From ifushman at stanford.edu  Thu Sep  1 22:21:20 2005
From: ifushman at stanford.edu (Ilya Fushman)
Date: Thu, 1 Sep 2005 22:21:20 -0700
Subject: can't get into SNF
Message-ID: <02f901c5af7e$2794f220$555540ab@BEHEMOTH>

if you can, the raith is yours
-ilya
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From lsmoore at stanford.edu  Mon Sep  5 16:23:43 2005
From: lsmoore at stanford.edu (Lindsay Shannon Moore)
Date: Mon,  5 Sep 2005 16:23:43 -0700
Subject: HELP! loadlock error 5
Message-ID: <1125962623.431cd37fdd0b3@webmail.stanford.edu>



The raith has somehow managed to pump down with the holder still in the
loadlock, causing a loadlock error 5.  Can someone please
1. tell me an administrative level login and password
2. tell me how to fix this problem.

ASAP would be great!  :) thanks!

Lindsay


From lsmoore at stanford.edu  Mon Sep  5 17:42:59 2005
From: lsmoore at stanford.edu (Lindsay Shannon Moore)
Date: Mon,  5 Sep 2005 17:42:59 -0700
Subject: HELP! loadlock error 5
In-Reply-To: <1125962623.431cd37fdd0b3@webmail.stanford.edu>
References: <1125962623.431cd37fdd0b3@webmail.stanford.edu>
Message-ID: <1125967379.431ce6133fcbc@webmail.stanford.edu>

I have fixed the loadlock error on the Raith computer, but the LEO and the
raith are not communicating properly.  I was not able to contact James
about this error, so it seems like it will have to wait until tomorrow to
be fixed.
Current status:
-sample holder is loaded, loadlock is vented.
-Raith will not let me unload the sample
-Raith and LEO not communicating properly
-CCD camera on LEO not working properly.

Lindsay


Quoting Lindsay Shannon Moore <lsmoore at stanford.edu>:

>
>
> The raith has somehow managed to pump down with the holder still in the
> loadlock, causing a loadlock error 5.  Can someone please
> 1. tell me an administrative level login and password
> 2. tell me how to fix this problem.
>
> ASAP would be great!  :) thanks!
>
> Lindsay
>




From koshnick at stanford.edu  Tue Sep  6 09:12:43 2005
From: koshnick at stanford.edu (Nick Koshnick)
Date: Tue, 6 Sep 2005 09:12:43 -0700
Subject: HELP! loadlock error 5
In-Reply-To: <1125967379.431ce6133fcbc@webmail.stanford.edu>
References: <1125962623.431cd37fdd0b3@webmail.stanford.edu>
	 <1125967379.431ce6133fcbc@webmail.stanford.edu>
Message-ID: <c7d5408d050906091273308e2f@mail.gmail.com>

After another software restart the raith can talk to the LEO (at least, with 
minimal errors) and the load unload procedure seems fine. I could not figure 
out the problems with the CCD and the normal LEO SEM functions do not work 
properly. A more experianced user might need to fix this on the next pump 
down. The system is now unloaded with the load lock vented.
 Nick 

 On 9/5/05, Lindsay Shannon Moore <lsmoore at stanford.edu> wrote: 
> 
> I have fixed the loadlock error on the Raith computer, but the LEO and the
> raith are not communicating properly. I was not able to contact James
> about this error, so it seems like it will have to wait until tomorrow to
> be fixed.
> Current status:
> -sample holder is loaded, loadlock is vented.
> -Raith will not let me unload the sample
> -Raith and LEO not communicating properly
> -CCD camera on LEO not working properly.
> 
> Lindsay
> 
> 
> Quoting Lindsay Shannon Moore <lsmoore at stanford.edu>:
> 
> >
> >
> > The raith has somehow managed to pump down with the holder still in the
> > loadlock, causing a loadlock error 5. Can someone please
> > 1. tell me an administrative level login and password
> > 2. tell me how to fix this problem.
> >
> > ASAP would be great! :) thanks!
> >
> > Lindsay
> >
> 
> 
>
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From scaccag at stanford.edu  Tue Sep  6 09:37:14 2005
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Tue, 6 Sep 2005 09:37:14 -0700 (PDT)
Subject: HELP! loadlock error 5
In-Reply-To: <c7d5408d050906091273308e2f@mail.gmail.com>
Message-ID: <Pine.GSO.4.44.0509060935380.7870-100000@elaine31.Stanford.EDU>

