From rohank at stanford.edu  Thu Mar  3 08:11:51 2005
From: rohank at stanford.edu (Rohan D. Kekatpure)
Date: Thu, 03 Mar 2005 08:11:51 -0800
Subject: Res. Removed 12:30p-17:30
Message-ID: <6.0.1.1.2.20050303081037.01faa540@rohank.pobox.stanford.edu>

Sample wont be ready.

-Rohan



From edwardsj at stanford.edu  Thu Mar  3 09:48:22 2005
From: edwardsj at stanford.edu (Jane Edwards)
Date: Thu, 3 Mar 2005 09:48:22 -0800
Subject: Reminder: e-beam lithography presentation, Friday, March 4
Message-ID: <1109720203.4224fc8b28242@webmail.stanford.edu>


There will be a presentation on electron beam lithography by Dr. Tim Groves
of Leica on:

                                 Friday, March 4th
                                        1 PM
                            CISX 101 (Auditorium)

Recent Progress in Electron Beam Lithography of Nanometer Scale Structures

Dr. Tim Groves, Director of Technology at Leica Microsystems Lithography,
and Consulting Professor of Electrical Engineering at Stanford

E-beam lithography remains the method of choice for fabricating structures
in the range of 4 nm to 200 nm in size. In additon to having inherently
high resolution, it has the ability to store and print complex patterns,
thus avoiding the cost and cycle time of photomasks. Recent years have seen
an enormous proliferation of commercial and research applications for EBL.
Dr. Groves will describe some of these, along with the capabilities and
limitations of the technology. An open discussion of the EBL needs of the
Stanford community will follow.







From ifushman at stanford.edu  Fri Mar  4 19:26:43 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Fri,  4 Mar 2005 19:26:43 -0800
Subject: cancelling write
Message-ID: <1109993203.422926f3a8ffe@webmail.stanford.edu>

There was an EHT trip when I tried to go to 20kV from 15kV. As a result, the
settings on the in-lens detector are off and when I try to go past ~ 15kX on
the magnification, the image area jumps to some random part. At this point
it's impossible for me to stig and focus. According to James the system
should be OK after 1 hr or so. I have another commitment and cannot stay
longer to find out.

-Ilya

---------------------
Ilya Fushman
215 Swain Way
Palo Alto CA 94304
(650) 804 1058
---------------------


From kychen51 at yahoo.com  Sat Mar  5 08:55:12 2005
From: kychen51 at yahoo.com (Kenneth Chen)
Date: Sat, 5 Mar 2005 08:55:12 -0800 (PST)
Subject: cancelling write
In-Reply-To: 6667
Message-ID: <20050305165512.94571.qmail@web51403.mail.yahoo.com>

The random jumping is still occurring after the system has been enabled over a hour.  

With the standard configuration of 10kV, 30 aperature, 550x mag, beam current 0.1803nA,  the random jumping occurs between 13.35kX - 13.5kX.  If you manually adjust the column control to skip past that range, to say...20kX, sometimes the shifting still occurs, but sometimes there's no shifting.  The shift is approximately one viewing area to the lower left.
 
This shifting causes problems with the align writefield as you don't end up in the spot you were previously focusing and stigmating on.  I also cancel the write as I can't get past this step.
 
- Kenneth Chen

Ilya Fushman <ifushman at stanford.edu> wrote:
There was an EHT trip when I tried to go to 20kV from 15kV. As a result, the
settings on the in-lens detector are off and when I try to go past ~ 15kX on
the magnification, the image area jumps to some random part. At this point
it's impossible for me to stig and focus. According to James the system
should be OK after 1 hr or so. I have another commitment and cannot stay
longer to find out.

-Ilya

---------------------
Ilya Fushman
215 Swain Way
Palo Alto CA 94304
(650) 804 1058
---------------------

		
---------------------------------
Celebrate Yahoo!'s 10th Birthday! 
 Yahoo! Netrospective: 100 Moments of the Web 
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From dfattal at stanford.edu  Sat Mar  5 13:16:11 2005
From: dfattal at stanford.edu (David Albert Fattal)
Date: Sat,  5 Mar 2005 13:16:11 -0800
Subject: cancelling write
In-Reply-To: <20050305165512.94571.qmail@web51403.mail.yahoo.com>
References: <20050305165512.94571.qmail@web51403.mail.yahoo.com>
Message-ID: <1110057371.422a219baff7c@webmail.stanford.edu>


> This shifting causes problems with the align writefield as you don't end
> up in the spot you were previously focusing and stigmating on.  I also
> cancel the write as I can't get past this step.

