Idea Re: Zoom(Y) out of range
Mark Topinka
mtopinka at stanford.edu
Sat Sep 11 11:39:07 PDT 2004
Hi John, Raith folks-
My two cents: I doubt simply changing the working distance will fix
it, because the Leo system will automatically compensate for any changes in
working distance by offsetting changes in the Y and X deflection coil
constants, resulting in roughly the same Zoom(Y) and Zoom(X). Inst\ead,
use what Gigi suggested- it worked last time (ie. go to lower mag for a 100
micron writefield- this needs to be set somewhere, maybe in the writefield
dialog box? maybe somewhere deep in the menus- I can't remember). The
basic problem is that for some reason the Raith PG + Leo system is not
physically able to bend the electron beam by (0.5 * 100 micron =) 50
microns at what it calls "600x", regardless of working distance. But it
can at "590X" or, to be even safer, at "580X" or "570X". I don't see any
problems with just going with this solution (use "570X" for a 100 micron
writefield)- I can't think of a reason it would degrade anybody's
results (maybe somebody else can?). Eventually we can get the
calibration on the EO board fixed, but until then I don't see a reason for
why this won't work perfectly well. -Mark
At 09:56 AM 9/11/2004 -0700, cumings at stanford.edu wrote:
>Hey all,
>
>I had the same error last week, but I didn't have it during my write this
>week. Perhaps the (Y) gain on the new E/O board is just a little bit
>lower than on the previous board, requiring higher voltage output from the
>elphy. I did notice that the (Y) zoom factor was about 1.52 during
>successful WF alignments. I remember it being more like 1.48 in the past.
>
>My idea: could this depend on the working distance? Maybe if you get this
>error again, try reducing the working distance, perhaps 50-100 micron or
>so? Just a thought.
>
>I'm not cc'ing Raith on this one - if one of the Raith champions wants to
>pass my ideas on to them, feel free.
>
>-John
>
>-----Original Message-----
>Sent: Friday 9/10/2004 10:37:14 PM
>Subject: Re: Zoom(Y) out of range
>
> >Hi Dong-Woon,
> >I guess you are writing at 600X, 100um field. What's the value of zoom Y?
> >the Y zoom factor must be < ~1.52. you may set 590X, 100um, or decrease
> >more the mag (570 or 550), that should work, but this is not normal and
> >its the same problem we had in past. Cole or Joe, can you help with this?
> >I guess it's again a problem with the calibration of the EO board...
> >Thanks
> >Gigi
> >
> >On Fri, 10 Sep 2004, Dong-Woon Shin wrote:
> >
> >>
> >> Hello.
> >>
> >> I am having continuous error in write field alignment - "Zoom(Y) out of
> >> range: please readjust SEM stage and ELPHY" Only down to 10 um field
> is OK.
> >> What does the message mean and what am I supposed to do?
> >>
> >> - DW
> >>
> >> PS. Also I met "access violation err. address 4006A668 in
> >> module "vcl50.bpl" reads of address 00000060"
> >>
> >
>
>
>--------------------------------------------------------
> John Cumings
> cumings at stanford.edu
> Postdoctoral Scholar
> Physics Department
> Stanford University
>
> office (650) 725-1025
> lab (650) 725-2047
> fax (650) 724-3681
>
> Geballe Laboratory for Advanced Materials
> 239 McCullough Building
> 476 Lomita Mall
> Stanford, CA 94305-4045
>--------------------------------------------------------
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