From kimsora at stanford.edu Tue Nov 1 22:06:18 2005 From: kimsora at stanford.edu (Sora Kim) Date: Tue, 1 Nov 2005 22:06:18 -0800 Subject: Raith is free from 2am to 7am. Message-ID: <006301c5df73$8ad512a0$325640ab@kimsora> Sorry for this late notice. Sora -------------- next part -------------- An HTML attachment was scrubbed... URL: From ryantu at stanford.edu Fri Nov 4 08:16:37 2005 From: ryantu at stanford.edu (Ryan Tu) Date: Fri, 4 Nov 2005 08:16:37 -0800 Subject: Cannot set aperture Message-ID: <1131120997.436b8965ea989@webmail.stanford.edu> Beam cannot be brought up due to an error message stating it cannot set the aperture because of a missing file. -> Cannot find 'ALSetAperture' -> No values for aperture alignment found in database -> It is not possible to set the aperture Ryan From jwc at snf.stanford.edu Fri Nov 4 09:54:51 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 04 Nov 2005 09:54:51 -0800 Subject: Cannot set aperture In-Reply-To: <1131120997.436b8965ea989@webmail.stanford.edu> References: <1131120997.436b8965ea989@webmail.stanford.edu> Message-ID: <436BA06B.2050401@snf.stanford.edu> I will be right in.... JWC Ryan Tu wrote: >Beam cannot be brought up due to an error message stating it cannot set the >aperture because of a missing file. > >-> Cannot find 'ALSetAperture' >-> No values for aperture alignment found in database >-> It is not possible to set the aperture > >Ryan > > From nayoung at stanford.edu Sat Nov 5 16:38:00 2005 From: nayoung at stanford.edu (Na Young Kim) Date: Sat, 5 Nov 2005 16:38:00 -0800 Subject: raith free from 4.30pm to 7.30pm Message-ID: <1131237480.436d5068b9893@webmail.stanford.edu> done early. ready for next user until 7.30pm ny From kimsora at stanford.edu Sun Nov 6 18:58:43 2005 From: kimsora at stanford.edu (Sora Kim) Date: Sun, 6 Nov 2005 18:58:43 -0800 Subject: Raith free until 9pm Message-ID: <1131332323.436ec2e3bd6be@webmail.stanford.edu> Done early. Sora From jwc at snf.stanford.edu Tue Nov 8 09:29:29 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 08 Nov 2005 09:29:29 -0800 Subject: [Fwd: Raith Micrograph Award 2005 - FINAL REMINDER] Message-ID: <4370E079.1070004@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Nov 8 09:47:49 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 08 Nov 2005 09:47:49 -0800 Subject: New user logins on the RAITH PC system... Message-ID: <4370E4C5.8000900@snf.stanford.edu> Greetings Raith User Community: If you are a new user on the system since RAITH Group XIV, please check to see if you can access your logins on both the RAITH SEM AND the RAITH PC's. Working with RAITH USA Application support specialist, Kevin Burcham, we were able to correct the problem we encountered where we would add your login to the user database but it would not appear in the login screens user name pull down. Several users in fact were working in rather odd truncations of their user name. The problem was identified to be within a file used to maintain the user names and login securely, escsecure.dll, and it had a fixed maximum string length of 512 characters. When we hit the 65th users we started having problems with the login pull down menu. Raith has increased the maximum length to 5120 characters and this seems to have taken care of the problem. All users should take a look at their directories upon their next login on the system and immediately inform me if you see any problems or changes. FYI: For many of the experienced users I have also increased your file permissions and functionality from Novice to Expert which will allow you to navigate further through the PC files systems and to save more changes to your users files. Thank you for your support! James Conway From scaccag at stanford.edu Tue Nov 8 16:05:45 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 8 Nov 2005 16:05:45 -0800 (PST) Subject: raith free tue 6pm (overnight) Message-ID: Even more sorry, I sent the original email a while ago, but to the wrong address! ---------- Forwarded message ---------- Date: Tue, 8 Nov 2005 14:14:30 -0800 (PST) From: Luigi Scaccabarozzi To: raith at stanford.edu Subject: raith free tue 6pm (overnight) Very sorry for late notice, I don't have a sample anylonger... From mtopinka at stanford.edu Thu Nov 10 07:36:20 2005 From: mtopinka at stanford.edu (Mark Topinka) Date: Thu, 10 Nov 2005 07:36:20 -0800 Subject: res. removed this morning Message-ID: <6.1.2.0.2.20051110073546.08045198@mtopinka.pobox.stanford.edu> sorry for the late notice. From xinranw at gmail.com Thu Nov 10 12:03:20 