From rcrane at snf.stanford.edu  Wed Jun  1 08:51:14 2005
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Wed, 01 Jun 2005 08:51:14 -0700
Subject: Column work delayed two weeks
Message-ID: <429DD972.2070306@snf.stanford.edu>

Raith users:

The column replacement work scheduled for the week of June 6 has been 
delayed and is tentatively rescheduled for the week of June 20. I have 
removed the maintenance reservations from the week of  June 6. Please 
feel free to sign up for this newly opened time.

Thanks,

Dick


From hansj at stanford.edu  Wed Jun  1 13:51:18 2005
From: hansj at stanford.edu (Shu-Jen Han)
Date: Wed, 01 Jun 2005 13:51:18 -0700
Subject: res removed Fri. 9a-12p
Message-ID: <6.0.1.1.2.20050601135037.04600540@hansj.pobox.stanford.edu>

enjoy



From ifushman at stanford.edu  Thu Jun  2 21:32:35 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Thu,  2 Jun 2005 21:32:35 -0700
Subject: done early
Message-ID: <1117773155.429fdd63d4908@webmail.stanford.edu>


done early. arvind is next.
-ilya


From rissman at stanford.edu  Fri Jun  3 11:54:13 2005
From: rissman at stanford.edu (Paul Rissman)
Date: Fri, 03 Jun 2005 11:54:13 -0700
Subject: Fwd: MNE 2005 - Abstract Submission - Deadline Notice 
Message-ID: <5.1.1.5.2.20050603115350.01831bd8@rissman.pobox.stanford.edu>


>X-Sieve: CMU Sieve 2.2
>Reply-To: <abstracts at mne05.org>
>From: "Abstracts MNE 05" <abstracts at mne05.org>
>To: <abstracts at mne05.org>
>Subject: MNE 2005 - Abstract Submission - Deadline Notice
>Date: Fri, 3 Jun 2005 20:09:04 +0200
>X-Mailer: Microsoft Outlook IMO, Build 9.0.2416 (9.0.2910.0)
>Importance: Normal
>X-Scanned-By: MIMEDefang 2.38
>
>mne-2005_for_web.jpg
>
>The 31st International Conference on Micro- and Nano-Engineering will be 
>held in Vienna, Austria, 19 - 22 Sept 2005.
>
>Just a reminder that abstracts are due by
>12 June 2005!
>
>Please submit your abstract on-line using the MNE 2005 website 
><http://www.mne05.org>www.mne05.org
>
>For complete abstract guidelines and conference information, please refer 
>also to our website.
>
>Hans Loeschner
>MNE 2005 Program Chair
><mailto:abstracts at mne05.org>abstracts at mne05.org
>
>Please disregard this information if you already have submitted your 
>abstract(s).
>
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From jwc at snf.stanford.edu  Mon Jun  6 14:47:06 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 06 Jun 2005 14:47:06 -0700
Subject: Column work delayed two weeks  RAITH system offline 10 AM Monday
 June 20 through afternoon June 24.
In-Reply-To: <429DD972.2070306@snf.stanford.edu>
References: <429DD972.2070306@snf.stanford.edu>
Message-ID: <42A4C45A.6080305@snf.stanford.edu>

Greetings Raith Users:

The planned downtime to replace the RAITH 150 system SEM Column must be 
delayed for two weeks.

The RAITH system will then be going offline to users 10 AM Monday June 
20 through late afternoon Friday June 24.
We may possibly be seeking standby operators for test exposures evening 
and overnight on Thursday June 23, 2005; but only if we can complete 
raith field service test before that time.  Please see James Conway if 
you are interested in helping us qualify the system.

Why the delay?

