From jwc at snf.stanford.edu Fri Oct 1 11:18:59 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 01 Oct 2004 11:18:59 -0700 Subject: RAITH 150 back into Green Light mode... Message-ID: <415D9F93.6000600@snf.stanford.edu> Good Morning, We continue to evaluate the level of Beam Current 'leakage' from the RAITH and LEO blanking sections. Raith USA is working with me closely on this issue. After more measurements we will develop a plan of attack to resolve these concerns. Although I am seeing leakage levels somewhat higher than a month ago they still could be within a normal range to be expected for any Ebeam column. Also note that as we continue towards the second half of our PM interval on the column, some increasing levels of beam drift and leakage are to be expected. I will be making some more measurements today if access is available on the system with hopes at developing a strategy to deal with this challenge. Returning the system to green mode for your use. Please inspect your patterns carefully and report back to this list your comments, concerns, and observations. Thank you for your support! James Conway From cwhicks at stanford.edu Fri Oct 1 14:07:02 2004 From: cwhicks at stanford.edu (Clifford Hicks) Date: Fri, 1 Oct 2004 14:07:02 -0700 (PDT) Subject: Raith available Monday 8am-1pm Message-ID: I have some additional processing I need to do. - Clifford Hicks From dwshin at stanford.edu Fri Oct 1 19:24:49 2004 From: dwshin at stanford.edu (Dong-Woon Shin) Date: Fri, 1 Oct 2004 19:24:49 -0700 Subject: Write finished early. available from 7:30 pm to 10:30 pm Message-ID: <1096683889.415e11719d68c@webmail.stanford.edu> Done early. Available for the next user. Thank you. - Dongwoon From jwc at snf.stanford.edu Wed Oct 6 16:24:05 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 06 Oct 2004 16:24:05 -0700 Subject: Raith UPDATE: Electrostatic Chuck Leveling and blanker leakage test results In-Reply-To: <003c01c4a7dd$c11b2850$6901a8c0@cllaptop> References: <003c01c4a7dd$c11b2850$6901a8c0@cllaptop> Message-ID: <41647E95.5040903@snf.stanford.edu> Hello Everyone on the RAITH 150: RE: ESC chuck leveling mechanical adjustments: I was able to complete the Electrostatic Chuck (ESC) leveling mechanical adjustments and we have tested this five times and the ESC w/ piezo's all centered measures a delta of 25 -28 um between the 3 different post positions at reference at WD of 5 mm. After performing the SW leveling routine -- which now completes with no problem or errors we are leveled to within a delta of 18 um difference between the three post positions on the ESC. Note this is on 150 mm wafers on the ESC only. This task I now will consider complete. Note that I will be mapping this reference double sided polished Prime <100> Si wafer to determine if we are able to leveling consistently, as well as to ensure the ESC is landing the same way every time. This map will give me a baseline to similar measurement I wish to do on the Std. Sample Holder in the future as my time allows... RE: RAITH Beam Blanker Leakage Test was completed today. Conclusion: There is some emission evident when the LEO is unblanked and the RAITH blanker is blanked. The emission level is between 400 and 1000 fA above the background value of 0.0005 -0.0006 nA. This measurement was variable from measurement to measurement but averages out to the same value and range when taking measurements over several minutes of time. This result is just slightly above the one percent leakage value proposed by Joe Klingfus at RAITH USA as being an acceptable amount of blanker leakage. The blanked exposure artifact has been observed on many EBL writes by users, specifically those whom are writing for a very long time within one writefield such as in a waveguide or Photonic Crystal, and/or when the stage is held in one position for any period of time such as at the end of a write. Workaround to be implemented at SNF: Add in an extra position to the position list at the end of the write session placed this artifact into a non critical area of the sample. Further action: To be determined by RAITH field service. SNF will continue to monitor this situation closely in the coming weeks. Hopefully these measurements will establish a baseline to compare to on other systems. Thank you for your support! James Conway Aperture I-beam (10 kV, 5 mm WD) Drift (nm) Direction of drift Recovery Time (s) 7.5 0.0076 3.57 160 degrees -- South EAST < 0.25 sec No evident drift 10 0.0156 1.77 90 degrees -- EAST < 0.25 sec No evident drift 20 0.0668 1.03 180 degrees -- SOUTH < 0.25 sec No evident drift 30 0.1275 4.47 180 degrees -- SOUTH < 0.5 sec slightest drift movement evident 60 0.5888 none none No movement evident Beam spot ovoid and irregular in shape 120 2.2077 none none No movement evident Spot is very large! Addendum: Beam drift specification is <10 nm/minute. All measurements made at 10 kV and 5 mm working distance. