From fjaeckel at stanford.edu Thu Jun 1 15:55:52 2006 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Thu, 1 Jun 2006 15:55:52 -0700 Subject: released Sunday 8AM-1PM Message-ID: <1149202552.447f7078c721f@webmail.stanford.edu> -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu and frank_jaeckel at web.de From luckyyrl at gmail.com Fri Jun 2 12:26:06 2006 From: luckyyrl at gmail.com (Yuerui Lu) Date: Fri, 2 Jun 2006 12:26:06 -0700 Subject: time free from1:30pm to3:30pm Message-ID: <9dc2cbc0606021226m27234433ub15f1b3fcc3f0028@mail.gmail.com> sample not ready. sorry for late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From hansj at stanford.edu Sat Jun 3 11:16:27 2006 From: hansj at stanford.edu (Shu-Jen Han) Date: Sat, 3 Jun 2006 11:16:27 -0700 Subject: cancel tonight (sat.) 6p-9p Message-ID: <1149358587.4481d1fb3d705@webmail.stanford.edu> I'm really sorry for the late notice. Drytek4 is down and I cannot make my samples ready. From xinranw at stanford.edu Tue Jun 6 18:12:27 2006 From: xinranw at stanford.edu (Xinran Wang) Date: Tue, 6 Jun 2006 18:12:27 -0700 Subject: reservation removed tomorrow from 4pm, sample won't be ready Message-ID: <22ffcd060606061812t779b08e8l2ffd65a721f6c518@mail.gmail.com> Sorry for the late notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 6 18:26:35 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 06 Jun 2006 18:26:35 -0700 Subject: First Announcement: Ebeam Town Hall Meeting for Wednesday June 14, 2006 from 3 - 4:30 PM Message-ID: <44862B4B.3020401@snf.stanford.edu> Greetings Ebeam and Raith Communities: The next Ebeam Town Hall Meeting will be held Wednesday June 14, 2006 from 3 - 4:30 PM in CIS 201. We hope to have a good turnout for this meeting as we sincerely desire your input and feedback on how to manage our Ebeam Lithography systems with so many Lab Members working on these systems. The agenda and items for discussion are currently open for your input and any request. Ebeam Town Hall Meeting Agenda: 1. Welcome and Introduction by James Conway ( 5 minutes) 2. Today's Feature Presentation: ( 40 minutes + 10 for Q&A) Leo P. Schuler MacDiarmid Institute for Advanced Materials & Nanotechnology Department of Electrical and Computer Engineering University of Canterbury, Christchurch, New Zealand Fabrication of functional ZnO coatings and optimizations for improved piezoelectric properties and photoluminescence Abstract: Zinc Oxide (ZnO) is a versatile material which has attractive dielectric, piezoelectric, semiconducting, acousto-optic, nonlinear optical, and electrical properties. ZnO nanomaterials are promising candidates for nanoelectronics and photonics. Compared with other semiconductor materials, ZnO has a high exciton binding energy of 60 meV, which gives it a high potential for room temperature light emission, it is more resistant to radiation, and is multifunctional as it has piezoelectric, ferroelectric, and ferromagnetic properties. ZnO can be deposited in a multitude of ways. In our department, we have been focusing in sputtering deposition. I have been concentrating on fabricating highly piezoelectric films with good photoluminescence properties. However, these two properties are somewhat contradictory. The choice of base substrate, sputtering parameters, and post deposition treatment (annealing and dry Etching) leads to modification of the crystal structure and the surface properties, which in turn leads to more intense photoluminescence (PL) response. The converse piezoelectric effect on sputtered ZnO was analyzed using interferometric methods and for the first time, using piezoelectric force microscopy (PFM). PFM is a variation of atomic force microscopy that can be applied to investigate piezoelectric thin films at the nanometer scale. Surface acoustic wave devices (SAW) were fabricated on various ZnO films and used to detect changes in UV light intensities. Finally I will give a short overview about the range of activities in the area of ZnO "Down Under". 3. Raith Reservation and Scheduling Issues: (15 minutes ) Managing the Raith 150 system with a large number of users of various experience levels: - Proposed Changes or Modification to the currently existing policies in place? - Cancellation Policy -- 24 hour notice? - Should we penalize users whom cancel, or repeatedly not show up for their reservations? - Should we implement a Raith System Standby Users listing? - 'Share the Ride' incentive for users working with small chips. 4. Additional Items to be determined... The Agenda remains open and waiting for your input! -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Wed Jun 7 10:57:59 2006 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Wed, 7 Jun 2006 10:57:59 -0700 Subject: reservation removed from 1 to 4pm Message-ID: <1149703079.448713a7e142c@webmail.stanford.edu> My sample is not ready, I am really sorry about the late notice -Hungtao From arvisun at stanford.edu Wed Jun 7 20:44:27 2006 From: arvisun at stanford.edu (arvind sundaramurthy) Date: Wed, 07 Jun 2006 20:44:27 -0700 Subject: Raith Reservation Removed Message-ID: <6.0.1.1.2.20060607204358.0358ddf0@arvisun.pobox.stanford.edu> Raith Reservation Removed midnight-7am. Sample not ready. arvind From illsbills at gmail.com Wed Jun 7 20:56:46 2006 From: illsbills at gmail.com (Ilya Fushman) Date: Wed, 7 Jun 2006 20:56:46 -0700 Subject: Raith Reservation Removed In-Reply-To: <6.0.1.1.2.20060607204358.0358ddf0@arvisun.pobox.stanford.edu> References: <6.0.1.1.2.20060607204358.0358ddf0@arvisun.pobox.stanford.edu> Message-ID: <28bfad130606072056r780c5df7uafa692d56011f84b@mail.gmail.com> i'll take it. thanks On 6/7/06, arvind sundaramurthy wrote: > > Raith Reservation Removed midnight-7am. Sample not ready. > > arvind > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From illsbills at gmail.com Wed Jun 7 21:49:20 2006 From: illsbills at gmail.com (Ilya Fushman) Date: Wed, 7 Jun 2006 21:49:20 -0700 Subject: Raith Reservation Removed In-Reply-To: <28bfad130606072056r780c5df7uafa692d56011f84b@mail.gmail.com> References: <6.0.1.1.2.20060607204358.0358ddf0@arvisun.pobox.stanford.edu> <28bfad130606072056r780c5df7uafa692d56011f84b@mail.gmail.com> Message-ID: <28bfad130606072149u4cb30644t978959f60a3be97b@mail.gmail.com> nevermind. sample also not ready. On 6/7/06, Ilya Fushman wrote: > > i'll take it. > thanks > > > On 6/7/06, arvind sundaramurthy wrote: > > > > Raith Reservation Removed midnight-7am. Sample not ready. > > > > arvind > > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Fri Jun 9 12:01:20 2006 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 9 Jun 2006 12:01:20 -0700 Subject: Raith free 5-9pm today Message-ID: <1149879680.4489c58052643@webmail.stanford.edu> Sorry for the late notice. Sample won't be ready. Yuan Yuan Zhang EE department From levi at snow.stanford.edu Fri Jun 9 12:37:15 2006 From: levi at snow.stanford.edu (Ofer Levi) Date: Fri, 09 Jun 2006 12:37:15 -0700 Subject: Raith free 5-9pm today In-Reply-To: <1149879680.4489c58052643@webmail.stanford.edu> References: <1149879680.4489c58052643@webmail.stanford.edu> Message-ID: <6.1.2.0.2.20060609123655.04b58170@snowboard.stanford.edu> Thanks Yuan, I took it, Ofer At 12:01 PM 6/9/2006, Yuan Zhang wrote: >Sorry for the late notice. Sample won't be ready. > >Yuan > >Yuan Zhang >EE department From kimsangb at stanford.edu Fri Jun 9 13:45:00 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Fri, 9 Jun 2006 13:45:00 -0700 Subject: raith free from 12:01AM Saturday Message-ID: <008901c68c05$93c7d570$a9b50c80@anavel> Sample is not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Fri Jun 9 14:39:41 2006 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Fri, 9 Jun 2006 14:39:41 -0700 Subject: finish earlier, raith free starting at 3pm Message-ID: <1149889181.4489ea9dc3231@webmail.stanford.edu> I start earlier and will finish my write earlier. -Hungtao From fjaeckel at stanford.edu Fri Jun 9 14:56:21 2006 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Fri, 9 Jun 2006 14:56:21 -0700 Subject: raith free monday 6-8PM Message-ID: <1149890181.4489ee859b812@webmail.stanford.edu> I reduced the amount of time I reserved. -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu and frank_jaeckel at web.de From lsmoore at stanford.edu Fri Jun 9 17:52:19 2006 From: lsmoore at stanford.edu (Lindsay Moore) Date: Fri, 9 Jun 2006 17:52:19 -0700 Subject: raith free tomorrow morning 7-10 Message-ID: <4dfce5b30606091752w1c89afe1sce19a69e0e5b0845@mail.gmail.com> I was too ambitious. Samples need one more day of prep. Lindsay From yiyangg at stanford.edu Sat Jun 10 14:11:06 2006 From: yiyangg at stanford.edu (Yiyang Gong) Date: Sat, 10 Jun 2006 14:11:06 -0700 Subject: raith free from 2:30-5:30pm (done early) Message-ID: <1149973866.448b356a29a01@webmail.stanford.edu> From jwc at snf.stanford.edu Mon Jun 12 10:20:36 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 12 Jun 2006 10:20:36 -0700 Subject: 2nd Announcement: Ebeam Town Hall Meeting: Wednesday June 14, 2006 from 3 - 4:30 PM Message-ID: <448DA264.2070102@snf.stanford.edu> Greetings Ebeam and Raith Communities: The next Ebeam Town Hall Meeting will be held this Wednesday June 14, 2006 from 3 - 4:30 PM in CIS 201. We hope to have a good turnout for this meeting as we sincerely desire your input and feedback on how to manage our Ebeam Lithography systems with so many Lab Members working on these systems. The agenda and items for discussion are currently open for your input and any request. Ebeam Town Hall Meeting Agenda: 1. Welcome and Introduction by James Conway ( 5 minutes) 2. Today's Feature Presentation: ( 40 minutes + 10 for Q&A) Leo P. Schuler MacDiarmid Institute for Advanced Materials & Nanotechnology Department of Electrical and Computer Engineering University of Canterbury, Christchurch, New Zealand Fabrication of functional ZnO coatings and optimizations for improved piezoelectric properties and photoluminescence Abstract: Zinc Oxide (ZnO) is a versatile material which has attractive dielectric, piezoelectric, semiconducting, acousto-optic, nonlinear optical, and electrical properties. ZnO nanomaterials are promising candidates for nanoelectronics and photonics. Compared with other semiconductor materials, ZnO has a high exciton binding energy of 60 meV, which gives it a high potential for room temperature light emission, it is more resistant to radiation, and is multifunctional as it has piezoelectric, ferroelectric, and ferromagnetic properties. ZnO can be deposited in a multitude of ways. In our department, we have been focusing in sputtering deposition. I have been concentrating on fabricating highly piezoelectric films with good photoluminescence properties. However, these two properties are somewhat contradictory. The choice of base substrate, sputtering parameters, and post deposition treatment (annealing and dry Etching) leads to modification of the crystal structure and the surface properties, which in turn leads to more intense photoluminescence (PL) response. The converse piezoelectric effect on sputtered ZnO was analyzed using interferometric methods and for the first time, using piezoelectric force microscopy (PFM). PFM is a variation of atomic force microscopy that can be applied to investigate piezoelectric thin films at the nanometer scale. Surface acoustic wave devices (SAW) were fabricated on various ZnO films and used to detect changes in UV light intensities. Finally I will give a short overview about the range of activities in the area of ZnO "Down Under". 