I just expereinced the same problem, with 20um aperture, 10 kV. The shift
occurs when you reach ~ kX of magnification. Can't align writefield...

the Raith is free is somebody else wants to try...

have a nice week-end,

David


From scaccag at stanford.edu  Mon Mar  7 08:32:24 2005
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Mon, 7 Mar 2005 08:32:24 -0800 (PST)
Subject: raith free tuesday night
Message-ID: <Pine.GSO.4.44.0503070832120.23280-100000@elaine37.Stanford.EDU>




From rohank at stanford.edu  Mon Mar  7 08:41:23 2005
From: rohank at stanford.edu (Rohan D. Kekatpure)
Date: Mon, 07 Mar 2005 08:41:23 -0800
Subject: raith free tuesday night
In-Reply-To: <Pine.GSO.4.44.0503070832120.23280-100000@elaine37.Stanford
 .EDU>
References: <Pine.GSO.4.44.0503070832120.23280-100000@elaine37.Stanford.EDU>
Message-ID: <6.0.1.1.2.20050307084004.01fad590@rohank.pobox.stanford.edu>

I will take 6:00-11:00p. Today's 5:30p- res removed.
-Rohan

At 08:32 AM 3/7/2005, Luigi Scaccabarozzi wrote:





From jwc at snf.stanford.edu  Mon Mar  7 09:12:14 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 07 Mar 2005 09:12:14 -0800
Subject: cancelling write -- PROBLEMS ON RAITH...
In-Reply-To: <1109993203.422926f3a8ffe@webmail.stanford.edu>
References: <1109993203.422926f3a8ffe@webmail.stanford.edu>
Message-ID: <422C8B6E.7070801@snf.stanford.edu>

Greetings:

There were numerous reports of problems on the system  in voice mails to 
me over the weekend. 
I will be taking the system at 10 AM to see where the problems actually 
lie.  Sounds like there may have been damage to the ELPHY+ or the image 
display boards as we have observed during previous EHT trips in the 
distant past.


Ryan Tu please grab me when you go to load the system at  9:30 AM...

James Conway


Ilya Fushman wrote:

>There was an EHT trip when I tried to go to 20kV from 15kV. As a result, the
>settings on the in-lens detector are off and when I try to go past ~ 15kX on
>the magnification, the image area jumps to some random part. At this point
>it's impossible for me to stig and focus. According to James the system
>should be OK after 1 hr or so. I have another commitment and cannot stay
>longer to find out.
>
>-Ilya
>
>---------------------
>Ilya Fushman
>215 Swain Way
>Palo Alto CA 94304
>(650) 804 1058
>---------------------
>  
>


From altug at stanford.edu  Mon Mar  7 22:47:00 2005
From: altug at stanford.edu (Hatice Altug)
Date: Mon, 7 Mar 2005 22:47:00 -0800
Subject: Raith:removed reseravtion 8:30pm-6:30am
Message-ID: <000801c523aa$a1048e50$d25540ab@hatice>

I am cancelling my reservation. In addition to the reported jump I got another problem..

-hatice 
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From kychen51 at yahoo.com  Tue Mar  8 13:40:37 2005
From: kychen51 at yahoo.com (Kenneth Chen)
Date: Tue, 8 Mar 2005 13:40:37 -0800 (PST)
Subject: Raith shifting problem fixed yet?
Message-ID: <20050308214037.58339.qmail@web51408.mail.yahoo.com>

Is the random jumping, as you change magnification, still occurring on the Raith right now?  I notice several users have used it since the weekend, but the problem has not been cleared on Coral yet.
 
- Kenneth Chen
coral: kychen51

__________________________________________________
Do You Yahoo!?
Tired of spam?  Yahoo! Mail has the best spam protection around 
http://mail.yahoo.com 
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From jwc at snf.stanford.edu  Tue Mar  8 16:41:03 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 08 Mar 2005 16:41:03 -0800
Subject: Raith shifting problem fixed yet?  NO CURRENT WORKAROUND
In-Reply-To: <20050308214037.58339.qmail@web51408.mail.yahoo.com>
References: <20050308214037.58339.qmail@web51408.mail.yahoo.com>
Message-ID: <422E461F.1080104@snf.stanford.edu>

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From jwc at snf.stanford.edu  Tue Mar  8 16:59:03 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 08 Mar 2005 16:59:03 -0800
Subject: RAITH 150 Plan for some down time and loss of access next week. 
 TUE WED THURS.  3 - 15 to 3-18-05
Message-ID: <422E4A57.2090608@snf.stanford.edu>


Greetings:

RAITH USA will be coming into the SNF ebeam lab at days and times still 
to be determined.
This email is to give you fair notice that it is likely we will need the 
system at various times TUES. WED. THURSDAY days and possibly Friday 
Morning.  Users reserving sessions through this period risk getting 
bumped or canceled.  I already have afternoon sessions scheduled for 
this purpose.

Once I have a firm schedule I will post to this list.

