From jwc at snf.stanford.edu Thu Dec 1 10:41:13 2005 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 01 Dec 2005 10:41:13 -0800 Subject: 2nd Annoucement: Ebeam Town Hall Meeting --- December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend. Message-ID: <438F43C9.2050804@snf.stanford.edu> Greetings to the Ebeam and Raith User Communities: The Next Ebeam Lab Town Hall Meeting will be held Friday December 2, 2005 at 2 - 4 PM in CIS-X 338. All interested parties are invited to attend this event which is always open to everyone. For your enjoyment we will have a presentation "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Bryan is the Manager for the Materials Characterization Lab at Spansion in Sunnyvale, CA. He presented a very interesting presentation at the Hitachi Nanotechnology Seminar last month and I invited him here to SNF to give his presentation here. The agenda of this meeting is open and your inputs are desired. Light Refreshments will be served. Please RSVP so I have a rough head count of who's coming. Thank you for your participation! Yours, James Conway Agenda for December's Ebeam Town Hall Meeting Friday December 2, 2005 from 2 - 4 PM in CISX 338 This forum is intended to allow lab members using the RAITH 150 and Hitachi HL-700 Ebeam exposure systems to provide feedback and inputs towards creating a supportive community of users working together to establish best practices and methods pushing the limits of Ebeam Lithography. This is also an opportunity to report your EBL results, problems, and concerns and obtain feedback from the community-at-large. Last year this forum successfully developed new reservation and system usage guidelines that improved system access and utilization for a large user base. This effort was successful and guided similar equipment policies on other SNF tools. 1. Welcome and Introduction - James W. Conway (5 min.) 2. Feature Presentation: "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Member of the Technical Staff, Spansion, Sunnyvale, CA. (40 minutes + Q&A) 3. Raith System Resolution and performance status report (5 - 10 minutes) - Current Performance issues and results. - Holiday shut down plan. 4. Raith Reservation and Scheduling Issues: (20 minutes) - Changes or Modification to the current reservation policies in place? - Cancellation Policy - 24 hour notice? - Should we have penalty or charge for cancellations? - Should we implement a Raith Users System Standby list? 5. Query of User needs for Negative Tone Ebeam resist for R&D in 2006: (20 min.) - Microchem MaN-2403 negative tone resist review. - User interest in HSQ and Calixarenes for High Resolution Negative Tone resist? Note that the Agenda remains open through 10 AM Friday December 2, 2005. Your inputs are invited. James W. Conway Stanford Nanofabrication Facility -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 569 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Agenda_EBTHM_12022005.doc Type: application/msword Size: 21504 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Dec 1 13:06:19 2005 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 01 Dec 2005 13:06:19 -0800 Subject: EIPBN call for papers Message-ID: <438F65CB.7090301@snf.stanford.edu> This is a great conference for EBeam and NIL topics. You are encouraged to submit abstracts of your work. James Conway -------- Original Message -------- Subject: EIPBN call for papers Date: Thu, 01 Dec 2005 13:56:26 -0500 From: EIPBN To: undisclosed-recipients:; eipbn2006 Dear Colleague, This is the 2nd call for papers for the 50th EIPBN! I hope that you are getting your abstract ready which will be due in a little over a month from now. The EIPBN (aka 3-Beams) Conference will achieve the 50th milestone this year! Shalom Wind and I are honored to serve as the Program and Conference Chairs, respectively, and would like to invite you to come and help us celebrate this wonderful occasion. It will be marked by some very special guests, lecturers, and of course, festivities with a unique banquet that will be held on a pier in the Inner Harbor of Baltimore, Maryland. Please mark your calendar for the dates between May 30th and June 2 of 2006. Again, abstracts for papers will be due on Friday, January 6th, 2006. Details of the conference and call for papers and be found below or in the tri-fold PDF printable attachment. We look forward to seeing you in Baltimore! Sincerely, Shane Palmer and Shalom Wind eipbn Conference Dates: May 30th - June 2nd, 2006 Conference Background The EIPBN Conference will hit the 50th milestone in 2006 and has consistently been recognized as the foremost international meeting dedicated to lithographic science and process technology and its application to micro and nanofabrication techniques. The conference brings together engineers and scientists from industries and universities from all over the world to discuss recent progress and future trends. The EIPBN conference is incorporated as a nonprofit organization in the state of New Jersey and is co-sponsored by the American Vacuum Society (www.avs.org), in cooperation with the IEEE Electron Devices Society and the Optical Society of America. It is organized by a steering committee that elects two new members each year. The conference opens on Tuesday afternoon, May 30th, with a special commercial session which features vendors of materials and equipment relevant to this conference. The plenary session begins Wednesday morning. The remainder of the conference is organized in two or three parallel sessions. The length of presentation is 30 minutes for invited papers and 20 minutes for contributed papers, discussion time included. A special feature of the technical program is the poster session that includes invited and contributed papers. There is only one poster session, but posters will be displayed for informal viewing throughout the entire conference. No distinction is made between the importance of poster and oral presentations. Technical Scope Abstracts representing high quality original research are invited in the following areas: * DUV, immersion, EUV and X-ray lithography * Electron and ion beam lithography * Sub-half wavelength "super resolution" optical lithography * Photon- and charged-particle optics * Metrology and alignment * Resists and resist processing * Plasma etching and deposition * Nanofabrication techniques Topics in nanofabrication and emerging technologies include: * Molecular electronic devices * Carbon nanotube and nanowire processing and applications * Bio-nanotechnology & hybrid bio/solid state devices * Nanostructures for energy applications * MEMS and NEMS * Nanoimprint lithography and embossing * Atom and molecule manipulation * Simulation & Computer Aided Design for the nanoscale era Abstract Submission The quality of the abstracts will form the basis for selection of papers for the conference and will be peer reviewed according to the following criteria: * Originality of work * Specific results achieved and described * Potential impact and interest to attendees Abstracts should be submitted to: EIPBN 2006 16220 South Frederick Ave., Suite 312 Gaithersburg, MD 20877 Please ensure that the presenting author's name is underlined in the author list. Abstracts are limited to one page of text (12 point or larger type) and a second, optional page with up to four figures. Include 4-5 keywords at the foot of the abstract. Use halftones for micrographs, as the abstracts will be reproduced directly for the program book. Faxed and e-mailed abstracts are not acceptable. Abstracts (original and 30 copies) are due by January 6, 2006 along with the full address including e-mail of the corresponding