft baked, preferably hard baked, to remove solvents and adsorbed gas residues. All assemblies and sample holders placed into the system must be solvent cleaned and baked in excess of 100 degrees for one hour, preferable in a N2 oven. Absolutely no Carbon or silver paste, DAG, adhesives, or greases of any kind are to be placed into the system. Please report to James Conway if you have any questions during my office hour. Free Dinner will be provided to the lab member whom obtains the finest line or smallest gap on the system through April 30, 2004. Thank you for your support! James Conway Ebeam Technology Group Stanford Nanofabrication Facility. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwson at stanford.edu Thu Mar 18 10:27:30 2004 From: jwson at stanford.edu (Ji-Won Son) Date: Thu, 18 Mar 2004 10:27:30 -0800 Subject: Important: High voltage clarification In-Reply-To: <00a501c40cf9$0f0ee180$d26a40ab@kondolam> Message-ID: <000201c40d16$ac8d27b0$416140ab@stanford.edu> Hi all, I asked the procedure to use voltage around 20keV, so I think I can answer some of David's question. The Raith system use 8kV deceleration up to 20keV, so the actual voltage that applied to the gun is plus 8V to the acc. voltage you choose. (if you use 20keV, then the actual voltage is 28 V, not 20.) Above 20kV, the system turns off 8V deceleration part and applied voltage will be same as you choose. That's why James asked us to use 10-15 kV and 20.1 - 21 kV at this point to reduce the load. I am not sure about using 10-15kV, but when you use 20.1-21kV, the procedure is: 1. Turn the beam on at 10kV. 2. Check the vacuum. (should be around 10^-9) 3. If vacuum is ok, then change the voltage to 20.1-21kV, by one step. Don't ramp up slowly step by step! These are what I heard from Raith field service. James, if there is anything wrong with these, please correct. Thank you. ==================== Sincerely, Ji-Won Son (Office) 650-723-4940 (Fax) 650-725-3459 ==================== -----Original Message----- From: David Goldhaber-Gordon [mailto:goldhaber-gordon at stanford.edu] Sent: Thursday, March 18, 2004 6:56 AM To: 'James Conway'; 'John Cumings' Cc: 'Raith SNF Mailing list' Subject: Important: High voltage clarification Hi all, Thanks and congratulations are due to James for pushing so hard to get the system up before he leaves for Germany. I want to clarify one point: James probably meant that the voltages me may use are 10-15 kV or 20.1 to 21 kV (i.e. 20100 to 21000 V). I point this out since the actual numbers may be important and I'd hate for someone to misunderstand and jeopardize the system for him- or herself and others. James, please post a correction if I got this wrong. Also, could someone comment on the proper procedure for getting up to those voltages? I'm not sure that procedure has been uniformly agreed upon and communicated. Best, David ---------------------------------------------------------------------------- David Goldhaber-Gordon goldhaber-gordon at stanford.edu Assistant Professor of Physics davidg at post.harvard.edu Stanford University (permanent forwarding) www.goldhaber-gordon.com (650) 725-2047 (lab) (650) 724-3709 (office) Address for letters or packages: Administrative Associate: David Goldhaber-Gordon Roberta Edwards Geballe Laboratory for Advanced Materials McCullough, Rm. 338 McCullough Building, Room 346 Phone: (650) 723-8028 476 Lomita Mall Fax: (650) 724-3681 Stanford, CA 94305-4045 email: redward at stanford.edu -----Original Message----- From: James Conway [mailto:jwc at snf.stanford.edu] Sent: Wednesday, March 17, 2004 8:25 PM To: John Cumings Cc: Raith SNF Mailing list Subject: Re: Raith is being qualified... Thread: Required Limits of keV operation through 6APRIL2004 on RAITH 150 Please Everyone: We would like to operate the system in a range between 10 - 15 KeV and/or at 20100 to 2100 kV only. NOT 20 kV or higher than 21 kV. When I return from Germany and with LEO field service we will perform further testing on the column. Things are in good order and tomorrow I plan to put the system back into green light mode as more measurements and imaging is completed Stitching Mean + 3 sigma was 19 nm. Thanks to everyone for your support during this challenging period, JWC John Cumings wrote: James, Green light means 30 kV is okay. I presume you mean yellow light, because 30 kV is not okay, correct? -John ------------------------------------------------------------ John Cumings cumings at stanford.edu Postdoctoral Scholar Physics Department Stanford University office (650) 725-1025 lab (650) 725-2047 fax (650) 724-3681 Geballe Laboratory for Advanced Materials 239 McCullough Building 476 Lomita Mall Stanford, CA 94305-4045 ------------------------------------------------------------ In message <4058B6CE.7060400 at snf.stanford.edu>you write:
Greetings:

I am most relieved to report that we are coming back into normal operational status on the RAITH 150 system.