RAITH GMBH and Zeiss SMT field service personnel working in Oberkocken, 
DE. were forced to delay the scheduled installation of the new SEM 
column on our RAITH Ebeam lithography system due to their want to fully 
characterize the replacement SEM column.  It was discovered during 
initial  testing that the Aperture Plate was aligned to the default LEO 
1530 orientation and not to the standard RAITH 150 aperture orientation 
which is required by the RAITH system. This forces the people working on 
the system to break gun section vacuum, rotate the aperture plate, and 
perform an additional bakeout on the system.

This is your notice that we will be taking the system off line from 10 
AM Monday June 20 through  late afternoon June 24, 2005. PCM test and 
Qualification runs will be conducted that Friday afternoon 13:00 - 18:00 
hours.  There is the opportunity to " Share the Ride" with me during 
these test.

Raith and myself apologize for the change in the planned downtime, but 
this was unavoidable.  Users are encouraged to make good use of this 
additional time remaining to complete your work if possible on the system.

Thank you for  your support!

James W. Conway

Dick Crane wrote:

> Raith users:
>
> The column replacement work scheduled for the week of June 6 has been 
> delayed and is tentatively rescheduled for the week of June 20. I have 
> removed the maintenance reservations from the week of  June 6. Please 
> feel free to sign up for this newly opened time.
>
> Thanks,
>
> Dick

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From jwc at snf.stanford.edu  Mon Jun  6 14:49:38 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 06 Jun 2005 14:49:38 -0700
Subject: Annoucement 2:  RAITH system offline 10 AM Monday June 20 through
 afternoon June 24.
In-Reply-To: <429DD972.2070306@snf.stanford.edu>
References: <429DD972.2070306@snf.stanford.edu>
Message-ID: <42A4C4F2.6080807@snf.stanford.edu>

Greetings Raith Users:

The planned downtime to replace the RAITH 150 system SEM Column must be 
delayed for two weeks.

The RAITH system will be going offline to users 10 AM Monday June 20 
through late afternoon Friday June 24.

We may possibly be seeking standby operators for test exposures evening 
and overnight on Thursday June 23, 2005; but only if we can complete 
raith field service test before that time.  Please see James Conway if 
you are interested in helping us qualify the system.

Why the delay?

RAITH GMBH and Zeiss SMT field service personnel working in Oberkocken, 
DE. were forced to delay the scheduled installation of the new SEM 
column on our RAITH Ebeam lithography system due to their want to fully 
characterize the replacement SEM column.  It was discovered during 
initial  testing that the Aperture Plate was aligned to the default LEO 
1530 orientation and not to the standard RAITH 150 aperture orientation 
which is required by the RAITH system. This forces the people working on 
the system to break gun section vacuum, rotate the aperture plate, and 
perform an additional bakeout on the system.

This is your notice that we will be taking the system off line from 10 
AM Monday June 20 through  late afternoon June 24, 2005. PCM test and 
Qualification runs will be conducted that Friday afternoon 13:00 - 18:00 
hours.  There is the opportunity to " Share the Ride" with me during 
these test.

Raith and myself apologize for the change in the planned downtime, but 
this was unavoidable.  Users are encouraged to make good use of this 
additional time remaining to complete your work on the system before the 
down time commences.

Thank you for  your support!

James W. Conway

Dick Crane wrote:

> Raith users:
>
> The column replacement work scheduled for the week of June 6 has been 
> delayed and is tentatively rescheduled for the week of June 20. I have 
> removed the maintenance reservations from the week of  June 6. Please 
> feel free to sign up for this newly opened time.
>
> Thanks,
>
> Dick

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From cwhicks at stanford.edu  Tue Jun  7 21:16:59 2005
From: cwhicks at stanford.edu (Clifford Hicks)
Date: Tue, 7 Jun 2005 21:16:59 -0700 (PDT)
Subject: Raith free 6-9am tomorrow (Wed 8 Jun)
Message-ID: <Pine.GSO.4.44.0506072116020.16992-100000@elaine30.Stanford.EDU>



I haven't properly prepared.