author. Abstract deadline: January 6, 2006 Late submissions may be considered but only if they report truly outstanding results. Please prepare abstracts carefully and describe accomplishments specifically. Authors will be notified of acceptance by April 14, 2006. Earlier notification will be provided to those authors providing an e-mail address. Conference Registration The 50th EIPBN Conference will be a special event with numerous distinguished visitors and speakers and, of course, a unique banquet for our 50th celebration. Please don't miss the fun! We strongly encourage you to register on line by using our website www.eipbn.org Early registration and special student rates are available. The online registration system will be open in early 2006. Conference Location Baltimore Marriott Waterfront 700 Aliceanna Street Baltimore, MD 21202 Phone: 1 410-385-3000 Fax: 1 410-385-0330 Web: www.marriotthotels.com/BWIWF Conference Site and Area Attractions Please join us in celebrating the 50th EIPBN conference that will be held in Baltimore, Maryland at the Baltimore Marriott Waterfront. This hotel is located in the heart of the historic Baltimore Inner Harbor district where you will find activities to suit everyone's tastes. The area offers excellent food, art, music entertainment, fine arts, sports activities, and world-class shopping. Take a stroll along the harbor and visit the outstanding shops and art stores, stop and tour the USS Constellation which is the last of the all-sail warships, the Museum of Science and Industry, and the renowned National Aquarium. Hop the clean subway and visit the fine Baltimore Museum of Art or the renowned campus of William and Mary. Fort McHenry is a wonderful cruise away where you can discover the profound history that inspired Francis Scott Key's "Star Spangled Banner". Or you can use the convenient water taxi to glide to over 35 Baltimore attractions and famous sites. Come and enjoy the phenomenal dining on seafood and ethnic food (Little Italy) that this area has to offer. But most of all don't miss the special events that we have planned to celebrate the 50th! Conference Chairman Shane Palmer Texas Instruments / SEMATECH 2706 Montopolis Drive Austin, TX 78741-6499 Phone: (512) 356-7579 Fax: (512) 356-3618 E-mail: spalmer at ti.com Program Chairman Shalom Wind Department of Applied Physics and Mathematics Center for Electron Transport in Molecular Nanostructures Columbia University 1020 Schapiro CEPSR 530 West 120th St., MC 8903 New York, NY 10027 Phone: (212) 854-5122 Fax: (212) 854-1909 E-mail: sw2128 at columbia.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 80685 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 80685 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: EIPBN_2006_Final_Call.pdf Type: application/pdf Size: 250820 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Dec 1 18:34:19 2005 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 01 Dec 2005 18:34:19 -0800 Subject: Reminder: Ebeam Town Hall Meeting --- TODAY December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend. Message-ID: <438FB2AB.6070703@snf.stanford.edu> Greetings to the Ebeam and Raith User Communities: The Next Ebeam Lab Town Hall Meeting will be held this afternoon Friday December 2, 2005 at 2 - 4 PM in CIS-X 338. All interested parties are invited to attend this event which is always open to everyone. For your enjoyment we will have a presentation "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Bryan is the Manager for the Materials Characterization Lab at Spansion in Sunnyvale, CA. He presented a very interesting presentation at the Hitachi Nanotechnology Seminar last month and I invited him here to SNF to give his presentation here. The agenda of this meeting is open and your inputs are desired. Light Refreshments will be served. Please RSVP so I have a rough head count of who's coming. Thank you for your participation! Yours, James Conway Agenda for December's Ebeam Town Hall Meeting Friday December 2, 2005 from 2 - 4 PM in CISX 338 This forum is intended to allow lab members using the RAITH 150 and Hitachi HL-700 Ebeam exposure systems to provide feedback and inputs towards creating a supportive community of users working together to establish best practices and methods pushing the limits of Ebeam Lithography. This is also an opportunity to report your EBL results, problems, and concerns and obtain feedback from the community-at-large. Last year this forum successfully developed new reservation and system usage guidelines that improved system access and utilization for a large user base. This effort was successful and guided similar equipment policies on other SNF tools. 1. Welcome and Introduction - James W. Conway (5 min.) 2. Feature Presentation: "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Member of the Technical Staff, Spansion, Sunnyvale, CA. (40 minutes + Q&A) 3. Raith System Resolution and performance status report (5 - 10 minutes) - Current Performance issues and results. - Holiday shut down plan. 4. Raith Reservation and Scheduling Issues: (20 minutes) - Changes or Modification to the current reservation policies in place? - Cancellation Policy - 24 hour notice? - Should we have penalty or charge for cancellations? - Should we implement a Raith Users System Standby list? 5. Query of User needs for Negative Tone Ebeam resist for R&D in 2006: (20 min.) - Microchem MaN-2403 negative tone resist review. - User interest in HSQ and Calixarenes for High Resolution Negative Tone resist? Note that the Agenda remains open through 10 AM Friday December 2, 2005. Your inputs are invited. James W. Conway Stanford Nanofabrication Facility -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 569 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Agenda_EBTHM_12022005.doc Type: application/msword Size: 21504 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Dec 1 18:46:10 2005 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 01 Dec 2005 18:46:10 -0800 Subject: Kim sora write completed system is ready for next user. Message-ID: <438FB572.7010709@snf.stanford.edu> Lorry: Sora Kim's write completed early -- system is ready for next user. You can get early access to the system for your run! Good evening, James From kimsora at stanford.edu Thu Dec 1 23:08:25 2005 From: kimsora at stanford.edu (Sora Kim) Date: Thu, 1 Dec 2005 23:08:25 -0800 Subject: Raith is free from midnight. Message-ID: <001001c5f70f$3103f440$325640ab@kimsora> Unexpected incident. I broke my sample during preparation. Sorry for this very short notification. Sora -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtopinka at stanford.edu Fri Dec 2 06:47:00 2005 From: mtopinka at stanford.edu (Mark Allen Topinka) Date: Fri, 2 Dec 2005 06:47:00 -0800 Subject: raith will be free today 10am-1:30pm Message-ID: <1133534820.43905e64b6034@webmail.stanford.edu> Hi- Ryan and I had traded our reservations, so unfortunately I cannot free up the slot on coral, but it turns out we will have to finish by 10am, and the next user is scheduled for 1:30pm. -Mark From jwc at snf.stanford.edu Fri Dec 2 09:08:41 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 02 Dec 2005 09:08:41 -0800 Subject: Raith schedule -- open slots on the coral schedule In-Reply-To: <002a01c5f631$69edf500$325640ab@kimsora> References: <002a01c5f631$69edf500$325640ab@kimsora> Message-ID: <43907F99.3040608@snf.stanford.edu> Hello Sora Kim and Raith Users: This is a great question that I wish to reiterate to maintain clarity od this policy: While there is a limit on the total number of hours that a User can reserve the Raith system on the Coral schedule, there is in fact no limit