3. Additional Items to be determined... The Agenda remains open and waiting for your input! -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Jun 12 11:08:37 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 12 Jun 2006 11:08:37 -0700 Subject: ANNOUNCEMENT: RAITH Group XX -- Intensive 4 day short course. June 20 - 23 TUESDAY - FRIDAY 10 AM - 6 PM Message-ID: <448DADA5.6000708@snf.stanford.edu> Greetings RAITH Group XX: If you are listed in the To: section of this email you are confirmed to be in RAITH Group XIX. If you are listed in the CC: section of this email, I still am in need of further information, or a commitment from you, to add you in the class. If you now find you cannot attend this training class please reply ASAP and we will place you in the next available class with priority. We also wish to invite all interested parties to the Tuesday morning lecture session and demo layer one training following at 2 PM - 6 PM in the afternoon. All are also welcome to attend as an observer the other 'hands-on' sessions through the week. All Users are also encouraged to join any Raith Champion when they are on the system to gain further exposure to the system. If you are listed in the To: section of this email: This is your first announcement and confirmation of your commitment for attending the RAITH Group XX Training course to be held June 20 - 23, 2006. The schedule follows along with a listing of Participants whom you will be working with as a Team. This will be an intensive four day workshop. You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system. NOTE: There are prerequisites you must complete before attending this class. You must have recent relevant SEM and LITHO experience before your can sit for this class. Please see me directly during my office hour should you have any questions. Bring examples of your high resolution SEM work to the first class. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- RAITH Group XX Schedule: Raith 150 Basic Users Training - Intensive 4 Day Short Course June 20 - 23, 2006 from 10 - 6 PM Tuesday through Friday. The Plan of Action: We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system. Schedule: Tuesday June 20, 2006: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS 115 [Please note the room change from previous classes!] 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday June 21, 2006: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday June 22, 2006: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday June 23, 2006: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class so you can demonstrate your skill on the system to me and gain your login to the system. I WILL PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. ------------------------------------------------------------------------------------------------------------------------------------------- PARTICIPANTS IN RAITH GROUP XX: 1. Ching-Huang Lu ratiug at stanford.edu Coral: ____________ Phone: ___________ Waiting for his confirmation ... <>2<>. Alex Neuhausen alexneu at gmail.com Coral: alexneu Phone: 571-643-8034 c David Gold-Haber Gordon Group Project: Single molecule trapping and conductance measurements. ? <>3. Li Zhang zhangli at stanford.edu Coral: zhangli Phone: 650-714-1386<> Hongjie Dai Group: Project: <>4. Deji Akinwande dejia at stanford.edu Coral: Dejia Phone: 703-623-6423 c Phillip Wong Group Project: CNT for Transistors devices ? <>5. Brian Gierhart bcgierhart at ucdavis.edu Phone: 530-752-8555 lab.<> UC DAVIS Project: Nano-gap electrodes for molecular electronics. 6<>. Andrei Garcia ag254 at stanford.edu Phone: 443-994-8186 cell David Gold-Haber Gordon Group Project: Spin orbit coupling in InGaAs. ? <>7. Ekin Kocabas kocabas at stanford.edu Coral: kocabas Phone: 650-804-4210 c David Miller Group: Project: Optical Antennas for detection in the IR. ? <>8. Guangyu Zhang gyzhang at stanford.edu Coral: Phone: 650-796-5467 Hongjie Dai Group: Project: Control of catalyst particles for CNT. ? -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Red-ball.gif Type: image/gif Size: 384 bytes Desc: not available URL: From fjaeckel at stanford.edu Mon Jun 12 12:51:49 2006 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Mon, 12 Jun 2006 12:51:49 -0700 Subject: raith free from 1.30PM to 6PM Message-ID: <1150141909.448dc5d5087d7@webmail.stanford.edu> Used unclaimed morning/noon reservation and released mine in the afternoon. -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu and frank_jaeckel at web.de From mtopinka at stanford.edu Tue Jun 13 00:48:19 2006 From: mtopinka at stanford.edu (Mark Topinka) Date: Tue, 13 Jun 2006 00:48:19 -0700 Subject: free slot Tuesday 2-4:30 Message-ID: <6.1.2.0.2.20060613004747.0304db28@mtopinka.pobox.stanford.edu> sorry for the late notice. From zhangy at stanford.edu Tue Jun 13 11:28:42 2006 From: zhangy at stanford.edu (Yuan Zhang) Date: Tue, 13 Jun 2006 11:28:42 -0700 Subject: free slot Tuesday 2-4:30 In-Reply-To: <6.1.2.0.2.20060613004747.0304db28@mtopinka.pobox.stanford.edu> References: <6.1.2.0.2.20060613004747.0304db28@mtopinka.pobox.stanford.edu> Message-ID: <1150223322.448f03da111f8@webmail.stanford.edu> I'll take 3:30pm to 4:30pm. Thanks. Yuan Quoting Mark Topinka : > sorry for the late notice. > > Yuan Zhang EE department From xinranw at stanford.edu Wed Jun 14 01:15:53 2006 From: xinranw at stanford.edu (Xinran Wang) Date: Wed, 14 Jun 2006 01:15:53 -0700 Subject: reservation removed 6/14 from 19:30 to 22:00 Message-ID: <22ffcd060606140115p7120cd6eh765bfdad86e4648b@mail.gmail.com> Sample wont be ready. Sorry for late notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Wed Jun 14 10:21:25 2006 From: zhangy at stanford.edu (Yuan Zhang) Date: Wed, 14 Jun 2006 10:21:25 -0700 Subject: reservation removed 6/14 from 19:30 to 22:00 In-Reply-To: <22ffcd060606140115p7120cd6eh765bfdad86e4648b@mail.gmail.com> References: <22ffcd060606140115p7120cd6eh765bfdad86e4648b@mail.gmail.com> Message-ID: <1150305685.44904595e3ad7@webmail.stanford.edu> I'll take 9:00-10:00pm. Thanks. Yuan Quoting Xinran Wang : > Sample wont be ready. Sorry for late notice. > > Xinran > Yuan Zhang EE department From jwc at snf.stanford.edu Wed Jun 14 18:07:46 2006 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 14 Jun 2006 18:07:46 -0700 Subject: Oil films or silicon oil type material on the VINOX microscope. Message-ID: <4490B2E2.5000000@snf.stanford.edu> Greetings to the Ebeam Community, All Users working in the Ebeam Lab are henceforth to be qualified and will need to review microscope operations procedures to utilize the Olympus