Final Reminder: Ebeam Town Hall Meeting --- TODAY December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend.

James Conway jwc at snf.stanford.edu
Fri Dec 2 16:08:40 PST 2005


Hemanth,

Thank you for your attendance and the great feedback.  I have already 
asked Bryan Tracy to submit a portion of his presentation to us for 
review by the users that may have missed his presentation.  Hopefully I 
will receive that content next week.

Thank you for your support!

James Conway


Hemanth Jagannathan wrote:

> HI James,
>  
>     Thanks for arranging the presentation. It was fantastic in its 
> content, SEM images and tips to get better SEM images. Will it be 
> possible to get a copy of Bryan's presentation? I had to run out for 
> another meeting and would like to go over the presentation again.
>  
> Thanks,
>  
> Best-
>  
> Hemanth Jagannathan
> PhD Candidate
> Department of Electrical Engineering
> Stanford University, CA
> Phone :(O)(650)-725-0417; (C) (650)-380-2105
> e-mail: jhemanth at stanford.edu <blocked::mailto:jhemanth at stanford.edu>
>
>  
>
>     -----Original Message-----
>     From: James Conway [mailto:jwc at snf.stanford.edu]
>     Sent: Friday, December 02, 2005 9:16 AM
>     To: ebeam at snf.stanford.edu; Raith SNF Mailing list;
>     beamtools at snf.stanford.edu; semhitachi at snf.stanford.edu;
>     sem4160 at snf.stanford.edu
>     Cc: weekly report; pease at jumpjibe.stanford.edu
>     Subject: Final Reminder: Ebeam Town Hall Meeting --- TODAY
>     December 2, 2005. 2 - 4 PM CISX 338 All are invited to attend.
>
>
>         Greetings to the Ebeam and Raith User Communities:
>
>      The Ebeam Lab Town Hall Meeting will be held this afternoon
>     Friday December 2, 2005 at 2 - 4 PM in CIS-X 338.  All interested
>     parties are invited to attend this event which is always open to
>     everyone.
>
>
>     For your enjoyment we will have a presentation "Scanning Electron
>     Microscopy in the IC Industry" by Bryan Tracy, Ph.D..  Bryan is
>     the Manager for the Materials Characterization Lab at Spansion in
>     Sunnyvale, CA.  He presented a very interesting presentation at
>     the Hitachi Nanotechnology Seminar  and I invited him here to SNF
>     to give his presentation here.
>
>     This is a great opportunity to review some really fine Scanning
>     Electron Microscopy work from an industrial perspective, while
>     obtaining tips and tricks towards improving the quality of your
>     SEM Imaging.
>
>     Light Refreshments will be served.
>
>      Thank you for your participation!
>
>     Yours,
>
>     James Conway
>
>
>       Agenda for December's Ebeam Town Hall Meeting
>
>      Friday December 2, 2005 from 2 - 4 PM in CISX 338
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     This forum is intended to allow lab members using the RAITH 150
>     and Hitachi HL-700 Ebeam exposure systems to provide feedback and
>     inputs towards creating a supportive community of users working
>     together to establish best practices and methods pushing the
>     limits of Ebeam Lithography.
>     This is also an opportunity to report your EBL results, problems,
>     and concerns and obtain feedback from the community-at-large.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     Last year this forum successfully developed new reservation and
>     system usage guidelines that improved system access and
>     utilization for a large user base.  This effort was successful and
>     guided similar equipment policies on other SNF tools.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     1. Welcome and Introduction - James W. Conway  (5 min.)
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     2. Feature Presentation:
>      "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy,
>     Ph.D..
>      Member of the Technical Staff, Spansion, Sunnyvale, CA.  (40
>     minutes + Q&A)
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     3. Raith System Resolution and performance status report   (5 - 10
>     minutes)
>                 - Current Performance issues and results.
>                 - Holiday shut down plan.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     4. Raith Reservation and Scheduling Issues:             
>                 (<20 minutes)
>
>                 - Changes or Modification to the current reservation
>     policies in place?
>
>                 - Cancellation Policy - 24 hour notice?
>                 - Should we have penalty or charge for cancellations?
>
>                 - Should we implement a Raith Users System Standby list?
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     5. Query of User needs for Negative Tone Ebeam resist for R&D in
>     2006:   (<20 min.)
>
>                 - Microchem MaN-2403 negative tone resist review. 
>
>                 - User interest in HSQ and Calixarenes for High
>     Resolution Negative Tone resist?
>
>     <!--[if !supportEmptyParas]--><!--[endif]-->
>
>
>
>     <!--[endif]-->
>
>      Your inputs are invited.
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     James W. Conway
>
>     Stanford Nanofabrication Facility
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>     <!--[if !supportEmptyParas]--> <!--[endif]-->
>
>
>
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/raith/attachments/20051202/b6c46922/attachment.html>


More information about the raith mailing list