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Oct 7 11:11:06 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 07 Oct 2004 11:11:06 -0700 Subject: [Fwd: Deadline approaching for Raith Micrograph Award 2004 - Reminder] Message-ID: <416586BA.2030500@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Oct 7 15:43:29 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 07 Oct 2004 15:43:29 -0700 Subject: Finished early system is available... Message-ID: <4165C691.8030604@snf.stanford.edu> Greetings: Finished early the system is available for your use. My reservation extended through 1800 hours. Thank you, James Conway From jwc at snf.stanford.edu Thu Oct 7 15:53:41 2004 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 07 Oct 2004 15:53:41 -0700 Subject: ZEP-520-12 is out of stock... Message-ID: <4165C8F5.1020303@snf.stanford.edu> Greetings Ebeam Users: We currently are completely out of stock of the ZEP-520-12 positive Ebeam Resist here at SNF. Sadly due to SNAFUs with the purchasing process, and delays in getting the material packaged and shipped from ZEON, it is likely we will not receive the new material until the end of next week at the earliest. (10 - 14 days from yesterday.) A: If any users have any ZEP-520-12 or ZEP-520-22 in their lab we have several users with critical project deadlines that would be very happy if you can spare a small amount. B: I have a small number of clean process, B-prime Si wafers <100> n+ low resistivity, with ~250 nm thickness (STD THICKNESS) in my archives ready for writing. Please see me during my office hour if this is of interest to you. Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From ryantu at stanford.edu Sun Oct 10 23:44:57 2004 From: ryantu at stanford.edu (Ryan Tu) Date: Sun, 10 Oct 2004 23:44:57 -0700 Subject: Raith free tomorrow Message-ID: Sorry for the late notice, but I will not have time for my Raith session tomorrow. It seems that the entire day is now free. From ifushman at stanford.edu Tue Oct 12 17:27:17 2004 From: ifushman at stanford.edu (Ilya Fushman) Date: Tue, 12 Oct 2004 17:27:17 -0700 Subject: raith free tonight Message-ID: <031801c4b0bb$657d9b40$555540ab@BEHEMOTH> Sorry for late notice not ready. -ilya -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhemanth at stanford.edu Wed Oct 13 02:00:51 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Wed, 13 Oct 2004 02:00:51 -0700 Subject: Reservation cancelled fopm - 10/13/2004 - 8pm to 12am Message-ID: <000001c4b103$2920f320$0401a8c0@JAGANNATHANPC> Will not be able to use my time. Have removed the reservation on coral. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Oct 13 18:41:18 2004 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 13 Oct 2004 18:41:18 -0700 Subject: Seeking the RAITH 150 offline SW dongle for this weeks class... Message-ID: <416DD93E.5020602@snf.stanford.edu> Greetings: I am seeking one of the RAITH 150 offline SW dongles for this weeks class... Please return it to my office ASAP. Thank you, James Conway From jwc at snf.stanford.edu Fri Oct 15 14:52:56 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 15 Oct 2004 14:52:56 -0700 Subject: James will be out of the office -- returning WEDnesday October 20 at 10 AM. Message-ID: <417046B8.3020204@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jhemanth at stanford.edu Sat Oct 16 08:28:01 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Sat, 16 Oct 2004 08:28:01 -0700 Subject: Raith free from 9am to 1pm 10/16/2004 Message-ID: <1097940481.41713e0118b66@webmail.stanford.edu> Sorry for the last minute cancellation. Had problems with my sample From okilic at stanford.edu Sat Oct 16 12:38:22 2004 From: okilic