Zeiss Field Service performed adjustments on the RAITH SEM today and CORAL SCHEDULE as shifted 2 + hours.
jwc at snf.stanford.edu
Wed Feb 15 18:33:25 PST 2006
Greetings Raith Users:
1. This afternoon, after many delays, working with Zeiss SMT field
service we finished up the E/O card calibrations and users will no
longer experience the large image shifts when working between the three
various Magnification Amplifier ranges; when selecting different scan
speeds, and when performing stigmation at high magnifications.
2. We now resume the CORAL schedule shifting your sessions back about 2
+ hours from your scheduled time. Current Users on the system expect to
finish about 7 PM. Ebeam lab phone is 650-725-3673
3. Current Restrictions on Operations:
Users may operate the system to as high as 25 kV with no other
restrictions. Gun vacuum is in the mid E -010 mBar scale. (6.2 E -010
Please ensure that the system reached base pressure before bringing up
the gun to above 20 kV. (Typical base for the system is 1.6 to 1.9 E
4. All Users are cautioned to continue to ALWAYS change their gloves as
they open the LOAD LOCK chamber and to make all efforts to not
contaminate the system with non-standard materials, greases, silica
gels, and un-cured resist structures. Users are also encouraged to
pre-bake all samples going into the system on a hot plate just before
loading. I recommend 105 degrees C for 2 minutes on the hot plate.
Thank you for your support!
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the raith