From jwc at snf.stanford.edu Fri Dec 1 08:59:24 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 01 Dec 2006 08:59:24 -0800 Subject: "Raith Cam" In-Reply-To: <456F0D6D.2050704@stanford.edu> References: <28bfad130611292250l3a9169bcved7a80fd2548f160@mail.gmail.com> <456F09B1.8000108@snf.stanford.edu> <456F0D6D.2050704@stanford.edu> Message-ID: <45705F6C.8030307@snf.stanford.edu> Hi John and others whom have commented, Thanks for the information. Likely we are seeking a lower cost solution to several needs within the RAITH users groups: - Secure remote access to the RAITH system to allow access for assisting students remotely, to recover from Load Lock errors, and other tasking when problems are encountered. Enable FTP file transfers and network access by qualified Users. - Allow Users and staff to see the LEO and RAITH screens remotely from their desktops so they can monitor their exposure runs. - Provide enhanced demonstration and 'through the clean room window' views of both LEO and RAITH screens to monitors visible from outside the clean room. (Dual output video cards for both computers may take care of this task.) -Enhance security and safety in the Ebeam Lab. Interested people are invited to continue brainstorming with me. I desire to implement solutions in the Spring term. Best, James Conway Ref: RE: Raith CAM http://snf.stanford.edu/cgi-bin/ezmlm-cgi?2160:mss:1820:200611:klbddbplcjehiiojmlni John Shott wrote: > James, Ilya, et al: > > While I won't comment on VPN or other control options, if you're > looking for a really great camera for this purpose, I'd suggest > something like the Sony -RZ30N. That's an network addressable camera > that can be controlled (pan/tilt/zoom) from a web site. > > A link to specs for it is at: > > http://bssc.sel.sony.com/BroadcastandBusiness/DisplayModel?m=10001&p=3&sp=147&id=67347 > > > It says that list price is $1865 ... but street price is more like > $1300-1500 > > Mike Deal has one of these in his office (maybe not this exact model, > but something very close to it) and knows a whole lot more about it > than I. However, it's controllable from the web (pan/tilt/zoom), has > a network connection that plugs directly into a RJ-45 network jack, > and has 25X optical zoom. My guess is that with proper positioning, > you could see any number of interest ... unless someone was standing > in the way. > > For your consideration, > > John > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Sun Dec 3 00:29:52 2006 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Sun, 3 Dec 2006 00:29:52 -0800 Subject: raith is free Sunday 2-5pm Message-ID: <1165134592.45728b00a0448@webmail.stanford.edu> My sample is not ready, Sorry for the late notice. -Hungtao From kimsangb at stanford.edu Sun Dec 3 16:23:33 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Sun, 3 Dec 2006 16:23:33 -0800 Subject: raith free from 5:00 PM to 6:30 PM Message-ID: <001801c7173a$6ef090f0$a9b50c80@sangbumhome> Remote coral is not working, so my reservation is still there but please go ahead and use it. Sample not ready for SEM. SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Sun Dec 3 16:27:53 2006 From: bdai at stanford.edu (Bing Dai) Date: Sun, 3 Dec 2006 16:27:53 -0800 Subject: raith free from 5:00 PM to 6:30 PM Message-ID: <20061204002754.0503E4EDA8@smtp1.stanford.edu> I'll take it. Thanks. Bing >Remote coral is not working, so my reservation is still there but please go >ahead and use it. > > > >Sample not ready for SEM. > > > >SangBum > > > > From kimsangb at stanford.edu Mon Dec 4 16:03:37 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Mon, 4 Dec 2006 16:03:37 -0800 Subject: raith free from 9:00 PM 11:00PM Message-ID: <000001c71800$d06cdb10$a9b50c80@sangbumhome> Sorry for late notice. SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangdw at stanford.edu Mon Dec 4 18:00:16 2006 From: zhangdw at stanford.edu (zhang dawei) Date: Tue, 5 Dec 2006 10:00:16 +0800 Subject: =?gb2312?B?tPC4tDogcmFpdGggZnJlZSBmcm9tIDk6MDAgUE0gMTE6MDBQTQ==?= In-Reply-To: <000001c71800$d06cdb10$a9b50c80@sangbumhome> Message-ID: <000b01c71811$1c1cf940$538c0c80@stanfordzhangd> I?ll take the time slot. Thanks. Dawei -----????----- ???: SangBum Kim [mailto:kimsangb at stanford.edu] ????: 2006?12?5? 