IMPORTANT: PLEASE be sure to return all ebeam materials to the storage cabinets or refrigerator after you use them.

James Conway jwc at
Fri Aug 4 08:35:20 PDT 2006

Greetings Ebeam and Raith Users

Yesterday evening as I finished up my day I found that some unknown User 
had not returned the 5% 495K PMMA in Anisole to the solvent cabinets 
where these materials are stored.  This prevented at least one user from 
continuing his work that evening because they could not locate the material.

 I then found the bottle of ZEP-520A left in the solvent cabinet -- 
which is not the proper storage location for this material!
This material must always be refrigerated and allowed to come up to room 
temperature before opening the bottle. 
I wish to know how long the bottle may have been out of the refrigerator 
to determine if the material has sufficient time to hydrolyze or 
gelate.  This is a very expensive high performance resist material.  We 
all wish to maintain the highest quality in all of our work, so please 
in the future, be sure to handle and store this material properly.

Users preparing substrates with ZEP-520A should carefully determine the 
dose to clear, inspect all patterns written before attempting pattern 
transfer, and report your results back to the email lists.

Reminder:  Please be frugal with the polymer materials  you work with at 
Your efforts in this regard will assist in controlling expenses for SNF 
and allow us to continue to offer high quality engineering materials to 
all Lab Members.

Thank you for your interest in Ebeam Technologies at Stanford 
Nanofabrication Facility!

James Conway

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