From nayoung at stanford.edu  Fri Apr  1 11:33:36 2005
From: nayoung at stanford.edu (Na Young Kim)
Date: Fri,  1 Apr 2005 11:33:36 -0800
Subject: sat. res. 3-7pm removed
Message-ID: <1112384016.424da210a5d68@webmail.stanford.edu>





From lxuwind at stanford.edu  Sun Apr  3 12:24:33 2005
From: lxuwind at stanford.edu (Liang Xu)
Date: Sun,  3 Apr 2005 12:24:33 -0700
Subject: Res 2-6am cancelled
Message-ID: <1112556273.425042f1f254f@webmail.stanford.edu>



-- 
Liang Xu
Address: 59, Dudley Lane, Escondido Village, Apt B, Stanford, CA 94305
Tel: 650-497-1934


From hungtao at stanford.edu  Mon Apr  4 10:39:50 2005
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Mon,  4 Apr 2005 10:39:50 -0700
Subject: sick, time open from 15:30-20:00 this afternoon
Message-ID: <1112636390.42517be6576ec@webmail.stanford.edu>

I am having a flu now. Raith is free from 15:30-20:00 this afternoon.
-Hungtao



From ryantu at stanford.edu  Mon Apr  4 13:38:21 2005
From: ryantu at stanford.edu (Ryan Tu)
Date: Mon,  4 Apr 2005 13:38:21 -0700
Subject: Missing bottle cap for 2% PMMA
Message-ID: <1112647101.4251a5bdbce89@webmail.stanford.edu>

We are missing the bottle cap for the 2% PMMA and someone has instead
replaced it with some aluminum foil.  It is likely that the solvent has
been steadily evaporating, so please take care to report such issues if you
encounter them.

James - can we get a new mix of the 2% PMMA?

Thanks,
Ryan



From hungtao at stanford.edu  Tue Apr  5 13:17:57 2005
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Tue,  5 Apr 2005 13:17:57 -0700
Subject: reservation removed Wed 6pm
Message-ID: <1112732277.4252f27563fc8@webmail.stanford.edu>

still sick and sample not ready.  -Hungtao



From ifushman at stanford.edu  Wed Apr  6 14:55:02 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Wed, 6 Apr 2005 14:55:02 -0700
Subject: res cancelled 10pm-2am
Message-ID: <003301c53af3$48ed1c90$555540ab@BEHEMOTH>

Sample not ready.
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From jwc at snf.stanford.edu  Thu Apr  7 09:46:42 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 07 Apr 2005 09:46:42 -0700
Subject: 2nd NOTICE: Extended downtime planned  for APRIL 18, 2005 9:00 AM
 through  April 22, 2005 12:00 PM
Message-ID: <425563F2.2010707@snf.stanford.edu>

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From dwshin at stanford.edu  Fri Apr  8 13:32:44 2005
From: dwshin at stanford.edu (Dong-Woon Shin)
Date: Fri,  8 Apr 2005 13:32:44 -0700
Subject: res removed sorry: free upto 5:00 pm
Message-ID: <1112992364.4256ea6c945bc@webmail.stanford.edu>


I am awfully sorry.  I removed my reservation and it is free until 5:00 pm.

- DW


From ryantu at stanford.edu  Fri Apr  8 13:49:59 2005
From: ryantu at stanford.edu (Ryan Tu)
Date: Fri, 08 Apr 2005 13:49:59 -0700
Subject: res removed sorry: free upto 5:00 pm
In-Reply-To: <1112992364.4256ea6c945bc@webmail.stanford.edu>
Message-ID: <BE7C3C87.3D36%ryantu@stanford.edu>

I'll take it.

Thanks.


On 4/8/05 1:32 PM, "Dong-Woon Shin" <dwshin at stanford.edu> wrote:

> 
> I am awfully sorry.  I removed my reservation and it is free until 5:00 pm.
> 
> - DW
> 



From jwc at snf.stanford.edu  Mon Apr 11 18:51:45 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 11 Apr 2005 18:51:45 -0700
Subject: RAITH STATUS 18:45 hours Monday April 11, 2005: SYSTEM IS BACK UP
 AFTER POWER FAILURE
Message-ID: <425B29B1.2050506@snf.stanford.edu>


Greetings:

A Power failure occurred late last evening and the system came down, 
shutting off the gun and partially venting the system to air.
User in attempt to recover his samples from the system then tripped a 
fatal load lock error (level 2) upon time out event of the turbo pump as 
it could not reach the set point vacuum.  Communication interfaces and 
the IEE-488 buss dropped when the computer was rebooted repeatedly 
without allowing it sufficient time to recover the W2K OS directory 
structure.  The LEO computer lost it configuration files and they were 
recovered from my Friday afternoon parachute backup.

I brought the vacuum system back up this morning. The FE-Gun and 
communications were restored to normal functionality this afternoon.  
The last three hours we have set up and performed a EBL write and will 
examine this sample tomorrow for a new Qualification of the system.  All 
functions seem normal and I am restoring users access as of 19:30 hours 
this evening.  System is now in Green light mode.

