From grupp at snowmass.Stanford.EDU Sat May 1 03:04:23 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Sat, 1 May 2004 03:04:23 -0700 (PDT) Subject: Raith: Anyone awake who can clear a loadlock error? Doh! Message-ID: call the ebeam room, 725-3673. thx, dan --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From arvisun at stanford.edu Sat May 1 05:05:45 2004 From: arvisun at stanford.edu (arvind sundaramurthy) Date: Sat, 1 May 2004 05:05:45 -0700 Subject: Raith Loadlock Error Cleared Message-ID: <0aa701c42f74$a20a91d0$cd5640ab@arvind> I cleared the loadlock error. The machine is ready for use. arvind -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhemanth at stanford.edu Sat May 1 20:11:42 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Sat, 1 May 2004 20:11:42 -0700 Subject: Machine Free till midnight today Message-ID: <000001c42ff3$3180f5b0$f56240ab@JAGANNATHANPC> Had problems with my sample. The machine is free till midnight today. Sorry for the lat minute notification. Hemanth -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 3 10:03:31 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 03 May 2004 10:03:31 -0700 Subject: Raith PC issue In-Reply-To: <200405030221.i432LuhZ013911@elaine4.Stanford.EDU> References: <200405030221.i432LuhZ013911@elaine4.Stanford.EDU> Message-ID: <40967B63.2090804@snf.stanford.edu> JOHN and RAITH Users: DO NOT direct mail to Raith Field service people, period. All communications should go through me, other wise you just burden them with too much information from too many sources. In this case, this is not a Raith problem but a windows memory utilization problem which is being worked on with the help of Stanford resources here at SNF. This problem has not been exhibited on other RAITH systems. Please report your questions and observations in the RAITH 150 Operations Notebook No. 2. BTW: I first contacted them on this issue in December 2003. Note: You should never run other windows applications when running the RAITH150 software as it could interfere with resource allocations in the window's memory addressing that need top be free for use by the RAITH 150 application. Hence if you run another windows appl. that takes up some of the addressable memory area; you will get problems within the RAITH application as it attempts to map to these addressable memory places, now reserved by the other appl. You can think of it as 'reserved seating' or place cards in the addressable memory array structure. This week I am working on performing some system admin. functions of the RAITH and LEO PC's and will open the PC's and determine if I can add more RAM memory as this may help this situation. Thank you, JWC John Cumings wrote: Bend, George and others, Thank you so much for your efforts to make the Raith a better system for us here at Stanford. I and the other users are really looking forward to moving forward from the latest round of issues, so -- hat's off for all the hard work! I just realized another problem with the Raith PC that I wanted to make people aware of. The system calculator (provided by Microsoft under Start->Programs->Accessories) doesn't work. At least twice by my memory, when I have run the program, it pops up a window with no buttons and malformed/missing graphical features. This is very similar to the problem that I and other users have when trying to open position lists and other files. I think it may be indicative of more severe stability issues, Windows crashes, etc. I only bring it up as a potential red flag; the calculator program itself is not critical to my research. Thanks, -John From jwc at snf.stanford.edu Wed May 5 13:53:56 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 05 May 2004 13:53:56 -0700 Subject: I will need the system for some time next week.... Please adjust your coral reservations. Message-ID: <40995463.4060703@snf.stanford.edu> Greetings: We will be running RAITH Group IX as an intensive four day short course. I am reserving the RAITH system for the following times and days. Please adjust your CORAL reservations. Sorry for the inconvenience and for this short notice. I will need the RAITH system from: Tuesday May 11, 2004 from 2 - 6 PM. WEDnesday May 12, 2004 10 - 5 PM