From ligao at stanford.edu Mon Oct 3 11:17:33 2005 From: ligao at stanford.edu (Li Gao) Date: Mon, 3 Oct 2005 11:17:33 -0700 Subject: Bilayer PMMA Resist Process for Liffoff Message-ID: <1128363453.434175bdba0e8@webmail.stanford.edu> Good morning: Does anyboday has the bi-layer PMMA recipe for metal liftoff? I found one one the SNF website, but is seems very old. Thanks! Best regards, Li ------ Li Gao Dept.of Applied Physics Stanford University Tel: (408) 927-2920 Email: ligao at stanford.edu From jwc at snf.stanford.edu Mon Oct 3 16:50:28 2005 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 03 Oct 2005 16:50:28 -0700 Subject: Bilayer PMMA Resist Process for Liffoff In-Reply-To: <1128363453.434175bdba0e8@webmail.stanford.edu> References: <1128363453.434175bdba0e8@webmail.stanford.edu> Message-ID: <4341C3C4.4040203@snf.stanford.edu> Here is the most consistent Bilayer process we are currently using... James Conway Jing Kong developed a very consistent process using dual layer PMMA: NOTE: That this recipe utilized the chlorobenzene solvent system and you will have to adjust your spin speeds to the anisole spin speed (f) Resist thickness data or see me to check out the chlorobenzene based materials. If you are interested please see me during my office hour. Jing Kong Process No. 1: Bi-layer PMMA Ebeam Resist for Liftoff. Revision 1.4 Dated March 1, 2003. James W. Conway This Bi-layer resist recipe utilizes both 950K PMMA and 495K PMMA. This recipe was intended for metal liftoff and pattern has an undercut to aid in release. 1. Singe Bake 150?C for 30 minutes. 2. Layer 1: Spin 5% 495K PMMA in chlorobenzene 6000 rpm, 40 sec. 3. Bake on hot plate 180C, 30 minutes. 4. Layer 2: Spin 2% 950K PMMA in chlorobenzene 5000 rpm 40 sec. 5. Bake on hot plate, 180C, 30 minutes. 6. Expose: Dose: 650 - 800 uC/cm2 @ 30 KV dependent on feature size on H-700. 7. Develop: MIBK:IPA=1:3 (volume) for 2 min Develop time can vary from 30 sec to 2 min. Temperature 20 - 21 C. 8. Microscope Inspection: Is pattern developed out and pattern cleared? 9. Post Process: Deposit Metal for liftoff, thickness as desired. Li Gao wrote: >Good morning: > >Does anyboday has the bi-layer PMMA recipe for metal liftoff? I found one >one the SNF website, but is seems very old. > >Thanks! > >Best regards, Li > >------ >Li Gao >Dept.of Applied Physics >Stanford University >Tel: (408) 927-2920 >Email: ligao at stanford.edu > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Tue Oct 4 22:47:49 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 4 Oct 2005 22:47:49 -0700 (PDT) Subject: raith free wed night Message-ID: From lsmoore at stanford.edu Wed Oct 5 15:29:02 2005 From: lsmoore at stanford.edu (Lindsay Shannon Moore) Date: Wed, 5 Oct 2005 15:29:02 -0700 Subject: done very early. Message-ID: <1128551342.434453aebcb86@webmail.stanford.edu> raith free until 5:30 lindsay From ryantu at stanford.edu Thu Oct 6 10:51:27 2005 From: ryantu at stanford.edu (Ryan Tu) Date: Thu, 6 Oct 2005 10:51:27 -0700 Subject: Finished early.. free until 1pm Message-ID: <1128621087.4345641f3a55a@webmail.stanford.edu> From ligao at stanford.edu Thu Oct 6 14:06:06 2005 From: ligao at stanford.edu (Li Gao) Date: Thu, 6 Oct 2005 14:06:06 -0700 Subject: Saturday night reservation cancelled (8:00-12:00) Message-ID: <1128632766.434591bec25f6@webmail.stanford.edu> Saturday night reservation cancelled (8:00-12:00) From jwc at snf.stanford.edu Thu Oct 6 18:27:45 2005 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 06 Oct 2005 18:27:45 -0700 Subject: Raith Micrograph Award 2005 - Deadline extended. Message-ID: <4345CF11.5070202@snf.stanford.edu> -------- Original Message -------- Subject: Raith Micrograph Award 2005 - Deadline postponed Date: Thu, 6 Oct 2005 17:06:21 +0200 From: Eggert, Marc To: Dear customer, The Raith Micrograph Award 2005 faces its new deadline on 15th November. -------------------------------------------------------------------------------------------------------------- Due to Raith's first Micrograph Award in 2004 attracted a great interest, we are pleased to inform you that Raith arranges the 'MICROGRAPH AWARD 2005' for highly sophisticated scientific application within our customers community. We meanwhile have more than 300 customers world wide working successfully with our lithography products for research and development. We would like our users to share their results (for a selection of contributions from Micrograph Award 2004 please click here <<>>) much more efficient than before with us and with the global network we have established with other users. For this we are interested in state of the art application material for our application notes, user meetings and the image gallery of our website. Participants should submit one or more pictures showing nano structures which were created using a Raith E-beam lithography system (ELPHY or RAITH50, RAITH150). A brief overview about the scientific motivation shall be attached as well as your address details. We also accept pictures showing "accidents" as long as they are displaying a unique nano-or microstructure. All Raith E-beam system and Raith SEM attachment users can participate, except Raith staff members or Raith partners staff members. -------------------------------------------------------------------------------------------------------------- Please visit Raith website <<>> for further information and registration. We are looking forward to your transmittals Marc Eggert Marketing Assistant Raith GmbH Hauert 18 - Technologiepark 44227 Dortmund Germany phone: +49 (0)231 975 000-35 fax: +49 (0)231 975 000-5 email: eggert at raith.de <> web: <> -------------- next part -------------- An HTML attachment was scrubbed... URL: From arvisun at stanford.edu Fri Oct 7 09:54:06 2005 From: arvisun at stanford.edu (arvind sundaramurthy) Date: Fri, 07 Oct 2005 09:54:06 -0700 Subject: Reservation Removed(10/07, noon-4:00pm) Message-ID: <6.0.1.1.2.20051007095340.03770080@arvisun.pobox.stanford.edu> From altug at stanford.edu Sun Oct 9 02:12:07 2005 From: altug at stanford.edu (Hatice Altug) Date: Sun, 9 Oct 2005 02:12:07 -0700 Subject: Raith is free from 2-9am Message-ID: Have problem with the chip so raith is free. -hatice From zhangy at stanford.edu Sun Oct 9 17:36:50 2005 From: zhangy at stanford.edu (Yuan Zhang) Date: Sun, 09 Oct 2005 17:36:50 -0700 Subject: reservation cancelled from 5:30-10:00pm Message-ID: <6.2.1.2.2.20051009173632.0368ad00@zhangy.pobox.stanford.edu> From scaccag at stanford.edu Mon Oct 10 10:58:33 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Mon, 10 Oct 2005 10:58:33 -0700 (PDT) Subject: raith free tonight (overnight) Message-ID: sample will not be ready... res. moved sorry for late notice From ligao at stanford.edu Tue Oct 11 15:49:55 2005 From: ligao at stanford.edu (Li Gao) Date: Tue, 11 Oct 2005 15:49:55 -0700 Subject: raith is free tonight Message-ID: <1129070994.434c419301b45@webmail.stanford.edu> Sample is not ready. Sorry for late notice. From xinranw at gmail.com Mon Oct 17 21:28:27 2005 From: xinranw at gmail.com (Xinran Wang) Date: Mon, 17 Oct 2005 21:28:27 -0700 Subject: session