Thank you for your support and interest in Ebeam Technologies here at SNF,

James Conway



From jwc at snf.stanford.edu  Wed Mar  9 09:10:18 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 09 Mar 2005 09:10:18 -0800
Subject: Plan for down time on RAITH -- I will likely need lxuwind's Mondays
 session next week.
Message-ID: <422F2DFA.4090102@snf.stanford.edu>

Hello Liang Xu:

I am trying to get RAITH USA in for service o the system next week, and 
it is likely then will arrive early in the afternoon on Monday and will 
immediately need access to the system.  But keep in mind, as that 
flights are sometimes delayed, and RAITH's plans often change without 
notice to us; I would suggest you coordinate with Ryan Tu on his run 
before you and if you can overlap a bit you should be finished before we 
will need the system.  You may in fact get some extra time if you load 
with ryan in the morning and simply do a hand off of the system when his 
run is completed. Save you the load lock interval and the warm up on the 
system.

I have only a very limited time with which to work with the RAITH people 
while they are here at SNF.  Their schedule seems very limited as they 
have other sites to visit this week. Thank you for the extra effort that 
this request will entail.

Yours,

JWC





From lxuwind at stanford.edu  Wed Mar  9 12:30:08 2005
From: lxuwind at stanford.edu (Liang Xu)
Date: Wed, 9 Mar 2005 12:30:08 -0800
Subject: Raith reservation cancelled 7-12 tonight
Message-ID: <000f01c524e6$c94aaec0$966a40ab@stanford.edu>

I actually cancelled it yesterday evening but forgot to send an email. Sorry about this.
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From cwhicks at stanford.edu  Wed Mar  9 12:54:53 2005
From: cwhicks at stanford.edu (Clifford Hicks)
Date: Wed, 9 Mar 2005 12:54:53 -0800 (PST)
Subject: Raith reservation cancelled 7-12 tonight
In-Reply-To: <000f01c524e6$c94aaec0$966a40ab@stanford.edu>
Message-ID: <Pine.GSO.4.44.0503091253560.21663-100000@elaine29.Stanford.EDU>



Raith is now available 1-5am tomorrow (Thursday) morning.

I moved my reservation up.





From nayoung at stanford.edu  Wed Mar  9 17:41:52 2005
From: nayoung at stanford.edu (Na Young Kim)
Date: Wed,  9 Mar 2005 17:41:52 -0800
Subject: raith open 8.30am-1pm tomorrow thurs
Message-ID: <1110418912.422fa5e007958@webmail.stanford.edu>

i cancelled my raith slot from 8.30am to 1pm tomorrow (thurs).
anyone interested?

ny


From rohank at stanford.edu  Wed Mar  9 17:54:18 2005
From: rohank at stanford.edu (Rohan D. Kekatpure)
Date: Wed, 09 Mar 2005 17:54:18 -0800
Subject: Res. Removed 1800-2200 {Samples not ready}
Message-ID: <6.0.1.1.2.20050309175018.01fb2eb0@rohank.pobox.stanford.edu>

Up for grabs!



From jwc at snf.stanford.edu  Wed Mar  9 18:23:33 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 09 Mar 2005 18:23:33 -0800
Subject: [Fwd: Comment raith SNF 2005-03-09 17:35:30: NO OPERATIONS ABOVE
 20 kV]
Message-ID: <422FAFA5.2070009@snf.stanford.edu>

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From jwc at snf.stanford.edu  Thu Mar 10 09:52:44 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 10 Mar 2005 09:52:44 -0800
Subject: Comment raith SNF 2005-03-09 17:35:30: NO OPERATIONS ABOVE 20
 kV]
In-Reply-To: <10d301c52517$e6d85560$555540ab@BEHEMOTH>
References: <422FAFA5.2070009@snf.stanford.edu> <10d301c52517$e6d85560$555540ab@BEHEMOTH>
Message-ID: <4230896C.5060807@snf.stanford.edu>

RAITH Magnification Range Three Update:
There exist a fault in the Magnification Range 3 amplifier on the 
Electron Optics board (E/O ) due to damage during last weeks EHT trip.  
We cannot make suitable adjustments to this amplifier's range of control 
to allow the SEM image at mag. range three to be centered and aligned as 
it should be with respect to the lower mag. ranges 1 and 2 SEM images. 

Monday I attempted to make the adjustments myself and I could not bring 
the image into the centered range and perform the alignment.  Zeiss SMT 
Field Service expert Mike Santomango visited SNF yesterday and we did 
our best to correct this but the E/O card is damaged and we cannot 
repair it on site.  Zeiss is working to locate a suitable model of this 
E/O board for our system here in the USA. I expect to hear from them 
today on the status. Otherwise we may have to wait until the E/O board 
is built up and shipped from Oberkocken, Germany. I am hoping we can get 
a new E/O board in and adjusted by this weekend.