Thursday May 13, 2004 10 - 5 PM Friday May 14, 2004 10 - 5 PM. Please remove any reservations you may have made during these periods. Thank you for your support! James Conway From jwc at snf.stanford.edu Wed May 5 14:20:34 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 05 May 2004 14:20:34 -0700 Subject: I have a 6 inch wafer HEADWAY chuck you can check out from me for EBeam Lab use. Message-ID: <40995AA2.3000804@snf.stanford.edu> Greetings: I have now obtained a 6 inch wafer chuck for the Headway spin coater. This is to be kept secured at my desk and will need to be check out through me for every loan. Thank you for your support! James Conway From jwc at snf.stanford.edu Wed May 5 14:23:25 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 05 May 2004 14:23:25 -0700 Subject: Please return the RAITH Offline dongles to me ASAP. RAITH Group IX class starts next week. Message-ID: <40995B4D.702@snf.stanford.edu> Hello: Can you please return the RAITH Off-line dongles to me ASAP. I have a RAITH Group IX class which starts next week and would like to check out the dongles to these students starting Friday. Thank you, JWC From jwc at snf.stanford.edu Wed May 5 17:14:15 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 05 May 2004 17:14:15 -0700 Subject: Will be Raith be up on Friday morning? YES! Current PLAN -- system coming back on line 1800 Thursday In-Reply-To: <200405052256.i45MuMjN011385@smtp2.Stanford.EDU> References: <200405052256.i45MuMjN011385@smtp2.Stanford.EDU> Message-ID: <40998357.40907@snf.stanford.edu> Greetings: Carl Zeiss and RAITH Field Service have just handed the system back to me for performance testing and LEO column adjustments evaluation. My plan: 1. Complete beam drift evaluations this afternoon. Beam drift is well within specification (spec. 10 nm/min. measured 3 - 5 nm/min. 2. Hand off the system to Gigi and other available RAITH champions after GiGi overnight and into Thursday morning. 3. I will return to the system at 10 AM tomorrow and hope to complete qualification testing by late tomorrow afternoon. 4. I hope to release the system back to users at 6 PM tomorrow. Thank you for your patience and support! James Conway Peter Catrysse wrote: >Hi James: > >I am losing two 4-hour time slots next week (I had Tuesday and Thursday >morning) as a result of the training class you are giving. I reserved some >time this Friday morning. How realistic is it that you will be done by then? > >Thanks, > >Peter Catrysse > > > >>-----Original Message----- >>From: James Conway [mailto:jwc at snf.stanford.edu] >>Sent: Wednesday, May 05, 2004 1:21 PM >>To: Peter Catrysse; Raith SNF Mailing list; ebeam at snf.stanford.edu >>Subject: I have a 6 inch wafer HEADWAY chuck you can check out from me for >>EBeam Lab use. >> >>Greetings: >> >>I have now obtained a 6 inch wafer chuck for the Headway spin coater. >>This is to be kept secured at my desk and will need to be check out >>through me for every loan. >> >>Thank you for your support! >> >>James Conway >> >> >> > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed May 5 17:17:48 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 05 May 2004 17:17:48 -0700 Subject: 5% STD PMMA In-Reply-To: References: Message-ID: <4099842C.7010502@snf.stanford.edu> A new bottle has been placed into the lab solvent cabinet. Please be conservative with this material. You must follow the Ebeam Resist Handling procedures. I have observed a great increase in usage of this material over the course of the last month! This might be just a lot of users using the material, but could some of it be ending up in others labs, or users supplies? Please be careful handling these materials. Thank you, JWC Ali Javey wrote: >Hi James, > >I noticed last night that there is absolutely no STD PMMA left in the lab, >not even a single drop. It would be great if you can please bring in some >new 5% STD PMMA to the lab. Thanks! > >Ali > > > > From jwc at snf.stanford.edu Fri May 7 15:24:44 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 07 May 2004 15:24:44 -0700 Subject: READ ALL: RAITH has qualified to specifications, and is up for all Qualified Users. Message-ID: <409C0CAC.9010904@snf.stanford.edu> Greetings RAITH Users: Qualifications