Nick and Lindsay,
I'm going in now and see what I can do, but I need to know exactly what
you guys did, especially if there has been any EHT trip at any time or
something else weird happened.
Gigi

On Tue, 6 Sep 2005, Nick Koshnick wrote:

> After another software restart the raith can talk to the LEO (at least, with
> minimal errors) and the load unload procedure seems fine. I could not figure
> out the problems with the CCD and the normal LEO SEM functions do not work
> properly. A more experianced user might need to fix this on the next pump
> down. The system is now unloaded with the load lock vented.
>  Nick
>
>  On 9/5/05, Lindsay Shannon Moore <lsmoore at stanford.edu> wrote:
> >
> > I have fixed the loadlock error on the Raith computer, but the LEO and the
> > raith are not communicating properly. I was not able to contact James
> > about this error, so it seems like it will have to wait until tomorrow to
> > be fixed.
> > Current status:
> > -sample holder is loaded, loadlock is vented.
> > -Raith will not let me unload the sample
> > -Raith and LEO not communicating properly
> > -CCD camera on LEO not working properly.
> >
> > Lindsay
> >
> >
> > Quoting Lindsay Shannon Moore <lsmoore at stanford.edu>:
> >
> > >
> > >
> > > The raith has somehow managed to pump down with the holder still in the
> > > loadlock, causing a loadlock error 5. Can someone please
> > > 1. tell me an administrative level login and password
> > > 2. tell me how to fix this problem.
> > >
> > > ASAP would be great! :) thanks!
> > >
> > > Lindsay
> > >
> >
> >
> >
>



From scaccag at stanford.edu  Tue Sep  6 10:33:08 2005
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Tue, 6 Sep 2005 10:33:08 -0700 (PDT)
Subject: problem fixed
Message-ID: <Pine.GSO.4.44.0509061027350.28818-100000@elaine13.Stanford.EDU>

Hi all,
the problem with the raith has been fixed (can someone bring it back to
green light state?), now all detectors work fine.
In future, when you reboot the computers, try a "real" shutdown, not a
simple "reboot". Sometimes also the software setting get screwed up, and
you need administrator passwords to fix them, but this was not the case.
Loadlock error 5+1 apparently is a loadlock mulfunction during
load/unloading procedure (for your info).
I tried to load the stage and everything is fine. Stage is inside now.
Gigi





From xinranw at gmail.com  Thu Sep  8 15:19:19 2005
From: xinranw at gmail.com (Xinran Wang)
Date: Thu, 8 Sep 2005 15:19:19 -0700
Subject: reservation cancelled from 15:30 tomorrow
Message-ID: <22ffcd06050908151920b79bda@mail.gmail.com>

Sorry for the late notice, sample is not ready yet.
 Xinran
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From scaccag at stanford.edu  Mon Sep 12 09:35:35 2005
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Mon, 12 Sep 2005 09:35:35 -0700 (PDT)
Subject: raith free today 4.30-5.30pm
Message-ID: <Pine.GSO.4.44.0509120935050.1021-100000@elaine21.Stanford.EDU>

sorry, cannot start earlier...



From jwc at snf.stanford.edu  Wed Sep 14 10:02:03 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 14 Sep 2005 10:02:03 -0700
Subject: [Fwd: Raith Lithography Training Course in November 2005]
Message-ID: <4328578B.2000300@snf.stanford.edu>

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From jwc at snf.stanford.edu  Wed Sep 14 11:31:15 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 14 Sep 2005 11:31:15 -0700
Subject: Take a Spin with Me: Ebeam resist handling on the Headway spinner.
 Tuesday September 20, 2005 10 AM- 1:00 PM
Message-ID: <43286C73.60001@snf.stanford.edu>


Greetings,

Interested users are invited to attend my monthly 'Take a Spin with Me' 
Class which will cover Ebeam resist handling on the Headway spinner.
If you are on the To: list you have indicated you desire this training. 
Everyone is welcome to attend this training and gain access to the 
Headway spinner.

This is also an opportunity to actually get some of your work done at 
this time, so please have your substrates cleaned and in either the 150 
degree Singe oven or just coming out of the YES HMDS Prime oven.   I 
will also be cleaning Silicon substrates on WBNONMETAL starting at 9:30 
AM in the cleanroom.

Thank you,

James Conway




From lsmoore at stanford.edu  Wed Sep 14 13:44:52 2005
From: lsmoore at stanford.edu (Lindsay Shannon Moore)
Date: Wed, 14 Sep 2005 13:44:52 -0700
Subject: reservations deleted
Message-ID: <1126730692.43288bc49ec70@webmail.stanford.edu>



today and tomorrow at around 5pm.  Sorry for the late notice.  There has
been a dramatic problem with my samples today.