In Brief:  While the mag range 3 SEM image is not centered with respect 
to the centered SEM images from Mag. Range 1 and 2 it still functions at 
high magnification.  Shifts as much as -100 to - 400 um U axis can be 
expected. Generally your high mag contamination dot  will be located 
well to the 'West' in your Mag range 2 field of view.  I normally burn a 
dot and let it scan in the reduced raster mode for about 15 seconds. 
Then reduce magnification to high end of Mag range 2, locate and center 
in the cross hairs the small box and perform my first iteration of the 
Align Write Field procedure on this feature.   Further reiterations of 
the process will locate your shot dot as you normally do.

You can view your MAG range easily using LEO :: [View] [SEM Status] 
{select Mag range from list in second tab if necessary} {First Tab to 
view status panel}
For your information at 5 mm Working Distance:
Mag Range 1 is 32 to ~ 480 X mag.
Mag Range 2 is ~ 480 X - ~ 13 kX
Mag Range 3 is above that. 
You can hear the relays click quietly as you and down scan up in the 
mag. ranges too!
Different working distances will result in different values of mag. at 
the thresholds for each range.

In performing your write field alignment employ this workaround that I 
posted Tuesday afternoon and you will be fine:
http://snf.stanford.edu/cgi-bin/ezmlm-cgi?2160:mss:1101:200503:lnmakckiaeafgldpilhd

Thank you for your support!

James Conway
SNF

Ilya Fushman wrote:

> So is the magnification error fixed?
> -ilya
>
>     ----- Original Message -----
>     From: James Conway <mailto:jwc at snf.stanford.edu>
>     To: raith at snf.stanford.edu <mailto:raith at snf.stanford.edu>
>     Sent: Wednesday, March 09, 2005 6:23 PM
>     Subject: [Fwd: Comment raith SNF 2005-03-09 17:35:30: NO
>     OPERATIONS ABOVE 20 kV]
>
>     System tested to 30 kV without any EHT trips...
>
>     Users can now return to up to, but not to exceed, 20 kV operations.
>
>     Please start at 10 kV allow system to stabilize for 20 minutes
>     then continue upwards if desired.
>     Please all acceleration voltage changes are to be made from the
>     RAITH side column navigator as normal.
>
>     Problems -- please immediately call James Conway on my cell.
>
>     JWC 03092005: 18:23:00
>     -------- Original Message --------
>     Subject: 	Comment raith SNF 2005-03-09 17:35:30: NO OPERATIONS
>     ABOVE 20 kV
>     Date: 	Wed, 9 Mar 2005 17:35:30 -0800
>     From: 	jwc at snf.stanford.edu
>     To: 	raith-pcs at snf.stanford.edu
>
>
>
>RECOMMEND TO USERS TO BRING SYSTEM UP AT 10 kV AND AFTER 20 MINUTES TO ALLOW SYSTEM TO STABILIZE THEN GO DIRECTLY TO 20 kV.
>Today I tested the system ramping from 10, 15, 20, 22, 25, 27, 28 for ten minutes each and allowed to soak at 28 kV for ~ 30 minutes.  Then ramped to 30 kV.  No EHT TRIPS ENCOUNTERED.  30 kV OPERATION WAS SLIGHTLY UNSTABLE IN EMISSION AND WITH SLIGHT ELEVATED VACUUM LEVELS. (GUN 1.8E-009 mbar, 1.3E-009 Torr.)  
>James Conway 03092005:17:33:00
>    
>
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From jwc at snf.stanford.edu  Fri Mar 11 14:36:57 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 11 Mar 2005 14:36:57 -0800
Subject: Problem raith SNF 2005-03-11 14:20:07: ALL operations restricted
 to 10 kV through the weekend.]
Message-ID: <42321D89.9050002@snf.stanford.edu>

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From jwc at snf.stanford.edu  Fri Mar 11 14:57:07 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 11 Mar 2005 14:57:07 -0800
Subject: Monday 13:00 through Tuesday 1800 RAITH will likely be off-line for
 use.  Maintenance and BAKEOUT scheduled.
Message-ID: <42322243.7010801@snf.stanford.edu>

RE: RAITH System down time MONDAY March 14, 2005 through late Tuesday 
afternoon.

Greetings:

Tentative plan is to have RAITH USA applications specialist Joe Klingfus 
and Mike Santomango from Zeiss SMT Field Service arrive early Monday 
afternoon and we will continue testing the system.  We are now also 
planning to perform a overnight bake out of the column of the RAITH 
system. Monday to Tuesday.  We will then bring the FE-Gun and exposure 
system back up in the afternoon and perform alignments to the E/O board 
and qualify the system that afternoon.