From jwc at snf.stanford.edu  Thu Jun  9 17:02:16 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 09 Jun 2005 17:02:16 -0700
Subject: I am handing off to Hungtao Chou early... 
Message-ID: <42A8D888.5080206@snf.stanford.edu>

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From jwc at snf.stanford.edu  Thu Jun  9 17:29:53 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 09 Jun 2005 17:29:53 -0700
Subject: Annoucement 3 :  RAITH system offline 10 AM Monday June 20 through
 afternoon June 24.
In-Reply-To: <429DD972.2070306@snf.stanford.edu>
References: <429DD972.2070306@snf.stanford.edu>
Message-ID: <42A8DF01.5080707@snf.stanford.edu>

  Greetings Raith Users:

The RAITH system will be going offline to users 10 AM Monday June 20 
through late afternoon Friday June 24.

We may be seeking standby operators for test exposures evening and 
overnight on Thursday June 23, 2005; but only if we can complete raith 
field service test before that time.  Please see James Conway if you are 
interested in helping us qualify the system.

This is your notice that we will be taking the system off line from 10 
AM Monday June 20 through  late afternoon June 24, 2005. PCM test and 
Qualification runs will be conducted that Friday afternoon 13:00 - 18:00 
hours.  There is the opportunity to " Share the Ride" with me during 
these test.

Users are encouraged to make good use of the available time remaining to 
complete your work on the system before the down time commences. As in 
the past it is sometimes challenging to bring these system back up and 
into order.  All parties will do their very best to complete this work 
within the scheduled time.

Thank you for  your support!

James W. Conway

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From jwc at snf.stanford.edu  Thu Jun  9 18:17:04 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 09 Jun 2005 18:17:04 -0700
Subject: JWC is out FRI. & MON: HOW to get help on the RAITH System during
 your session -- "Who are your gonna call"  
Message-ID: <42A8EA10.9090708@snf.stanford.edu>


FAQ ##:  SYSTEM PROBLEMS:  "WHO ARE YOU GOING TO CALL"

Greetings Raith Users:

I will be away this Friday and next Monday attending a training event in 
Southern California. I will be returning 8:30 AM Tues.
I wish to remind everyone that we have set into place a hierarchical 
structure on what to do and whom to call if you encounter problems on 
the RAITH 150 system during my absence, or for those times I am not be 
available by cell phone.

I may not be available by phone during this period at 415-412-4825 
because at times I will be 'off-the-grid'. Please leave a voice mail and 
I will respond as soon as I am able to.

For Example:

    * You encounter a LOAD LOCK Error 5 on the system and cannot 
complete the Load/ Unload cycle without an administrator login.
    * The pumps or system hardware are not working normally and the 
logic may have become reversed.
    * Beam Blanking Logic is reversed due to an RAITH150.exe application 
crash when the beam was unblanked...

   1. If I am available, try to call me on my cell and I will walk you 
through the Recovery procedures. 001-415-412-4825
      (NOTE:  I live on the fringe of cell service when at home, and 
every Monday evening am off the grid after 10 PM and cannot be reached. 
Sometimes I can receive a SMS text messages.  I will respond if I am 
able to ASAP.

   2. Try to contact a RAITH Champion:
      Luigi Scaccabarozzi gigi at snf.stanford.edu  at 1-650-725-6970  GIGI 
will be away this weekend too!
      Arvind Sundaramurthy  arvisun at stanford.edu 1-650- 450-0475
      Ryan Tu ryantu at stanford.edu  1-650-799-6492
      Mark Topinka mtopinka at stanford.edu  1-650-387-6049
      David Fattal dfattal at stanford.edu  650-724-9612 office  
650-723-8586 lab


   3. Contact a RAITH USA Application Support Specialist:

Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com  218-483-1267
    

   4. For Major Hardware issues and all emergencies with the LEO or 
RAITH Hardware:
Contact the  RAITH USA Field Service Manager, Cole Loomis 
cl at raithusa.com   (631) 738-9500
or Kevin Burcham kb at raithusa.com also at the Main Raith USA line (631) 
738-9500
    

Finally unless it is a catastrophic failure and the system becomes 
unsafe or in the least terrifying to operate -- please avoid placing the 
system into RED LIGHT Mode when I am away. ALWAYS report all errors and 
comments to to the CORAL 'Make Comments' or 'Report Problem' section so 
it gets logged into our tracking system. To quote John Shott, "Its not a 
problem until it is reported to CORAL."

