System coming back up online for RAITH Champions over the weekend. READ ME ALL!
jwc at snf.stanford.edu
Fri Jan 7 17:16:45 PST 2005
I was able to restore normal FE-Gun operations after the EHT trip we had
early this morning. The Gun continues to run in and it will be expected
that the emission will slowly increase towards a target of 119 uA over
the weekend. Currently EHT I is 60.4 uA. Vacuum has returned to
7.0E-010 mbar levels which is optimal.
This evening I am running the qualification run at 10 kV, 30 um apt., 5
mm working distance. I have saved suitable settings for the Gun/Apt
alignment and the writefield alignment values to the default mic.ini
file so all users can accept these values as they come on the system if
they desire to when prompted.
I have several more issues to resolve on the system related to beam
blanking leakage concerns and shot dots appearing out of the reduced
rastering areas. Note: I was unable to obtain contamination dots as
would be normal on the system. However examining the scan raster
artifacts I do see the minute dot normal artifacts. QED: We do have a
minute beam but for reasons unknown when we go into spot mode using the
software something strange may be occurring with the placement or dwell
time of the dot shots. What I am observing with longer dwell time shots
are features several microns in diameter and very diffuse -- as if the
system loses focus during the shot operation. Very strange but true.
So after many hours attempting to get through this challenge; I have
decided to proceed with an extended write of a number of patterns and we
will examine the EBL results on this chip on Monday. I am also
conducting a blanker leakage test to evaluate the beam blankers that
dwell on a site for various increasing dwell times then moves to a new
spot and repeats. Thanks go out to Bernd Stegemann at RAITH GmbH whom
provided this test as a macro for me to run on the system.
Please allow this write to complete in its entirety -- I expect it to
finish between 6 and 8 PM this evening but it may take longer. DO NOT
ABORT THIS WRITE.
I am placing the system on CORAL into 'yellow light mode' and RAITH
Champions may access the system for their use this weekend but with the
caveat that I expect these users to promptly report their results and
provide data and images to me of their EBL results. This will assist me
in establishing new baselines for performance for the system. Many eyes
are better than one. All other users whom wish to access the system if
it is not in use by raith champions are requested to call me on my cell
phone for permission to utilize the system.
Limitations of Use:
NO OPERATIONS ON THE SYSTEM TO EXCEED 15 kV ACCELERATION VOLTAGE.
All materials going into the system shall be baked for 90 sec. on the 90
degree hot plate in the Ebeam lab, or oven baked at any temperature
greater than 90 degrees for 30 minutes. This is to ensure we maintain a
clean system as we condition the system and run in the FE-Gun.
Please contact me if you have any concerns.
Thank you for your support!
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