2005 From: xinranw at gmail.com (Xinran Wang) Date: Thu, 10 Nov 2005 12:03:20 -0800 Subject: raith session removed tonight from 20:00 Message-ID: <22ffcd060511101203o6ca57aem8f8b4342df1b97d0@mail.gmail.com> Sorry for the late notice, sample not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From panjun at stanford.edu Fri Nov 11 18:53:43 2005 From: panjun at stanford.edu (Jun Pan) Date: Fri, 11 Nov 2005 18:53:43 -0800 Subject: raith free Sat 10am Message-ID: <200511120253.jAC2rhB2030941@smtp1.Stanford.EDU> raith free Sat 10am From xinranw at gmail.com Mon Nov 14 22:01:18 2005 From: xinranw at gmail.com (Xinran Wang) Date: Mon, 14 Nov 2005 22:01:18 -0800 Subject: raith free tomorrow from 10:00 to 12:30 Message-ID: <22ffcd060511142201j64b6268euad19503c5216f83d@mail.gmail.com> Sorry for the late notice, sample not ready at the last step... -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Nov 15 09:53:05 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 15 Nov 2005 09:53:05 -0800 Subject: RAITH FAQ No 5. Overlay alignment to optical and other EBL system generated features. Message-ID: <437A2081.1020307@snf.stanford.edu> Greetings: I have noted that RAITH users working in Layer to Layer Overlay alignment have developed several procedures to perform this overlay registration task. The following is the procedure I am using to align Layer 1 to Layer 2 on a structure that previously I had difficulty locating the alignment targets due to U and V offsets resulting from the size of the Working Area of the Chip's design. I would appreciate comments from other users working in Overlay on their structures, specifically how their method differs from this one. 1. Establish simple GLOBAL U, V, W alignment to major flat of wafer to adjust angle correction. 2. Determine the center line of the wafer by taking the absolute value of the angle correction values and divide by 2. 3. Move to the center line of the major flat and align cross hairs to the edge of the flat. Adjust this position to be 0 U, -50 mm V per std. 100 mm wafer layout. 4. Establish new GLOBAL U, V, W alignment by locating patterns or marks on the wafer from the previous layer that you know the actual U, V position. Often you can use the Position List (*. PLS) to obtain the U, V. Positions with the exposure module turned off in the Scan menu you can drive to the marks. Normally this will just be a slight offset to the simple initial GLOBAL U, V, W alignment. Adjust as necessary using the Set Origin to Origin Correction Tab. 5. Switch to LOCAL in the Adjust U, V, W window. Move the stage to the position of the first chip you will wish to perform Overlay alignment to. This chip should be consider a sacrificial chip as it will be exposed repeatedly during the target location and alignment routines by the SEM. 6. Find the First Write Field alignment mark such as the lower left chip in the writefield. Position the SEM cross hairs over this chip. [READ] the X, Y position into the LOCAL U, V, W window and enter the design u, v coordinates into the U, V positions. Check off the first check in the dialog box and Press [Adjust]. ( Alternately, using the GDSII viewer with the design in view, and with the title bar highlighted, you can drag into the viewer window the green flags from the top menu and these will enter both the X, Y and the design u, v positions into the dialog box. Confirm these positions in the SEM view and if necessary adjust the X, Y positions by pressing [READ] in the dialog box. Ensure that the U, V coordinates in the dialog box are correct and press [ADJUST] 7. Now located the Second and the Third Write Field Alignment marks repeating step 6 -- but do not adjust until all three marks and their positions have been entered in to the Adjust U, V, W dialog box. Press [Adjust] to establish your final LOCAL U, V, W coordinate system. 8. Move the Stage back to the actual U, V, W position of the first chip, if necessary. Drag and drop the design into a New Position List and enter 0, 0 into the U, V position. Then press the button on the right hand side of the exposure properties box named, 'Adjust position to match Working Area' This will establish the offsets to the actual center of the chip based on the working area size. 9. Matrix Copy the new Local U, V value for the U, V array dimension and number of chips written in the previous layer. (E.G., 10 'U' X 10 'V' X 1 mm) 10. Adjust Brightness and Contrast in the SEM and then process Layer 63; Manual Write field alignment to test the LOCAL U, V, adjustments and you should now be able to easily locate your targets. If not you may wish to increase the size of the scan area in the target design for testing. 