were completed overnight and we are in very good shape. Patterns written in the last 24 hours have been reported to be excellent for resolution, line width, and stitching all factors appear to be well within specifications. No breaks in U or V axis's on any patterns written have been observed. SEM imaging of the qualification sample and stitching measurements will be performed after the overlay layer is written and more test will be written at 20 and 30 keV early next week. Users are requested to carefully inspect their results and report their results to the raith at snf.stanford.edu mailing list. All USERS READ ME: We are now returning to the CORAL scheduling system. All Users must log onto CORAL and start a logbook entry before starting their work on the system. NO EXCEPTIONS! I want you all to be particularly careful about the materials you introduce into the system. We have a nice clean column and gun vacuum is better than ever. Beam spot size as small at 15 nm has been observed, with the typical short shot spot measuring at ~ 18 nm. When I left last night System vacuum was 9.4 E -007 and Gun Vacuum was 9.8 E -010 Torr. I request all users to be careful and patient in their operations of the system. Please record all error messages or concerns in the RAITH 150 Notebook No. 2. If a problem occurs please report it to CORAL either as 'make a comment' or 'report problem'. Please perform graceful exits from the RAITH 150 and LEO applications when possible. Limitation to Operations: 1. You may operate at any Acceleration Voltage and with any Aperture. 2. All materials placed into the system must be soft baked to no less than 140 degrees Celsius on the hot plate. Oven bake is preferred. Samples that have been in storage, or exposed to ambient conditions for any length time, are requested to be soft baked again on the Ebeam Labs hot plate. This is an easy to use device-- please see any staff member if your need assistance using it. 3. If there is a FE-Gun EHT trip I wish to be called immediately on my cell phone and always report to CORAL. 4. All floppy disk and USB memory sticks must be screened with Virus scanning software before coming onto the RAITH computer system. NO exceptions. Upgrades and Updates: Column PM and resolution of the EHT Trip problem: RAITH and LEO Field Service were in most of this week and we replaced the Anode Aperture, the 6 -hole Aperture plate and its liner tube, and the Extractor Contact pin that contacts the FE-Gun. This small gold pin was found to be mechanically not so good, it could move in one direction a little too freely than for suitable operations. Upon my inspection with a hand lens last night I found a minute fatigue crack along the bend of the pin. I presses ever so gently on it and it broke in half. In addition they found a small filament of material on the aperture plate, that could of been causing the beam drift problems we observed. The column was then cleaned, vacuumed, and carefully inspected before closing it up and baking the system out overnight. The FE-Gun came up and we have tested it at all Acceleration voltages including idling overnight at 30 keV with no EHT Trips. Windows OS and RAITH Computer System Administration was performed: We updated the operating system for the RAITH computer to the current service packages and critical patches. I found the Hard drive a bit fragmented and have defragged it and cleaned up the disk of all the trash. "Blank dialog box" problem: I 'googled' the web and found a Microsoft Knowledge base document (REF # 831430) that referenced the infamous "blank dialog box" problem and have performed their recommended actions, i.e., re-registering into the windows registry the vbdscript.dll and the jscript.dll. Testing so far has not tripped the blank dialog box error ... -The USB port on the RAITH computer has been activated. - I am still working on getting the CD-RW on the LEO to work for users logins. Seems the software application for the application to access need to be granted for users. New Ultra High Efficiency IN-Lens Detector has been tested and installed: Users will rejoice at the new Ultra High Efficiency IN-Lens detector! This improved detector really shines compared to the