Vinox Microscope in the Ebeam Lab. Why: For the last three months occasionally, more recently over the last three weekends, and repeatedly over several evenings this week -- I have come into the lab in the morning to discover that the Vinox microscope stage, edges of the stage, the X-Y and Focus controls are contaminated with a thin oily film that is difficult to remove. There have also been a number of times when the microscope set up has been changed in attempts to utilize the tool making it obvious that a person is using the tool but has no skill in microscopy. The end result is that the XY motion control and the Z mechanical stage rack have been damaged and most surfaces on this tool are contaminated. There have also been three recent incidents of person(s) unknown using the microscope after aqueous development (TMAH and water) from wet bench miscres. the developer solution has roughened the surface of the stage and sample holders. My concern is that if any of this unknown oily material makes it way into the SEM columns or the EBL systems it will very quickly migrate throughout the column and contaminate the LIS Stage, laser mirrors, and SEM column of these systems. This will rapidly and severely degrade the performance and utility of all of our Beam Tools. In essence it could take us down hard in just a drop of this material gets into an Ebeam system. Why would anyone let this happen?!! What I need from you: I must request that all users working in the Ebeam Lab see me and get checked out on this microscope before they use the tool again. No exceptions. I need all users to be especially careful to change their gloves before using the microscope each and every time they use it. I need all users to be especially vigilant in looking for users working outside this lab in the main cleanroom that may be entering the Ebeam Lab after hours, especially over the weekends. We need to identify the User(s) whom are working with oily stuff in the lab or inadvertently carrying these contaminants over to the Microscope from another Lab before it gets into our Ebeam systems. I cannot believe that anyone would be so careless that they could not notice this happening. The oily material is being left all over the microscope and the table surface. It is obvious from the prints on the stage that they are forcing the stage back and forth and not using the X-Y stage movement controls properly. From the hand prints on the table it is obvious their gloves and their wafer box are covered in this material. All Users are again reminded that the Ebeam Lab is a restricted area in the Cleanroom, and only persons qualified on the Ebeam tools are to be coming into this area. Only Users working in the Ebeam Tools are to be using this microscope and only on samples that are clean and free of residues. READ: ALL users doing aqueous development or other processes should be using the microscopes in the Cleanroom. Finally All Ebeam users may confront and obtain the name and coral login of anyone coming into the Ebeam Lab unescorted. Please forward this information to me and I will take it up from there. Thank you for your support! James Conway 650-725-7075 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jun 14 18:39:10 2006 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 14 Jun 2006 18:39:10 -0700 Subject: Changes observed in characteristic of the focus and stigmation controls on the RAITH , User please report if they observed changes in control functions. Message-ID: <4490BA3E.5050807@snf.stanford.edu> Greetings Raith Community: Today when I came onto the system it was immediately apparent that the typical response characteristic manipulating the controls for FOCUS and less so the Stigmation controls has changed profoundly from my last access on the system yesterday. In fact I have never seen it take so much translation of the controls to change focus and orders of magnitude more current is required to properly stigmate. (Note before that it was less than 1 mm to go from stop to stop on the X-Y stigmation controls. now it is five to ten mm!) This indicated to me that the chamber and likely the lower end of the column at the objective lens and pole piece have become severely contaminated in an individual event. The upper column and gun section seems to be maintaining good vacuum, but the big change in stigmation characteristic is very worrisome. I suspect that the RAITH system may have become contaminated with the oily residues that we have been observing showing up on the VINOX microscope. See my previous message on this topic. In fact it may be an Ebeam Lab Raith User whom introduced oil or silicon contaminated samples into the system yesterday evening. All Users working on the tool are asked to be especially vigilant in not placing samples into the system that are not fully baked and cured to above 140 degrees C. Never allow any materials into the system containing Wax, greases, silicon based lubricants and pump oils, krytox fluoridated grease, adhesive tapes including carbon and copper tape. If it isn't high vacuum compliant it doesn't go into the system. If residues are on the backside of the sample it doesn't go into the system. If it is not one of our standard resist materials it is not to go into the system without my approval. In the past on other SEM and Ebeam systems, we have observed spurious contamination events from out gassing of resist and extended exposure of resist under the Ebeam. In time this will coat up the Apertures, the pole pieces, and the Objective lens with hydrocarbon residue resulting in more and more current required to the properly align the gun and when focusing and stigmating on a SEM image. This is what I would normally observe as a SEM system extend beyond the normal PM interval for cleaning, FE gun and aperture replacement... Some of those events were recoverable and the systems returned to normal after a few days period of time. But most of the time contamination like this can only be addressed by a full column PM and an extended N2 Purge followed by a several hundred hour long Gun Bake Out. In reference to the superb resolution and outstanding EBL results we are obtaining on the system since a new column was installed on this tool, it would be unfortunate if just one careless user ruined the whole thing for everyone by contaminating the column. I am hoping we will not have to tear this column down to effect a repair. Users are requested to report any changes they have observed when running the system recently. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 15 09:08:48 2006 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 15 Jun 2006 09:08:48 -0700 Subject: Accepting nominations for RAITH Champions... Message-ID: <44918610.4060604@snf.stanford.edu> An HTML attachment was scrubbed... URL: From fjaeckel at stanford.edu Fri Jun 16 10:26:26 2006 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Fri, 16 Jun 2006 10:26:26 -0700 Subject: released Sat 3-8PM and Tue 12.30-2PM Message-ID: <1150478786.4492e9c28cb20@webmail.stanford.edu> released Sat 3-8PM and Tue 12.30-2PM -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu and frank_jaeckel at web.de From lxuwind at stanford.edu Fri Jun 16 10:44:13 2006 From: lxuwind at stanford.edu (Liang Xu) Date: Fri, 16 Jun 2006 10:44:13 -0700 Subject: raith free 7:30-13:00 on Sunday, 6/18 Message-ID: <000f01c6916c$7b0ccdd0$38aa0c80@Leon> Sample not ready Liang Xu PhD candidate in Department of Materials Science and Engineering, Stanford University Tel: 650-723-2939 (office) 650-497-1934 (home) Address: 60 Olmsted Rd, Apt 104, Stanford, CA94305 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rohank at stanford.edu Sun Jun 18 16:54:18 2006 From: rohank at stanford.edu (Rohan D. Kekatpure) Date: Sun, 18 Jun 2006 16:54:18 -0700 (PDT) Subject: Done Early: Raith Available 5:00p-6:30p Message-ID: -rohan From kimsangb at stanford.edu Sun Jun 18 17:39:49 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Sun, 18 Jun 2006 17:39:49 -0700 Subject: hardlock-API-error:38 Message-ID: <001601c69338$df56b0d0$a9b50c80@anavel> Dear all, The raith150 program in the computer in the ebeam room which we use for pattern design is not starting with the error message "hardlock-API-error:38." Does anyone know how to fix this? I would like to restart the computer but I don't know the password for 'user' account.. I need to use it for pattern design for the session I have tonight. SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Jun 19 12:10:10 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 19 Jun 2006 12:10:10 -0700 Subject: ANNOUNCEMENT: RAITH Group XX -- Intensive 4 day short course. June 20 - 23 TUESDAY - FRIDAY 10 AM - 6 PM --> TUESDAY ROOM AND TIME CHANGE Message-ID: <4496F692.2080601@snf.stanford.edu> NOTE: WE HAD TO CHANGE THE ROOM AND ADJUST THE START TIME CHANGE FOR TOMORROW'S LECTURE IN THE MORNING. WE WILL START THE LECTURE AT 11:00 SHARP IN CIS-X 316 Please be sure to bring examples of your best SEM imaging to the first class tomorrow. Greetings RAITH Group XX: If you are listed in the To: section of this email you are confirmed to be in RAITH Group XX. If you are listed in the CC: section of this email; I still am in need of further information or a commitment from you, and hope to add you in the next class. We wish to invite all interested parties to the Tuesday morning lecture session and demo layer one training following at 2 PM - 5 PM in the afternoon. All are also welcome to attend as observers the other 'hands-on' sessions through the week. All Users are also encouraged to join any Raith Champion when they are on the system to gain further exposure to the system. If you are listed in the To: section of this email: This is your final reminder and confirmation of your commitment for attending the RAITH Group XX Training course to be held June 20 - 23, 2006. The schedule follows along with a listing of Participants whom you will be working with as a Team. This will be an intensive four day workshop. You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system. NOTE: There are prerequisites you must complete before attending this class. You must have recent relevant SEM and LITHO experience before your can sit for this class. Please see me directly during my office hour should you have any questions. Bring examples of your best high resolution SEM work to the first class. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- RAITH Group XX Schedule: Raith 150 Basic Users Training - Intensive 4 Day Short Course June 20 - 23, 2006 from 10 - 6 PM Tuesday through Friday. The Plan of Action: We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system. Schedule: Tuesday June 20, 2006: 11:00 - 1:00 Session 1: Basic Users Course Lecture -- CIS-X 316 [Please note the room change from previous classes!] 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday June 21, 2006: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday June 22, 2006: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday June 23, 2006: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class so you can demonstrate your skill on the system to me and gain your login to the system. I WILL PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. ------------------------------------------------------------------------------------------------------------------------------------------- PARTICIPANTS IN RAITH GROUP XX: 1. Alex Neuhausen alexneu at gmail.com Coral: alexneu Phone: 571-643-8034 c David Gold-Haber Gordon Group Project: Single molecule trapping and conductance measurements. 2. Li Zhang zhangli at stanford.edu Coral: zhangli Phone: 650-714-1386.<> Hongjie Dai Group: Project: 3. Brian Gierhart bcgierhart at ucdavis.edu Phone: 530-752-8555 lab.<> UC DAVIS Project: Nano-gap electrodes for molecular electronics. 4. Andrei Garcia ag254 at stanford.edu Phone: 443-994-8186 cell David Gold-Haber Gordon Group Project: Spin orbit coupling in InGaAs. 