From cwhicks at stanford.edu Sun May 1 11:37:50 2005 From: cwhicks at stanford.edu (Clifford Hicks) Date: Sun, 1 May 2005 11:37:50 -0700 (PDT) Subject: Raith available 11:30 to 2pm Message-ID: Thought my sessions was later this afternoon. My mistake. From daweiw at uci.edu Mon May 2 12:05:24 2005 From: daweiw at uci.edu (daweiw at uci.edu) Date: Mon, 2 May 2005 12:05:24 -0700 (PDT) Subject: machine available from 12:00 to 13:00 Message-ID: <1114.171.64.100.35.1115060724.squirrel@webmail.uci.edu> Started earlier. From jwc at snf.stanford.edu Wed May 4 17:15:41 2005 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 04 May 2005 17:15:41 -0700 Subject: [Fwd: Problem raith SNF 2005-05-04 14:17:09: ELPHY+ LOGIC FOUND REVERSED] Message-ID: <427965AD.1000200@snf.stanford.edu> ALL Users please check the logic states of your raith blanking when logging into the raith system. DON'T CHANGE THE ELPHY+ SWITCH SETTINGS! Thank you, James Conway -------- Original Message -------- Subject: Problem raith SNF 2005-05-04 14:17:09: ELPHY+ LOGIC FOUND REVERSED Date: Wed, 4 May 2005 14:17:10 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Users are directed to NOT make changes to the SEM EXTERN and BEAM SWITCH modes on the ELPHY+ high performance scan generator. This afternoon Users JWC AND LEVI discovered that the BEAM switch had been switched to down position. This forces the system into SEM mode and blanking will not occur under the ELPHY+ control. This also effectively reverses the logic state for blanking for next user(s) coming onto the system. Users whose User.vbd are in a reversed logic state should see JWC for a simple method to revert to normal blanking states. JWC 05042005:1416 -------------- next part -------------- An HTML attachment was scrubbed... URL: From cwhicks at stanford.edu Thu May 5 18:39:47 2005 From: cwhicks at stanford.edu (Clifford Hicks) Date: Thu, 5 May 2005 18:39:47 -0700 (PDT) Subject: Raith available 6-8.30am Friday 5/6 Message-ID: Feeling ill; won't be up that early in the morning. From jwc at snf.stanford.edu Fri May 6 11:11:35 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 06 May 2005 11:11:35 -0700 Subject: Seeking the RAITH Notebook NO. 1 Frequently asked questions. Message-ID: <427BB357.7040007@snf.stanford.edu> An HTML attachment was scrubbed... URL: From ifushman at stanford.edu Fri May 6 17:35:51 2005 From: ifushman at stanford.edu (Ilya Fushman) Date: Fri, 6 May 2005 17:35:51 -0700 Subject: removed res tonight at 10 Message-ID: <009301c5529c$b8c82f30$555540ab@BEHEMOTH> Sample not ready -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Sat May 7 07:36:09 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Sat, 7 May 2005 07:36:09 -0700 (PDT) Subject: res removed monday night Message-ID: From dwshin at stanford.edu Mon May 9 16:07:33 2005 From: dwshin at stanford.edu (Dong-Woon Shin) Date: Mon, 9 May 2005 16:07:33 -0700 Subject: raith free from 5:30-11:00 pm Message-ID: <1115680053.427fed35dd199@webmail.stanford.edu> Sorry for my late notice. I cannot use 5:30-11:00 pm on RAITH tonight. Sincerely, DWS From jwc at snf.stanford.edu Mon May 9 16:44:49 2005 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 09 May 2005 16:44:49 -0700 Subject: Finished early and DWSHIN cancelled system available for your use. Today's RAITH System Status... Message-ID: <427FF5F1.20005@snf.stanford.edu> An HTML attachment was scrubbed... URL: From hansj at stanford.edu Tue May 10 00:57:05 2005 From: hansj at stanford.edu (Shu-Jen Han) Date: Tue, 10 May 2005 00:57:05 -0700 Subject: reservation cancelled Tuesday 9AM-1PM Message-ID: <1115711825.42806951a1289@webmail.stanford.edu> Sorry for the late notice. Sample not ready. From altug at stanford.edu Wed May 11 17:12:42 2005 From: altug at stanford.edu (Hatice Altug) Date: Wed, 11 May 2005 17:12:42 -0700 Subject: Raith reservation cancelled tonight 21:00pm-4:00am Message-ID: <001501c55687$5118f150$e35540ab@hatice> Sorry for the late notice. Sample will not be ready by tonight. -hatice -------------- next part -------------- An HTML attachment was scrubbed... URL: From levi at snowmass.stanford.edu Sun May 15 00:01:27 2005 From: levi at snowmass.stanford.edu (Ofer Levi) Date: Sun, 15 May 2005 00:01:27 -0700 Subject: Raith free till 9:00 AM Message-ID: <6.1.2.0.2.20050515000038.024aad40@snow.stanford.edu> Raith is free now. Ofer From edo at stanford.edu Sun May 15 20:52:41 2005 From: edo at stanford.edu (Edo Waks) Date: Sun, 15 May 2005 20:52:41 -0700 Subject: raith reservation cancelled 9:00pm-5:00am Message-ID: <000001c559ca$b6252280$0200a8c0@DaShiznit> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue May 17 10:24:54 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 17 May 2005 10:24:54 -0700 Subject: Announcement: tentative time line to replace the LEO SEM column. System offline June 6 to 10, 2005 Message-ID: <428A28E6.5020407@snf.stanford.edu> Greetings: This is a tentative announcement that we may be taking the RAITH 150 system off line for up to a weeks time to replace the LEO SEM column with a brand new SEM column. I will update this list when I have a firm date from Raith USA Inc. for the work. Tentatively Monday June 6, 2005 to possibly the end of the week Friday June 10 the system may be off line to all users. This is to allow us time to replace the SEM column with the new column, perform a normal column bakeout, and then to make adjustments to the E/O card and SEM column. This period will also allow adequate time for testing and performance characterization before returning the systems for users. This effort is made to eliminate the column scattering issues that has negatively impacted some users working on the system. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue May 17 10:31:16 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 17 May 2005 10:31:16 -0700 Subject: Comment raith SNF 2005-05-17 10:29:46: Users are restricted to no more than 25 kV. Message-ID: <428A2A64.3080508@snf.stanford.edu> -------- Original Message -------- Subject: Comment raith SNF 2005-05-17 10:29:46: Users are restricted to no more than 25 kV. Date: Tue, 17 May 2005 10:29:46 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Greetings: Users are requested to not exceed 25 kV acceleration voltage until further testing at higher acceleration voltages has been completed. Gun vacuum and emission levels are stable. Please stay tuned for further updates and check the maintenance section on coral for machine status on each enable of the system. James Conway 05172005:10:30:00 -------------- next part -------------- An HTML attachment was scrubbed... URL: From arvisun at stanford.edu Tue May 17 15:41:11 2005 From: arvisun at stanford.edu (arvind sundaramurthy) Date: Tue, 17 May 2005 15:41:11 -0700 Subject: Raith Reservation Removed from 6:00-10:00pm Today Message-ID: <6.0.1.1.2.20050517154041.03591e30@arvisun.pobox.stanford.edu> From ryantu at stanford.edu Tue May 17 16:01:03 2005 From: ryantu at stanford.edu (Ryan Tu) Date: Tue, 17 May 2005 16:01:03 -0700 Subject: Raith free from 6:00-10:00pm Today In-Reply-To: <6.0.1.1.2.20050517154041.03591e30@arvisun.pobox.stanford.edu> Message-ID: I put a reservation in after Arvind just canceled and realized that my samples are not ready. Enjoy! On 5/17/05 3:41 PM, "arvind sundaramurthy" wrote: > > From jwc at snf.stanford.edu Tue May 17 17:09:49 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 17 May 2005 17:09:49 -0700 Subject: My write is almost finished and system should be free for your use in the next half hour. Message-ID: <428A87CD.3020207@snf.stanford.edu> An HTML attachment was scrubbed... URL: From levi at snowmass.stanford.edu Wed May 18 01:06:41 2005 From: levi at snowmass.stanford.edu (Ofer Levi) Date: Wed, 18 May 2005 01:06:41 -0700 Subject: Raith is free from 1:00 AM till the morning, on Wed. Morning In-Reply-To: <000001c559ca$b6252280$0200a8c0@DaShiznit> Message-ID: <4.3.2.7.2.20050518010508.0437cd20@snow.stanford.edu> Hi all, I finished my inspection on the Raith. The system is free till the morning. Regards, Ofer From jwc at snf.stanford.edu Wed May 18 09:39:10 2005 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 18 May 2005 09:39:10 -0700 Subject: 'Take a Spin with Me' Ebeam resist handling training on the Headway Spinner. Monday May 23, 10 - 13:00 hours. Message-ID: <428B6FAE.1060807@snf.stanford.edu> Greetings Raith Groups XIII and XIV and others whom have expressed interest: You are invited to the next 'Take a Spin with Me' Ebeam resist handling training on the Headway Spinner. I will be conducting this training this next Monday morning and will be cleaning up my substrates on WBNONMETAL starting at 10 AM and will plan to start spinning resist on the Headway starting about 11:00 hours. If you wish to work with us, please have your substrates clean and ready to apply resist either in the 150 degree Singe Oven or just out of the YES HMDS vapor prime system. This is your