Many thanks to the many Raith Champions whom have come forward and 
offered to cover for me during my absence!

Thank you all for your support!

James Conway
Ebeam Technology Group
Stanford Nanofabrication Facility.
650-725-7075
cell 415-412-4825
jwc at snf.stanford.edu



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From hungtao at stanford.edu  Thu Jun  9 20:39:03 2005
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Thu,  9 Jun 2005 20:39:03 -0700
Subject: write will finish early 
In-Reply-To: <42A8D888.5080206@snf.stanford.edu>
References: <42A8D888.5080206@snf.stanford.edu>
Message-ID: <1118374743.42a90b5766b74@webmail.stanford.edu>

I started earlier and my wirte finish around 9pm.  -Hungtao

Quoting James Conway <jwc at snf.stanford.edu>:

>
>
>
>
>
>
>
> I was working with another two users this afternoon, and will not have
> enough time to complete my planned write on the system scheduled for
> this evening before your session will begin. I  desire to hand off to
> you and give you some more time for your work in deference to the
> delays that I have contributed to your project last month when my
> writes extended into your session time.
>
>
>
> If you cannot start early just forward to the RAITH group that the
> system is available.
>
> Good Beam current today. Voltage is stable to 20 kV. Adjustments I made
> to the gun parameters Fil I ten days ago have stabilized within the
> optimal range.
>
>
>
> All the best,
>
>
>
> James Conway
>
>
>
>
>




From ahazeghi at stanford.edu  Fri Jun 10 17:37:56 2005
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Fri, 10 Jun 2005 17:37:56 -0700
Subject: Raith free
Message-ID: <544cf5414042e89af2daf2a2bae3b838@stanford.edu>

Raith is free,
enjoy
Arash



From ifushman at stanford.edu  Fri Jun 10 18:27:34 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Fri, 10 Jun 2005 18:27:34 -0700
Subject: won't make reservation tonight. will remove it as soon as i can
References: <544cf5414042e89af2daf2a2bae3b838@stanford.edu>
Message-ID: <001301c56e24$be99ddc0$0300a8c0@ilya>

Sorry for the late notice. I have other pending work.

----- Original Message ----- 
From: "Arash Hazeghi" <ahazeghi at stanford.edu>
To: "raith" <raith at snf.stanford.edu>
Sent: Friday, June 10, 2005 5:37 PM
Subject: Raith free


> Raith is free,
> enjoy
> Arash
> 


From hendrikb at stanford.edu  Sat Jun 11 13:51:04 2005
From: hendrikb at stanford.edu (Hendrik Bluhm)
Date: Sat, 11 Jun 2005 13:51:04 -0700 (PDT)
Subject: Raith free in ~30 min
Message-ID: <Pine.GSO.4.44.0506111350260.17912-100000@elaine34.Stanford.EDU>

finishing early

---------------------------------------------------
Hendrik Bluhm


Department of Physics
Stanford University

Work address:                    Moler Lab
           			Lab. for Advanced Materials
Phone: (650) 723-4012           McCullough Bldg.
Fax:   (650) 725-2189           476  Lomita Mall
                                Stanford, CA 94305