5. Ekin Kocabas kocabas at stanford.edu Coral: kocabas Phone: 650-804-4210 c David Miller Group: Project: Optical Antennas for detection in the IR. 6. Guangyu Zhang gyzhang at stanford.edu Coral: Phone: 650-796-5467 Hongjie Dai Group: Project: Control of catalyst particles for CNT. - -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 384 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon Jun 19 12:31:34 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 19 Jun 2006 12:31:34 -0700 Subject: Please welcome the new RAITH Champions for 2006! Message-ID: <4496FB96.2060809@snf.stanford.edu> Greetings Raith Users Community: We have had our RAITH 150 system for just over 4 years and as we graduate some users whom have become Raith Champions in the past we are also bringing in additional Raith Champions for 2006. It is will great pleasure and satisfaction that I can now announce a number of New Raith Champions for 2006. Raith Champions act as expert Raith Operators and as docents for each of their groups' assisting users in exposures, and when a User only has need for an occasional exposure on the RAITH 150 Ebeam Lithography system. All Raith Champions have show me that they can properly operate the system without problems and that they are willing to work with other Users on a regular basis. Please welcome these talented people whom are willing to help you on the RAITH system. A complete listing of all 25 RAITH Champions is attached as a MS word document. New Raith Champions for 2006: Xinran Wang with the Hongjie DAI Group Jun Pan with the Harris Group. Yuan Zhang with the H.S Philip Wong Group Nick Koshnick with the Kam Moler Liang Xu with the Shan Wang Group Venkatesh Chambrolu with the Stohr Group Andrei Faraon with the Vuckovic Group Maria Makarova also with the Vuckovic Group Dirk Englund also with the Vuckovic Group Thank you for your support! James Conway SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: RAITH EBEAM TEAMS AND CHAMPIONS.doc Type: application/msword Size: 32256 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon Jun 19 15:04:37 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 19 Jun 2006 15:04:37 -0700 Subject: Off line SW installation disk missing -- please return. Message-ID: <44971F75.3060808@snf.stanford.edu> Greetings: Will the User whom last installed the RAITH 150 Offline SW version 3.0 service Pack 7, Please return the installation disk to James Conway A month ago a Users requested the off line SW to install on his or her laptop to generate GDSII patterns for the Raith class. At that time I provided you with both a full version all in one disk and three disk of the old version plus the upgrades and the hot fixes. Sadly the full version all in one disk was not returned to me when the disk were returned. Please return this disk to me so we can install this SW on other computers. Only the dongle is needed to run the SW and you no longer need, or will find useful, the installation disk. Thank you, James Conway From jwc at snf.stanford.edu Mon Jun 19 15:08:45 2006 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 19 Jun 2006 15:08:45 -0700 Subject: All raith 150 SW dongles are to be returned next Monday monrning or sooner. Message-ID: <4497206D.5020502@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 20 10:46:30 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 20 Jun 2006 10:46:30 -0700 Subject: JWC will be coming onto the system about 14:30 hours half hour later than planned... Message-ID: <44983476.4060300@snf.stanford.edu> An HTML attachment was scrubbed... URL: From faraon at stanford.edu Tue Jun 20 11:59:25 2006 From: faraon at stanford.edu (Andrei Faraon) Date: Tue, 20 Jun 2006 11:59:25 -0700 Subject: JWC will be coming onto the system about 14:30 hours half hour later than planned... In-Reply-To: <44983476.4060300@snf.stanford.edu> References: <44983476.4060300@snf.stanford.edu> Message-ID: <28d3ece90606201159y6a6d0013k365d019c903f2a34@mail.gmail.com> I will use that time. Andrei On 6/20/06, James Conway wrote: > > > -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Tue Jun 20 15:09:21 2006 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Tue, 20 Jun 2006 15:09:21 -0700 Subject: 6-9am free this Thursday Message-ID: <1150841361.449872111ca43@webmail.stanford.edu> My sample will not be ready. -Hungtao From xinranw at stanford.edu Wed Jun 21 01:22:21 2006 From: xinranw at stanford.edu (Xinran Wang) Date: Wed, 21 Jun 2006 01:22:21 -0700 Subject: raith free from 8:30pm Wednesday, sample not ready Message-ID: <22ffcd060606210122q460f47abye1ec7c525069b877@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From cvenky at stanford.edu Wed Jun 21 07:28:39 2006 From: cvenky at stanford.edu (Venkatesh Chembrolu) Date: Wed, 21 Jun 2006 07:28:39 -0700 Subject: Raith free 7:30-10am Message-ID: <1150900119.44995797b7cfd@webmail.stanford.edu> Apologize for late notice, will not be able to use my reservation. Venkatesh From jhemanth at stanford.edu Wed Jun 21 13:30:24 2006 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Wed, 21 Jun 2006 13:30:24 -0700 Subject: Raith free from 6-8:30pm today Message-ID: <000301c69571$87080290$0100000a@jhemanthibm1> Sample not ready. Will not be able to use my time. Best- Hemanth -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jun 21 18:32:15 2006 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 21 Jun 2006 18:32:15 -0700 Subject: ZEP available? YES stocked in the lab this morning! In-Reply-To: <6.0.1.1.2.20060621135328.046a9b00@hansj.pobox.stanford.edu> References: <4496FB96.2060809@snf.stanford.edu> <6.0.1.1.2.20060621135328.046a9b00@hansj.pobox.stanford.edu> Message-ID: <4499F31F.5070306@snf.stanford.edu> Greetings ZEP-520A Users: The new bottle of ZEP-520A is now stocked in the refrigerator in the Lab. All Users are asked to be conservative in their usage and strive to minimize waste of this expensive polymer. All use should be recorded on the box that holds the bottle so I can estimate future usage and usage to specific research groups. Thank you for your support! James Conway Shu-Jen Han wrote: > hi James, > > Do we have ZEP in the lab now? If not, I'll