opportunity to prepare high quality thin film layers of our PMMA's and other ebeam resist on your wafers and to make thickness measurements on these films to aid your work in the Ebeam Lab. This training is open to everyone whom wished to participate. This session will get you qualified to work on the Headway system if you choose to participate. I plan to spin 100 mm Si substrates with 5% 495K PMMA-A (in anisole). We can also apply other Ebeam resist in the session as well. No need to RSVP to this email just show up at the session. Thank you for your interest in Ebeam Technologies here at SNF! James Conway From jwc at snf.stanford.edu Wed May 18 10:20:19 2005 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 18 May 2005 10:20:19 -0700 Subject: Announcement: Ph.D. Thesis Defense - Ali Javey -- Carbon Nanotube Electronics 9AM Monday 5-23-05 Message-ID: <428B7953.7030106@snf.stanford.edu> Good Morning to the Raith Community: Please join me in supporting Ali Javey during his Ph.D. Thesis defense next Monday at 9 AM in the CISX Auditorium. James Conway -------- Original Message -------- Subject: Ph.D. Thesis Defense - Ali Javey Date: Wed, 18 May 2005 09:33:35 -0700 (PDT) From: Ali Javey To: labmembers at snf.stanford.edu Dear All, I will be defending on Monday, May 23rd at 9 am in the CISX Auditorium. I hope you can make it despite the early time. Best, Ali ------------------------------------------------------------------------- Carbon Nanotube Electronics Ali Javey Monday, May 23 at 9 am CISX Auditorium Molecular electronics is an emerging field with a goal of developing miniaturized device elements based on the bottom-up synthetic processes. As the conventional Si technology reaches its scaling limit, many have approached novel molecular concepts, such as nanotube-based electronics, as alternatives. Carbon nanotubes are chemically derived quantum wires (diameter ~ 1 nm) with atomically well defined structures, and are ideal for elucidating basic phenomena in 1-D and have been proposed as the potential building blocks for future nanoelectronics. In this talk, I will discuss ohmic contacts, high-k dielectric integration, electrostatics, device physics, and electron-phonon interactions in carbon nanotube devices with novel geometries. Unprecedented near-ballistic electron transport is observed at room temperature in nanotube FETs with high-k dielectrics, capable of delivering higher current densities and therefore switching speeds than the state-of-the-art Si MOSFETs. The results show the promise of nanotube building blocks in paving a "revolutionary" pathway for future generation of high density and performance digital electronics. Furthermore, I will present electron transport spectroscopy measurements of molecular-scale organic electronics obtained by incorporating metallic nanotubes as miniaturized contact materials with better electrostatic gate control and contact transparencies than the bulk metal contacts. ------------------------------------------------------------------------- -------------- next part -------------- An HTML attachment was scrubbed... URL: From ifushman at stanford.edu Thu May 19 00:27:30 2005 From: ifushman at stanford.edu (Ilya Fushman) Date: Thu, 19 May 2005 00:27:30 -0700 Subject: won't make reservation Message-ID: <001301c55c44$378fa720$555540ab@BEHEMOTH> -ilya -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 20 10:18:25 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 20 May 2005 10:18:25 -0700 Subject: New Thread: Request for your data points for Microchem 5% 495K PMMA in Anisole. Message-ID: <428E1BE1.6010605@snf.stanford.edu> Greetings Raith and Ebeam Community: I am just about to release my characterization data for the new Microchem 5% 495K PMMA - A (in Anisole solvent) including the updated process definition. It would be very nice if users already working with this material could provide me with their data for Resist Thickness as a function of spin speed as well as their dose-to-clear determinations to acceleration voltages for the Range 10 - 50 kV. I have only very little data at 30 kV on our Hitachi HL-700 system; not having the time to work very much on the Hitachi since it came back up last month. This would greatly assist us in evaluation of the process width or variability from user to user, and between full wafers and pieces using this resist system on both machines. People with quality SEM images of their process results for this resist system would be honored if they wish to add their images to this data base. I hope to get all the data up on our web site by mid week next week. Thank you for your support! James Conway All replies to raith at snf.stanford.edu discussion list. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 20 17:12:23 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 20 May 2005 17:12:23 -0700 Subject: Comment raith SNF 2005-05-20 16:34:38: Four new users on the system this week] Message-ID: <428E7CE7.2060104@snf.stanford.edu> Four new users coming onto the system this week and next. have a nice weekend, james -------- Original Message -------- Subject: Comment raith SNF 2005-05-20 16:34:38: Four new users on the system this week Date: Fri., 20 May 2005 16:34:39 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Raith Group XIII is qualifying on the system this week and next. Please be kind to these users. James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 20 17:33:34 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 20 May 2005 17:33:34 -0700 Subject: RAITH STATUS: 05-20-2005 16:36:23: Beam Unstable above 20 kV acceleration voltage... Message-ID: <428E81DE.9030303@snf.stanford.edu> Greetings: We may not currently be in an optimal operation parameter window for the FE-GUN operation at higher acceleration voltages. While emission is good and stable at 10 kV; with higher acceleration voltages the Extraction Current and Gun vacuum are varying by a large amount and emission becomes irregular. No arcing events or EHT trips have been encountered this week. The value for Ext I 'off' to 'on' at 10 kV is 33.5% and slowly rising, and for 20 kV much much larger and very irregular in behavior. To be safe operations are being restricted to all users to below 20 kV. Please contact me if you have any questions and be sure report all problems to CORAL. Sadly, and certainly not to my satisfaction, neither RAITH USA nor I have been able to influence Zeiss SMT Field Service to come in and make adjustments to our E/O board as requested nearly two weeks ago. These were to be the alignments and adjustments we have normally performed after running in the system a week or so. Users will see slight shifts going from mag range 2 to 3, and when adjusting stigmators for some apertures only. These are not large magnitudes and well within the range of the E/O card adjustment range. This leaves me no choice other than to perform these alignments myself early next week and/or we must escalate this problem to management level at RAITH GmbH and specifically towards Zeiss management in Oberkocken, DE. Other than just one Email last week there has been no response from Zeiss SMT to come in and it has been obvious that calls from both entities are, at the moment, simply being ignored. Thank you for your support! James W. Conway Stanford Nanofabrication Facility 001-650-725-7075 001-415-412-4825 -------- Original Message -------- Subject: Problem raith SNF 2005-05-20 16:36:23: Beam Unstable above 20 kV acceleration voltage Date: Fri., 20 May 2005 16:36:23 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Extraction I and Gun pressure vary wildly above 20 kV NO OPERATION ABOVE 20 KV. CALL James Conway if you have questions over the weekend. -------------- next part -------------- An HTML attachment was scrubbed... URL: From lxuwind at stanford.edu Sat May 21 19:47:55 2005 From: lxuwind at stanford.edu (Liang Xu) Date: Sat, 21 May 2005 19:47:55 -0700 Subject: raith free 11pm to 6am Message-ID: <200505220248.j4M2lu97003350@smtp2.Stanford.EDU> Sample not ready. Sorry for the late notice Liang Xu PhD candidate in Department of Materials Science and Engineering Tel: 650-723-2939 (office) 650-497-1934 (home) Address: 59 Dudley Lane, Apt 102, Stanford, CA 94305 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 23 14:42:39 2005 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 23 May 2005 14:42:39 -0700 Subject: Cancelling my raith session for this afternoon. Message-ID: <42924E4F.7000600@snf.stanford.edu> Hello: I am canceling my raith session for this afternoon. Ran over on my resist preparation session this morning, and have thin film measurements to continue with before I can write on the next wafer. All the best, James Conway JWC From jwc at snf.stanford.edu Mon May 23 18:58:42 2005 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 23 May 2005 18:58:42 -0700 Subject: Raith write In-Reply-To: <000001c56001$b99dd690$611b40ab@hydra> References: <000001c56001$b99dd690$611b40ab@hydra> Message-ID: <42928A52.8030007@snf.stanford.edu> Stephan and Raith Community: I will take your later session, but will not be able to start till 1 PM. Anybody desire my 10 - 13:00 slot tomorrow you can take it. I am modifying my reservations on coral now! I may be able to finish slightly earlier and will post as soon as I know the end time of the write tomorrow night. (Read 8 - 9 PM possibly...) Thank you, James Conway Stephan Goetzinger wrote: >Dear James, > >I will not be able to do the RAITH write tomorrow. I did not cancel my >reservation since I was not sure if you will need my time. Please let me >know or just take it. > >Thanks for your patience, >Stephan > > > > >Stephan Goetzinger >Edward L. Ginzton Laboratory Box S-79 >Stanford University >Stanford, CA 94305-4088 >Tel.: ++1-650-723-3929 >Fax.: ++1-650-723-5320 >http://feynman.stanford.edu/ > > From jwc at snf.stanford.edu Mon May 23 19:01:51 2005 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 23 May 2005 19:01:51 -0700 Subject: Announcement NO 2: Time line to replace the LEO SEM. System offline June 6 to 10, 2005 Message-ID: <42928B0F.3010109@snf.stanford.edu> Greetings Raith Community This is your notice and second announcement that we will be taking the RAITH 150 system off line for up to a weeks time to replace the LEO SEM column with a brand new SEM column. Tentatively Monday June 6, 2005 to possibly the end of the week Friday June 10 the system may be off line to all users. I hope to have it back up and available for testing Thursday evening and open for all users mid day Friday if humanly possible. This is to allow us time to replace the SEM column with the new column, perform a normal column bakeout, and then to make adjustments to the E/O card and SEM column. This period should also allow adequate time for testing and performance characterization before returning the systems for users. This effort is made to eliminate the column scattering issues that has negatively impacted most users working on the system. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From ifushman at stanford.edu Wed May 25 20:38:21 2005 From: ifushman at stanford.edu (Ilya Fushman) Date: Wed, 25 May 2005 20:38:21 -0700 Subject: removed res. jwc has it till the next user Message-ID: <025401c561a4$5d6d9280$555540ab@BEHEMOTH> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu May 26 08:51:03 2005 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 26 May 2005 08:51:03 -0700 Subject: [Fwd: Re: Problem raith SNF 2005-05-20 16:36:23: Beam Unstable above 20 kV acceleration voltage] Message-ID: <4295F067.4080808@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jiencao at stanford.edu Thu May 26 14:16:14 2005 From: jiencao at stanford.edu (Jien Cao) Date: Thu, 26 May 2005 14:16:14 -0700 Subject: raith availible 12am-2am Message-ID: <001b01c56238$26643840$e37840ab@Jienlaptop> Cancelling reservation Friday morning 12am-2am. Sample not ready. From ifushman at stanford.edu Thu May 26 17:40:15 2005 From: ifushman at stanford.edu (Ilya Fushman) Date: Thu, 26 May 2005 17:40:15 -0700 Subject: won't be able to make time slot. Message-ID: <002f01c56254$a635b640$0300a8c0@ilya> Sorry, sample is not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu May 26 18:10:23 2005 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 26 May 2005 18:10:23 -0700 Subject: Problem RAITH SNF 2005-05-26 17:32:36: RAITH ALERT: Check your exposures for focus!! Message-ID: <4296737F.4090602@snf.stanford.edu> Greetings Raith Users: Last night on the Electrostatic Chuck and then again today on the Std. Sample Holder I observed much larger than normal offsets from true level during and after leveling routines. These offsets are on the order of +- 300 um rather than the typical 12 - 28 um for the ESChuck and 28 - 55 um for the Std. Sample Holder. The result of my write last night was very large lines and not all areas cleared, indicating focus was not suitable during the write. Users are encouraged to inspect and review their patterns carefully BEFORE pattern transfer. I will look further into this issue in the morning. Has any one else observed this recently, please report to the raith at snf.stanford.edu list. I request reports of good and bad exposures and the date and time you were on the system. Thank you for your support! James Conway 05262005:17:32 From jwc at snf.stanford.edu Fri May 27 12:17:05 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 