Note: We will not be opening up the column, nor installing any new parts 
inside the high vacuum area of the FE-Gun on the column.  In this manner 
we can evaluate changes in vacuum to determine potential sources of 
contamination is this area.


If you received this message twice it is because you are listed in the 
TO: column of this email and you are being informed that your 
reservation may be shortened, terminated early, or canceled to gain 
access to the system when the Field Service people arrive.

Users before 13:00 hours Monday should 'Share the Ride' and load their 
samples together early in the morning to minimize the load lock time 
overhead.  There may be a chance that flights, or other dependencies, 
may delay the field service people from arriving until later in the 
afternoon. This is what has happened most of the time in the past! So 
within this plan is to allow lxuwind to write until the time they enter 
the lab.

Users scheduled overnight Monday will likely have their sessions 
canceled if we must perform the bakeout.  But as a contingency plan do 
have your wafers ready to go should we decide the bakeout effort is not 
practical at that time.
We hope to return to the CORAL scheduled sessions for Users starting 
with Gigi's run at 1800 hours Tuesday.

Thank you for your support and your patience during this busy period at SNF.

Thank you,

James Conway
03112005:14:50:00
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From lxuwind at stanford.edu  Sat Mar 12 02:24:32 2005
From: lxuwind at stanford.edu (Liang Xu)
Date: Sat, 12 Mar 2005 02:24:32 -0800
Subject: reservation 13:00pm-18:00pm cancelled
Message-ID: <006801c526ed$ae80d2f0$966a40ab@stanford.edu>

Time conflict with a final. 
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From jiencao at stanford.edu  Tue Mar 15 12:17:11 2005
From: jiencao at stanford.edu (Jien Cao)
Date: Tue, 15 Mar 2005 12:17:11 -0800
Subject: finished early
Message-ID: <1110917831.423742c7d14f5@webmail.stanford.edu>

System ready for next user.

Jien

-- 
Graduate Student
Dai Lab
Department of Chemistry
Stanford University


From jwc at snf.stanford.edu  Thu Mar 17 12:28:00 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 17 Mar 2005 12:28:00 -0800
Subject: NO access on system until after 2200 hours (10 PM)
Message-ID: <4239E850.9030708@snf.stanford.edu>


Greetings:

There will be no access to the RAITH system this evening as that Joe 
Klingfus from Raith USA Inc. will be returning to SNF for further 
testing on the system.  Users ROHANK and IFUSHMAN should load when the 
system becomes free and work through the early morning hours.  My 
apologies for the interruption to your schedules and sleep periods.

Thank you for your support!

James Conway





From jwc at snf.stanford.edu  Thu Mar 17 12:46:17 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 17 Mar 2005 12:46:17 -0800
Subject: No restrictions on acceleration voltage: OPERATIONS APPROVED TO 25
 kV for all users. + NEW E?O BOARD 
Message-ID: <4239EC99.5090607@snf.stanford.edu>

Greetings Raith Users:

A new replacement for our Electron Optics board was installed yesterday 
which was aligned and tested in the evening.  I am running a long 
exposure this afternoon and I expect the system should pass 
qualification as I am observing good performance.  Smallest shot dot 
this morning was on the order of 7 -8 nm ! Beam drift was at 10 nm/min. 
Resolution of SEM imaging is excellent.

OPERATIONS APPROVED TO 25 kV for all users:

I would like to request that you give the system additional time to pump 
down and stabilize before starting up the EHT bringing the acceleration 
voltage up after loading. I was unable to reproduce the EHT arcing 
events encountered two weekends ago by any means employed. We have now 
operated  at 20, 25, and 30 kV acceleration voltages for many hours 
without problems.
The 20 kV writes from last week look very nice albeit we are still 
suffering from decided column scatter issues and these effects are more 
pronounced in the exposure artifacts at higher acceleration voltages 
particularly for single pixel lines and dot shots.

Tips and Tricks:
You may find it easier to set up your UVW coordinate system and locate 
your targets for overlay at 10 kV. Then move up to the higher 
accelerations voltage desired to set up the column once again, perform 
your write field alignments, reacquire your saved position of targets 
for overlay to confirm their position, and only then perform your 
writing task.

Users are requested to report at problems encountered to this list and 
make a comment on CORAL.

We continue to work closely with both RAITH organizations and ZEISS SMT 
with urgency. All parties hope to have a plan of  action to address this 
problem in the coming week. Likely we will be rebuilding sections of the 
SEM column and repeat the PM routine as is necessary to effect repairs 
to the system.

Thank you for your support!

