Cancelling reservation for this evening

Mehmet Fatih Yanik fatih at stanford.edu
Wed Sep 22 20:39:15 PDT 2004


sorry for the late notice, sample not ready

> -----Original Message-----
> From: James Conway [mailto:jwc at snf.stanford.edu]
> Sent: Wednesday, September 22, 2004 5:52 PM
> To: Raith SNF Mailing list
> Cc: Mehmet Fatih Yanik
> Subject: Cancelling my reservation for this evening 4 - 12 midnight.
> Process problem using ZEP - 520...
> 
> 
> 
> 
> Greetings RAITH Users:
> 
> I am canceling my session after my wafers did not spin up uniformly 
> using ZEP-520-12.
> 
> I am using ZEP - 520 - 12 and was surprised to have this result after 
> many runs with no problems.
> Other users working with this bottle of resist since 9-14-2004 are 
> requested to send me a brief email and tell me if their wafers spun up 
> uniformly or not?  Thickness measurements?
> 
> This problem is the same or similar to what Arvind reported several 
> weeks ago.  The wafers under microscope inspection at any magnification 
> look like a psychedelic light show.
> 
> I will strip and repeat tomorrow morning for tomorrow afternoon.
> 
> System is available for the next user...
> 
> James Conway
> 
> 
> 
> 
> 
> 



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