From hungtao at stanford.edu  Sun Jun 12 20:21:16 2005
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Sun, 12 Jun 2005 20:21:16 -0700
Subject: Raith available tomorrow 10am-2pm
Message-ID: <1118632876.42acfbac2f5d2@webmail.stanford.edu>

sample not ready. -Hungtao


From yamanaka at snowmass.stanford.edu  Mon Jun 13 23:16:41 2005
From: yamanaka at snowmass.stanford.edu (Kazuhiko Yamanaka)
Date: Mon, 13 Jun 2005 23:16:41 -0700
Subject: Raith Problem: Monitor of SEM does not work.
In-Reply-To: <1118632876.42acfbac2f5d2@webmail.stanford.edu>
References: <1118632876.42acfbac2f5d2@webmail.stanford.edu>
Message-ID: <20050613230337.62AE.YAMANAKA@snowmass.stanford.edu>

Dear James and Raith users,

The monitor of SEM User Interface does not work, so that I could not use Raith.
My previous user noted the same problem.

Best wishes,
Kazuhiko


From jwc at snf.stanford.edu  Tue Jun 14 09:52:39 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 14 Jun 2005 09:52:39 -0700
Subject: [Fwd: Re: Problem raith SNF 2005-06-13 15:10:27: RAITH monitor doesn't
 work]
Message-ID: <42AF0B57.4010707@snf.stanford.edu>

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From jwc at snf.stanford.edu  Tue Jun 14 09:57:38 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 14 Jun 2005 09:57:38 -0700
Subject: Annoucement 4 :  RAITH system offline 10 AM Monday June 20 through
 afternoon June 24.
In-Reply-To: <429DD972.2070306@snf.stanford.edu>
References: <429DD972.2070306@snf.stanford.edu>
Message-ID: <42AF0C82.9090106@snf.stanford.edu>

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From ahazeghi at stanford.edu  Thu Jun 16 15:03:51 2005
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Thu, 16 Jun 2005 15:03:51 -0700
Subject: Reservation removed
Message-ID: <0c76cb88407c036736d9f35ed2d354a0@stanford.edu>

Reservation removed tonight, sample not ready.


  



From zia at stanford.edu  Fri Jun 17 10:55:08 2005
From: zia at stanford.edu (Rashid Zia)
Date: Fri, 17 Jun 2005 10:55:08 -0700
Subject: Raith Free, 3:30am-8am Friday night / Satruday Morning
In-Reply-To: <0c76cb88407c036736d9f35ed2d354a0@stanford.edu>
Message-ID: <200506171755.j5HHt0no028132@smtp-roam.Stanford.EDU>


Sorry, but I won't be able to use this prime slot tonight.  

The Raith is free from 3:30am to 8am early Saturday morning (Friday night).

Cheers, 
Rashid.



From jiencao at stanford.edu  Sun Jun 19 12:16:21 2005
From: jiencao at stanford.edu (Jien Cao)
Date: Sun, 19 Jun 2005 12:16:21 -0700
Subject: raith free 4:30-8pm
Message-ID: <000701c57503$60d4d600$0100000a@chochobo>

Sorry for the late notice.


From ryantu at stanford.edu  Sun Jun 19 12:23:39 2005
From: ryantu at stanford.edu (Ryan Tu)
Date: Sun, 19 Jun 2005 12:23:39 -0700
Subject: raith free 4:30-8pm
In-Reply-To: <000701c57503$60d4d600$0100000a@chochobo>
References: <000701c57503$60d4d600$0100000a@chochobo>
Message-ID: <1119209019.42b5c63beda2b@webmail.stanford.edu>

I'll take it from 4:30 - 6:00

Thanks,
Ryan

Quoting Jien Cao <jiencao at stanford.edu>:

> Sorry for the late notice.
>




From jhemanth at stanford.edu  Sun Jun 19 13:14:57 2005
From: jhemanth at stanford.edu (Hemanth Jagannathan)
Date: Sun, 19 Jun 2005 13:14:57 -0700
Subject: raith free 4:30-8pm
In-Reply-To: <1119209019.42b5c63beda2b@webmail.stanford.edu>
Message-ID: <000501c5750b$940d0b20$0100000a@JAGANNATHANPC>