8:04 ???: raith at snf.stanford.edu ??: raith free from 9:00 PM 11:00PM Sorry for late notice. SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From faraon at stanford.edu Tue Dec 5 08:41:24 2006 From: faraon at stanford.edu (Andrei Faraon) Date: Tue, 5 Dec 2006 08:41:24 -0800 Subject: Raith free untill 11am Message-ID: <28d3ece90612050841m602b50du908eef7de81e2b9f@mail.gmail.com> Sorry for the late notice. Sample not ready. -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Dec 5 17:13:09 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 05 Dec 2006 17:13:09 -0800 Subject: [Fwd: Please remove all items from Ebeam Lab Drybox by December 1, 2006 -- NO STORAGE OF SAMPLES IN THIS DRYBOX IN DECEMBER.] Message-ID: <45761925.3090908@snf.stanford.edu> *Final Reminder:* All Users are requested to check the Ebeam Lab dry box for lost and missing samples as well as to remove all of your in-process Ebeam samples from this dry box. Do it Tonight! /I wish to thank all Users that are donating their valuable MBE GaAs and GaAlAs samples to me for my future use! // /James Conway / // / -------- Original Message -------- Subject: Please remove all items from Ebeam Lab Drybox by December 1, 2006 -- NO STORAGE OF SAMPLES IN THIS DRYBOX IN DECEMBER. Date: Mon, 20 Nov 2006 17:33:35 -0800 From: James Conway Organization: Stanford Nanofabrication Facility - Stanford University To: Raith SNF Mailing list , ebeam at snf.stanford.edu CC: Andrei Faraon , Dirk Englund , Ilya Fushman , "Richter, Claudia" Greetings: All Users are requested to check the Ebeam Lab dry box for lost and missing samples as well as to remove all of your in process Ebeam samples from this dry box. December 1, 2006 all samples remaining will be removed and thrown away. Users are reminded that this dry box is not really dry and is not to be used for long term storage of samples in the Ebeam Lab. Only samples that are in-process and will be exposed within 24 hours are to be stored there. NO samples are to be stored in this area from December 1 through January 3, 2006 so we can clean out this box as part of our annual Lab cleanup. ALL Users are also requested to take a moment out of their tasking in the ebeam lab and assist us in cleaning up the lab of excess debris, archived manuals, and assist us by manually wiping down surfaces of the keyboards, counters and desk with IPA. Please help us keep this and other areas of the SNF clean room clean and ready for the next user. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: StopLight.gif Type: image/gif Size: 6413 bytes Desc: not available URL: From kocabas at stanford.edu Wed Dec 6 15:01:33 2006 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Wed, 06 Dec 2006 15:01:33 -0800 Subject: Tomorrow (Dec 7) 9am-12 is free Message-ID: <45774BCD.5020209@stanford.edu> I've rescheduled and will be using Shu-Jen's slot (hansj). Ekin From kimsangb at stanford.edu Wed Dec 6 17:21:53 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Wed, 6 Dec 2006 17:21:53 -0800 Subject: raith free from 8pm to 10pm Message-ID: <1165454513.45776cb1cd3ef@webmail.stanford.edu> Sorry for late notice From jwc at snf.stanford.edu Fri Dec 8 08:36:26 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 08 Dec 2006 08:36:26 -0800 Subject: Raith off line will be going into the cleanroom shortly to resolve. Message-ID: <4579948A.1020201@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Dec 8 15:29:32 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 08 Dec 2006 15:29:32 -0800 Subject: [Fwd: Shutdown raith SNF 2006-12-08 14:51:57: Electron optics board may have been damaged im EHT trip event.] Message-ID: <4579F55C.7080902@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Dec 11 17:19:02 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 11 Dec 2006 17:19:02 -0800 Subject: Raith Status: Monday December 11, 2006 4 PM -- RAITH WILL REMAIN OFFLINE FOR REPAIRS. Message-ID: <457E0386.3090506@snf.stanford.edu> * Greetings Raith Community: RAITH WILL REMAIN OFF-LINE FOR REPAIRS. I DO NOT KNOW WHEN IT WILL COME BACK UP! * On Friday in the early morning a User's error loading the Load Lock Station resulted in the Standard Sample Holder falling off the piezo post during the Load Lock Exchange. The Std. Sample Holder touched the Laser Interferometer Mirror on the Raith's LIS Stage and may have also touched the SEM Objective Lens Pole piece. This resulted in a arcing event through the column to the stage ground from the EHT power supply. This then caused an EHT set point trip (Error 519) and we subsequently lost some functionality of the Electron Optics Board in the focusing and stigmation sections. Zeiss SMT was not able to provide a Field Service technician as expected on Friday afternoon and no