cancelled tomorrow morning from 10:00 Message-ID: <22ffcd060510172128g5e69b481g43e42de3ea119e98@mail.gmail.com> Sample not ready, sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Oct 19 17:46:57 2005 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 19 Oct 2005 17:46:57 -0700 Subject: 5% 495K PMMA-A has almost been used up In-Reply-To: <1129694458.4355c4face96b@webmail.stanford.edu> References: <1129694458.4355c4face96b@webmail.stanford.edu> Message-ID: <4356E901.1040801@snf.stanford.edu> Hello PMMA Users: I have just placed a new bottle of 5% 495K MW PMMA in anisole into the cleanroom solvent cabinet. There is still 10 -15 ml left in the old bottle and the material is still fine. Will the next user please use up the remaining material and place the empty bottle into the hazardous waste slot in the chemical pass-thru after bagging and filling out a hazardous waste disposal form. Please be conservative in your usage to minimize waste and to reduce cost of engineering materials to SNF. Thank you, JWC Jun Pan wrote: >Hi James, > >I found the 5% 495K PMMA-A has almost been used up. Could you please bring >some in? > >Thanks, >Jun > > From panjun at stanford.edu Thu Oct 20 21:39:37 2005 From: panjun at stanford.edu (Pan, Jun) Date: Thu, 20 Oct 2005 20:39:37 -0800 Subject: raith free Fri 3:30pm Message-ID: <200510210339.j9L3dVqh027092@smtp-roam.Stanford.EDU> From yamanaka at snowmass.stanford.edu Fri Oct 21 12:23:16 2005 From: yamanaka at snowmass.stanford.edu (Kazuhiko Yamanaka) Date: Fri, 21 Oct 2005 12:23:16 -0700 Subject: Raith free until 8:00pm In-Reply-To: <200510210339.j9L3dVqh027092@smtp-roam.Stanford.EDU> References: <200510210339.j9L3dVqh027092@smtp-roam.Stanford.EDU> Message-ID: <20051021122124.745F.YAMANAKA@snowmass.stanford.edu> Done much earlier. Eventually Raith is free from noon to 8:00pm. ------- Kazuhiko Yamanaka Harris Group, Solid State & Photonics Lab, Center for Integrated Systems, Stanford University CIS-X Rm 126X, Stanford, CA 94305-4075 Tel : (650)725-6909 Fax: (650)723-4659 E-mail : yamanaka at snowmass.stanford.edu From sunaeseo at stanford.edu Fri Oct 21 19:34:37 2005 From: sunaeseo at stanford.edu (sunae seo) Date: Fri, 21 Oct 2005 19:34:37 -0700 Subject: tonight is free In-Reply-To: <20051021122124.745F.YAMANAKA@snowmass.stanford.edu> Message-ID: <200510220234.j9M2YeTv021788@smtp-roam.Stanford.EDU> Sorry for late notice. I've got a bad cold. I moved the reservation. Sorry again. ============================================================= SUNAE SEO. PH.D CIS #105, 420 Via Palou Stanford University Stanford CA 94305-4070 sunaeseo at stanford.edu Mobile: 1-650-704-4313 Work : 1-650-725-5725 ============================================================== From sunaeseo at stanford.edu Sat Oct 22 22:36:11 2005 From: sunaeseo at stanford.edu (Sunae Seo) Date: Sat, 22 Oct 2005 22:36:11 -0700 Subject: after 10:30 pm to midnight Message-ID: <1130045771.435b214bbed43@webmail.stanford.edu> RAith is free. early done. From jwc at snf.stanford.edu Mon Oct 24 13:02:31 2005 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 24 Oct 2005 13:02:31 -0700 Subject: Please return the RAITH SW Dongle keys to me ASAP. Message-ID: <435D3DD7.1070000@snf.stanford.edu> Greetings: I need the RAITH 150 SW dongles returned to me as soon as possible. I checked out two of the dongles for a two week load period and they have not yet been returned. Others have requested use of the off line SW for their work and are now waiting. Please drop them off at my desk ASAP. Thank you, James Conway From scaccag at