SEM computer problem on Wed. night
levi at snowmass.stanford.edu
Thu Sep 9 15:07:57 PDT 2004
last night when I was preparing for writing on the Raith system, I was
imaging a sample with the Raith SEM [10 KV, 30 micron aperture, sample is
Quartz sample with ZEP 520 resist, and metal coating layer for conduction
At one point after about 1/2 hour of SEM usage, while I was using a high
magnification to see features of 100 nm wide, the SEM computer suddenly
crashed. After restarting the SEM computer and logging in, I was able to
resume operation as normal, get reasonable spot sizes in contamination dot
burning, and write my job. I have no indication for what caused this
problem but it only happened last night once. I have written at least 10
times on identical samples and had no problems, so probably it is not a
sample related issue.
Any idea what may have caused it and how to avoid/overcome it ?
Ofer Levi, Ph.D.
Department of Electrical Engineering, Stanford University
CIS-X Rm 310, Stanford, CA 94305-4075
Phone: (650)723-0464 or 725-6907
Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983
E-Mail: levi at snow.stanford.edu
Web page: http://snow.stanford.edu/~levi/
More information about the raith