at stanford.edu (Onur Kilic) Date: Sat, 16 Oct 2004 12:38:22 -0700 Subject: Raith free 14:00-18:00 today Message-ID: <1097955502.417178ae7a038@webmail.stanford.edu> Sorry for late notice. Just need more time on my mask designs. Also releasing my time for tomorrow. From pcatryss at stanford.edu Mon Oct 18 12:49:15 2004 From: pcatryss at stanford.edu (Peter Catrysse) Date: Mon, 18 Oct 2004 12:49:15 -0700 Subject: [Raith] Reservation removed Tues 10/19/2004 9AM-1PM: Sample not ready Message-ID: <200410181949.i9IJnIMM007501@smtp1.Stanford.EDU> -------------- next part -------------- An HTML attachment was scrubbed... URL: From levi at snowmass.stanford.edu Wed Oct 20 14:19:41 2004 From: levi at snowmass.stanford.edu (Ofer Levi) Date: Wed, 20 Oct 2004 14:19:41 -0700 Subject: Raith session tonight 12:00 to 6:00 AM cancelled Message-ID: <5.1.0.14.2.20041020115206.04d5f640@snow.stanford.edu> Hi all, I could not find James today or anyone else to see if the new ZEP resist came in. Therefore I remove my e-beam write reservation for tonight, Regards, Ofer ______________________________________________ Ofer Levi, Ph.D. Department of Electrical Engineering, Stanford University CIS-X Rm 310, Stanford, CA 94305-4075 Phone: (650)723-0464 or 725-6907 Fax: (650)723-4659 Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983 E-Mail: levi at snow.stanford.edu Web page: http://snow.stanford.edu/~levi/ ______________________________________________ From jhemanth at stanford.edu Wed Oct 20 14:25:24 2004 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Wed, 20 Oct 2004 14:25:24 -0700 Subject: Ratih free from 8pm -12am Message-ID: <000001c4b6eb$5639b9d0$c66340ab@JAGANNATHANPC> Will not be able to use this reservation. Removed from Coral -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Wed Oct 20 15:22:38 2004 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Wed, 20 Oct 2004 15:22:38 -0700 Subject: Ratih free from 9am -1pm tomorrow 10/21 Message-ID: <1098310958.4176e52e70211@webmail.stanford.edu> Having a cold now so won't be able to use this reservation. -Hungtao From jiencao at stanford.edu Wed Oct 20 15:41:44 2004 From: jiencao at stanford.edu (Jien Cao) Date: Wed, 20 Oct 2004 15:41:44 -0700 Subject: Ratih free from 9am -1pm tomorrow 10/21 References: <1098310958.4176e52e70211@webmail.stanford.edu> Message-ID: <001401c4b6f5$fa246b30$e07840ab@Jienlaptop> Hungtao, Thank you for the notice. I'll take that slot. Are you going to remove your reservation on coral? Meanwhile, I'm removing my reservation tonight. Jien ----- Original Message ----- From: "Hung-Tao Chou" To: "'Raith SNF Mailing list'" Sent: Wednesday, October 20, 2004 3:22 PM Subject: Ratih free from 9am -1pm tomorrow 10/21 > Having a cold now so won't be able to use this reservation. -Hungtao > > > > From hungtao at stanford.edu Wed Oct 20 15:44:56 2004 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Wed, 20 Oct 2004 15:44:56 -0700 Subject: Ratih free from 9am -1pm tomorrow 10/21 In-Reply-To: <001401c4b6f5$fa246b30$e07840ab@Jienlaptop> References: <1098310958.4176e52e70211@webmail.stanford.edu> <001401c4b6f5$fa246b30$e07840ab@Jienlaptop> Message-ID: <1098312296.4176ea6860cec@webmail.stanford.edu> I dont have access to Coral right now. I've emailed James and asked if he can remove for me. -Hungtao Quoting Jien Cao : > Hungtao, > > Thank you for the notice. I'll take that slot. Are > you going to remove your reservation on coral? > > Meanwhile, I'm removing my reservation tonight. > > Jien > ----- Original Message ----- > From: "Hung-Tao Chou" > To: "'Raith SNF Mailing list'" > Sent: Wednesday, October 20, 2004 3:22 PM > Subject: Ratih free from 9am -1pm tomorrow 10/21 > > > > Having a cold now so won't be able to use this reservation. -Hungtao > > > > > > > > > From jwc at snf.stanford.edu Fri Oct 22 10:03:00 2004 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 22 Oct 2004 10:03:00 -0700 Subject: Raith back up ... RAITH Champions -- please report your results fromthe last month. Message-ID: <41793D44.3090308@snf.stanford.edu> An HTML attachment was scrubbed... URL: From cwhicks at stanford.edu Fri Oct 22 15:17:51 2004 From: cwhicks at stanford.edu (Clifford Hicks) Date: Fri, 22 Oct 2004 15:17:51 -0700 (PDT) Subject: Raith available 6-10a Saturday Message-ID: Sample not