This afternoon and evening we will be qualifying the system and working with users whom are in crisis mode.

We hope to go into green light mode in the next twelve hours.

James Conway
-------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Mar 18 10:40:23 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Mar 2004 10:40:23 -0800 Subject: IMPORTANT : High voltage clarification In-Reply-To: <00a501c40cf9$0f0ee180$d26a40ab@kondolam> References: <00a501c40cf9$0f0ee180$d26a40ab@kondolam> Message-ID: <4059ED17.3020509@snf.stanford.edu> Greetings: The only way to bring up the acceleration voltage on the RAITH 150 properly is to use the microscope control panel on the Raith150 application. This ensures that the voltage ramp is performed uniformly with rate ramp control. This also updated the ELPHY+ pattern generator with the dynamic timing parameters for the required pattern deconvolution. This will greatly affect your results for pattern placement and scaling information within your EBL write. [If you have been observing some strange pattern placement this could be one of the reasons.] IMPORTANT: PLEASE DO NOT --EVER - adjust the acceleration voltage by using the sliders on the SEM control panel --> Gun Tab on the LEO. This will not perform a uniform ramp to set voltage on some rare occasions can induce an EHT trip. Thank you for your support! JWC David Goldhaber-Gordon wrote: >Hi all, > >Thanks and congratulations are due to James for pushing so hard to get the >system up before he leaves for Germany. > >I want to clarify one point: James probably meant that the voltages me may >use are 10-15 kV or 20.1 to 21 kV (i.e. 20100 to 21000 V). I point this out >since the actual numbers may be important and we would hate for someone to >misunderstand and jeopardize the system for him- or herself and others. >James, please post a correction if I got this wrong. Also, could someone >comment on the proper procedure for getting up to those voltages? I'm not >sure that procedure has been uniformly agreed upon and communicated. > >Best, > >David > >---------------------------------------------------------------------------- >David Goldhaber-Gordon goldhaber-gordon at stanford.edu >Assistant Professor of Physics davidg at post.harvard.edu >Stanford University (permanent forwarding) > www.goldhaber-gordon.com >(650) 725-2047 (lab) (650) 724-3709 (office) > >Address for letters or packages: Administrative Associate: >David Goldhaber-Gordon Roberta Edwards >Geballe Laboratory for Advanced Materials McCullough, Rm. 338 >McCullough Building, Room 346 Phone: (650) 723-8028 >476 Lomita Mall Fax: (650) 724-3681 >Stanford, CA 94305-4045 email: redward at stanford.edu >-----Original Message----- >From: James Conway [mailto:jwc at snf.stanford.edu] >Sent: Wednesday, March 17, 2004 8:25 PM >To: John Cumings >Cc: Raith SNF Mailing list >Subject: Re: Raith is being qualified... Thread: Required Limits of keV >operation through 6APRIL2004 on RAITH 150 > >Please Everyone: > >We would like to operate the system in a range between 10 - 15 KeV and/or >at 20100 to 2100 kV only. NOT 20 kV or higher than 21 kV. > > When I return from Germany and with LEO field service we will perform >further testing on the column. > > >Things are in good order and tomorrow I plan to put the system back into >green light mode as more measurements and imaging is completed > >Stitching Mean + 3 sigma was 19 nm. > >Thanks to everyone for your support during this challenging period, > >JWC > > >John Cumings wrote: > >James, > >Green light means 30 kV is okay. > >I presume you mean yellow light, because 30 kV is not okay, correct? > >-John > >------------------------------------------------------------ > John Cumings > cumings at stanford.edu > Postdoctoral Scholar > Physics Department > Stanford University > > office (650) 725-1025 > lab (650) 725-2047 > fax (650) 724-3681 > > Geballe Laboratory for Advanced Materials > 239 McCullough Building > 476 Lomita Mall > Stanford, CA 94305-4045 >------------------------------------------------------------ >In message <4058B6CE.7060400 at snf.stanford.edu>you write: > > > > > > > > >
>Greetings:
>
>I am most relieved to report that we are coming back into normal >operational status on the RAITH 150 system.
