RAITH Status Update: Last night there were load lock errors and vent of system chamber. Coral schedule slides back two to three hours.
jwc at snf.stanford.edu
Fri Aug 11 14:49:59 PDT 2006
Good Afternoon Raith Users:
Last night there were several errors including load lock errors and vent
of system chamber...
System is back up and writing. Coral schedule slides back two to three
I have pumped down the system from atmosphere, brought back up the gun,
and vacuum levels are slowly returning to previous base pressures.
Likely it will take a day or more for the Gun pressures to return to the
mid E - 010 Torr level. Currently 1.9 E-009 T and slowly falling.
ALL USERS ARE REMINDED TO PRE-BAKE THEIR SAMPLES AT 90 DEGREES C. FOR 2
MINUTES BEFORE LOADING.
(Users may bake at any temperature higher than this if they wish. This
will help to maintain a clean vacuum system and it will be much easier
to burn contamination dots on your samples.
Note on the Load Lock Procedures:
Users are reminded that during all Load Lock (LL) procedures the RAITH
computer and keyboard are locked out and your inputs are ignored.
THE COMPUTER IS NOT LOCKED UP -- JUST WAITING FOR THE LL PROCEDURE TO
Please never shut down or restart the Raith Computer during the LL
procedure it will cause a LL ERROR.
Currently the system is writing and XINRAN will come onto the system
between 4 and 5 PM. Others will follow in sequence and users are
encouraged to 'share the ride' so we can catch up to the schedule by
If any significant problems are encountered please call me immediately
Have a nice weekend,
-------- Original Message --------
Subject: Problem raith SNF 2006-08-11 10:25:10: nested load lock errors
and a manual vent of system chamber
Date: Fri, 11 Aug 2006 10:25:12 -0700
From: jwc at snf.stanford.edu
To: raith-pcs at snf.stanford.edu
Good Morning RAITH USERS,
System is currently down and we are hoping to recover...
Last evening a user encountered a load lock error or errors after they aborted, or shut down, the computer during a load lock procedure. The computer as not locked up and was logging the LL procedure normally.
The system was in a critical state when I arrived this morning with the robot arm in the main chamber and the pressure of the chamber was at Atmosphere!
Then some time after the Load Lock errors occurred a manual vent of the system occurred upon pressing the vent button on the LEO SEM control panel.
This crashed the turbo pump with a abrupt flow of N2 and vented the system chamber to ATM.
PLEASE NEVER -- EVER - PRESS THE VENT BUTTON ON THE LEO SEM CONTROL VACUUM PANEL!
THIS IS NOT THE LOAD LOCK VENT BUTTON!
Currently troubleshooting the turbo and mechanical pump for damage and attempting to pump down the system.
Should take about 6 to 12 hours to pump down. Will update as progress is made.
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