to the number of hours that you can utilize the system if no one else has reserved the system on Coral. This policy was designed to allow everyone qualified to operate the system to have fair and equal ability to make reservations and gain access to the Raith system within a ten day to two week time frame. RE: Open slots on the Coral schedule... If no other User has made a reservation for the system, or upon not showing up for their session, or posting by email and/or notice on the system that they intend to start late; at minute 16 after the reservation period starts any User whom enables the tool now has the system for that reservation period. It is only at that User's courtesy when they complete their writing task to return the system to the previous user should they show up later to use the tool. It is intended that there exist some flexibility and cooperation amongst Users working on the system within these policies. This and other reservation policies were decided by the Raith community early last year during a previous Ebeam Town Hall Meeting. This afternoon we will be reiterating the reservation policies and this would be the forum to propose or introduce any modifications to our existing policies, as well as to this news group. Please join us this afternoon from 2 - 4 PM at CIS-X 338 for what will be an interesting meeting. Light Refreshments will be provided. Thank you for your support, James Conway Sora Kim wrote: > Hi James, > I am wondering if I can use empty slots of reservation when there is > nobody who reverved Raith. > I want to be more familar with Raith as soon as possible. Actually, a > deadline for a conference is coming up, and the clean roomwill be > closed soon as you know. > Please let me know. > Sora -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Dec 2 09:16:16 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 02 Dec 2005 09:16:16 -0800 Subject: Final Reminder: Ebeam Town Hall Meeting --- TODAY December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend. Message-ID: <43908160.6070208@snf.stanford.edu> Greetings to the Ebeam and Raith User Communities: The Ebeam Lab Town Hall Meeting will be held this afternoon Friday December 2, 2005 at 2 - 4 PM in CIS-X 338. All interested parties are invited to attend this event which is always open to everyone. For your enjoyment we will have a presentation "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Bryan is the Manager for the Materials Characterization Lab at Spansion in Sunnyvale, CA. He presented a very interesting presentation at the Hitachi Nanotechnology Seminar and I invited him here to SNF to give his presentation here. This is a great opportunity to review some really fine Scanning Electron Microscopy work from an industrial perspective, while obtaining tips and tricks towards improving the quality of your SEM Imaging. Light Refreshments will be served. Thank you for your participation! Yours, James Conway Agenda for December's Ebeam Town Hall Meeting Friday December 2, 2005 from 2 - 4 PM in CISX 338 This forum is intended to allow lab members using the RAITH 150 and Hitachi HL-700 Ebeam exposure systems to provide feedback and inputs towards creating a supportive community of users working together to establish best practices and methods pushing the limits of Ebeam Lithography. This is also an opportunity to report your EBL results, problems, and concerns and obtain feedback from the community-at-large. Last year this forum successfully developed new reservation and system usage guidelines that improved system access and utilization for a large user base. This effort was successful and guided similar equipment policies on other SNF tools. 1. Welcome and Introduction - James W. Conway (5 min.) 2. Feature Presentation: "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Member of the Technical Staff, Spansion, Sunnyvale, CA. (40 minutes + Q&A) 3. Raith System Resolution and performance status report (5 - 10 minutes) - Current Performance issues and results. - Holiday shut down plan. 4. Raith Reservation and Scheduling Issues: (<20 minutes) - Changes or Modification to the current reservation policies in place? - Cancellation Policy - 24 hour notice? - Should we have penalty or charge for cancellations? - Should we implement a Raith Users System Standby list? 5. Query of User needs for Negative Tone Ebeam resist for R&D in 2006: (<20 min.) - Microchem MaN-2403 negative tone resist review. - User interest in HSQ and Calixarenes for High Resolution Negative Tone resist? Your inputs are invited. James W. Conway Stanford Nanofabrication Facility -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 569 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Agenda_EBTHM_12022005.doc Type: application/msword Size: 21504 bytes Desc: not available URL: From xinranw at gmail.com Fri Dec 2 14:26:23 2005 From: xinranw at gmail.com (Xinran Wang) Date: Fri, 2 Dec 2005 14:26:23 -0800 Subject: raith finish early, next user can come Message-ID: <22ffcd060512021426t7d5871cew924a73676394cc69@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Dec 2 16:08:40 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 02 Dec 2005 16:08:40 -0800 Subject: Final Reminder: Ebeam Town Hall Meeting --- TODAY December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend. In-Reply-To: <000001c5f792$73b254c0$0100000a@jhemanthibm1> References: <000001c5f792$73b254c0$0100000a@jhemanthibm1> Message-ID: <4390E208.3010005@snf.stanford.edu> Hemanth, Thank you for your attendance and the great feedback. I have already asked Bryan Tracy to submit a portion of his presentation to us for review by the users that may have missed his presentation. Hopefully I will receive that content next week. Thank you for your support! James Conway Hemanth Jagannathan wrote: > HI James, > > Thanks for arranging the presentation. It was fantastic in its > content, SEM images and tips to get better SEM images. Will it be > possible to get a copy of Bryan's presentation? I had to run out for > another meeting and would like to go over the presentation again. > > Thanks, > > Best- > > Hemanth Jagannathan > PhD Candidate > Department of Electrical Engineering > Stanford University, CA > Phone :(O)(650)-725-0417; (C) (650)-380-2105 > e-mail: jhemanth at stanford.edu > > > > -----Original Message----- > From: James Conway [mailto:jwc at snf.stanford.edu] > Sent: Friday, December 02, 2005 9:16 AM > To: ebeam at snf.stanford.edu; Raith SNF Mailing list; > beamtools at snf.stanford.edu; semhitachi at snf.stanford.edu; > sem4160 at snf.stanford.edu > Cc: weekly report; pease at jumpjibe.stanford.edu > Subject: Final Reminder: Ebeam Town Hall Meeting --- TODAY > December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend. > > > Greetings to the Ebeam and Raith User Communities: > > The Ebeam Lab Town Hall Meeting will be held this afternoon > Friday December 2, 2005 at 2 - 4 PM in CIS-X 338. All interested > parties are invited to attend this event which is always open to > everyone. > > > For your enjoyment we will have a presentation "Scanning Electron > Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Bryan is > the Manager for the Materials Characterization Lab at Spansion in > Sunnyvale, CA. He presented a very interesting presentation at > the Hitachi Nanotechnology Seminar and I invited him here to SNF > to give his presentation here. > > This is a great opportunity to review some really fine Scanning > Electron Microscopy work from an industrial perspective, while > obtaining tips and tricks towards improving the quality of your > SEM Imaging. > > Light Refreshments will be served. > > Thank you for your