>
>This afternoon and evening we will be qualifying the system and working >with users whom are in crisis mode.
>
>We hope to go into green light mode in the next twelve hours.
>
>James Conway
> > > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Mar 18 10:42:11 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Mar 2004 10:42:11 -0800 Subject: Important: High voltage clarification In-Reply-To: <000201c40d16$ac8d27b0$416140ab@stanford.edu> References: <000201c40d16$ac8d27b0$416140ab@stanford.edu> Message-ID: <4059ED83.5060305@snf.stanford.edu> Very well said - Thank you. Additional post on this thread slowly moving through the mail spooling cue... Thank you, JWC Ji-Won Son wrote: > Hi all, > > > > I asked the procedure to use voltage around 20keV, so I think I can > answer some of David's question. > > > > The Raith system use 8kV deceleration up to 20keV, so the actual > voltage that applied to the gun is plus 8V to the acc. voltage you > choose. (if you use 20keV, then the actual voltage is 28 V, not 20.) > > > > Above 20kV, the system turns off 8V deceleration part and applied > voltage will be same as you choose. That's why James asked us to use > 10-15 kV and 20.1 - 21 kV at this point to reduce the load. > > > > I am not sure about using 10-15kV, but when you use 20.1-21kV, the > procedure is: > > 1. Turn the beam on at 10kV. > > 2. Check the vacuum. (should be around 10^-9) > > 3. If vacuum is ok, then change the voltage to 20.1-21kV, by one step. > Don't ramp up slowly step by step! > > > > These are what I heard from Raith field service. James, if there is > anything wrong with these, please correct. > > > > Thank you. > > > > ==================== > > Sincerely, > > Ji-Won Son > > > > (Office) 650-723-4940 > > (Fax) 650-725-3459 > > ==================== > > > > -----Original Message----- > From: David Goldhaber-Gordon [mailto:goldhaber-gordon at stanford.edu] > Sent: Thursday, March 18, 2004 6:56 AM > To: 'James Conway'; 'John Cumings' > Cc: 'Raith SNF Mailing list' > Subject: Important: High voltage clarification > > > > Hi all, > > > > Thanks and congratulations are due to James for pushing so hard to get the > > system up before he leaves for Germany. > > > > I want to clarify one point: James probably meant that the voltages me may > > use are 10-15 kV or 20.1 to 21 kV (i.e. 20100 to 21000 V). I point > this out > > since the actual numbers may be important and I'd hate for someone to > > misunderstand and jeopardize the system for him- or herself and others. > > James, please post a correction if I got this wrong. Also, could someone > > comment on the proper procedure for getting up to those voltages? I'm not > > sure that procedure has been uniformly agreed upon and communicated. > > > > Best, > > > > David > > > > ---------------------------------------------------------------------------- > > David Goldhaber-Gordon > goldhaber-gordon at stanford.edu > > Assistant Professor of Physics davidg at post.harvard.edu > > Stanford University (permanent forwarding) > > www.goldhaber-gordon.com > > (650) 725-2047 (lab) (650) 724-3709 (office) > > > > Address for letters or packages: Administrative Associate: > > David Goldhaber-Gordon Roberta Edwards > > Geballe Laboratory for Advanced Materials McCullough, Rm. 338 > > McCullough Building, Room 346 Phone: (650) 723-8028 > > 476 Lomita Mall Fax: (650) 724-3681 > > Stanford, CA 94305-4045 email: redward at stanford.edu > > -----Original Message----- > > From: James Conway [mailto:jwc at snf.stanford.edu] > > Sent: Wednesday, March 17, 2004 8:25 PM > > To: John Cumings > > Cc: Raith SNF Mailing list > > Subject: Re: Raith is being qualified... Thread: Required Limits of keV > > operation through 6APRIL2004 on RAITH 150 > > > > Please Everyone: > > > > We would like to operate the system in a range between 10 - 15 KeV and/or > > at 20100 to 2100 kV only. NOT 20 kV or higher than 21 kV. > > > > When I return from Germany and with LEO field service we will perform > > further testing on the column. > > > > > > Things are in good order and tomorrow I plan to put the system back into > > green light mode as more measurements and imaging is completed > > > > Stitching Mean + 3 sigma was 19 nm. > > > > Thanks to everyone for your support during this challenging