one showed up as expected at any point today. The Zeiss office in Thornwood, New York did not deploy a Field Service engineer today as was promised by Zeiss management Friday afternoon. I again spoke with Christoff Barbier, Zeiss west coast service manager and he stated that we could not get a engineer here as they were deployed to Hitachi HTA - Almaden. I have attempted to expedite a Electron Optics board to our site but have not been able to obtain one, likely as in similar situations before they do not have a board in current stock. Zeiss wishes to review the situation before they commit to shipping a E/O board despite my request they come over with E/O and EHT control boards and tools to effect repairs. I have also requested they bring over a final objective lens pole piece cap just in case it too had become damaged during this event. *I must say that I am again very disappointed in the poor service response and lack of effort by ZEISS SMT to assist us with this event in a timely manner.* Now we are entering our 4th day of downtime and they seem unable to respond to our current need for Field Service Support. Will post more information as progress comes to pass. All Users with reservations after WED Noon should maintain their reservations in hope that I can return the system to service. My apologizes for the negative impact upon your work that this downtime has caused during this busy period. Thank you for your support! James Conway SNF Ebeam Lab. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: stop-light.gif Type: image/gif Size: 3800 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri Dec 15 08:58:45 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 15 Dec 2006 08:58:45 -0800 Subject: Raith may be coming back on line this afternoon... Message-ID: <4582D445.4060209@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Dec 15 15:05:53 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 15 Dec 2006 15:05:53 -0800 Subject: RAITH is up and back online for Users... Message-ID: <45832A51.1040007@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: reindeer_waltz.gif Type: image/gif Size: 37166 bytes Desc: not available URL: From bdai at stanford.edu Sat Dec 16 22:00:43 2006 From: bdai at stanford.edu (Bing Dai) Date: Sat, 16 Dec 2006 22:00:43 -0800 Subject: Raith Free from 10pm tonight to 12:30am tomorrow In-Reply-To: <45832A51.1040007@snf.stanford.edu> References: <45832A51.1040007@snf.stanford.edu> Message-ID: <1166335243.4584dd0bb5b98@webmail.stanford.edu> Reservation released. Thanks. Bing From dkozak at ucsc.edu Sun Dec 17 17:29:51 2006 From: dkozak at ucsc.edu (Dmitry Alexander Kozak) Date: Sun, 17 Dec 2006 17:29:51 -0800 Subject: Raith free from 12:30-3:30 tonight Message-ID: Wafer broke, no time to make another one. Sorry for late notice. Dmitry From jwc at snf.stanford.edu Mon Dec 18 14:42:08 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 18 Dec 2006 14:42:08 -0800 Subject: RAITH Offline for the Holidays!! Plan to return to service January 5 for RAITH Champions and Jan 10th for All other users. SHUT DOWN AND START UP PLAN. Message-ID: <45871940.1010808@snf.stanford.edu> *Happy Holiday Greetings to the Raith Community: The Year in Review: * Well it was a wild ride for the RAITH community this last year with a great run of uptime through the first two thirds of the year; followed by several upsets resulting in significant downtime during the later months of 2006. However All-in-All the performance of the system has been superb and well within the system specifications. 2006 also saw the RAITH community grow to almost 150 members as some older Users migrating off the system as they graduate and a very large group of new users coming onto the system late this year. In November alone we had 10 new users start on the system with only a few load lock errors encountered. By my count I have now trained more than 160 users on the RAITH system to date at Stanford University. In 2006 we also observed the first RIE etched EBL features coming off the RAITH system with line width features below 10 nm. In fact several structures were found for Single Pixel Lines with line widths, and and single shot Dot diameters, in the 5 to 7 nm range. This is world class Electron Beam Lithography results and everyone working in the SNF Ebeam Lab should feel a sense of being a participant in this effort. Good Job to everyone! *Special Thanks to the following People and Groups: * I would like to thank the entire RAITH Community, especially