From xinranw at gmail.com  Wed Sep 14 22:35:06 2005
From: xinranw at gmail.com (Xinran Wang)
Date: Wed, 14 Sep 2005 22:35:06 -0700
Subject: reservation cancelled tomorrow afternoon from 1PM
Message-ID: <22ffcd06050914223535e3c226@mail.gmail.com>

sorry for the late notice.
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From scaccag at stanford.edu  Wed Sep 21 11:58:13 2005
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Wed, 21 Sep 2005 11:58:13 -0700 (PDT)
Subject: raith free tonight
Message-ID: <Pine.GSO.4.44.0509211155330.6346-100000@elaine36.Stanford.EDU>




From jwc at snf.stanford.edu  Wed Sep 21 18:16:03 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 21 Sep 2005 18:16:03 -0700
Subject: Raith Status end of day WED SEPT. 21, 2005 18:00 hours SYSTEM IS
 UP AND AVAILABLE AFTER YESTERDAY' S POWER FAILURE.
Message-ID: <433205D3.5000007@snf.stanford.edu>

Greetings Raith Users:

Yesterday the power failure and electrical storm brought down all of our 
ebeam tools including the RAITH 150 system.  Loss of water cooling 
caused the Raith 150 system to move into safe standby mode.  The gun 
section column chamber valve closed and it maintained vacuum, but the 
system chamber rose to the upper 10E-004 mbar pressure.  I took three 
hours to pump down and about four hours for beam emission to stabilize.  
We were back up at midnight last night.

This morning I performed a system qualification and PCM test of the 
RAITH system and it passed all quality points:

Std. sample holder on Stage with piezo's in centered position measured 
delta WD of 60 um.  This sample holder leveled using  the 
100MM_Std.SAMPLE_Holder file rendered level to 67 um.  Users are 
encouraged to use the system centering defaults and to not attempt to 
level small pieces on the Std. sample holder.

DEMO and Single Pixel Lines patterns were run and everything appears 
excellent under 1000 X optical Microscope.  Single Pixel Lines are below 
the diffraction limit on the microscope so we will SEM this sample after 
metallization.

Write Field to Write Field Stitching is excellent and below what I can 
measure using the stitching verniers.  (< 5 nm mean)

System and Gun section Vacuum levels are near where they were before the 
power failure. FE-GUN emission is stable and returning to normal levels 
this afternoon.

System is available to all users and there is open time available on 
tonight's overnight schedule.

Current exposure on the system ends at about 19:30 hours.

Thank you for your support!

James Conway


-------- Original Message --------
Subject: 	Re: Problem raith SNF 2005-09-20 16:53:06: DOWN AND OFF LINE 
THROUGH MIDNIGHT WED.
Date: 	Wed, 21 Sep 2005 14:43:49 -0700
From: 	jwc at snf.stanford.edu
To: 	raith-pcs at snf.stanford.edu



SYSTEM CHECK OUT OK SINGLE PIXEL LINES AND ALL DOSES NORMAL. GOOD BEAM EMISSION STABILITY
JWC

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From jwc at snf.stanford.edu  Fri Sep 23 16:53:30 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 23 Sep 2005 16:53:30 -0700
Subject: RAITH IS UP AND AVAILABLE FOR YOUR USE!  PLEASE REPORT ALL PROBLEMS
 ENCOUNTERED DURING YOUR RUN.
Message-ID: <4334957A.7060801@snf.stanford.edu>

GREETINGS:

We are back up and running on the RAITH system.
  PLEASE REPORT ALL PROBLEMS ENCOUNTERED DURING YOUR RUN.

Thank you for your support!

James Conway



recently to raith-pcs at snf.stanford.edu:
Re: Shutdown raith SNF 2005-09-23 10:25:16: Major malfunction on the 
loader, loss of positioning.  IN RECOVERY manually
Troubleshot system and found XYZT coordinates system was offset to 
irrational numbers.  Load Lock arm inner position had been lost.  LL 
serpentine belt might have stretched. I then broke it during testing in 
manual  mode test.
Replaced LL serpentine belt with spare belt we maintain in house. 
Reestablished inner LL transfer arm position and then using SW found T 
rod outer stop position and updated system virtual data base.  Tested 
both manually and using LL exchange navigator scripts and all is 
operating perfectly.
Users are requested to call JWC if any problems are encountered over 
weekend and to NOT ATTEMPT to resolve issue by manual T arm operations 
whatsoever.
Thanks,
JWC



From jwc at snf.stanford.edu  Mon Sep 26 09:59:15 2005
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 26 Sep 2005 09:59:15 -0700
Subject: [Fwd: Reminder - Raith Micrograph Award 2005]
Message-ID: <433828E3.7020600@snf.stanford.edu>

Greetings:

Raith users might wish to check out their image page.  Some very nice 
SEM images within....