old generation detector. This will be useful for users with slightly charging surfaces and low contrast targets acquisition, and it should improve automatic target acquisition too! Note: The AUTO Brightness and Contrast functions take some time to stabilize. Give it a few seconds at higher frame rates and it dos work. Maybe some adjustments and further tweaking might be necessary to get this to work better... The schedule has open slots I would like you to utilize. Come back onto the system, be careful, and lets get some work through the machine this weekend. Next Week: Tuesday through Friday 10 AM - 5 PM we will be conducting RAITH Group IX training class. This intensive short course is full, but I have one standby slot open. This will bring us up to 75 users on the system, all working carefully to maximize throughput in a supportive learning environment. Few other systems at SNF are this heavily used, and the RAITH community that you have helped to form is a model for other systems to consider. My hat goes off to all of the RAITH Champions and Users on this system. Thank you for your support! James Conway Ebeam Technology Group -------------- next part -------------- An HTML attachment was scrubbed... URL: From cshen at briontech.com Fri May 7 17:10:01 2004 From: cshen at briontech.com (Chongfei Shen) Date: Fri, 7 May 2004 17:10:01 -0700 Subject: Raith reservation canceled Message-ID: <27BD9C7454BDDA4C8A9235DE3D49AEA111AAC9@ex01.briontech.com> canceled for next Tuesday. Raith is free now. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwson at stanford.edu Fri May 7 20:04:12 2004 From: jwson at stanford.edu (Ji-Won Son) Date: Fri, 7 May 2004 20:04:12 -0700 Subject: Raith Free tomorrow afternoon (Sat) In-Reply-To: <27BD9C7454BDDA4C8A9235DE3D49AEA111AAC9@ex01.briontech.com> Message-ID: <000301c434a9$23dd9ca0$416140ab@stanford.edu> I took the evening session. ==================== Sincerely, Ji-Won Son (Office) 650-723-4940 (Fax) 650-725-3459 ==================== -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtopinka at stanford.edu Sun May 9 20:30:41 2004 From: mtopinka at stanford.edu (Mark Allen Topinka) Date: Sun, 9 May 2004 20:30:41 -0700 Subject: raith slots open Message-ID: <1084159841.409ef7618a9cc@webmail.stanford.edu> sorry, still feeling sick- 9pm-midnight open tonight. (I can't get on to coral right now, so you'll have to just email reserve it) -Mark From lsmoore at stanford.edu Mon May 10 14:02:21 2004 From: lsmoore at stanford.edu (Lindsay Moore) Date: Mon, 10 May 2004 14:02:21 -0700 Subject: reservation postponed. Message-ID: <5.1.1.5.2.20040510140137.01adc258@lsmoore.pobox.stanford.edu> The raith will be free for 2 hrs from 3-5pm today because my samples are taking much longer to prepare than i had anticipated. Lindsay From jhemanth at stanford.edu Mon May 10 19:22:33 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Mon, 10 May 2004 19:22:33 -0700 Subject: Reservation cancelled In-Reply-To: <5.1.1.5.2.20040510140137.01adc258@lsmoore.pobox.stanford.edu> Message-ID: <000001c436fe$d1df4540$a06240ab@JAGANNATHANPC> Free today from 8pm to 12am. Sorry for the late notice From sandrew at stanford.edu Tue May 11 10:49:57 2004 From: sandrew at stanford.edu (Scott D. Andrews) Date: Tue, 11 May 2004 10:49:57 -0700 (PDT) Subject: Raith chuck position Message-ID: Hello, I just want to confirm with everyone that the community decided to leave the chuck in the load lock at the end of user writes. If this is not the case, please let me know. When I arrived this morning I found the chuck inside the machine, which took me precious time to unload. I just want to make sure that leaving the chuck unloaded was one of the new policies meant to reduce needed machine time. -Scott From ifushman at stanford.edu Thu May 13 02:57:22 2004 From: ifushman at stanford.edu (Ilya Fushman) Date: Thu, 13 May 2004 02:57:22 -0700 Subject: load lock error Message-ID: <1084442242.40a34682c8412@webmail.stanford.edu> If anyone is still awake and can help me clear load lock error 4, please let me know. Error unloading the sample - forgot to hold down load lock lid. Thanks, Ilya --------------------- Ilya Fushman 268 Charles Marx Way Palo Alto CA 94304 (626) 484 6049 --------------------- From scaccag at stanford.edu Thu May 13 18:21:57 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Thu, 13 May 2004 18:21:57 -0700 (PDT) Subject: raith res removed next monday Message-ID: From hungtao at stanford.edu Thu May 13 19:59:13 2004 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Thu, 13 May 2004 19:59:13 -0700 Subject: finish earlier, system will be available after 8:30pm to 10pm Message-ID: <1084503553.40a4360158833@webmail.stanford.edu> available from 8:30 to 10pm today -hungtao From mtopinka at stanford.edu Thu May 13 22:07:56 2004 From: mtopinka at stanford.edu (Mark Topinka) Date: Thu, 13 May 2004 22:07:56 -0700 Subject: raith write moved to Sat. Message-ID: <5.2.0.9.0.20040513220738.03bad6d8@mtopinka.pobox.stanford.edu> moved my raith write to Saturday. From cumings at stanford.edu Thu May 13 23:57:46 2004 From: cumings at stanford.edu (John Cumings) Date: Thu, 13 May 2004 23:57:46 -0700 Subject: raith res removed 5pm 5-14 Message-ID: <200405140657.i4E6vkeW013628@elaine4.Stanford.EDU> Working devices beckon me. ------------------------------------------------------------ John Cumings cumings at stanford.edu Postdoctoral Scholar Physics Department Stanford University office (650) 725-1025 lab (650) 725-2047 fax (650) 724-3681 Geballe Laboratory for Advanced Materials 239 McCullough Building 476 Lomita Mall Stanford, CA 94305-4045 ------------------------------------------------------------ From scaccag at stanford.edu Fri May 14 09:38:22 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Fri, 14 May 2004 09:38:22 -0700 (PDT) Subject: raith res removed 5pm 5-14 In-Reply-To: <200405140657.i4E6vkeW013628@elaine4.Stanford.EDU> Message-ID: got it and freed tonight instead tahnks On Thu, 13 May 2004, John Cumings wrote: > Working devices beckon me. > > ------------------------------------------------------------ > John Cumings > cumings at stanford.edu > Postdoctoral Scholar > Physics Department > Stanford University > > office (650) 725-1025 > lab (650) 725-2047 > fax (650) 724-3681 > > Geballe Laboratory for Advanced Materials > 239 McCullough Building > 476 Lomita Mall > Stanford, CA 94305-4045 > ------------------------------------------------------------ > From jwc at snf.stanford.edu Wed May 19 18:06:41 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 19 May 2004 18:06:41 -0700 Subject: Raith Update WED. May 19, 2004 1800 hours... Dose increments found in error on one exposure. Message-ID: <40AC04A1.5070702@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed May 19 18:18:44 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 19 May 2004 18:18:44 -0700 Subject: Raith Update TWO WED. May 19, 2004 1800 hours... WE ADDED MORE MEMORY TO RAITH COMPUTER. Message-ID: <40AC0774.1000408@snf.stanford.edu> Greetings, This morning I worked on the computer a bit and upgraded the amount of SDRAM memory on the system adding two more 256 MB SDRAM MMIM. We now have a total of 0.78 GB of memory on the system. Unfortunately this upgrade did nothing to change the errant "Blank Dialog Boxes" problems users have been rarely observing. It appears to me that this problem may be occurring more often as of recent, and it does not appear to be limited to specific User logins on the system. I have seen one occurrence of this problem on other applications that the RAITH150.exe in addition to the 'blank' calculator John Cummings reported. Please note in the Operations Logbook the number of times you observed this problems in your sessions. BLANK BOX and the N number please. Suggestions on what to evaluate next are welcomed. I will be examining the video board and its memory next in pursuit of the solution to this problem. Has any one ever seen this problem on other systems? Thank you for your support! James Conway From hendrikb at stanford.edu Thu May 20 00:15:14 2004 From: hendrikb at stanford.edu (Hendrik Bluhm) Date: Thu, 20 May 2004 00:15:14 -0700 (PDT) Subject: Blank dialogs In-Reply-To: <40AC0774.1000408@snf.stanford.edu> Message-ID: James, I think the problem is entirely on the Windows side and not related to memory. My best guess is that it is due to the disk crash over Xmas. Did you try reinstalling Win? If not, I would guess this would be