ready. From jiencao at stanford.edu Sat Oct 23 00:08:25 2004 From: jiencao at stanford.edu (Jien Cao) Date: Sat, 23 Oct 2004 00:08:25 -0700 Subject: Raith Sun. 10-1pm Free References: Message-ID: <001401c4b8cf$173029f0$0400a8c0@Jienlaptop> Sample not ready. From pcatryss at stanford.edu Sun Oct 24 20:11:57 2004 From: pcatryss at stanford.edu (Peter Catrysse) Date: Sun, 24 Oct 2004 20:11:57 -0700 Subject: [Raith] Removed reservation Mon 10/25 9AM-1PM: Sample not ready Message-ID: <200410250311.i9P3Bv3i001520@smtp1.Stanford.EDU> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Oct 25 15:05:06 2004 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 25 Oct 2004 15:05:06 -0700 Subject: ZEP - 520 - 12 stock has been received. Message-ID: <417D7892.6060509@snf.stanford.edu> Greetings Ebeam Users: After several delays and some snafu's with SU purchasing we are now restocked with the ZEP - 520 - 12 resist. We will be keeping this material locked up and will check it out directly to users for use at the time of need. The material is very expensive and all users are instructed to be frugal with this material to keep waste to a minimum. It cost about $15.00 per ml. This material is also very sensitive to moisture and must be stored under refrigeration. You must allow 30 minutes or more to allow the material to reach lab temperature BEFORE you open the bottle. This material should be handled with syringes to get the best results and cannot be used on the track systems. If you desire to work with this material please see James Conway during his daily office hour. Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Oct 26 11:38:11 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 26 Oct 2004 11:38:11 -0700 Subject: Using or loosing your raith reservation today? I will take it at 12:30... Message-ID: <417E9993.3070307@snf.stanford.edu> DW Shin: Will you be using your raith reservation today? If not I will take the system at ~12:30 if you don't wish to use it. I am off for a quick lunch. Thank you, James Conway From jwc at snf.stanford.edu Tue Oct 26 11:40:32 2004 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 26 Oct 2004 11:40:32 -0700 Subject: 5% 495K MW PMMA by microchem has been restocked in the cleanroom. Message-ID: <417E9A20.5080606@snf.stanford.edu> Greetings Ebeam users: I just restocked the solvent cabinet in the cleanroom with 5% 495K MW PMMA w/ Chlorobenzene by Microchem. Please when you finish a bottle up please send James Conway or Mahnaz a note that it needs to be restocked. Thank you, JWC From dhkim81 at stanford.edu Tue Oct 26 22:11:29 2004 From: dhkim81 at stanford.edu (Donghyun Kim) Date: Tue, 26 Oct 2004 22:11:29 -0700 Subject: Raith Mon 7:30pm to 1:00am Free Message-ID: <000b01c4bbe3$6ab7d7a0$426418ac@Khansolo> I can not make it that day. Regards, Donghyun From ajavey at stanford.edu Thu Oct 28 20:49:55 2004 From: ajavey at stanford.edu (Ali Javey) Date: Thu, 28 Oct 2004 20:49:55 -0700 (PDT) Subject: Raith reservation removed midnight-2 am Message-ID: Sorry for the late notice. Raith is free early tomorrow morning. Ali From joshuar at stanford.edu Fri Oct 29 13:56:35 2004 From: joshuar at stanford.edu (Josh Bryce Ratchford) Date: Fri, 29 Oct 2004 13:56:35 -0700 Subject: Sat 3:30a-9:30a Res. Removed Message-ID: <1099083395.4182ae83449a0@webmail.stanford.edu> Hello Raith Friends! My stuff is not ready for this time slot. My apologies. Keep it real, joshuar From chquay at MtHolyoke.edu Fri Oct 29 16:30:42 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Fri, 29 Oct 2004 19:30:42 -0400 (EDT) Subject: done early Message-ID: things went faster than expected. ryan, you can come over now. i'm unloading in ten minutes. charis. From rohank at stanford.edu Fri Oct 29 23:38:15 2004 From: rohank at stanford.edu (Rohan Deodatta Kekatpure) Date: Fri, 29 Oct 2004 23:38:15 -0700 (PDT) Subject: done early Message-ID: From chquay at MtHolyoke.edu Sun Oct 31 16:53:19 2004 From: chquay at MtHolyoke.edu (Charis Quay Huei Li) Date: Sun, 31 Oct 2004 19:53:19 -0500 (EST) Subject: done early Message-ID: unloading now. charis. From edo at stanford.edu Sun Oct 31 22:17:04 2004 From: edo at stanford.edu (Edo Waks) Date: Sun, 31 Oct 2004 22:17:04 -0800 Subject: reservation cancelled 11-7 Message-ID: <1099289824.4185d4e017828@webmail.stanford.edu>