period, > > > > JWC > > > > > > John Cumings wrote: > > > > James, > > > > Green light means 30 kV is okay. > > > > I presume you mean yellow light, because 30 kV is not okay, correct? > > > > -John > > > > ------------------------------------------------------------ > > John Cumings > > cumings at stanford.edu > > Postdoctoral Scholar > > Physics Department > > Stanford University > > > > office (650) 725-1025 > > lab (650) 725-2047 > > fax (650) 724-3681 > > > > Geballe Laboratory for Advanced Materials > > 239 McCullough Building > > 476 Lomita Mall > > Stanford, CA 94305-4045 > > ------------------------------------------------------------ > > In message <4058B6CE.7060400 at snf.stanford.edu>you write: > > > > > > > > > > > > > > > > > >
> > Greetings:
> >
> > I am most relieved to report that we are coming back into normal > > operational status on the RAITH 150 system.
> >
> > This afternoon and evening we will be qualifying the system and working > > with users whom are in crisis mode.
> >
> > We hope to go into green light mode in the next twelve hours.
> >
> > James Conway
> > > > > > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Mar 18 19:46:56 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Mar 2004 19:46:56 -0800 Subject: Thread: OPerations at 30 kV? Not until 2nd week of April and after more test are conducted. In-Reply-To: <200403090028.i290SWAM014499@elaine0.Stanford.EDU> References: <200403090028.i290SWAM014499@elaine0.Stanford.EDU> Message-ID: <405A6D30.1080904@snf.stanford.edu> Hello ALL: I hope to continue testing April 6 or 8th I will be working with LEO to determine next actions on higher than 21 kV acceleration voltages. Note that the Hitachi is always 30 kV and 2.5 nA Beam I... Paul Jerabek can train anyone interested in learning on this very fast system. It has been working well the last 24 hours. (Did I say that?!!) Thank you, JWC John Cumings wrote: >James, > >Can you please post a note about the current status of when we can expect >the Raith to back in full operation at 30 kV. > >In future emails, could you please make an effort also to include a >"current estimate" of when full operation at 30 kV will resume. > >-John > >------------------------------------------------------------ > John Cumings > cumings at stanford.edu > Postdoctoral Scholar > Physics Department > Stanford University > > office (650) 725-1025 > lab (650) 725-2047 > fax (650) 724-3681 > > Geballe Laboratory for Advanced Materials > 239 McCullough Building > 476 Lomita Mall > Stanford, CA 94305-4045 >------------------------------------------------------------ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Mar 18 19:50:48 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Mar 2004 19:50:48 -0800 Subject: Yellow light for <30kV? NOT -- RED LIGHT FOR 20 kV and above 21 until further notice. In-Reply-To: <200403090033.i290XGrN014857@elaine0.Stanford.EDU> References: <200403090033.i290XGrN014857@elaine0.Stanford.EDU> Message-ID: <405A6E18.1080807@snf.stanford.edu> Fine suggestion-- but it will interfere with tracking actual up time on the Coral system. Some strange type of new math is employed where yellow is charged at some different rate downtime at 1 day to 1 day and red is maybe twice. Always read the messages on RAITH newsgroup. We will resolve the higher kV Acc. Voltage issues in early April. Yours, JWC John Cumings wrote: >All, > >I would like to see the Raith yellow-lighted any time there are "special >instructions", such as "no operation above 10kV". > >Do other users agree with this? > >-John > >------------------------------------------------------------ > John Cumings > cumings at stanford.edu > Postdoctoral Scholar > Physics Department > Stanford University > > office (650) 725-1025 > lab (650) 725-2047 > fax (650) 724-3681 > > Geballe Laboratory for Advanced Materials > 239 McCullough Building > 476 Lomita Mall > Stanford, CA 94305-4045 >------------------------------------------------------------ > > From jwc at snf.stanford.edu Thu Mar 18 21:28:44 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Mar 2004 21:28:44 -0800 Subject: last call for submissions for the dortmund presentations. Message-ID: <405A850C.3090004@snf.stanford.edu> Greetings, Last call for submissions to the RAITH LTC-II workshop in Dortmund. Feel free to submit your best stuff later as well to be included in presentations I plan to make in April and May within Stanford and later within the NNIN. Full credit and exposure will be given to all submissions... To those of you whom have sent me your submissions already. Thank you absolutely fantastic work. I am very proud of all your efforts, James Conway From grupp at snowmass.Stanford.EDU Fri Mar 19 14:43:08 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Fri, 19 Mar 2004 14:43:08 -0800 (PST) Subject: res removed sunday eve. Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From ajavey at stanford.edu Fri Mar 19 21:00:17 2004 From: ajavey at stanford.edu (Ali Javey) Date: Fri, 19 Mar 2004 21:00:17 -0800 (PST) Subject: reservation removed mid-night - 4 am Message-ID: I'm very sorry for the very late notice. Ali From chquay at MtHolyoke.edu Sat Mar 20 23:34:57 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Sun, 21 Mar 2004 02:34:57 -0500 (EST) Subject: loadlock... Message-ID: so...i'll admit to having an administrator password...as some of you already know. i cleared the error (it said loadlock error 1) and unloaded. things went well and everything seems fine except that since the system is shutdown nobody can enable the machine... is there a way to un-red-light it with james in germany? maybe someone else with an administrator login? :-P arvind and mark, i'm sorry for not getting involved before you gave up, but at the time i thought you owul dbe able to solve the problem and that i shouldn't get involved... charis. From hendrikb at stanford.edu Sun Mar 21 00:04:07 2004 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Sun, 21 Mar 2004 00:04:07 -0800 (PST) Subject: loadlock... In-Reply-To: Message-ID: You could ask Charley or Paul, they might have admin access on coral. Otherwise, try to contact a James, possibly via some Raith guy. In the worst case, there is a way to manually went the loadlock by opening some screw on the turbo, but I don't know which one. I think this would be acceptable for preventing days of downtime, as long as people dont open the wrong screws.... Hendrik --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From chquay at MtHolyoke.edu Sun Mar 21 00:38:02 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Sun, 21 Mar 2004 03:38:02 -0500 (EST) Subject: loadlock... In-Reply-To: Message-ID: hendrik, there is no longer any problem with the loadlock. but we do need to figure out how to green light the raith... charis. From lsmoore at stanford.edu Sun Mar 21 17:51:01 2004 From: lsmoore at stanford.edu (Lindsay Moore) Date: Sun, 21 Mar 2004 17:51:01 -0800 Subject: 50nm features In-Reply-To: References: Message-ID: <5.1.1.5.2.20040321174838.01ad0788@lsmoore.pobox.stanford.edu> Hi. Has anyone gotten 50nm features using 10kV acc voltage? I am trying to do this now, but have been unsuccessful. If you have achieved this could you please tell me what parameters you used? (aperture, write field size, dose, area step size or line step size, etc...) thank you! Lindsay From pcatryss at stanford.edu Mon Mar 22 09:45:37 2004 From: pcatryss at stanford.edu (Peter Catrysse) Date: Mon, 22 Mar 2004 09:45:37 -0800 Subject: Can any of the Raith champions restore Raith? Message-ID: <200403221745.i2MHjLRn014776@smtp2.Stanford.EDU> Hi: Can any of the Raith champions restore Raith while it is in yellow mode? Thanks, Peter B. Catrysse, Ph.D. Department of Electrical Engineering Stanford University Stanford, CA 94305 Ph: (650) 736-2309 Fax: (650) 322-5379 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwson at stanford.edu Mon Mar 22 10:05:03 2004 From: jwson at stanford.edu (Ji-Won Son) Date: Mon, 22 Mar 2004 10:05:03 -0800 Subject: Raith Status? In-Reply-To: <200403221745.i2MHjLRn014776@smtp2.Stanford.EDU> Message-ID: <000001c41038$332bad90$416140ab@stanford.edu> Hi, I believe you can enable and use Raith while it is in yellow mode. I would like to ask if there is more problem other than loadlock, which I believe no longer a problem. Could anyone involved in the problem let us know? I would appreciate your prompt reply since I am supposed to use Raith from 1 pm today. Thank you. ==================== Sincerely, Ji-Won Son (Office) 650-723-4940 (Fax) 