50nm features

Lindsay Moore lsmoore at stanford.edu
Sun Mar 21 17:51:01 PST 2004


Hi.  Has anyone gotten 50nm features using 10kV acc voltage?  I am trying 
to do this now, but have been unsuccessful.  If you have achieved this 
could you please tell me what parameters you used?  (aperture, write field 
size, dose, area step size or line step size, etc...)
thank you!

Lindsay




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