participation! > > Yours, > > James Conway > > > Agenda for December's Ebeam Town Hall Meeting > > Friday December 2, 2005 from 2 - 4 PM in CISX 338 > > > > This forum is intended to allow lab members using the RAITH 150 > and Hitachi HL-700 Ebeam exposure systems to provide feedback and > inputs towards creating a supportive community of users working > together to establish best practices and methods pushing the > limits of Ebeam Lithography. > This is also an opportunity to report your EBL results, problems, > and concerns and obtain feedback from the community-at-large. > > > > Last year this forum successfully developed new reservation and > system usage guidelines that improved system access and > utilization for a large user base. This effort was successful and > guided similar equipment policies on other SNF tools. > > > > 1. Welcome and Introduction - James W. Conway (5 min.) > > > > 2. Feature Presentation: > "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, > Ph.D.. > Member of the Technical Staff, Spansion, Sunnyvale, CA. (40 > minutes + Q&A) > > > > 3. Raith System Resolution and performance status report (5 - 10 > minutes) > - Current Performance issues and results. > - Holiday shut down plan. > > > > 4. Raith Reservation and Scheduling Issues: > (<20 minutes) > > - Changes or Modification to the current reservation > policies in place? > > - Cancellation Policy - 24 hour notice? > - Should we have penalty or charge for cancellations? > > - Should we implement a Raith Users System Standby list? > > > > 5. Query of User needs for Negative Tone Ebeam resist for R&D in > 2006: (<20 min.) > > - Microchem MaN-2403 negative tone resist review. > > - User interest in HSQ and Calixarenes for High > Resolution Negative Tone resist? > > > > > > > > Your inputs are invited. > > > > James W. Conway > > Stanford Nanofabrication Facility > > > > > > > > > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsora at stanford.edu Sun Dec 4 13:06:00 2005 From: kimsora at stanford.edu (Sora Kim) Date: Sun, 4 Dec 2005 13:06:00 -0800 Subject: Loadlock Error 4 Message-ID: <1133730360.43935a38387f2@webmail.stanford.edu> Dear all, I got a loadlock error 4 right now. I was trying to contact everybody that I know to solve the problem. But, I could not. James is in a situation hard to be contacted right now. But, fortunately, he gave me a password for administrator login. Is there anybody who knows how to solve this problem? Please call me at 650-996-2679 or email me, if you know, as soon as possible. It will be very much appreciated. I feel very sorry for other users especially who made reservations after me. Sora From kimsora at stanford.edu Sun Dec 4 13:51:08 2005 From: kimsora at stanford.edu (Sora Kim) Date: Sun, 4 Dec 2005 13:51:08 -0800 Subject: Loadlock Error 4 In-Reply-To: <1133730360.43935a38387f2@webmail.stanford.edu> References: <1133730360.43935a38387f2@webmail.stanford.edu> Message-ID: <1133733067.439364cc0426d@webmail.stanford.edu> I solved the problem! I really appreciate all of you who helped me a lot!! Don't press 'cancel' when you have a pumping problem. It will cause a loadlock error. Sora Quoting Sora Kim : > > Dear all, > > I got a loadlock error 4 right now. I was trying to contact everybody > that I > know to solve the problem. But, I could not. > > James is in a situation hard to be contacted right now. But, fortunately, > he > gave me a password for administrator login. > > Is there anybody who knows how to solve this problem? Please call me at > 650-996-2679 or email me, if you know, as soon as possible. It will be > very > much appreciated. > > I feel very sorry for other users especially who made reservations after > me. > > Sora > From hansj at stanford.edu Tue Dec 6 00:22:25 2005 From: hansj at stanford.edu (Shu-Jen Han) Date: Tue, 06 Dec 2005 00:22:25 -0800 Subject: res. removed Tue 6p-9:30p Message-ID: <6.0.1.1.2.20051206002101.0433ecc0@hansj.pobox.stanford.edu> My sample cannot be ready. Sorry. Shu-Jen Han Materials Science and Engineering McCullough Bldg., RM208 Stanford University 650-7232939 -------------- next part -------------- An HTML attachment was scrubbed... URL: From lwchang at stanford.edu Wed Dec 7 00:12:41 2005 From: lwchang at stanford.edu (Li-Wen Chang) Date: Wed, 7 Dec 2005 00:12:41 -0800 Subject: Raith is free from 8pm on 12/8 to 2am on 12/9 Message-ID: <200512070812.jB78Cpj4028198@smtp1.Stanford.EDU> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Dec 7 11:49:08 2005 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 07 Dec 2005 11:49:08 -0800 Subject: Final Reminder: Ebeam Town Hall Meeting --- TODAY December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend. Message-ID: <43973CB4.7070702@snf.stanford.edu> Greetings to the Ebeam and Raith User Communities: The Ebeam Lab Town Hall Meeting was held Friday afternoon December 2, 2005. As in the past this meeting was lightly attended. We will post results of and comments made during this meeting in-lined below in BLUE. We had an excellent presentation "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D. His presentation reviewed some really fine Scanning Electron Microscopy work from an industrial perspective and pointed out some Tips'n'Tricks towards improving the quality of your SEM Imaging. James Conway gave a brief presentation following the agenda and has attached that presentation to this email for your review. Your feedback is requested. Thank you, James Conway Agenda for December's Ebeam Town Hall Meeting Friday December 2, 2005 from 2 - 4 PM in CISX 338 [Users comments are in-lined within the agenda below in BLUE.] This forum is intended to allow lab members using the RAITH 150 and Hitachi HL-700 Ebeam exposure systems to provide feedback and inputs towards creating a supportive community of users working together to establish best practices and methods pushing the limits of Ebeam Lithography. This is also an opportunity to report your EBL results, problems, and concerns and obtain feedback from the community-at-large. Last year this forum successfully developed new reservation and system usage guidelines that improved system access and utilization for a large user base. This effort was successful and guided similar equipment policies on other SNF tools. 1. Welcome and Introduction - James W. Conway (5 min.) <>2. Feature Presentation: "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, Ph.D.. Member of the Technical Staff, Spansion, Sunnyvale, CA. (40 minutes + Q&A) This was an excellent presentation that displayed a number of excellent SEM micrographs and discussed what we need to improve to obtain better SEM imaging. Bryan Tracy also showed some examples of different types of cross section preparations utilizing some new ion milling equipment just becoming available to Users. <> 3. Raith System Resolution and performance status report (5 - 10 minutes) - Current Performance issues and results. - Holiday shut down plan. Please see my presentation for content on this topic. 