11. Process Layer 63 for the initial chip, and if desired Layer 61 for subsequent chips along with the Layer you wish to write in Overlay turned on in the properties dialog box within the chip in the Position List. 12. If you cannot locate targets in Layer 63 return to the chip design window and double check your target positions from the u, v positions in the design. Then double check the array number and dimensions. If you still cannot locate the targets acquire an image in the SEM and measure the offsets positions carefully and enter then into the New positions list carefully and repeat the Layer 63 Write Field Alignment. If this still doesn't work see me and I will help you. This method has now been tested on two designs over three runs and it seems to be working well for me. Your comments are invited. James Conway Stanford Nanofabrication Facility November 15, 2005 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Nov 15 10:23:44 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 15 Nov 2005 10:23:44 -0800 Subject: Annoucement: Ebeam Town Hall Meeting --- December 2, 2005. 2 - 4 PM CISX 338 Message-ID: <437A27B0.2060300@snf.stanford.edu> Greetings to the Ebeam and Raith User Communities: The Next Ebeam Lab Town Hall Meeting will be held Friday December 2, 2005 at 2 - 4 PM in CIS-X 338. All interested parties are invited to attend this event which is open to everyone. For your enjoyment we will have a presentation "Scanning Electron Microscopy in the IC Industry" by Bryan Tracy, PhD. Bryan is the Manager for the Materials Characterization Lab at Spansion in Sunnyvale, CA. He presented a very interesting presentation at the Hitachi Nanotechnology Seminar last month and I invited him here to SNF to give his presentation here. The agenda of this meeting is now open and your inputs are desired. Light Refreshments will be served. Thank you for your participation! Yours, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: blutextb.gif Type: image/gif Size: 569 bytes Desc: not available URL: From ykkato at stanford.edu Tue Nov 15 13:53:36 2005 From: ykkato at stanford.edu (Yuichiro Kato) Date: Tue, 15 Nov 2005 13:53:36 -0800 Subject: raith free 6-9PM today Message-ID: <026e01c5ea2f$07df62d0$e37840ab@tendon> Sample not ready, sorry for late notice. Yui From scaccag at stanford.edu Thu Nov 17 16:33:30 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Thu, 17 Nov 2005 16:33:30 -0800 (PST) Subject: raith free tonight Message-ID: Sorry for late notice... From xinranw at gmail.com Thu Nov 17 23:05:19 2005 From: xinranw at gmail.com (Xinran Wang) Date: Thu, 17 Nov 2005 23:05:19 -0800 Subject: raith free tomorrow from 10:00 Message-ID: <22ffcd060511172305y23758ad5ibad2569c40244b35@mail.gmail.com> Got some extra time tonight so don't need it anymore. -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Tue Nov 22 23:04:52 2005 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Tue, 22 Nov 2005 23:04:52 -0800 Subject: raith free 10-2pm tomorrow Message-ID: <1132729492.43841494c41da@webmail.stanford.edu> sample not ready, sorry for late notice... Hungtao From xinranw at gmail.com Wed Nov 23 22:50:45 2005 From: xinranw at gmail.com (Xinran Wang) Date: Wed, 23 Nov 2005 22:50:45 -0800 Subject: raith free tomorrow from 10am Message-ID: <22ffcd060511232250u1f69a379nde8a53069d3e9cc3@mail.gmail.com> Sorry for the late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From nayoung at stanford.edu Fri Nov 25 18:19:19 2005 From: nayoung at stanford.edu (Na Young Kim) Date: Fri, 25 Nov 2005 18:19:19 -0800 Subject: 10am -1.30pm sat.(11/26/05) open Message-ID: <1132971559.4387c6277bd76@webmail.stanford.edu> pmma coating cannot be done. tomorrow 10am-1.30pm slot open. From jwc at snf.stanford.edu Tue Nov 29 17:30:03 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 29 Nov 2005 17:30:03 -0800 Subject: Finished early today system is available :: Next user come on down ... Message-ID: <438D009B.70302@snf.stanford.edu> Greetings: Finished early today -- system is ready for the next user. Thank you, James Conway From faraon at stanford.edu Wed Nov 30 00:10:26 2005 From: faraon at stanford.edu (Andrei Faraon) Date: Wed, 30 Nov 2005 00:10:26 -0800 (PST) Subject: raith free thursday 9pm 1am Message-ID: Andrei Faraon Dept. of Applied Physics, 316 Via Pueblo Mall Stanford University Stanford, CA 94305-4090 650 497 3857