jwc at snf.stanford.edu
Tue Apr 26 15:25:13 PDT 2005
Greetings RAITH Users:
We will continue to keep the system off line through this week.
If you have reservation on the tool before Thursday 18:00 hours please
We don't anticipate any Users access to the system before that time.
Please see me during my office hour should you have questions.
Bernd Stegemann wrote:
>Since the problem with the leakage current is unusual for this column and
>not quite understood, several steps have been taken to troubleshoot the
>The following parts have been exchanged separately, with testing after each
>- Linertube with 6 hole aperture
>- Blanker mechanics
>- Anode including anode aperture
>- extractor contact pin
>Unfortunately every time the column is opened, a long bakeout is needed to
>gain the necessary vacuum.
>The last work on the column was done onm Sunday night; which is the reason
>for the delay. For testing reasons the gun has been run up today. The drop
>in vacuum that occured during the runup indicates that another bakeout cycle
>BS at raithusa.com
>I am sorry for the inconvenience and delay.
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