4. Raith Reservation and Scheduling Issues: (<20 minutes) - Changes or Modification to the current reservation policies in place? No changes were proposed to the current reservation policies. User feedback indicated that most users are pleased with the existing system in place. - Cancellation Policy - 24 hour notice? I reiterated the need to post to the email list well in advance of your reservation (>24 hours) to allow other users to fill your vacant reservation slot. SNF would also like to know why you cancel, particularly if it is due to a equipment dependence or a process anomaly. - Should we have a penalty or charge for cancellations? This is currently in discussions by SNF management and staff. It appears that the same people are often canceling their reservations ands preventing others from gaining timely access to the system. I post a email to the canceled on the third cancellation within a months time, or within my memory; encouraging them to be more careful in reserving system access. Realize that a open unused reservation slot is a loss of access and opportunity to another User's EBL needs, and a loss of income to SNF! Please reply regarding your opinions, "Should we charge users when they cancel without advanced notice on the Raith system?" - Should we implement a Raith Users System Standby list? Raith Users support having a system, either formal or informal, to implement a Standby Listing for additional access to the system. It would be useful to all Users if the Coral system could post an automated SUBJECT Line message to the raith at snf.stanford.edu email list upon the event in which a User does not enable the RAITH on the Coral system at 'minute 16' after their reservation period begins. [Reference: The 16 Minute Rule: If at 'Minute 16' after your reservation slot starts, if you have not posted to the email list and/or posted a note on the Raith system itself your intention to utilize the system; you loose your reservation slot and any user whom therein enables the system on CORAL now has that reservation for its entire period. It is only upon that User's kindness should they decide to return the system to the previously reserved User after completing their task on the system.] 5. Query of User needs for Negative Tone Ebeam resist for R&D in 2006: (<20 min.) - Microchem MaN-2403 negative tone resist review. Several Users have been characterizing this material for more than a year now with good results obtained in their work. User's support making this material a standard stocked material within the SNF resist materials inventory. In early February concurrent with the next Ebeam Town Hall Meeting, we will conduct a technical review of results obtained using this material. Users are requested to report on their results working with this material at that meeting. Users interested in trying out this material for evaluation purposes are to contact James Conway directly. - User interest in HSQ and Calixarenes for High Resolution Negative Tone resist? There has been several request and some interest in working with HSQ here at SNF in 2006. HSQ -- Hydrogen silsesquioxane is a high resolution negative tone inorganic resist for electron beam lithography. A number of groups have been pursuing this material for RIE etching of Single Pixel Lines, etched gratings and Photonic devices. Users with an interest in sharing the cost of a small amount of HSQ material for evaluation purposes are encouraged to reply. Based in current feedback, only James Conway is interested in working with Calixarenes for sub-10 nm dots, Single Pixel Lines, and FET gate structures. Users interested in working with other Novel resist systems here at SNF are encouraged to lend their opinions and feedback on this topic. The raith at snf.stanford.edu email list continues to provide a forum for discussions on Ebeam Topics, as well as to provide system status and problem messaging. Your inputs are invited. The meeting finished early at 3:40 PM. Thank you for your support! <> James W. Conway Stanford Nanofabrication Facility jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Agenda_EBTHM_12022005.doc Type: application/msword Size: 21504 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Ebeam Town Hall Meeting.ppt Type: application/vnd.ms-powerpoint Size: 1785344 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed Dec 7 13:07:57 2005 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 07 Dec 2005 13:07:57 -0800 Subject: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? In-Reply-To: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> References: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> Message-ID: <43974F2D.4010807@snf.stanford.edu> Good suggestion! I will also CC the raith at snf.stanford.edu and this will help to get the discussions started on this email list. All the best, JWC Adrian Tymes wrote: >--- James Conway wrote: > > >>Please reply regarding your opinions, "Should we charge users when >>they >>cancel without advanced notice on the Raith system?" >> >> > >If you're conducting a poll, then I vote yes. Specifically, if >they cancel less than 4 hours (x<=240 minutes) in advance, charge >them for their full reservation; if they cancel at least 4 but >no more than than 24 hours (240charge them at half rate; if they cancel further out than that, >don't charge. > >I would also suggest this for other extremely high use systems. >Perhaps someone could check Coral to see what other systems, if >any, are at over 50% utilization (or at least over 50% >reservation) and thus might need to discourage reservations that >may be abruptly cancelled. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Wed Dec 7 14:04:36 2005 From: toecutter4ranger at gmail.com (James Conway) Date: Wed, 7 Dec 2005 14:04:36 -0800 Subject: User Okilic did not show for his reservation -- RAITH available for next User Message-ID: GREETINGS: User Okilic did not show for his reservation -- RAITH available for next User. Please do not reply to this message. James Conway SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: From levi at snowmass.stanford.edu Wed Dec 7 17:17:21 2005 From: levi at snowmass.stanford.edu (Ofer Levi) Date: Wed, 07 Dec 2005 17:17:21 -0800 Subject: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? In-Reply-To: <43974F2D.4010807@snf.stanford.edu> References: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> Message-ID: <5.1.1.5.2.20051207170604.01a5fe00@snow.stanford.edu> An HTML attachment was scrubbed... URL: From kimsora at stanford.edu Wed Dec 7 18:00:14 2005 From: kimsora at stanford.edu (Sora Kim) Date: Wed, 7 Dec 2005 18:00:14 -0800 Subject: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? References: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <5.1.1.5.2.20051207170604.01a5fe00@snow.stanford.edu> Message-ID: <006b01c5fb9b$211df040$325640ab@kimsora> I also had a few experiences of canceling reservations such as breaking my wafer at the last moment or being sick. I think that people who cancel their reservations at the last minute or do not show up might have some unforseen reasons. Charging full amount doesn't seem to be the best option. Rather, limiting reservation time that they can make for the next ten days might be more reasonable. Regards, Sora ----- Original Message ----- From: Ofer Levi To: James Conway Cc: Raith SNF Mailing list Sent: Wednesday, December 07, 2005 5:17 PM Subject: Re: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? Dear James, I would like to separate the issue of finding a good way to ensure the system will be used at all times, from educating people that are negligent in reporting that they can not make it to their Raith reservation. I have found that in many cases when you develop your last e-beam run and need inspection, you do not know till you exam your samples in the raith using SEM inspection if it worked, or you have to pull out your samples. In addition, charging people for short cancel notice may be working for people who only have Raith write and inspection, or simple etch steps. For some of us who go through multiple steps of processing and then go through Raith write and need to cancel an hour or two in advance, due to another system that is down as happens often here, it will be a bad idea. I believe that you want to find some penalties for people who do not show up and do not tell anyone, but