May 2005 12:17:05 -0700 Subject: FAQ: HOW to get help on the RAITH System during your session -- "Who are your gonna call" Message-ID: <42977231.5070903@snf.stanford.edu> FAQ: HOW to get help on the RAITH System during your session -- "Who are your gonna call" FAQ ##: SYSTEM PROBLEMS: "WHO ARE YOU GOING TO CALL" Greetings: I will be away all of next week attending Three Beams and I wish to remind everyone that we have set into place a hierarchical structure on what to do and whom to call if you encounter problems on the RAITH 150 system during my absence' or for those times I am not be available by cell phone. I will be available by phone at 415-412-4825 by voice mail and SMS text messaging. I will respond at my earliest opportunity. I normally will call the Ebeam Lab several times daily through the course of the week. For Example: * You encounter a LOAD LOCK Error 4 on the system and cannot complete the Load/ Unload cycle without an administrator login. * The pumps or system hardware are not working normally and the logic may have become reversed. * Beam Blanking Logic is reversed due to an RAITH150.exe application crash when the beam was unblanked... 1. If I am available, try to call me on my cell and I will walk you through the Recovery procedures. 001-415-412-4825 (NOTE: I live on the fringe of cell service when at home, and every Monday evening am off the grid after 10 PM and cannot be reached. Sometimes I can receive a SMS text messages. I will respond if I am able to ASAP. 2. Try to contact a RAITH Champion: Luigi Scaccabarozzi gigi at snf.stanford.edu at 1-650-725-6970 Arvind Sundaramurthy arvisun at stanford.edu 1-650- 450-0475 Ryan Tu ryantu at stanford.edu 1-650-799-6492 Mark Topinka mtopinka at stanford.edu 1-650-387-6049 David Fattal dfattal at stanford.edu 650-724-9612 office 650-723-8586 lab 3. Contact a RAITH USA Application Support Specialist: Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com 218-483-1267 4. For Major Hardware issues and all emergencies with the LEO or RAITH Hardware: Contact the RAITH USA Field Service Manager, Cole Loomis cl at raithusa.com (631) 738-9500 or Kevin Burcham also at the Main Raith USA line (631) 738-9500 Finally unless it is a catastrophic failure and the system becomes unsafe or in the least terrifying to operate -- please avoid placing the system into RED LIGHT Mode when I am away. ALWAYS report all errors and comments to to the CORAL 'Make Comments' or 'Report Problem' section so it gets logged into our tracking system. To quote John Shott, "Its not a problem until it is reported to CORAL." Many thanks to the many Raith Champions whom have come forward and offered to cover for me during my absence! Thank you all for your support! James Conway Ebeam Technology Group Stanford Nanofabrication Facility. 650-725-7075 cell 415-412-4825 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 27 14:53:51 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 May 2005 14:53:51 -0700 Subject: Ebeam litho solvent bench is up -- ready for your use. Guidelines for Use. Please keep this area spot less! Message-ID: <429796EF.1070406@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 27 15:03:43 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 27 May 2005 15:03:43 -0700 Subject: Please remove your materials from the Ebeam lab pass thru -- this is not a storage area. Message-ID: <4297993F.2040109@snf.stanford.edu> Greetings: Users are reminded that the pass through between the Lithography and Ebeam Lab areas is for work in progress and is not to be used as a storage area. All boxes and sample holders are to be labels with the lab members name and the process name, and list materials that are inside the box or carrier. The week of June 6 - 10 the Raith system will be off-line for replacement of the SEM column. During that time we will also be cleaning up the Ebeam Lab and performing wipe downs of surfaces in preparation of performing maintenance in the chamber. Please remove and store in your lab bin all materials you may have left in the pass through. We will then clean the pass through completely. All materials left in this pass through during that period that are not in active use on the other systems in the Ebeam lab will be considered abandoned and donated to the lab. Likely they could be disposed of if not of immediate use. Lets get this lab cleaned up and ready for the coming summer's fabrication activities. Thank you for your support! James Conway