the best bet. Hendrik --------------------------------------------------- Hendrik Bluhm Department of Physics Stanford University Work adress: Moler Lab Lab. for Advanced Materials Phone: (650) 723-4012 McCullough Bldg. Fax: (650) 725-2189 476 Lomita Mall Stanford, CA 94305 From jwc at snf.stanford.edu Thu May 20 10:06:46 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 20 May 2004 10:06:46 -0700 Subject: Thread: New Inlens Detector ABCC controls don't function quickly.... In-Reply-To: <004e01c43e08$40720050$555540ab@DBXQS341> References: <40AC04A1.5070702@snf.stanford.edu> <004e01c43e08$40720050$555540ab@DBXQS341> Message-ID: <40ACE5A6.7090206@snf.stanford.edu> Greetings: With the new In-lens detector we installed last week, the Auto Brightness and Contrast controls are now a bit too reactive to small changes in B-C. Give it some time and allow it to settle down and it should result in a uniform Contrast and Brightness setting. This seems to work better in Full screen mode. rather than reduced raster, and is better with faster scan rates than slower. Default settings for Brightness can be set to 50% and then slowly adjust contrast manually for your preferred image gray scale values. Hope users are settling in with the new detector and are pleased with the improved imaging. Charging on UVN- 30 is normal and you can reduce this effect with thin metal layers on top of your PMMA layer. SEE me if you have questions. Yours, James Conway Ilya Fushman wrote: > This is unrelated to your email, but I was writing at 30 kV on > Monday night and noticed that I had issues with the auto-BC. At a > setting of 3 on the beam scan speed successive refresh frames were > periodically too bright. This made it really hard to focus. The fact > that we use UVN 30 may be an issue because it charges. > -ilya > > ----- Original Message ----- > From: James Conway > To: Raith SNF Mailing list > Sent: Wednesday, May 19, 2004 6:06 PM > Subject: Raith Update WED. May 19, 2004 1800 hours... Dose > increments found in error on one exposure. > > > Greetings: > > Today I was working on the Raith much of the day continuing > qualifications after the PM. Today I was writing at 20 keV. > > The gun emission was stable and working at 20 keV and 10 um > aperture I had a Beam Current value of 0.044 nA. > I did notice during my write that the third element was dosed > below the first two of the series. Dose was the same and chip 2 X > 1.25 Dose factor in its dose increment. Dose was set to Areas - > 160 uC/cm-2, Lines - 660 uC/cm-2, and dots to 0.5 ms dwell time. > However the EBL dose result was low by about 50%, much to my > surprise. The write time per chip was 32 minutes. > > I also noticed that the Zoom U, V values were different that the > Zoom U = 1.49 Zoom V =1.49 values I normally encountered. > The W.F. to W.F. stitching was poor with breaks on the order of > 200 nm in Y. Some write fields appear to be rotated by about - 1 > degree. > > Users are requested to carefully inspect their dose arrays to > verify you are getting proper dose increments. > Users are requested to report if they see stitching problems in > their patterns. > > I will review protocol files tomorrow to see if human error may > have accounted for the bad chip exposure. > I plan to repeat this exposure on other material as well. > > Thank you for your support! > > James Conway > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhemanth at stanford.edu Thu May 20 10:10:13 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Thu, 20 May 2004 10:10:13 -0700 Subject: Reservation today 10:30 pm to 2am cancelled Message-ID: <000f01c43e8d$51205200$b46240ab@JAGANNATHANPC> Will not be able to make the reservation. Hemanth -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Thu May 20 20:13:46 2004 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Thu, 20 May 2004 20:13:46 -0700 (PDT) Subject: res removed friday night Message-ID: From dwshin at stanford.edu Mon May 24 12:00:38 2004 From: dwshin at stanford.edu (Dong-Woon Shin) Date: Mon, 24 May 2004 12:00:38 -0700 Subject: res cancelled Message-ID: <1085425238.40b24656309e5@webmail.stanford.edu> Sorry for the late notice. Cancelling reservation between 17:30 - 21:00 From jwc at