workaround and solutions for users having problems using layer 61 automated write field alignment.

Joe Klingfus jk at raithusa.com
Tue Feb 14 19:42:39 PST 2006


A few comments to add that I hope can help those who may have problems doing
automatic alignment....
 
When doing overlay and mark detection it is always recommended to have at
least 1 mark (not in a critical part of your pattern) in order to "practice"
or "train" the system.  You cannot have any success if there are marks
somewhere in the middle of your design and you don't first scan any of the
marks to make sure the threshold settings are OK.  The Raith Demo pattern
shows an example of a single field containing marks, within a special
writefield called "writefield calibration".  You may not have the luxury of
having a special alignment field within your own design, but at least you
need to drive to the location of a mark and see if the mark threshold
settings are working or not.  At this location you can create a special
working area so that you can scan the mark a few time to adjust the
threshold settings. 
 
Anyone who is doing automatic alignment should understand what I'm saying,
if not, practice with the Demo pattern. When exposing only layer 61 of the
Demo pattern, and using just the Working Area "writefield calibration" the
system will scan only the alignment marks.  This allows the user to open the
Align.PLS, look at the results, and adjust the threshold settings until the
marks are correctly recognized. After all settings are OK you can select
other layers/working areas to expose.
 
If any of the IDs in the Align.PLS are red, nothing will work.  Even if they
are all green, you still need to double-click a few of the linescans to see
if the threshold settings are appropriate or else at the edge of failing.
As James indicated, when adjusting the threshold settings the Parameter set
displayed should say "Align write field".  (This is the default.  You should
also see the setting "stay;set=Align write field" under Module status >>
Writefield Alignment >> Autoscan options.)
 
Is there something funny going on, and the alignment corrections are not
being taken into account??  
This is easy enough to determine. Have the Align Writefield window in a
visible place on the desktop when you scan layer 61.  The zoom, shift, and
rotation numbers should change after a set of marks have been scanned. You
can also check the protocol file to see if there were any changes to the
align write field values. The Align.PLS is over-written each time a set of
marks have been scanned.  You can always look at the most recent set of
scans to see the result.
 
Joe.  

-----Original Message-----
From: James Conway [mailto:jwc at snf.stanford.edu] 
Sent: Tuesday, February 14, 2006 12:02 PM
To: James Conway
Cc: Raith SNF Mailing list; Cole Loomis -- RAITH USA.; Joseph Klingfus
Subject: Re: workaround and solutions for users having problems using layer
61 automated write field alignment.


Greetings:

Yesterday I looked at the problem the User had encountered overnight
Saturday last weekend in more detail and found a that change in the
Threshold parameter settings for the align write field process called in the
ALIGN.PLS position list.  When a user scanned his position list for layer 61
the system opens up ALIGN.PLS and performs the automated scans.  The line
scans completes and there is a wave form in the Line scan dialog box but the
thresholds displays the WIDTH and NOT the POSITION that the system desires
to measure.  The data then does not get placed into the proper POS 1 POS 2
and POS 3 columns of the ALIGN.PLS so the system do receive the data as to
where the targets are in order to adjust the ALIGN Write field.  In the end
you get a red light in the PLS.

I believe I have resolved this problem by copying ALIGN.PLS from the system
folder and over writing the ALIGN.PLS is users directories: training, stohr.
If you are working in overlay using layer 61 and encounter this problem you
can also do this simple procedure to correct this problem:



1.	Scan layer 61 in your position list item.  Let the system perform
the line scans and you will either get green or red dots next to the ID
number. 

2.	If necessary open ALIGN.PLS ensuring you are opening from YOUR
user/data/ directory.  You will see the line scan files in the listing on
the right of the U, V positions and patterns names.  


3.	Double click on the item line in the position list.  You will obtain
the new dialog box containing the line scan image file which is a SEM wave
form. 

4.	Press the apply button on the dialog box and that will pop up the
Threshold algorithm - ALIGN WRITE Field dialog box.  If it is another
thresholding file, use the pull down menu to select ALIGN WRITE FIELD.  


5.	Finally on the bottom of this dialog box is a DISPLAY section and
click off the POSITION button and not the WIDTH button and then press [OK]. 


6.	Close the align.pls list and save your changes on the pop up
request. 

7.	Go and rescan you pattern layer 61 and all other layers exposed in
overlay and you should be just fine. 



Users still having problems with this please seem me immediately, or call my
cell.

Thank you for your support!

James Conway


James Conway wrote:



Greetings: 

Over the weekend I had report of users on log in other than my own, whom had
begun seeing problems getting automated write field alignment to complete
during their run. 

During the align.PLS scans the line scan was completed but the system does
not measure the line scan or allow WF aignment to complete. You will see red
lights next to the ID number on the PLS. 

ALL users are asked to promptly report if they run into this problem. 

Thank you 

JWC 





-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/raith/attachments/20060214/2f468a36/attachment.html>


More information about the raith mailing list