James Conway


-------- Original Message --------
Subject: 	Re: Problem raith SNF 2005-03-11 14:20:07: operations 
restricted to 10 kV through the weekend.
Date: 	Thu, 17 Mar 2005 09:27:28 -0800
From: 	jwc at snf.stanford.edu
To: 	raith-pcs at snf.stanford.edu



System tested repeatedly to 20, 25, and 30 kV acceleration voltages and no EHT trips were encountered.
OPERATIONS APPROVED TO 25 kV for all users.
JWC 

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From rohank at stanford.edu  Thu Mar 17 13:13:40 2005
From: rohank at stanford.edu (Rohan Deodatta Kekatpure)
Date: Thu, 17 Mar 2005 13:13:40 -0800
Subject: Res removed 6:00pm-
In-Reply-To: <4239E850.9030708@snf.stanford.edu>
References: <4239E850.9030708@snf.stanford.edu>
Message-ID: <1111094020.4239f30460865@webmail>

Ilya can go ahead and load as soon as the system becomes free...
Quoting James Conway <jwc at snf.stanford.edu>:

>
> Greetings:
>
> There will be no access to the RAITH system this evening as that Joe
> Klingfus from Raith USA Inc. will be returning to SNF for further
> testing on the system.  Users ROHANK and IFUSHMAN should load when the
> system becomes free and work through the early morning hours.  My
> apologies for the interruption to your schedules and sleep periods.
>
> Thank you for your support!
>
> James Conway
>
>
>
>




From ifushman at stanford.edu  Thu Mar 17 13:55:13 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Thu, 17 Mar 2005 13:55:13 -0800
Subject: Res removed 6:00pm-
References: <4239E850.9030708@snf.stanford.edu> <1111094020.4239f30460865@webmail>
Message-ID: <04fc01c52b3b$ff7268c0$555540ab@BEHEMOTH>

I won't be able to make the time. Slot is free tonight.
-ilya

----- Original Message ----- 
From: "Rohan Deodatta Kekatpure" <rohank at stanford.edu>
To: <raith at snf.stanford.edu>
Cc: <ifushman at stanford.edu>
Sent: Thursday, March 17, 2005 1:13 PM
Subject: Res removed 6:00pm-


> Ilya can go ahead and load as soon as the system becomes free...
> Quoting James Conway <jwc at snf.stanford.edu>:
> 
>>
>> Greetings:
>>
>> There will be no access to the RAITH system this evening as that Joe
>> Klingfus from Raith USA Inc. will be returning to SNF for further
>> testing on the system.  Users ROHANK and IFUSHMAN should load when the
>> system becomes free and work through the early morning hours.  My
>> apologies for the interruption to your schedules and sleep periods.
>>
>> Thank you for your support!
>>
>> James Conway
>>
>>
>>
>>
> 
> 
>


From fatih at stanford.edu  Fri Mar 18 01:15:40 2005
From: fatih at stanford.edu (Mehmet Fatih Yanik)
Date: Fri, 18 Mar 2005 01:15:40 -0800
Subject: Raith:saturday 19:00-4:00am free
Message-ID: <1111137339.423a9c3c018c2@webmail.stanford.edu>


sorry for late notice,
sample will not be ready..


From ifushman at stanford.edu  Fri Mar 18 03:03:54 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Fri, 18 Mar 2005 03:03:54 -0800
Subject: reservation removed Fri 10pm
Message-ID: <001c01c52baa$2d524c10$0500a8c0@ilya>

sample not ready.
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From jwc at snf.stanford.edu  Mon Mar 21 11:24:26 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 21 Mar 2005 11:24:26 -0800
Subject: Users working on the RAITH Sunday while coral was down --  please
 report your hours to me so we can adjust charges.
Message-ID: <423F1F6A.9010201@snf.stanford.edu>

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From altug at stanford.edu  Tue Mar 22 17:15:56 2005
From: altug at stanford.edu (Hatice Altug)
Date: Tue, 22 Mar 2005 17:15:56 -0800
Subject: Raith::Reservation removed tonight
References: <6.0.1.1.2.20050322162314.03515a40@arvisun.pobox.stanford.edu>
Message-ID: <005001c52f45$ddc21460$6c5440ab@hatice>

sorry for late notice, but my sample has problem and will not able to use 
Raith tonight..

-hatice



From jwc at snf.stanford.edu  Tue Mar 22 18:29:04 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 22 Mar 2005 18:29:04 -0800
Subject: MICROCHEM PMMA website now has FAQ's.
Message-ID: <4240D470.6000805@snf.stanford.edu>


Greetings RAITH and EBEAM Users:

The links below will take you to both the Microchem PMMA page and a PMMA 
Frequently Asked Question page which has good information on the new 
PMMA's formulated in anisole solvent.  We are currently rolling out 
these materials to replace the toxic chlorobenzene based PMMA's of past.