a much more effective way is to restrict machine use for 2 weeks so they will remember to report it all the times. Once people do report that they can not use the machine, I do not see any point to force them to tell it 4 hours in advance, unless it is a whole night run, where people would like to use it. In the day time 1-2 hours in advance a should be enough to find a replacement person to use the machine. Charging for the full amount of reservation will also not help, as in this case users will have multiple consecutive reservation tactics to avoid it. Regards, Ofer At 01:07 PM 12/7/2005 -0800, James Conway wrote: Good suggestion! I will also CC the raith at snf.stanford.edu and this will help to get the discussions started on this email list. All the best, JWC Adrian Tymes wrote: --- James Conway wrote: Please reply regarding your opinions, "Should we charge users when they cancel without advanced notice on the Raith system?" If you're conducting a poll, then I vote yes. Specifically, if they cancel less than 4 hours (x<=240 minutes) in advance, charge them for their full reservation; if they cancel at least 4 but no more than than 24 hours (240 From ifushman at stanford.edu Wed Dec 7 18:06:14 2005 From: ifushman at stanford.edu (Ilya Fushman) Date: Wed, 7 Dec 2005 18:06:14 -0800 Subject: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? References: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <5.1.1.5.2.20051207170604.01a5fe00@snow.stanford.edu> Message-ID: <16d201c5fb9b$f7f505e0$555540ab@BEHEMOTH> Dear All, There have been times when I destroyed my sample moments before using the Raith. I think that on average most people who sign up, show up. I doubt that most people block off time in advance with less than 80% of intent to really use it. I think that you can penalize people who do not show up and leave the system reserved, but if anything happens, you should be able to email the list and remove the reservation without penalty. In that case, it is first come first serve, as it has been. Also, there is a gray area where people trade sessions last minute. In that case, how will you differentiate someone canceling last minute and someone wanting to swap? -ilya ----- Original Message ----- From: Ofer Levi To: James Conway Cc: Raith SNF Mailing list Sent: Wednesday, December 07, 2005 5:17 PM Subject: Re: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? Dear James, I would like to separate the issue of finding a good way to ensure the system will be used at all times, from educating people that are negligent in reporting that they can not make it to their Raith reservation. I have found that in many cases when you develop your last e-beam run and need inspection, you do not know till you exam your samples in the raith using SEM inspection if it worked, or you have to pull out your samples. In addition, charging people for short cancel notice may be working for people who only have Raith write and inspection, or simple etch steps. For some of us who go through multiple steps of processing and then go through Raith write and need to cancel an hour or two in advance, due to another system that is down as happens often here, it will be a bad idea. I believe that you want to find some penalties for people who do not show up and do not tell anyone, but a much more effective way is to restrict machine use for 2 weeks so they will remember to report it all the times. Once people do report that they can not use the machine, I do not see any point to force them to tell it 4 hours in advance, unless it is a whole night run, where people would like to use it. In the day time 1-2 hours in advance a should be enough to find a replacement person to use the machine. Charging for the full amount of reservation will also not help, as in this case users will have multiple consecutive reservation tactics to avoid it. Regards, Ofer At 01:07 PM 12/7/2005 -0800, James Conway wrote: Good suggestion! I will also CC the raith at snf.stanford.edu and this will help to get the discussions started on this email list. All the best, JWC Adrian Tymes wrote: --- James Conway wrote: Please reply regarding your opinions, "Should we charge users when they cancel without advanced notice on the Raith system?" If you're conducting a poll, then I vote yes. Specifically, if they cancel less than 4 hours (x<=240 minutes) in advance, charge them for their full reservation; if they cancel at least 4 but no more than than 24 hours (240 From jwc at snf.stanford.edu Wed Dec 7 18:18:30 2005 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 07 Dec 2005 18:18:30 -0800 Subject: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? In-Reply-To: <16d201c5fb9b$f7f505e0$555540ab@BEHEMOTH> References: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <5.1.1.5.2.20051207170604.01a5fe00@snow.stanford.edu> <16d201c5fb9b$f7f505e0$555540ab@BEHEMOTH> Message-ID: <439797F6.30205@snf.stanford.edu> Ilya, Thank you for your comments! You bring up a good point >> In that case, how will you differentiate someone canceling last minute and someone wanting to swap? These users should post to the mail list their intention to swap or trade times and then they should update these changes on coral reservations. Keep you comments coming... JWC Ilya Fushman wrote: > Dear All, > There have been times when I destroyed my sample moments before using > the Raith. I think that on average most people who sign up, show up. I > doubt that most people block off time in advance with less than 80% of > intent to really use it. I think that you can penalize people who do > not show up and leave the system reserved, but if anything happens, > you should be able to email the list and remove the reservation > without penalty. In that case, it is first come first serve, as it has > been. Also, there is a gray area where people trade sessions last > minute. In that case, how will you differentiate someone canceling > last minute and someone wanting to swap? > -ilya > > > > ----- Original Message ----- > From: Ofer Levi > To: James Conway > Cc: Raith SNF Mailing list > Sent: Wednesday, December 07, 2005 5:17 PM > Subject: Re: New Thread: Should we charge users when they cancel > without advanced notice on the Raith system? > > Dear James, > I would like to separate the issue of finding a good way to ensure > the system will be used at all times, from educating people that > are negligent in reporting that they can not make it to their > Raith reservation. > I have found that in many cases when you develop your last e-beam > run and need inspection, you do not know till you exam your > samples in the raith using SEM inspection if it worked, or you > have to pull out your samples. > In addition, charging people for short cancel notice may be > working for people who only have Raith write and inspection, or > simple etch steps. For some of us who go through multiple steps > of processing and then go through Raith write and need to cancel > an hour or two in advance, due to another system that is down as > happens often here, it will be a bad idea. > I believe that you want to find some penalties for people who do > not show up and do not tell anyone, but a much more effective way > is to restrict machine use for 2 weeks so they will remember to > report it all the times. Once people do report that they can not > use the machine, I do not see any point to force them to tell it 4 > hours in advance, unless it is a whole night run, where people > would like to use it. In the day time 1-2 hours in advance a > should be enough to find a replacement person to use the machine. > Charging for the full amount of reservation will also not help, as > in