I'll take it from 6-8pm

Hemanth Jagannathan



From jwc at snf.stanford.edu  Fri Jun 24 18:31:54 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 24 Jun 2005 18:31:54 -0700
Subject: NEW LEO SEM COLUMN installed and system qualified, now back on-line.
 Users restricted to 10 kv through July 6, 2005
Message-ID: <42BCB40A.2040102@snf.stanford.edu>


      Greetings Raith Community:


This week we received installed and characterized a brand new LEO 1530 
SEM column on the RAITH 150 system.
Tuesday evening, working into the early morning with Jason Sanabia and 
Mirwais Aktary, we exchanged the SEM column on the Raith 150 system with 
a new SEM column. Through the remainder of the week we have been 
performing many test and qualification evaluation runs.

I am very much relieved to report that the blanker leakage and column 
scattering issues that we have experienced since mid May of last year 
have now been fully resolved to my satisfaction.  Emission and scatter 
from the column when blanked on the Raith Blanker are now between 0.0002 
and 0.0003 nA for all apertures.  There is no difference between this 
value when the LEO blanker is enabled either. A test script that we have 
been employing to evaluate scatter for various impingement periods, 
which well displayed the problem before we installed the new column, 
also displayed no exposure artifacts evident whatsoever after the column 
exchange.

Please READ:
WE NOW HAVE BASICALLY A BRAND NEW AND CALIBRATED RAITH 150 SYSTEM.  THE 
SEM COLUMN, IN-LENS DETECTOR, THE FE-GUN, AND THE BLANKER SECTIONS ARE 
BRAND SPANKING NEW! THE SYSTEM AND COLUMN ARE EXQUISITELY CLEAN AND FREE 
OF CONTAMINATION -- WE MUST ALL STRIVE TO DILIGENTLY KEEP IT THIS WAY.

ALL USERS MUST COMPLY WITH THE FOLLOWING PROTOCOLS EXACTLY WITH NO 
EXCEPTIONS:

   1. NO OPERATIONS ABOVE 10 kV ACCELERATION VOLTAGE WHILE WE CONDITION
      THE FE-GUN.( through 7-6-1005)
   2. NO RESIST OR OTHER MATERIALS THAN HAVE NOT BEEN SOFT BAKED TO >
      150 DEGREES C.
   3. BEFORE GOING INTO THE LOAD LOCK ON THE SYSTEM ALL CHIPS AND WAFERS
      MUST BE SOFT BAKED AGAIN AT >= 90 DEGREES CELSIUS FOR 90 SECONDS.
      REMARKABLE YOU WILL OBTAIN BETTER CONTAMINATION DOTS TOO!
   4. NO CARBON TAPE, EPOXIES, GREASES, OR OTHER ADHESIVES ARE TO BE
      PLACED INTO THE SYSTEM OTHER THAN MINUTE FRAGMENTS OF SPECTRA TABS
      THIN CONTAMINATION FREE CARBON DOTS. SMALL 1 MM STRIPES ARE
      RECOMMENDED.  ALL OTHER HOLD DOWN FIXTURES MUST BE FRESHLY SOLVENT
      CLEANED AND BAKED BEFORE ENTERING SYSTEM.

IF YOU ARE UNABLE TO FOLLOW THESE GUIDELINES EXACTLY TAKE YOUR WORK 
ELSEWHERE!

Should you have any questions please see during my office hour!


      Finally everyone working on the Stanford RAITH system owes a great
      debt of gratitude to the following people for making the extra
      effort and going the distance to resolve this problem.  Any other
      manufacturer would have not gone to this level of effort that the
      RAITH team has made to address our concerns, and to ensure that we
      had the very best system possible to perform our research here at
      SNF! 