All the best,

James Conway
Stanford Nanofabrication Facility

[MICROCHEM <http://www.microchem.com/products/pmma.htm> PMMA]
[Microchem PMMA FAQ <http://www.microchem.com/products/pmma_faq.htm>]
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From ryantu at stanford.edu  Wed Mar 23 15:02:13 2005
From: ryantu at stanford.edu (Ryan Tu)
Date: Wed, 23 Mar 2005 15:02:13 -0800
Subject: Raith free today 4-6pm
Message-ID: <BE673575.3A28%ryantu@stanford.edu>





From dwshin at stanford.edu  Fri Mar 25 12:36:23 2005
From: dwshin at stanford.edu (Dong-Woon Shin)
Date: Fri, 25 Mar 2005 12:36:23 -0800
Subject: res cancled 1:00-5:00 pm
Message-ID: <1111782983.42447647ebcfc@webmail.stanford.edu>


res cancled.
sorry for short notice.


From lxuwind at stanford.edu  Fri Mar 25 12:57:03 2005
From: lxuwind at stanford.edu (Liang Xu)
Date: Fri, 25 Mar 2005 12:57:03 -0800
Subject: res cancled 1:00-5:00 pm
In-Reply-To: <1111782983.42447647ebcfc@webmail.stanford.edu>
References: <1111782983.42447647ebcfc@webmail.stanford.edu>
Message-ID: <1111784223.42447b1f67f94@webmail.stanford.edu>

I'll take it.

I'll move my reservation 6:30pm-12:00am up to 2-7:30pm

Quoting Dong-Woon Shin <dwshin at stanford.edu>:

>
> res cancled.
> sorry for short notice.
>


-- 
Liang Xu
Address: 59, Dudley Lane, Escondido Village, Apt B, Stanford, CA 94305
Tel: 650-497-1934


From ryantu at stanford.edu  Mon Mar 28 23:37:01 2005
From: ryantu at stanford.edu (Ryan Tu)
Date: Mon, 28 Mar 2005 23:37:01 -0800
Subject: Canceled res Tues: 9-1pm
Message-ID: <BE6E459D.3B01%ryantu@stanford.edu>





From jwc at snf.stanford.edu  Tue Mar 29 08:29:30 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 29 Mar 2005 08:29:30 -0800
Subject: Canceled res Tues: 9-1pm
In-Reply-To: <BE6E459D.3B01%ryantu@stanford.edu>
References: <BE6E459D.3B01%ryantu@stanford.edu>
Message-ID: <4249826A.4080102@snf.stanford.edu>

Users:

I will take the system from 10 AM today.
Thank you for the timely notice of the opening.
Anyone care to share the ride in case I am finished later this afternoon?
We load at 10: 05 in the Ebeam Lab.

James Conway

Ryan Tu wrote:

Canceled res. Tues: 9-1pm
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From jwc at snf.stanford.edu  Tue Mar 29 10:30:16 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 29 Mar 2005 10:30:16 -0800
Subject: NEW FAQ: ELPHY PLUS switch settings -- 'Please do not adjust the
 set...'
Message-ID: <42499EB8.4020403@snf.stanford.edu>


Greetings Users:

During weekends particularly Sunday PM we have been receiving a larger 
than usual number of phone calls for support due to the positions of the 
switches on the ELPHY Plus pattern generator.  Is someone purposely 
changing the switch positions? Please see me as that the logic states in 
your RAITH user.vbd may have been reversed which will also occur if you 
exit ungracefully from the software while you are unblanked, or if you 
saved your project while unblanked.  ON login you can change your user 
vbd to defaults by selecting 'default configuration' from [OPTIONS] pull 
down menu on your login dialog box.

Default position of the switches:

Left hand switch is the hardware reset for the Pattern generator.  It is 
a momentary on switch. When moved up to the upper position resets and 
centers the X Y deflection system and zeros the DAC's to the pattern 
generator.

Middle switch  is to be set to the up position.  This button is not 
employed by our system but needed for raith attachment systems attached 
to other SEM's. On our system this function is controlled by the 
software. LED SHOULD BE LIGHTED.

Right hand switch is the SEM external  button and it also is to be set 
to 'up' to allow remote control by ELPHY plus pattern generator.  LED 
SHOULD BE LIGHTED. When switched down you are in manually selecting the  
'SEM' mode only!
 The system will not blank during operations. Despite your raith 
software blanking selection you will always be 'BEAM ON'.

Here is an image of the RAITH ELPHY PLUS attached to another SEM.  NOT 
OUR SYSTEM. Note the middle button is in the down position for their 
system. 



Please Be Reminded:

The Ebeam Lab is a restricted area of the cleanroom and is open only to 
users of Ebeam, RAITH  and the S4160 SEM tools.  There should be no one 
else in this area. As that several users have insisted the switches were 
in the correct position at the beginning of their runs; only to return 
to discover the switch positions have been changed, I asking all users 
to be vigilant in checking this before you start your exposure. Please 
also report to me if you see other people wandering into this area 
unescorted.