this case users will have multiple consecutive reservation > tactics to avoid it. > > Regards, > Ofer > > > At 01:07 PM 12/7/2005 -0800, James Conway wrote: > >> Good suggestion! >> I will also CC the raith at snf.stanford.edu >> and this will help to get the >> discussions started on this email list. >> >> All the best, >> >> JWC >> Adrian Tymes wrote: >> >>> >>>--- James Conway >>> >>>wrote: >>> >>> >>>> >>>>Please reply regarding your opinions, "Should we charge users when >>>>they >>>>cancel without advanced notice on the Raith system?" >>>> >>>> >>> >>>If you're conducting a poll, then I vote yes. Specifically, if >>>they cancel less than 4 hours (x<=240 minutes) in advance, charge >>>them for their full reservation; if they cancel at least 4 but >>>no more than than 24 hours (240>>charge them at half rate; if they cancel further out than that, >>>don't charge. >>> >>>I would also suggest this for other extremely high use systems. >>>Perhaps someone could check Coral to see what other systems, if >>>any, are at over 50% utilization (or at least over 50% >>>reservation) and thus might need to discourage reservations that >>>may be abruptly cancelled. >>> >>> -------------- next part -------------- An HTML attachment was scrubbed... URL: From ykkato at stanford.edu Wed Dec 7 21:40:45 2005 From: ykkato at stanford.edu (Yuichiro Kato) Date: Wed, 7 Dec 2005 21:40:45 -0800 Subject: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? References: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <5.1.1.5.2.20051207170604.01a5fe00@snow.stanford.edu> Message-ID: <008001c5fbb9$f24050f0$6580a8c0@gyudon> Hi all, The cleanroom at UC Santa Barbara had a reservation system where qualified users for that machine recieved notification e-mails when reservations were cancelled. Of course, you can choose whether to recieve such notifications or not at any time via the reservation system, since you are only interested in those notifications if you are waiting for that instrument. It worked pretty well, also because of the psycological effect from the fact that an email is sent out to many people every time you cancel reservations. People try not to make unnecessary reservations, just because they don't want emails sent out saying "[Reservation Cancelled] E-beam Evaporator #3 - June 12 2003 8:00-9:00 AM by xxx". Such a system would at least get rid of cancellations without notifications. Perhaps coral can also ask the user to input the reason for cancellation within 24 hours, to help SNF maintainance. I think that repeated no-shows and excessive cancellations are irresponsible, and they should get restrictions to reservations. As with charging for the cancelled times, for most of us, it shouldn't be a big deal, since we are capped. (http://snf.stanford.edu/Access/Fees.html) Most people probably work more than 25 hrs/month and if you work more than 160 hrs/month in the cleanroom, man, I'm sorry for you :) In my opinion, being charged for cancellation doesn't cost us (or rather the PIs) anything and will make Raith look good to the SNF management, so why not? Cheers, Yui +++++++++++++++++++++++++++++++++++++++ Yuichiro Kato Postdoctoral Researcher Dai Group Chemistry Department Stanford University tel: (650)-725-9156 fax: (650)-725-0259 e-mail: ykkato at stanford.edu From kimsora at stanford.edu Thu Dec 8 01:57:28 2005 From: kimsora at stanford.edu (Sora Kim) Date: Thu, 8 Dec 2005 01:57:28 -0800 Subject: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? References: <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <20051207205928.96016.qmail@web81604.mail.mud.yahoo.com> <5.1.1.5.2.20051207170604.01a5fe00@snow.stanford.edu> <006b01c5fb9b$211df040$325640ab@kimsora> Message-ID: <003001c5fbdd$cd87f230$948d0c80@kimsora> Also, I really feel responsible for this thread of discussion. I swapped the reservation with Onur, and, yesterday, I seriously felt dizzy and should take a rest outside for some time. When I came back, I got the email from James, and that was it. I hope this can clarify yesterday's happening to all of you and Onur. I know how depressing it is when someone simply does not show up. Sorry for the inconvenience. I am thinking about limiting my reservation time for next week by myself to show my apology. Sora ----- Original Message ----- From: Sora Kim To: James Conway ; Ofer Levi Cc: Raith SNF Mailing list Sent: Wednesday, December 07, 2005 6:00 PM Subject: Re: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? I also had a few experiences of canceling reservations such as breaking my wafer at the last moment or being sick. I think that people who cancel their reservations at the last minute or do not show up might have some unforseen reasons. Charging full amount doesn't seem to be the best option. Rather, limiting reservation time that they can make for the next ten days might be more reasonable. Regards, Sora ----- Original Message ----- From: Ofer Levi To: James Conway Cc: Raith SNF Mailing list Sent: Wednesday, December 07, 2005 5:17 PM Subject: Re: New Thread: Should we charge users when they cancel without advanced notice on the Raith system? Dear James, I would like to separate the issue of finding a good way to ensure the system will be used at all times, from educating people that are negligent in reporting that they can not make it to their Raith reservation. I have found that in many cases when you develop your last e-beam run and need inspection, you do not know till you exam your samples in the raith using SEM inspection if it worked, or you have to pull out your samples. In addition, charging people for short cancel notice may be working for people who only have Raith write and inspection, or simple etch steps. For some of us who go through multiple steps of processing and then go through Raith write and need to cancel an hour or two in advance, due to another system that is down as happens often here, it will be a bad idea. I believe that you want to find some penalties for people who do not show up and do not tell anyone, but a much more effective way is to restrict machine use for 2 weeks so they will remember to report it all the times. Once people do report that they can not use the machine, I do not see any point to force them to tell it 4 hours in advance, unless it is a whole night run, where people would like to use it. In the day time 1-2 hours in advance a should be enough to find a replacement person to use the machine. Charging for the full amount of reservation will also not help, as in this case users will have multiple consecutive reservation tactics to avoid it. Regards, Ofer At 01:07 PM 12/7/2005 -0800, James Conway wrote: Good suggestion! I will also CC the raith at snf.stanford.edu and this will help to get the discussions started on this email list. All the best, JWC Adrian Tymes wrote: --- James Conway wrote: Please reply regarding your opinions, "Should we charge users when they cancel without advanced notice on the Raith system?" If you're conducting a poll, then I vote yes. Specifically, if they cancel less than 4 hours (x<=240 minutes) in advance, charge them for their full reservation; if they cancel at least 4 but no more than than 24 hours (240 From jwc at snf.stanford.edu Fri Dec 9 10:04:58 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 09 Dec 2005 10:04:58 -0800 Subject: Biannual Ebeam Lab Pass through Cleanout and removal of lost and abandoned items Message-ID: <4399C74A.2060901@snf.stanford.edu> Greeting Users of the Ebeam Lab: All Users are requested to check for their lost substrates, engineering materials, and other misc. samples that may have been stored, lost, or forgotten in the Ebeam Lab Pass Through. Users are reminded that this area is for current work in progress only, and you should not be storing your materials in this Pass Through. Deadline: Please remove all items that you wish to retain by mid-day Wednesday December 14, 2005. Items found, abandoned, or forgotten after that date will be removed from this Pass Through and will be considered donated to the Ebeam Lab. We will subsequently utilize these substrates for training and resist material characterization. Request for Donations of useful Engineering Materials: If you have valuable substrates you wish to donate to the Ebeam Lab, particularly GaAs, Lithium Niobate, Sapphire, SOI or other unusual items such as Si3N4 membranes on Silicon -- we would welcome your donation. These items should be submitted to James Conway either in my office, or in the plastic tub above my dry box in the Ebeam Lab. Please label as appropriate the material type and the cleanliness level that these materials have been exposed to so far. Thank you for your assistance! James Conway Ebeam Lab -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Dec 9 10:26:55 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 09 Dec 2005 10:26:55 -0800 Subject: Annual Ebeam Lab Cleanup -- your assistance is requested. Message-ID: <4399CC6F.8010407@snf.stanford.edu> Greetings Ebeam Lab Users: Happy Holiday! As we approach our Annual Holiday Shutdown period I would like to request that ALL USERS of the EBEAM Lab to please take one half hour of their time and take a few moments to clean up the Ebeam Lab area over the course of next week. I have placed the cleanroom vacuum cleaner into this lab and it is stored under the microscope table. There will also be cleaning supplies in the cabinet for your use. I am seeking your assistance to help: * Carefully vacuum off the acoustic foam on the walls carefully removing any particles and flakes that may be evident. * Vacuum behind the Raith system and the Hitachi computer cabinets. * Wipe down all windows, hard surfaces and desktops in the Lab with either the diluted Fast Orange cleaner or TEXCLEAN 100. * Wipe down the chairs in the Cleanroom. Please don't forget the wheels of these chairs too! * Remove scuff marks and debris attached to the flooring tiles. * Clean up the Microscope stage and area around it. * Clean up and reorganize the books and shelves above the Hitachi Computer consoles. Over the Holiday shutdown the Maintenance and Facilities group will be relamping the lab and performing other annual maintenance. We will also request that after this work is completed that they do a thorough cleaning of all the Flooring surfaces after placing the tiles back into proper place. The floors have shifted are starting to lift up from pressure pushing across the floor. Likely we will need to square off and reposition the floor tiles to get them all back firmly in place. Currently I have been suffering from a disk problem in my lower back and have been experiencing great pain. I can barely open the doors much less perform any bending or vacuuming operations. A few minutes of your time and attention, while you allow your systems to pump down, would be so very much appreciated. Thank you for your participation! James Conway and Paul Jerabek -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Fri Dec 9 10:45:57 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Fri, 9 Dec 2005 10:45:57 -0800 (PST) Subject: raith free tue night Message-ID: ... smple will not be ready in time... Gigi From faraon at stanford.edu Fri Dec 9 10:55:50 2005 From: faraon at stanford.edu (Andrei Faraon) Date: Fri, 9 Dec 2005 10:55:50 -0800 (PST) Subject: raith free thursday afternoon Message-ID: I reserved on Tuesday because of Gigi's cancelation. Andrei Faraon Dept. of Applied Physics, 316 Via Pueblo Mall Stanford University Stanford, CA 94305-4090 650 497 3857 From jwc at snf.stanford.edu Fri Dec 9 11:02:51 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 09 Dec 2005 11:02:51 -0800 Subject: Seeking Raith Champions to hel pqualify system in January 4/5, 2006 Message-ID: <4399D4DB.2040001@snf.stanford.edu> An HTML attachment was scrubbed... URL: From koshnick at stanford.edu Fri Dec 9 12:57:59 2005 From: koshnick at stanford.edu (Nick Koshnick) Date: Fri, 9 Dec 2005 12:57:59 -0800 Subject: Raith Free Saturday Evening Message-ID: Sample process not fully ready. Sorry for the late notice. From xinranw at gmail.com Fri Dec 9 18:26:47 2005 From: xinranw at gmail.com (Xinran Wang) Date: Fri, 9 Dec 2005 18:26:47 -0800 Subject: res removed sunday from 11:00 Message-ID: <22ffcd060512091826x51e9ede4w358ca940eeabe97a@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From lwchang at stanford.edu Fri Dec 9 18:51:11 2005 From: lwchang at stanford.edu (Li-Wen Chang) Date: Fri, 9 Dec 2005 18:51:11 -0800 Subject: Raith res removed sunday from 14:00-19:30 Message-ID: <200512100251.jBA2pNgA031328@smtp1.Stanford.EDU> -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Mon Dec 12 12:20:53 2005 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Mon, 12 Dec 2005 12:20:53 -0800 Subject: finish earlier Message-ID: <1134418853.439ddba53aa1b@webmail.stanford.edu> Unloading my sample now. -Hungtao From jwc at snf.stanford.edu Tue Dec 13 11:36:49 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 13 Dec 2005 11:36:49 -0800 Subject: New Thread: Query on UVN-30 Users and developer preferences. Message-ID: <439F22D1.2020105@snf.stanford.edu> Greetings UVN-30 Users: I am taking a quick poll of the UVN-30 Users currently working in the Lab. Please reply with your level of interest in continuing to utilize UVN-30 resist going into the 2006 year AND which developer are you currently using to develop out your patterns. Also welcome your feedback based on your EBL results obtained with this resist. Are you happy with this material? Are you seeking alternative negative tone resist materials for your EBL work here at SNF? Images of your best results would be welcomed too! The favor of your reply is requested. Happy Holidays, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: orig_tar_PRIE_1750XB_color.jpg Type: image/jpeg Size: 159791 bytes Desc: not available URL: From kimsora at stanford.edu Wed Dec 14 10:15:04 2005 From: kimsora at stanford.edu (Sora Kim) Date: Wed, 14 Dec 2005 10:15:04 -0800 Subject: [Raith] Free from 1pm to 2pm. Message-ID: <001701c600da$4ed8cf20$325640ab@kimsora> I am going to use Raith at 2pm due to delay of preparation. Sorry for late notice. Sora -------------- next part -------------- An HTML attachment was scrubbed... URL: From nayoung at stanford.edu Wed Dec 14 18:38:50 2005 From: nayoung at stanford.edu (Na Young Kim) Date: Wed, 14 Dec 2005 18:38:50 -0800 Subject: res 10am-11am tomorrow(12/15/05 Thur) removed Message-ID: <1134614330.43a0d73a7feaf@webmail.stanford.edu> doesn't make sense to have one-hour slot. either ryan extends his write or panjun starts early. From jwc at snf.stanford.edu Fri Dec 16 13:59:57 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 16 Dec 2005 13:59:57 -0800 Subject: Comment raith SNF 2005-12-16 10:38:36: RAITH SYSTEM OFF LINE FOR HOLIDAYS Message-ID: <43A338DD.5080801@snf.stanford.edu> THE RAITH SYSTEM IS NOW OFF LINE TO ALL USERS THROUGHOUT THE HOLIDAY SHUTDOWN. TURN ON SCHEDULED FOR JANUARY 3 OR 4, 2006 FIRST USER ACCESS FOR RAITH CHAMPIONS ONLY END OF DAY JANUARY 5, 2006. ONLY AFTER ZEISS SMT FIELD SERVICE COMPLETES STARTUP, CALIBRATIONS, AND ADJUSTMENTS TO THE COLUMN 24 HOURS AFTER START UP. QUESTIONS IN JANUARY: PLEASE SEE TED BERG, ILYA FUSHMAN, OR CALL JAMES CONWAY 415-412-4825. THANK YOU FOR YOUR SUPPORT THROUGHOUT 2005! HAPPY HOLIDAYS TO EVERYONE, JAMES CONWAY I'M BACK TO SNF ON 1-9-2006