System schedule open as of 19:30 as HUNGTAO is canceling for the evening 
session.  Who's next?  Please unload my sample into the sample box on 
the system.  Questions -- please call me on my cell.

Thank you for your support!

James Conway
SNF


From jwc at snf.stanford.edu  Mon Apr 11 19:06:29 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 11 Apr 2005 19:06:29 -0700
Subject: 2005-04-11 18:50:22: Users restricted to 10 kV acceleration voltage
 until further notice.
Message-ID: <425B2D25.7070403@snf.stanford.edu>

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From jwc at snf.stanford.edu  Tue Apr 12 16:21:53 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 12 Apr 2005 16:21:53 -0700
Subject: Raith Status Tuesday April 12, 2005 16:00 hours SYSTEM is UP and
 normal operation to 10 kV.
Message-ID: <425C5811.9090204@snf.stanford.edu>

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From ryantu at stanford.edu  Fri Apr 15 10:44:32 2005
From: ryantu at stanford.edu (Ryan Tu)
Date: Fri, 15 Apr 2005 10:44:32 -0700
Subject: Raith free now until 12:30
Message-ID: <BE854B90.3E28%ryantu@stanford.edu>





From makarova at stanford.edu  Fri Apr 15 10:56:57 2005
From: makarova at stanford.edu (Maria Makarova)
Date: Fri, 15 Apr 2005 10:56:57 -0700
Subject: Raith free now until 12:30
In-Reply-To: <BE854B90.3E28%ryantu@stanford.edu>
References: <BE854B90.3E28%ryantu@stanford.edu>
Message-ID: <13b09f772b4bd83fe3bad3529f87ebbd@stanford.edu>

I'll take that

On Apr 15, 2005, at 10:44 AM, Ryan Tu wrote:

>
>



From makarova at stanford.edu  Fri Apr 15 15:46:28 2005
From: makarova at stanford.edu (Maria Makarova)
Date: Fri, 15 Apr 2005 15:46:28 -0700
Subject: Raith Free now till 5:30
Message-ID: <911dc11ee80ff6fdf54e4e34d5d6f1ca@stanford.edu>




From lxuwind at stanford.edu  Sat Apr 16 01:44:59 2005
From: lxuwind at stanford.edu (Liang Xu)
Date: Sat, 16 Apr 2005 01:44:59 -0700
Subject: UVN30 lift-off
Message-ID: <200504160845.j3G8iwjp014363@smtp1.Stanford.EDU>

Hi All,

 

I want to a lift off process using UVN30 as the mask. Does anyone know what
chemical can remove the exposed UVN30 efficiently?

 

Thank you.

 

Liang Xu

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From lxuwind at stanford.edu  Sun Apr 17 12:36:56 2005
From: lxuwind at stanford.edu (Liang Xu)
Date: Sun, 17 Apr 2005 12:36:56 -0700
Subject: reservation cancelled 11:30am to 18:30pm
Message-ID: <200504171937.j3HJatZA026034@smtp2.Stanford.EDU>

Sorry for the late notice. Sample not ready.

 

Liang Xu

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From mtang at snf.stanford.edu  Fri Apr 22 13:52:36 2005
From: mtang at snf.stanford.edu (Mary Tang)
Date: Fri, 22 Apr 2005 13:52:36 -0700
Subject: Raith Status
Message-ID: <42696414.3080005@snf.stanford.edu>

Hi everyone!

The Raith guys are still here.  So far, the prognosis is good, but they 
want to check some more things this afternoon.  So, I'm afraid that 
reservations may not be available until they are done (which should 
hopefully be around 6 pm.)

The system will be put into YELLOW for now, in anticipation of 
everything coming out OK -- however, status may change and it may not be 
reflected right away on Coral, so PLEASE CHECK THE RAITH at SNF EMAIL LIST 
FOR THE LATEST UPDATES!!!  Bernd and Mirwais will be sending an update 
to raith at snf just before they leave.

Thanks for your patience!

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From ma at raithusa.com  Fri Apr 22 23:46:31 2005
From: ma at raithusa.com (ma at raithusa.com)
Date: Sat, 23 Apr 2005 02:46:31 -0400
Subject: Raith-150 Status
Message-ID: <131120-22005462364631250@M2W110.mail2web.com>

Dear Raith User Group:

The Raith-150 will not be available for use this weekend.  We are
anticipating normal operations by Monday afternoon.  We will send an update
Monday morning.


Thanks and regards,

Mirwais Aktary

Raith USA

----------------------------------

--------------------------------------------------------------------
mail2web - Check your email from the web at
http://mail2web.com/ .




From hickorie at gmx.de  Mon Apr 25 11:05:40 2005
From: hickorie at gmx.de (Bernd Stegemann)
Date: Mon, 25 Apr 2005 20:05:40 +0200 (MEST)
Subject: Raith 150 stays in red state until Wednesday afternoon
Message-ID: <3416.1114452340@www3.gmx.net>

Since the problem with the leakage current is unusual for this column and
not quite understood, several steps have been taken to troubleshoot the
problem

The following parts have been exchanged separately, with testing after each
step:

- Linertube with 6 hole aperture
- Blanker mechanics
- Anode including anode aperture
- extractor contact pin

Unfortunately every time the column is opened, a long bakeout is needed to
gain the necessary vacuum.