        Special recognition goes out to:

George Lanzarotta gl at raithusa.com President RAITH USA  -- This 
replacement is likely costing him in excess of $50 K US.

Ralf Jede Director RAITH GmbH for his continuing concern and support 
through this period. He freed up the personnel resources necessary to 
successfully complete the task from the RAITH Dortmund site side.

Bernd Stegemann, Stegemann at Raith.de   RAITH GmbH, Dortmund.  For time 
and travel well above reasonable expectations. His outstanding talent 
and effort made both here at Stanford and at Raith in Dortmund, DE and 
working in Oberkocken at the Zeiss factory ensured we obtained the very 
best column set up possible.

 Michael  Kahl kahl at raith.de for his continuing technical and 
application support.  We worked well into the night during my visit to 
Dortmund, DE in April and we made critical observations comparing 
several RAITH systems that gave us the right directions to proceed IN to 
address the scattering issues.

Cole Loomis RAITH USA Field Service Manager  We must have had  100 hours 
on the phone CALLS nights and mornings during measurements over the last 
year.

Jason Sanabia and Mirwais Aktary RAITH USA Field Service for time and 
effort above and beyond any reasonable expectation.  The three of us 
have been at it since the minute they arrived here at SNF this week and 
we completed the plan on time and with an successful outcome. These guys 
are "The Right Stuff."

Mike Santomango Zeiss SMT Field Service.  Despite other commitments from 
Zeiss, he did his absolute best and made sure that when we needed him he 
was there and was able to get the adjustments performed that needed to 
be performed, and for his continuing support. He is one of Zeiss's very 
best technical people.

Dan Pickard, Pease Group Stanford. For continuing consultation and 
support related to electro-static and SEM Column Theory in discussions 
that were useful and informative toward reaching a solution. 


There were many other people involved in this work over the last year 
from both RAITH organizations, Zeiss SMT, and Stanford. Please accept my 
heartfelt thanks for your encouragement and support through the past 
year.  Many many thanks to you all.

Now lets get back to our research and together let us push the limits of 
Ebeam Lithography here at Stanford Nanofabrication Facility.

Sincerely Yours,

James Conway
Ebeam Technology Group
Stanford Nanofabrication Facility








-------- Original Message --------
Subject: 	Problem raith SNF 2005-06-24 13:36:06: Users restricted to 10 
kv through July 6, 2005
Date: 	Fri, 24 Jun 2005 13:36:07 -0700
From: 	jwc at snf.stanford.edu
To: 	raith-pcs at snf.stanford.edu



No operations above 10 kV -- the system was tested hot to 20 kV and cold to 30 kV but we wish to allow additional time for FE-Gun tip conditions to stabilize and vacuum to enter the 10e--010 mbar range.  
I will qualify the system for higher acceleration voltages on July 5, 2005
James Conway
06242005:13:34:00.00

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From jwc at snf.stanford.edu  Mon Jun 27 11:47:38 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 27 Jun 2005 11:47:38 -0700
Subject: ANNOUNCEMENT: Take a spin with me Ebeam resist training on the headway
 spinner. Tuesday 10 am - 1 PM.
Message-ID: <42C049CA.6030806@snf.stanford.edu>


  Greetings RAITH Group XIV and other interested people:


  Please come and 'Take a Spin with Me.'


      I will be conducting  Ebeam Resist Handling on the Headway Spinner
      working with several polymers and you can use this opportunity to
      clean and coat your wafers for your work too!



      I will be starting with wafer cleans for clean level Silicon and
      stripping old resist as well on WBNONMETAL starting at 10 AM then
      starting coating operations from 11 - 12:30.  I have reserved the
      headway from 11 - 1:00 PM for your usage.



      No need to reply to this email -- just show up and learn and get
      qualified on this very useful tool.