have to cancel my > tomorrow's raith session. > Thank you. > > --Shu-Jen > From rohank at stanford.edu Thu Jun 22 10:32:58 2006 From: rohank at stanford.edu (Rohan D. Kekatpure) Date: Thu, 22 Jun 2006 10:32:58 -0700 Subject: Reservation removed: Fri 8p-12a Message-ID: <6.0.1.1.2.20060622103237.01ea2760@rohank.pobox.stanford.edu> From cvenky at stanford.edu Thu Jun 22 16:35:52 2006 From: cvenky at stanford.edu (Venkatesh Chembrolu) Date: Thu, 22 Jun 2006 16:35:52 -0700 Subject: Removed Raith reservation Fri: 7:30-10am Message-ID: <1151019352.449b29587f30d@webmail.stanford.edu> From fjaeckel at stanford.edu Thu Jun 22 18:40:15 2006 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Thu, 22 Jun 2006 18:40:15 -0700 Subject: released Sat 3PM-8PM Message-ID: <1151026815.449b467fcbe4d@webmail.stanford.edu> -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu and frank_jaeckel at web.de From hansj at stanford.edu Thu Jun 22 19:26:38 2006 From: hansj at stanford.edu (Shu-Jen Han) Date: Thu, 22 Jun 2006 19:26:38 -0700 Subject: released Sat 3PM-8PM In-Reply-To: <1151026815.449b467fcbe4d@webmail.stanford.edu> References: <1151026815.449b467fcbe4d@webmail.stanford.edu> Message-ID: <1151029598.449b515e86623@webmail.stanford.edu> I'll take it. Tomorrow 5p-8p is released. --SJ Quoting Frank Jaeckel : > > > -- > Dr. rer. nat. Frank J?ckel > mail address: Department of Chemistry, M/C 5080 > 333 Campus Drive > mailbox #74 > Stanford University, Stanford, CA 94305-5080 > street address: 369 North-South Mall, Stauffer I, Room 15 > Stanford University, Stanford, CA 94305-5080 > phone: +1-650-724-4052/51 (office/lab) > fax: +1-650-725-0259 (indicate mailbox #74) > e-mail: fjaeckel at stanford.edu and frank_jaeckel at web.de > From hideoiw at yahoo.co.jp Fri Jun 23 03:05:33 2006 From: hideoiw at yahoo.co.jp (=?ISO-2022-JP?B?GyRCNGRAJRsoQiAbJEI9KElXGyhC?=) Date: Fri, 23 Jun 2006 19:05:33 +0900 (JST) Subject: Removed Raith reservation Fri: 7:30-10am In-Reply-To: <1151019352.449b29587f30d@webmail.stanford.edu> Message-ID: <20060623100533.36825.qmail@web3711.mail.tnz.yahoo.co.jp> I will take it. Thanks. Hideo Venkatesh Chembrolu wrote: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jun 23 17:11:42 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 23 Jun 2006 17:11:42 -0700 Subject: Notice of scheduled downtime for maintenance on RAITH 150 JUNE 30, Noon through July 7 15:00 hours for FE_Gun replacement. Message-ID: <449C833E.1010407@snf.stanford.edu> Greetings Raith Community: Notice is given that we will be taking the RAITH 150 system off-line for maintenance, adjustments, and replacement of the FE-GUN tip at the end of next week. The system will go off line for all Users at or about noon Friday June 30, upon arrival of Zeiss SMT Field Service. We will perform the PM and FE-Gun replacement and then place the system into an extended bake out of the SEM column through the July 4th Holiday. (120 hour bake out target) Zeiss will return on either Thursday or Friday July 6 or 7, 2006 (TBD) to bring the system back up and perform testing, calibrations and adjustments to the E/O card and EHT power supply. The system will then be qualified Friday and returned to Users access at or about 3 PM Friday July 7, 2006 if all goes well with the startup. Users will not be able to make reservations during this period of downtime, and several reservations for next weekend have been deleted from the system. Please contact James W. Conway should you have any questions or concerns. I had intended on giving you this notice earlier this month but was unable to get commitments from ZEISS SMT or RAITH until this afternoon. Thank you for your interest in Ebeam Technologies at SNF, James Conway SNF Ebeam Lab -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: constrMining.gif Type: image/gif Size: 1029 bytes Desc: not available URL: From xinranw at stanford.edu Fri Jun 23 21:22:34 2006 From: xinranw at stanford.edu (Xinran Wang) Date: Fri, 23 Jun 2006 21:22:34 -0700 Subject: finish early, free till midnight Message-ID: <22ffcd060606232122vc31b776w3d49d1030d53fbd3@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Sun Jun 25 01:45:49 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Sun, 25 Jun 2006 01:45:49 -0700 Subject: Raith cancellation Sunday 7:00am~10:00am & 9:30pm~12:30am Message-ID: <013f01c69833$c25a7520$a9b50c80@anavel> Sorry for late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhemanth at stanford.edu Sun Jun 25 03:12:03 2006 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Sun, 25 Jun 2006 03:12:03 -0700 Subject: Will be done early on Sunday Message-ID: <000a01c6983f$ce3e2a60$0100000a@jhemanthibm1> Have removed time from 7:30-9:30pm on coral since I will be done early with my write. Best- Hemanth -------------- next part -------------- An HTML attachment was scrubbed... URL: From levi at snow.stanford.edu Mon Jun 26 09:40:00 2006 From: levi at snow.stanford.edu (Ofer Levi) Date: Mon, 26 Jun 2006 09:40:00 -0700 Subject: starting late at 10:00 AM Message-ID: <6.1.2.0.2.20060626093746.045e6dd0@snowboard.stanford.edu> hey all, I have the Raith machine this morning. I will start loading my sample, a bit late at 10:00 AM. system is free to use till then. Thanks, Ofer From jwc at snf.stanford.edu Tue Jun 27 09:14:54 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 27 Jun 2006 09:14:54 -0700 Subject: FAQ NO. 7 RAITH BEAM BLANKER in wrong phase or polarity. How to fix... In-Reply-To: <8769af0c0606270647v6764cf6ai7c4bb8ce99f57326@mail.gmail.com> References: <8769af0c0606270647v6764cf6ai7c4bb8ce99f57326@mail.gmail.com> Message-ID: <44A1597E.7030909@snf.stanford.edu> Greetings Raith Users: RE: FAQ NO. 7 RAITH BEAM BLANKER in wrong phase or polarity. How to fix... I have been seeing this occasionally, more often recently, and it is normally a result of the previous user on the system whom has reversed his blanking state and then when the software application thinks the blanker is unblanked the user resets the front panel of the ELPHY+ High Speed Pattern Generator. The