snf.stanford.edu Mon May 24 12:16:31 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 24 May 2004 12:16:31 -0700 Subject: Please welcome RAITH Group IX onto the RAITH system Message-ID: <40B24A0F.5010004@snf.stanford.edu> Greetings Raith Community: Please welcome with me the next group of Raith Users coming onto the RAITH 150 system as 'RAITH Group IX'. We also have Jocelyn Electra Plant (Coral: electra) returning to the system after a six month hiatus she completed this class as a refresher. These users completed the RAith Basic Users Course, aa an intensive four day short course. Please welcome them onto the system and assist them as they come up to speed on this instrument. Thank you for your support! James Conway Ebeam Technology Group SNF Raith Group IX is: 1. Ryan Tu ryantu at stanford.edu Coral: ryantu Dai and Nishi Group. - Nanowire devices basic research 2. Amir Ali Haj Hossein Talasaz atalasaz at stanford.edu CORAL: atalasaz Genome Center - Dept. of Chemistry EE 3. Clifford Hicks cwhicks at stanford.edu Coral: cwhicks Kam Moler Group - Hall Probe devices. 4. Peter Bjeletich bjeletic at ece.ucdavis.edu Coral: Bjeletich Ben Yoo Group UC DAVIS Photonic Crystals and Waveguide devices. 5. Jocelyn Electra Plant electra at stanford.edu CORAL: electra -------------- next part -------------- An HTML attachment was scrubbed... URL: From grupp at snowmass.Stanford.EDU Mon May 24 16:01:08 2004 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 24 May 2004 16:01:08 -0700 (PDT) Subject: RAITH: res removed Tu 26th 11 am 4 hrs Message-ID: --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From jwc at snf.stanford.edu Mon May 24 17:07:47 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 24 May 2004 17:07:47 -0700 Subject: RAITH Is available -- cumings did not show up and I am finished as well... Message-ID: <40B28E53.3010600@snf.stanford.edu> Greetings: RAITH IS Available!!! User: Cumings did not show up and I am finished as well... Please make use of the open slots on the schedule! James Conway. From lsmoore at stanford.edu Tue May 25 11:59:31 2004 From: lsmoore at stanford.edu (Lindsay Moore) Date: Tue, 25 May 2004 11:59:31 -0700 Subject: reservation cancelled In-Reply-To: <40AC04A1.5070702@snf.stanford.edu> Message-ID: <5.1.1.5.2.20040525115831.01aea318@lsmoore.pobox.stanford.edu> i missed my flight yesterday, so i am 24 hrs behind where i thought i would be today. sorry for the late notice. Lindsay From ifushman at stanford.edu Tue May 25 12:06:38 2004 From: ifushman at stanford.edu (Ilya Fushman) Date: Tue, 25 May 2004 12:06:38 -0700 Subject: reservation cancelled References: <5.1.1.5.2.20040525115831.01aea318@lsmoore.pobox.stanford.edu> Message-ID: <002001c4428b$685b2e70$489f42ab@ilya> sample not ready -Ilya From jwc at snf.stanford.edu Tue May 25 18:35:15 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 25 May 2004 18:35:15 -0700 Subject: 'Take a Spin with Me...' HEADWAY training WED. May 26, 2004 10 - 12 Noon SNF Cleanroom Message-ID: <40B3F453.5040105@snf.stanford.edu> Greetings: I will be processing on the Headway spinner tomorrow and offer you the opportunity to review and train on the Ebeam resist Handling Procedures. This is the class you need to gain qualification on the Headway Spinner. I have attached the Ebeam Resist Handling Procedure. I will be working with Silicon wafers and will be handling PMMA material. Spinning on the headway will start at ~11 AM after the wafer cleans have been completed. Class will start at 10:05 AM WED. in the Cleanroom. Just show up no need to RSVP... Thank you, James Conway -------------- next part -------------- A non-text attachment was scrubbed... Name: E-beam resist handling.doc Type: application/msword Size: 34816 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri May 28 11:16:40 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 28 May 2004 11:16:40 -0700 Subject: [Fwd: Specimen holders?] Message-ID: <40B78208.8010600@snf.stanford.edu> Users: I expect that Users whom have borrowed fixtures, holders, and studs will have returned and placed them back in the lab before my return June 7, 2004. Otherwise I will make a decision that will require ALL SEM Users to purchase their fixtures, holders, and