Raith: interesting (important?) discovery
Mark Topinka
mtopinka at stanford.edu
Mon Jul 4 01:46:05 PDT 2005
Hi- if anyone is continuing to have problems with part(s) of their pattern
being blurry or not exposing at all, while the rest of it seems fine,
please contact me asap. I think I've figured out a work-around, even
though I still don't understand the underlying hardware problem. As best I
can tell, this is not happening because of a leaky beam blanker. Rather,
it seems that after a long time being blanked (like, between writefield
moves), the beam is out of focus and/or low in beam current for the first
roughly 0.01-0.1 seconds after being unblanked (+ or - a factor of ten,
probably - I haven't measured it carefully, and it probably depends on lots
of things). Short blankings, like between dots or objects within one
writefield don't affect it, so after the initial "warm-up" time in each
writefileld, my experience has been that the rest of the pattern writes
great. The (hack) solution that I found is to make a sacrificial object in
each writefield that takes about a second to write and is the first thing
that gets written. (Use the "O" command in the raith pattern editor to
order your objects so that it is the first object written, otherwise it
does no good). I have no idea *why* the raith is doing this. Has anybody
else continued to experience these problems (even after the column
replacement?) or have I been the only one? -Mark
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