All the best,

James Conway


-------- Original Message --------
Subject: 	Reminder - Raith Micrograph Award 2005
Date: 	Thu, 1 Sep 2005 16:59:55 +0200
From: 	Eggert, Marc <Eggert at Raith.de>
To: 	<jwc at snf.stanford.edu>



Dear customer,

Due to Raith's first Micrograph Award in 2004 attracted a great 
interest, we are pleased to inform you that Raith arranges the 
'MICROGRAPH AWARD 2005' for highly sophisticated scientific application 
within our customers community. We meanwhile have more than 300 
customers world wide working successfully with our lithography products 
for research and development. We would like our users to share their 
results (for a selection of contributions from Micrograph Award 2004 
please click here 
<<http://www.raith.com/WWW_RAITH/nanolithography/nano_imagegallery.html>>) 
much more efficient than before with us and with the global network we 
have established with other users.

For this we are interested in state of the art application material for 
our application notes, user meetings and the image gallery of our website.

Participants should submit one or more pictures showing nano structures 
which were created using a Raith E-beam lithography system (ELPHY or 
RAITH50, RAITH150). A brief overview about the scientific motivation 
shall be attached as well as your address details. We also accept 
pictures showing "accidents" as long as they are displaying a unique 
nano-or microstructure. All Raith E-beam system and Raith SEM attachment 
users can participate, except Raith staff members or Raith partners 
staff members.

To reward you for your efforts and participation, we have set three 
valuable prizes:

First Prize:
Raith will sponsor the participation of an international nanotechnology 
related conference including flight and accommodation

Second Prize:
A brandnew Laptop PC

Third Prize:
A digital Camera


Please visit Raith website 
<<http://www.raith.com/WWW_RAITH/news/news.html>>  for further 
information and registration.


We are looking forward to your transmittals


Marc Eggert
Marketing Assistant
Raith GmbH
Hauert 18 - Technologiepark
44227 Dortmund
Germany
 
phone:  +49 (0)231 975 000-35
fax:      +49 (0)231 975 000-5
email:   eggert at raith.de <mailto:eggert at raith.de>
web: <http://www.raith.com>
 

********************************************************************************************************* 


Meet Raith at:

-          Nano Korea 2005 
<http://www.nanokorea.or.kr/2005/eng/introduction/introduction01.php>, 
KINTEX, Korea International Exhibition Center, 24th - 26th August

-          TNT 2005 <http://www.phantomsnet.net/TNT05/>, Oviedo, Spain, 
29th August - 2nd September

-          MNE2005 <http://www.mne05.org/>, Vienna, Austria, 19th - 22nd 
September

Following:  Raith User Meeting 
<http://www.raith.com/WWW_RAITH/events/meetings.html>, Friday 23rd 
September

********************************************************************************************************* 


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From altug at stanford.edu  Mon Sep 26 23:11:52 2005
From: altug at stanford.edu (Hatice Altug)
Date: Mon, 26 Sep 2005 23:11:52 -0700
Subject: Raith is free on Tuesday @ 11pm-5am
Message-ID: <JEEGIDNCJLPDAJGEIGFMGEJKCFAA.altug@stanford.edu>

 
Sample will not be ready..


From kimsora at stanford.edu  Wed Sep 28 10:51:35 2005
From: kimsora at stanford.edu (Sora Kim)
Date: Wed, 28 Sep 2005 10:51:35 -0700
Subject: Raith free from 5pm to 10pm today
Message-ID: <200509281752.j8SHqKtb026269@smtp3.Stanford.EDU>

The sample is not prepared. 

Sorry for late notice. 

 

Sora

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From hansj at stanford.edu  Fri Sep 30 11:37:49 2005
From: hansj at stanford.edu (Shu-Jen Han)
Date: Fri, 30 Sep 2005 11:37:49 -0700
Subject: Sun. afternoon free
Message-ID: <6.0.1.1.2.20050930113613.039d1b40@hansj.pobox.stanford.edu>

hi,

I've cancelled my reservation of this Sunday afternoon. Enjoy!!
--SJ