The last work on the column was done onm Sunday night; which is the reason
for the delay. For testing reasons the gun has been run up today. The drop
in vacuum that occured during the runup indicates that another bakeout cycle
is required.

Regards

Bernd Stegemann
Raith GmbH
BS at raithusa.com

I am sorry for the inconvenience and delay.

-- 
+++ GMX - die erste Adresse f?r Mail, Message, More +++

10 GB Mailbox, 100 FreeSMS  http://www.gmx.net/de/go/topmail


From jwc at snf.stanford.edu  Tue Apr 26 15:25:13 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 26 Apr 2005 15:25:13 -0700
Subject: Raith
In-Reply-To: <3416.1114452340@www3.gmx.net>
References: <3416.1114452340@www3.gmx.net>
Message-ID: <426EBFC9.8080402@snf.stanford.edu>

Greetings RAITH Users:

We will continue to keep the system off line through this week.
If you have reservation on the tool before Thursday 18:00 hours please 
remove them.
We don't anticipate any Users access to the system before that time.

Please see me during my office hour should you have questions.

James Conway




Bernd Stegemann wrote:

>Since the problem with the leakage current is unusual for this column and
>not quite understood, several steps have been taken to troubleshoot the
>problem
>
>The following parts have been exchanged separately, with testing after each
>step:
>
>- Linertube with 6 hole aperture
>- Blanker mechanics
>- Anode including anode aperture
>- extractor contact pin
>
>Unfortunately every time the column is opened, a long bakeout is needed to
>gain the necessary vacuum.
>
>The last work on the column was done onm Sunday night; which is the reason
>for the delay. For testing reasons the gun has been run up today. The drop
>in vacuum that occured during the runup indicates that another bakeout cycle
>is required.
>
>Regards
>
>Bernd Stegemann
>Raith GmbH
>BS at raithusa.com
>
>I am sorry for the inconvenience and delay.
>
>  
>


From jwc at snf.stanford.edu  Wed Apr 27 18:02:53 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 27 Apr 2005 18:02:53 -0700
Subject: [Fwd: Announcement: Rashid Zia, Doctoral Defense]
Message-ID: <4270363D.4020403@snf.stanford.edu>

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From jwc at snf.stanford.edu  Wed Apr 27 18:22:32 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 27 Apr 2005 18:22:32 -0700
Subject: RAITH STATUS WED. APRIL 27, 2005: 1800 HOURS  SYSTEM RETURNED TO
 USERS ACCESS
Message-ID: <42703AD8.7060600@snf.stanford.edu>

Greetings Raith Users:

Despite our best efforts to effect repairs to the system these last 
weeks we have been unable to eliminate, or significantly reduce the 
Electron Scatter effects that we have been experiencing in the Zeiss / 
LEO SEM column.
There is little to no change from the situation from before albeit the 
20 um aperture values have been reduced.
The scatter effects evidenced as exposure artifacts remain and will 
affect those users whom were affected by this problem before.

Last week, and over the past weekend, a nearly complete PM routine has 
been performed again with the exception of the extractor anode plate 
below the gun section.  This part was received in a used contaminated 
condition from ZEISS and our current part was reversed and reinserted in 
the system.  We are currently slowly conditioning the FE-gun after 
several opening and closings of the system and it will take several days 
to a week for Gun vacuum levels to return to normal with operation.

We are now resuming the CORAL Queue and reservations from 0600 hours 
Thursday morning or whenever HANSJ and DWANG have completed their work 
on the system overnight.  I have asked them to post to this list when 
they have finished.

Both RAITH USA Inc. and RAITH GmbH and myself are continuing to strive 
to correct these issues expediently.

Thank you for your support!

James Conway




From hansj at stanford.edu  Thu Apr 28 01:03:29 2005
From: hansj at stanford.edu (Shu-Jen Han)
Date: Thu, 28 Apr 2005 01:03:29 -0700
Subject: finish my session (1AM 4/28) Raith is available now
Message-ID: <1114675409.427098d1755ea@webmail.stanford.edu>


The machine is available from now to 9AM.
It worked fine.

--SJ


From jwc at snf.stanford.edu  Thu Apr 28 17:18:59 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 28 Apr 2005 17:18:59 -0700
Subject: RAITH 2005-04-28 16:00:59: Users restricted to no higher than 25
 kV.
Message-ID: <42717D73.8020305@snf.stanford.edu>

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From daweiw at uci.edu  Fri Apr 29 19:44:37 2005
From: daweiw at uci.edu (daweiw at uci.edu)
Date: Fri, 29 Apr 2005 19:44:37 -0700 (PDT)
Subject: done earlier
Message-ID: <4605.171.64.100.35.1114829077.squirrel@webmail.uci.edu>