Thank you,

james Conway

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From jwc at snf.stanford.edu  Mon Jun 27 17:24:27 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 27 Jun 2005 17:24:27 -0700
Subject: [Fwd: Comment raith SNF 2005-06-27 17:16:45: USERS ARE RESTRICTED
 TO BELOW 20 KV OPERATIONS.]
Message-ID: <42C098BB.1070509@snf.stanford.edu>

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From jwc at snf.stanford.edu  Mon Jun 27 17:52:27 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 27 Jun 2005 17:52:27 -0700
Subject: [Fwd: Raith Micrograph Award 2005]
Message-ID: <42C09F4B.5020006@snf.stanford.edu>

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From zia at stanford.edu  Mon Jun 27 18:26:07 2005
From: zia at stanford.edu (Rashid Zia)
Date: Mon, 27 Jun 2005 18:26:07 -0700
Subject: Raith free tomorrow, 9am-1pm
Message-ID: <200506280125.j5S1PsNN000901@smtp-roam.Stanford.EDU>

Hi everyone, 


I have canceled my reservation from 9am - 1pm tomorrow (Tuesday).

 

Sorry for the late notice, but I can not use my time tomorrow morning.

 

Apologies, 

Rashid.

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From jwc at snf.stanford.edu  Wed Jun 29 12:11:06 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 29 Jun 2005 12:11:06 -0700
Subject: ANNOUNCEMENT:  Please welcome RAITH Group XIV to the Raith community.
Message-ID: <42C2F24A.504@snf.stanford.edu>

Greetings Raith Community:

Please welcome the next six users from RAITH Group XIV into the RAITH 
Community!

These individuals worked very hard with me attending both the Four Day 
Short Course and several additional user sessions and everyone did a 
fine job of coming up to speed as Basic Operators on the RAITH 150 system.

Please work with them and promote the concept of "Sharing the Ride" on 
your runs while working on the system.  This will help us to reduce the 
load lock sample exchange time overhead and enable more people to 
complete their work on the RAITH 150.

Thank you for your support!

James Conway
SNF

<>Raith Group XIV:
 

1. Serena Faruque serenaf at stanford.edu <mailto:serenaf at stanford.edu> Coral: serenaf 

Peter Peumans Group, Electrical Engineering Project: Nanowires placed into circuits for nano-electronics. 

2. SangBum Kim kimsangb at stanford.edu <mailto:kimsangb at stanford.edu> Coral: kimsangb 

H.S. Philip Wong Group Project: nonvolatile memory devices

<>3. Sun-Hae Hong shhong at stanford.edu <mailto:shhong at stanford.edu> 
Coral:  shhong
Yamamoto Group Project: Quantum Dots for Quantum Information Devices.

4. Jun Pan panjun at stanford.edu <mailto:panjun at stanford.edu> Coral: panjun  

 Jim Harris Group  Project:  Stopping Light using a Photonic Crystal

5. Xinran Wang xinranw at gmail.com <mailto:xinranw at gmail.com> Coral: xinranw

Dai Group:  nano-scale Carbon nanotubes and nano-wires (Ge)

6. Yuerui Lu yueruilu at stanford.edu <mailto:yueruilu at stanford.edu> Coral: 
lorry

Dai group:  Carbon Nanotube synthesis

Everyone Gained Qualification on June 28, 2005

 


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From jiencao at stanford.edu  Wed Jun 29 21:03:13 2005
From: jiencao at stanford.edu (Jien Cao)
Date: Wed, 29 Jun 2005 21:03:13 -0700
Subject: finished early
Message-ID: <1120104193.42c36f0150621@webmail.stanford.edu>

Was able to start early, system availible through 10PM.



From ifushman at stanford.edu  Wed Jun 29 22:46:59 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Wed, 29 Jun 2005 22:46:59 -0700
Subject: no image 
Message-ID: <1120110419.42c387536ed3a@webmail.stanford.edu>

I am not able to image with the system even after resetting and restarting
everything. Cancelling reservation.
-Ilya