[Fwd: Comment ebeam 2003-11-20 16:48:34: Report etch rate ZEP520]

James Conway jwc at snf.stanford.edu
Wed Mar 10 17:59:40 PST 2004


Greetings:

Has anyone similar data on ZEP- 520 or 2% 950K MW PMMA on oxide and Silicon?
Do tell - inquiring persons wish to know....

James Conway
Ebeam Technology Group


Subject: 	Comment ebeam 2003-11-20 16:48:34: Report etch rate ZEP520
Date: 	Thu, 20 Nov 2003 16:48:36 -0800
From: 	jnee at snf.stanford.edu
To: 	ebeam-pcs at snf.stanford.edu



I checked etch rate for ZEP520 for two etches:
1. Oxide etch in amtetcher (program3): 170A/min
2. Silicon etch in stsetch (SMOOSHAL): 195A/min
The stsetch recipe used is a more gentle recipe, so etching using more standard recipes such as SMOODEEP and DEEP wiill have higher etch rates.

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