the many RAITH Champions, for your efforts above and beyond the call of duty to keep the system up, help the many new Users come up to speed, and always being there to lend a hand when it was needed. I would also like to thank all the members of Raith USA Inc. and RAITH GmbH in Dortmund, Germany for their constant encouragement and support as we have moved through several software upgrades and for responding to problems and support when we have needed it. Thanks also to Mike Santomango with Carl Zeiss SMT for many service responses and timely phone calls. Finally a special thanks to Dick Crane, Ted Berg, and the entire maintenance group whom have worked tirelessly behind the scenes ensuring the facility stays up so our systems can also maintain uptime. Dick is retiring next month so say 'hello' the next time you see him in passing and _Thank Him_ before he leaves at the end of January. Finally thanks to Mary Tang for her patience and gentle leadership; to Paul Jerabek and Ted Berg for continuing to take on and tame the Hitachi HL-700-F so I can concentrate on the RAITH. Finally Many kudos's also go out to all of our SNF Process Staff whom maintain a lab that we can get our work done with the highest quality. Overall I think 2006 was a great year! I look forward to the same level of engagement with all users on the RAITH tool in 2007. My hope in 2007 is to push the limits of what we can do on the RAITH system, improve the metrology and imaging equipment available to users working in the SNF Cleanroom and Ebeam Lab all the while creating pathways to everyone's success in their research in nanotechnology at the Stanford Nanofabrication Facility. To each and every one of you, and to your families, a very Joyous Holiday Season and a Happy New Year! Safe Travels where ever you go, James Conway Ebeam Lab Stanford Nanofabrication Facility _*Schedule for Shutdown and Startup:*_ 12-18-2006 12:00 Noon Lab and RAITH system are shut down and in Bake Out for the Holiday NO USER ACCESS TO THE CLEAN ROOM. 01-04-2007 10 - 15:00 hours ZEISS Field Service comes in and brings the FE-GUN back on line. NO USER ACCESS TO THE SYSTEM. 01-04-2007 10 - 15:00 hours to 15:00 01-05-2007: FE_GUN run in and conditioning. 01-05-2007 10 AM Zeiss Field Service performs Electron Optics card adjustments and performs a preliminary system check out. NO USER ACCESS TO THE SYSTEM. 01-05-2007 15:00 to 11:00 01-08-2007. Possible access to the RAITH system if handed off for 'testing' by ZEISS Field Service. _*RAITH Champion user access ONLY -- unless escorted by a RAITH Champion. *_01-08-2007 12:00 to 01-09-2005 1800 hours SYSTEM off line to users for RAITH USA Inc. Field Service for some preventative service on the cooling section and Laser Interferometer Stage and Loader of the RAITH system. This will be followed by the RAITH Qualification for Performance as we have done in the past. There may exist some periods over each evening when the RAITH may be available by Users to assist us in performance testing. We will do our best to return the system to all Users as soon as possible during this week once the system is qualified. _* JWC's Request for 'Safe and Sane' *__*Coral *__*reservations: *_To avoid massive jumbling and consequent grumblings during the start up of the RAITH system in January I am requesting you: * Please do not make reservations on CORAL for any time before January 5, 2007 at 15:00 hours. Likely there will be no system access until after this time at the very best. * Only RAITH Champions may make Coral reservations for any time *before* WED. January 10, 2007 at 12:00 Noon. The Coral schedule will begin in earnest for all users at that time. * All Users are encouraged to 'Share the Ride' and optimize the operations time by working closely with the User before and after your session to hand off the system smoothly. This is in order to allow everyone a chance to come back onto the system in the first two weeks of operations in 2007! Users should start timing their writes to avoid idle time at the end of their reservations time slots. Please strive to improve the throughput of the system now that we have so many users on the tool! *Thank you for your support! ** **James Conway 415-412-4825 cell... * I will be returning to SNF mid to late morning Monday 01-08-2007. I will be unavailable except for emergencies from December 26, 2006 - January 2, 2007. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... 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