Idea Re: Zoom(Y) out of range
James Conway
jwc at snf.stanford.edu
Wed Sep 15 12:52:28 PDT 2004
make that increase the working distance.... see my previous message
posted Tuesday Night to this list.
JWC
cumings at stanford.edu wrote:
>Hey all,
>
>I had the same error last week, but I didn't have it during my write this week. Perhaps the (Y) gain on the new E/O board is just a little bit lower than on the previous board, requiring higher voltage output from the elphy. I did notice that the (Y) zoom factor was about 1.52 during successful WF alignments. I remember it being more like 1.48 in the past.
>
>My idea: could this depend on the working distance? Maybe if you get this error again, try reducing the working distance, perhaps 50-100 micron or so? Just a thought.
>
>I'm not cc'ing Raith on this one - if one of the Raith champions wants to pass my ideas on to them, feel free.
>
>-John
>
>-----Original Message-----
>Sent: Friday 9/10/2004 10:37:14 PM
>Subject: Re: Zoom(Y) out of range
>
>
>
>>Hi Dong-Woon,
>>I guess you are writing at 600X, 100um field. What's the value of zoom Y?
>>the Y zoom factor must be < ~1.52. you may set 590X, 100um, or decrease
>>more the mag (570 or 550), that should work, but this is not normal and
>>its the same problem we had in past. Cole or Joe, can you help with this?
>>I guess it's again a problem with the calibration of the EO board...
>>Thanks
>>Gigi
>>
>>On Fri, 10 Sep 2004, Dong-Woon Shin wrote:
>>
>>
>>
>>>Hello.
>>>
>>>I am having continuous error in write field alignment - "Zoom(Y) out of
>>>range: please readjust SEM stage and ELPHY" Only down to 10 um field is OK.
>>>What does the message mean and what am I supposed to do?
>>>
>>>- DW
>>>
>>>PS. Also I met "access violation err. address 4006A668 in
>>>module "vcl50.bpl" reads of address 00000060"
>>>
>>>
>>>
>
>
>--------------------------------------------------------
> John Cumings
> cumings at stanford.edu
> Postdoctoral Scholar
> Physics Department
> Stanford University
>
> office (650) 725-1025
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>
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>
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