650-725-3459 ==================== -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Mon Mar 22 14:26:06 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 22 Mar 2004 14:26:06 -0800 Subject: Loadlock error follow up Message-ID: <405F67FE.ED4752B5@snf.stanford.edu> Hi everyone -- I'm sure y'all will join in offering heartfelt gratitude to Arvind for rescuing and resetting the Raith. Thanks Arvind!!! While James is out of town, I would like to offer a suggestion. It seems that this was the typical loadlock error problem, in which the system was easily rescued by one of the knowledgeable Raith champions. The problem this weekend was complicated by the fact that the system had been put down to red on Coral on Saturday evening, and thus nothing could be done to it until a staff member came in and intervened. Although putting a system down on Coral is normally exactly what should be done, in this case, it may have prevented the system from being reset by knowledgeable users and then made available for use for the rest of the weekend. So, my suggestion is this: while James is out of town, I would recommend that Raith users not put the machine down to red on Coral during off-hours or weekends, unless it is felt that the machine may be in any danger of being seriously damaged, or a Raith champion recommends that it be shut down. Instead, for now please report problems in yellow and email raith at snf to let everyone know of anything which may prevent their use of the system (as in this case, the loadlock error.) In this way, Raith users would not become beholden to staff members (none of us whom really know what to do, besides call Raith/Leo anyway) for problems which can be resolved by champions. I just passed this by Dick, who agrees that for the short term, at least until James returns, this is an acceptable procedure. Let me know what you think, and if people are in agreement, I suggest we start this now. Thanks for your attention -- Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at snf.stanford.edu Mon Mar 22 16:09:46 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 22 Mar 2004 16:09:46 -0800 Subject: Correction... Message-ID: <405F804A.597E6C4C@snf.stanford.edu> Hi all -- Oops, I've been told that Charis also should be credited with helping out on the Raith (sorry Charis!) In any case, would everyone (Raith champions especially) who does anything non-standard on the Raith, please, please, please make sure to document whatever it is that was done? I understand that there's a logbook at the station, and you should also use the raith at snf email list. James needs to know what's been done when he returns, and it would be for the good of all Raith users everywhere. Thanks again for your attention -- Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From grupp at snowmass.Stanford.EDU Tue Mar 23 11:05:24 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Tue, 23 Mar 2004 11:05:24 -0800 (PST) Subject: Raith: done 1 hr early Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From okilic at stanford.edu Tue Mar 23 15:34:35 2004 From: okilic at stanford.edu (Onur KILIC) Date: Tue, 23 Mar 2004 15:34:35 -0800 Subject: Raith free Wed 19:30-5am Message-ID: <1080084875.4060c98b8904e@webmail.stanford.edu> Raith reservation removed Wed 19:30 to Thur 5am. Onur -- Onur KILI? PhD Candidate Applied Physics Stanford University, CA http://www.stanford.edu/~okilic From dwshin at stanford.edu Tue Mar 23 18:07:05 2004 From: dwshin at stanford.edu (Dong-Woon Shin) Date: Tue, 23 Mar 2004 18:07:05 -0800 Subject: RAITH QUESTION - LEO Message-ID: <1080094025.4060ed49bf1b9@webmail.stanford.edu> Hello. As I transfered my gds to leo PC, it showed fatal windows error (blue screen) I rebooted the computer and log on as user(user). Do I have to shut down the column before rebooting it? I was not aware of it, but some one mentioned that. Second question: LEO seemed to work well but one problem. Whenever I do the write field alignment, the third marker always moved to a wrong position. Scan area varied from 2 um to 0.6 and they all had the same problem. Has anyone had the same experience? Thank you. From chquay at MtHolyoke.edu Wed Mar 24 19:10:17 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Wed, 24 Mar 2004 22:10:17 -0500 (EST) Subject: res cancelled thu morning Message-ID: not ready. sorry for short notice. charis. From chquay at MtHolyoke.edu Fri Mar 26 18:54:50 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Fri, 26 Mar 2004 21:54:50 -0500 (EST) Subject: raith down, very sorry Message-ID: guys, i forgot to enable the raith before loading. i enabled it after loading, but this didn't prevent loadlock error 4 from happening when i tried to unload. i tried to reset the error but instead got emergency error 4, which i don't know how to clear. currently the stage is in exchange position and the loadlock is vented. i'm sorry about this. maybe we should think about disconnecting the enabling/disabling from the loading process...? charis. From chquay at MtHolyoke.edu Fri Mar 26 19:11:34 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Fri, 26 Mar 2004 22:11:34 -0500 (EST) Subject: raith up, thanks to arvind... In-Reply-To: Message-ID: ...who cleared the emergency error. you learn something new every day. thanks, arvind! charis. From fatih at stanford.edu Sat Mar 27 13:22:19 2004 From: fatih at stanford.edu (Mehmet Fatih Yanik) Date: Sat, 27 Mar 2004 13:22:19 -0800 Subject: 11pm cancelled: sample has problem In-Reply-To: <403BBD75.8050202@snf.stanford.edu> Message-ID: -----Original Message----- From: James Conway [mailto:jwc at snf.stanford.edu] Sent: Tuesday, February 24, 2004 1:09 PM To: Raith SNF Mailing list Cc: John Shott; Mary Tang Subject: READ ME: CURRENT RAITH RESERVATION AND USAGE POLICY Greetings Raith Community: Thank you for your input and participation in the Ebeam Town Meeting we held February 2, 2004. Here is the final version of the Reservation and System Usage policy based on your inputs. I hope that all users will see this change as an improvement from the past policy that was in place. We all agreed to try out this policy out and discuss further refinements needed at our next Ebeam Town Meeting. This meeting is scheduled for March 15, 2004 at 2 - 4 PM, CIS 101. Current RAITH 150 Reservations Policy: 1. Reservation limit of 8 hours per rolling 10 day reservation window on the Coral Reservation System. The reservation horizon was increased from 7 days to 10 days on Coral to allow you a longer window to make reservations. 2. Minimum of a four hour reservation slot, or you should 'Share the Ride' with other users within your CORAL reservation. i.e., No half hour reservation games allowed or tolerated! Not necessary to petition the Raith list for each of your sessions! 3. Longer reservation needed than the normal 8 hour session: You may have one reservation only of up to 10 hours maximum if you have no other reservations on the RAITH Coral system in a rolling two week period. You must have approval from James Conway if you desire a session longer than 10 hours, and you will then not be able to make an additional reservation for a two week period after that reserved session is completed. This is meant to meet the needs of users with special writing needs or circumstances only. Note: This policy continues to be under review and may be modified in the future as the need presents itself. 4. Reservations start (rather than end) within the reservation horizon. This change in particular, is designed to avoid the "30 minute roulette" that labmembers wishing to reserve the raith and the stsetch have been forced to play. 5. We have abandoned the concept of 'prime time' and 'non-prime time' hours. The Lab operates 24/7. 6. First Come First Serve -- You must use your reservation before making a new reservation on the Coral system. Raith System Usage Policy: 1. No System Usage Limit: While we have specific limits to RAITH Coral reservations, we do not have a limit on the system utilization if there are no other users working on or reserved for the system. I expect the system to be utilized 100% of the time. Users are asked to make the hand off between users as smooth as possible. It is suggested you check in with the previous user a short time before your session to aid in communications and the system hand off to reduce the unload / load exchange interval time. 2. Grace Period: Users are expected to start and end your writing sessions within 15 minutes of the scheduled time slot. If you are having problems, or encountered difficulties