studs. Thank you, James Conway Ebeam Technology Group -------- Original Message -------- Subject: Specimen holders? Date: Fir, 28 May 2004 09:47:06 -0700 From: Charley To: sem4160 at snf.stanford.edu 4160 fans, We are down to about four of the cross-section holders. If any of you have a couple of these in your desk, bring them back. You do not keep the holders, you do not take them out of the lab. If the holder is more than five feet away from the machine, you are part of our problem. Except for when you have the holder in the Hummer, it should be in the SEM or in the box on top of the airlock. These are expensive to have made and there is no good reason for them to be missing. The one with the wide slot has been missing for months, now, and this jams up those for whom the holder was made. Bring it back. chw3 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 28 12:46:49 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 28 May 2004 12:46:49 -0700 Subject: FAQ: HOW to get help on the RAITH System during your session -- "Who are your gonna call" Message-ID: <40B79729.5070009@snf.stanford.edu> FAQ ##: SYSTEM PROBLEMS: "WHO ARE YOU GOING TO CALL" Greetings: I will be away next week attending Three Beams and I wish to formally set into place a hierarchical structure on what to do and whom to call if you encounter problems on the RAITH 150 system during my absence, and for those times I am not be available by cell phone. Up till now this has been in place informally within the RAITH Champions and has been mentioned in training sessions after RAITH Group V -- but after a SNAFU that occurred in my last absence last March I wish to restate this THREAD as an FAQ... For Example: * You encounter a LOAD LOCK Error 4 on the system and cannot complete the Load/ Unload cycle without an administrator login. * The pumps or system hardware are not working normally and the logic may have become reversed. * Beam Blanking Logic is reversed due to an RAITH150.exe application crash when the beam was unblanked... 1. If I am available, try to call me on my cell and I will walk you through the Recovery procedures. 001-415-412-4825 (NOTE: I live on the fringe of cell service when at home, and every Monday evening am off the grid after 10 PM and cannot be reached. Sometimes I can receive a SMS text messages. I will respond if I am able to ASAP. 2. Try to contact a RAITH Champion: Luigi Scaccabarozzi gigi at snf.stanford.edu at 650-725-6970 Arvind Sundaramurthy arvisun at stanford.edu (650) 450-0475 Mark Topinka mtopinka at stanford.edu 1-650-387-6049 David Fattal dfattal at stanford.edu 650-724-9612 office 650-723-8586 lab 3. Contact a RAITH USA Application Support Specialist: Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com 218-483-1267 4. For Major Hardware issues and all emergencies with the LEO or RAITH Hardware: Contact the RAITH USA Field Service Manager, Cole Loomis cl at raithusa.com (631) 738-9500 or Kevin Burcham also at the Main Raith USA line (631) 738-9500 Finally unless it is a catastrophic failure and the system becomes unsafe or in the least terrifying to operate -- please avoid placing the system into RED LIGHT Mode when I am away. ALWAYS report all errors and comments to to the CORAL 'Make Comments' or 'Report Problem' section so it gets logged into our tracking system. To quote John Shott, "Its not a problem until it is reported to CORAL." Raith Champions wishing to step forward and gain more training on clearing load lock errors and recovering from problems are encouraged to see me for further training. Thank you for your support! James Conway Ebeam Technology Group Stanford Nanofabrication Facility. 650-725-7075 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From okilic at stanford.edu Sun May 30 12:08:37 2004 From: okilic at stanford.edu (Onur KILIC) Date: Sun, 30 May 2004 12:08:37 -0700 Subject: A new uncommon problem? Message-ID: <1085944117.40ba313597471@webmail.stanford.edu> I have reported a new problem at the link below: http://elrey.stanford.edu:8080/Raith/33 Looks like Raith generates a strange "triple comet" pattern at the end of the write. -- Onur KILI? PhD Candidate Applied Physics Stanford University, CA http://www.stanford.edu/~okilic