Please let me know if you are still encountering any problems whatsoever.

Thank you for your support!


James Conway



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From jwc at snf.stanford.edu  Tue Mar 29 19:06:40 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 29 Mar 2005 19:06:40 -0800
Subject: RAITH system offline for users tomorrow afternoon from ~2 PM.  RAITH
 field service and testing of blankers.
Message-ID: <424A17C0.7090802@snf.stanford.edu>


Greetings:

Raith is FED-Xing a new blanker electronics unit out to us and we will 
need the system from sometime after 2 PM until we are finished testing 
sometime into the evening, and possibly some additional time Thursday 
morning and afternoon.

Working with RAITH Field service we hope to eliminate the blanker 
electronics as a source of the problems we have been encountering with 
column scattering when the system is blanked using the RAITH blanker.

We apologize for the interruption to your RAITH sessions.

Thank you for your support!

James Conway


From jwc at snf.stanford.edu  Thu Mar 31 11:37:15 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 31 Mar 2005 11:37:15 -0800
Subject: James Conway out of the office from Friday April 1 returning Tuesday
 April 5, 2005
Message-ID: <424C516B.80305@snf.stanford.edu>

Greetings:

James Conway out of the office from Friday April 1 returning Tuesday 
April 5, 2005.
I will likely not be available by cell phone at ll times between Friday 
afternoon through Monday evening. 
Please leave a voice mail if you call and I will respond ASAP when I 
come back onto the grid.
Gigi, Arvind, and Ryan Tu are in charge of the system in my absence. 
Attached is the "FAQ: Who are you going to call" list.

Off to the Wilderness,

James Conway


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From jwc at snf.stanford.edu  Thu Mar 31 13:11:31 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 31 Mar 2005 13:11:31 -0800
Subject: Handing off my RAITH session to Hung- Tao
In-Reply-To: <1112298011.424c521bb10f7@webmail.stanford.edu>
References: <424C4C18.9060602@snf.stanford.edu> <1112298011.424c521bb10f7@webmail.stanford.edu>
Message-ID: <424C6783.8060809@snf.stanford.edu>

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From jwc at snf.stanford.edu  Thu Mar 31 15:03:55 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 31 Mar 2005 15:03:55 -0800
Subject: Notice of extended downtime planned  for APRIL 18, 2005 10:00 through
  April 21, 2005 18:00 hours.
Message-ID: <424C81DB.40709@snf.stanford.edu>

Greetings:

Herein is notice that I may be taking the RAITH 150 system off line to 
Users from Monday APRIL 18, 2005 about 10 AM through approximately 18:00 
hours Thursday April 21, 2005 to effect repairs to the LEO SEM COLUMN .
We will be performing more inspections inside the column, rebuilding the 
blanking aperture sections, testing blanking voltages, and repeating the 
PM routine.  No changes are planned to the FE- Gun section of the column.

This is the current plan of action to resolve the blanker leakage and 
scattering issues we are currently being encumbered by for many 
structure writes on the system.  This plan may change and we will post 
to this list ASAP as our schedule shifts if necessary.

Thank you for your support!

James Conway

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From hungtao at stanford.edu  Thu Mar 31 15:11:41 2005
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Thu, 31 Mar 2005 15:11:41 -0800
Subject: Will finish at 4pm
In-Reply-To: <424C6783.8060809@snf.stanford.edu>
References: <424C4C18.9060602@snf.stanford.edu> <1112298011.424c521bb10f7@webmail.stanford.edu> <424C6783.8060809@snf.stanford.edu>
Message-ID: <1112310701.424c83ad39e53@webmail.stanford.edu>

My write will finish around 4 pm, Raith is free from 4-6pm  -Hungtao

Quoting James Conway <jwc at snf.stanford.edu>:

>
>
>
>
>
>
>
> Hello Hung-Tao:
>
>
>
> Yes -- please take my session this afternoon to catch up on your work.
>
> I will be in the lab and working on the RAITH Pattern Computer in the
> middle of the lab later this afternoon.
>
> Thank you,
>
>
>
> James Conway
>
>
>
>
>
> Hung-Tao Chou wrote:
>
>
>   Hi James,
>
> I was able to complete my work last night! Thanks for finishing the
> testing
> early last evening. If you are not using the time this afternoon, could I
> use that time?
>
> Thanks!
>
> Hungtao
>
>
>
>
> Quoting James Conway <jwc at snf.stanford.edu>:
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>
>




From ifushman at stanford.edu  Thu Mar 31 15:57:25 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Thu, 31 Mar 2005 15:57:25 -0800
Subject: removed res tonight 10pm-1:30 am
Message-ID: <03ed01c5364d$63a72fd0$555540ab@BEHEMOTH>

sample not ready
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