during your write, which may require for you to extend into the next user's session you are expected to make an attempt to inform the next user within a hour of the hand off time. You must gain their permission to extend into their session. If you don't get permission or cannot complete the EBL task -- you are expected to cancel the exposure and immediately yield the system to the next user on their request. If you did not start your session on time as scheduled you will not be allowed a grace period to continue into the next person's session. Remember you must gain the next users permission to extend beyond 15 minutes into the next reservation slot. 3. Beginning your writing session -- the '16 minute Rule' applies: If at 'minute 16' of your reservation slot, if you have neither shown up to start your session, nor marked the system with a note saying you are coming, nor communicated with the last user on the system and posted to the raith mailing list; you lose your entire reservation. It is only upon the courtesy of the user available to come onto the system, once he has enabled on CORAL for the session, as to either to return the system to you within your lost reservation time or not. 4. Cancellations: Cancellations and trade off in RAITH sessions should be posted to the Raith mailing list for all to view as soon as possible once you realize that you will not be able to make use of your reservation. It is expected of Users that cancellations be done at least 24 hours before your reserved session to allow other lab members to make use of the opening. You must post a reason for your cancellation, particularly if it was due to a system or machine dependence from within the lab not allowing you to get your work finished. 5. If there is no one on the system and no reservation on CORAL, the system is available to you for your use. This does not affect your reservation limits on the Coral schedule and there is no need to make a reservation on Coral for this session. 6. ALL USERS must enable CORAL in their own account for their writing sessions. At the time of enable Users are to start an entry in the RAITH Operations Logbook and all pertinent information should be recorded. Problems during a run should be reported to CORAL and noted in the Logbook for prompt action by SNF staff. Thank you for your inputs and support of these policies. This should go a long way to create fair and uniform access and utility of the RAITH 150 Ebeam Lithography System. Yours, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwson at stanford.edu Sun Mar 28 16:48:58 2004 From: jwson at stanford.edu (Ji-Won Son) Date: Sun, 28 Mar 2004 16:48:58 -0800 Subject: Raith free from 5:30 to 9 pm In-Reply-To: References: Message-ID: <1080521338.4067727a95ceb@webmail.stanford.edu> Hi all, I will be finishing a little bit early so raith will be free from 5:30 to 9pm, Sunday (3/28). Ji-Won From jhemanth at stanford.edu Mon Mar 29 13:12:08 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Mon, 29 Mar 2004 13:12:08 -0800 Subject: Raith reservation cancelled In-Reply-To: <1080521338.4067727a95ceb@webmail.stanford.edu> Message-ID: <000001c415d2$7f5f3d40$6601a8c0@JAGANNATHANPC> Samples not ready. I have removed my reservation on Tuesday 3/30 from 12:00pm to 4pm. Hemanth From grupp at snowmass.Stanford.EDU Mon Mar 29 14:20:40 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 29 Mar 2004 14:20:40 -0800 (PST) Subject: Raith: black dots on holder Message-ID: Hi Everybody, I found the holder today covered (like over 4") with little black specks. They came off in IPA, so i presume they were the sticky dots. Please clean the holder if what you put in leaves something behind! I am also concerned about this stuff migrating to the column, where recently we had major contamination problems, Thanks, Dan --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From altug at stanford.edu Wed Mar 31 12:54:44 2004 From: altug at stanford.edu (Hatice Altug) Date: Wed, 31 Mar 2004 12:54:44 -0800 Subject: 11:00pm reservation cancelled (tonight) Message-ID: <03aa01c41762$65441110$419a0c80@hatice> Very sorry for late notice. My sample has problem and will not able to write tonight. -hatice -------------- next part -------------- An HTML attachment was scrubbed... URL: