Problems continue w/ raith SNF 2005-01-13 18:20:23: System still cannot write high resolution features. SEM functions fine!

James Conway jwc at snf.stanford.edu
Thu Jan 13 18:47:19 PST 2005


Raith SNF 2005-01-13 18:20:23: System still cannot write high resolution 
features. SEM functions fine!

Good Evening Raith Users:

I am continuing to work on the problems we have encountered after the 
shutdown and PM with much larger spots written than usual resulting in 
grossly overdosed area and single pixel line features.  I am turning 
CORAL to 'yellow light' mode to all RAITH CHAMPIONS ONLY to utilize the 
system for SEM CD inspections and your troubleshooting if you desire. I 
will return to this effort from 10 - 1:00 tomorrow. (Friday Jan 14, 
2004) Others call me if you wish to try overnight tonight.

The SEM and Image Acquisition and Metrology sections are working fine 
and resolution in SEM mode is excellent.
Minimum feature I resolved today was 10 nm at 10 kV., WD 5 mm, 30 um apt.

While you may attempt to perform EBL writes, but I personally would 
desire you did not do this on critical work as your results may vary 
from what you normally expect to get from this system. Single shot dots 
are 100 nm in diameter with a 1.5 - 2.0 um blur or scattering artifact 
around these features.
I performed several test writes today and will develop and evaluate in 
the morning.

I have requested they ship me a new calibrated Electron Optics board to 
perform additional test. Other causes could be problems during 
unblanking with the objective lens controls, and the new installed 
FE-Gun emission settings. 
We continue to evaluate this problem and will resolve it ASAP with 
RAITH''s assistance.

Thank you for your support!

James Conway


-------- Original Message --------
Subject: 	Problem raith SNF 2005-01-13 18:20:23: System still cannot 
write high resolution features. SEM functions fine!
Date: 	Thu, 13 Jan 2005 18:20:23 -0800
From: 	jwc at snf.stanford.edu
To: 	raith-pcs at snf.stanford.edu



System still cannot write high resolution features.
SEM functions fine!  Requesting a new electron optics board.
Placing system in yellow mode to allow RAITH Champion access for SEM and CD measurements.
Your attempts at EBL may have poor results -- at your risk.
Another set of eyes may see other problems leading to ID of root cause of problem.
JWC 01132005:1800 hours
High resolution features failed to be resolved and all features appear grossly overdosed.  Smallest single pixel lines at dose factor 1 are approximately 1 - 3 um (optical micr. 1000X PL)
system placed into shut down mode. [NOW CLEARED]
JWC 01112005:1356 hrs

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/raith/attachments/20050113/b247091f/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Au_100kX.tif
Type: image/tiff
Size: 787028 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/raith/attachments/20050113/b247091f/attachment.tif>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Au_250000kX.tif
Type: image/tiff
Size: 787028 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/raith/attachments/20050113/b247091f/attachment-0001.tif>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: shot_study4_HW_test_2350x.tif
Type: image/tiff
Size: 787028 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/raith/attachments/20050113/b247091f/attachment-0002.tif>


More information about the raith mailing list