stanford.edu Mon Oct 24 20:12:36 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Mon, 24 Oct 2005 20:12:36 -0700 (PDT) Subject: raith free tue night Message-ID: From ligao at stanford.edu Tue Oct 25 11:27:10 2005 From: ligao at stanford.edu (Li Gao) Date: Tue, 25 Oct 2005 11:27:10 -0700 Subject: Raith is free from 6:00 to 10:00pm tonight Message-ID: <1130264830.435e78fe56d9a@webmail.stanford.edu> sorry for late notice From jwc at snf.stanford.edu Tue Oct 25 19:22:54 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 25 Oct 2005 19:22:54 -0700 Subject: RAITH STATUS ::: Shutdown raith SNF 2005-10-25 12:08:35: system adminsitration off line 1 hour over lunch today Message-ID: <435EE87E.7060302@snf.stanford.edu> Both LEO and RAITH PC's have been sorted, purged of exxcess files, and defraged both the HDrives. Monthly IT maintenance. Thank you for your support! James Conway From jwc at snf.stanford.edu Tue Oct 25 19:24:11 2005 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 25 Oct 2005 19:24:11 -0700 Subject: Just finished and system is unloading now -- JWC Message-ID: <435EE8CB.7040709@snf.stanford.edu> Just finished the exposure and system is unloading now -- JWC From kimsora at stanford.edu Wed Oct 26 09:14:23 2005 From: kimsora at stanford.edu (Sora Kim) Date: Wed, 26 Oct 2005 09:14:23 -0700 Subject: Raith free until 11:30am Message-ID: <1130343263.435fab5fb61af@webmail.stanford.edu> Done early. Sora From xinranw at gmail.com Wed Oct 26 19:20:31 2005 From: xinranw at gmail.com (Xinran Wang) Date: Wed, 26 Oct 2005 19:20:31 -0700 Subject: raith free tomorrow from 10 to 12:30, sample not ready Message-ID: <22ffcd060510261920l2f6f77ddj6f6b0635f2674f17@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From hansj at stanford.edu Thu Oct 27 18:24:23 2005 From: hansj at stanford.edu (Shu-Jen Han) Date: Thu, 27 Oct 2005 18:24:23 -0700 Subject: res removed Fri. 3:30P~7:30P Message-ID: <6.0.1.1.2.20051027182318.03d947b0@hansj.pobox.stanford.edu> Sample not ready From panjun at stanford.edu Thu Oct 27 22:06:06 2005 From: panjun at stanford.edu (Pan, Jun) Date: Thu, 27 Oct 2005 21:06:06 -0800 Subject: raith free on Sat 18:00 Message-ID: <200510280406.j9S4633h011367@smtp-roam.Stanford.EDU> From sunaeseo at stanford.edu Fri Oct 28 13:00:50 2005 From: sunaeseo at stanford.edu (sunaeseo) Date: Sat, 29 Oct 2005 05:00:50 +0900 Subject: raith free on Sat 18:00 In-Reply-To: <200510280406.j9S4633h011367@smtp-roam.Stanford.EDU> Message-ID: <200510291201.j9TC1KfZ026555@smtp-roam.Stanford.EDU> Sample is not ready. Sorry for late notice. ============================================================= SUNAE SEO. PH.D CIS #105, 420 Via Palou Stanford University Stanford CA 94305-4070 sunaeseo at stanford.edu Mobile: 1-650-704-4313 Work : 1-650-725-5725 ============================================================== From xinranw at gmail.com Sat Oct 29 11:13:18 2005 From: xinranw at gmail.com (Xinran Wang) Date: Sat, 29 Oct 2005 11:13:18 -0700 Subject: raith free on Sat 18:00 In-Reply-To: <200510291201.j9TC1KfZ026555@smtp-roam.Stanford.EDU> References: <200510280406.j9S4633h011367@smtp-roam.Stanford.EDU> <200510291201.j9TC1KfZ026555@smtp-roam.Stanford.EDU> Message-ID: <22ffcd060510291113w12d795cl5898dffd8041cfff@mail.gmail.com> raith cancelled from 16:00, sample is also not ready... -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Mon Oct 31 17:56:34 2005 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Mon, 31 Oct 2005 17:56:34 -0800 (PST) Subject: raith free tonight (from 6pm) Message-ID: Sorry for extremely late notice...