other cause of this is if the ELPHY+ High Speed Pattern Generator is manually switched to beam 'on' manual control. This is the far right toggle switch on the ELPHY+ High Speed Pattern Generator and it should always be in the UP position and not in the DOWN position ever as Randy found it upon coming onto the system very early this morning. If you have managed to get your software into a reversed blanking state this is how to recover it and restore normal blanking functions. In the RAITH 150 Application window confirm that the software toggle for Blanking indicate 'Beam Blanked' On the ELPHY+ High Speed Pattern Generator move the momentary toggle position switch on the Far left hand side upwards to 'RESET' the ELPHY+ High Speed Pattern Generator. The deflection indicators should center and the beam blanker box above it should have the 'Beam Off light' indicating ON and the 'Beam On light' OFF. Then Save your project file to record and preserve this state for your next use. If necessary you can gracefully exit and come back into the application and/or reset the hardware -- but normally you will not have to. Thank you, James Conway Randy Stoltenberg wrote: > James- > I'm doing a write right now, but I don't know if it's going to work. > The beam blanker on the Raith side is out of phase. (On=off and vice > versa). I notice that as the stage translates during the write, I'm > still getting beam current. I don't think this is good. DOes this mean > I'm just exposing everything? I tried a full restart of the Raith > computer, but that didn't fix the problem. What should I do? > Randy > > -- > Randy Stoltenberg > Ph.D. Student, Department of Chemistry > Stanford University > Stauffer III, Room 15 > 381 North South Mall > Stanford, CA 94305 > randalls at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 27 09:27:24 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 27 Jun 2006 09:27:24 -0700 Subject: raith clip #4 is very dirty In-Reply-To: <28d3ece90606262302k47ee2d50ofb986689cb40898f@mail.gmail.com> References: <28d3ece90606262302k47ee2d50ofb986689cb40898f@mail.gmail.com> Message-ID: <44A15C6C.2040608@snf.stanford.edu> Hello Raith Users: Once again we have had the return to a single user, or group of Users, whom have some material on the back of their wafer pieces. This material is incompatible with the Aluminum pallet and it is rapidly anodically corroding its surface where they are clipping down their samples. Often they are working with multiple very small samples on several clips in the system. It is difficult if not impossible to remove as it smears when you mechanically attempt to clean it off, and is not affected by solvents. Likely this is Gallium or Indium metal that a MBE or MOCVD system User may have used to attach his wafer to the growth mount in those system. These are all small pieces of substrate often smaller than 4 x 3 mm. The end result is that it contaminates the Std. sample holder, roughens and corrodes the surface and then renders the Std. Sample holder unsuitable for EBL because the holder cannot make suitable electrical contact to the sample nor allow it to lay flat onto it. THIS CARELESSNESS IS NEGATIVELY IMPACTING EVERYONE WORK. HOW CAN ANYONE BE SO STUPID?!! All Users working with any material on the back sides of the wafers are instructed to completely remove all material before placing the sample into the RAITH. This includes resist and PMMA residues as well as all residues from previous processing and mounting of your samples on the backside of your chips and wafers. Users having concerns or needing assistance in cleaning their samples are requested to contact James Conway for help. Thank you for your support! James Conway Andrei Faraon wrote: > Hi James, > > Today around 9:30 when I came to do my Raith lithography and I noticed > a big grey-colored stain under clip number 4. It looks like the same > material that made the other clips dirty. However, this stain is very > large, on the order of ~1cm/1cm. Maybe you could re polish the stage > during the Raith shutdown next week because all the clips are in > pretty bad condition, especially for people working with small pieces. > > Andrei > > > -- > Andrei Faraon > > Stanford University, Applied Physics > 316 Via Pueblo Mall > Stanford, CA, 94305 > Mobile: 650 714 7881 > Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 27 11:37:10 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 27 Jun 2006 11:37:10 -0700 Subject: New bottle of 9% PMMA in anisole just stocked in cleanroom. Users data requested for spin speed(f)thickness and dose/kv. In-Reply-To: <6.0.1.1.2.20060627102427.04347560@hansj.pobox.stanford.edu> References: <1151087093.449c31f529edb@webmail> <44A08357.7020603@snf.stanford.edu> <6.0.1.1.2.20060627102427.04347560@hansj.pobox.stanford.edu> Message-ID: <44A17AD6.20906@snf.stanford.edu> Greetings: I just stocked a new bottle of 9% 950K PMMA in Anisole into the cleanroom solvent storage cabinet. Users are requested to be frugal in the use of this material this is the last bottle in this LOT. Users are also requested to please report their spin speed as a function of Thickness data and exposure doses per each acceleration voltage used so we can generate a Process Definition for Thick Film Single Layer 950K MW PMMA-A for all Lab members reference. Thank you, James Conway Shu-Jen Han wrote: > I was not using it for last night's writing, but I'll use it for my > next step. > I just noticed the original 9% bottle becomes 4.5%. Is it the bottle > you're saying? > > thanks, > --Shu-Jen > > At 06:01 ?U?? 2006/6/26, you wrote: > >> The whole bottle? >> >> There should be a 9% 950K PMMA - anisole in the ebeam chemical cabinet >> with Claudia Richter's name on it available for use. >> >> I will page you in the Cleanroom as I leave to make sure you have >> polymeric for tonight. >> >> All the best, >> >> James > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From hungtao at stanford.edu Tue Jun 27 15:49:06 2006 From: hungtao at stanford.edu (Hung-Tao Chou) Date: Tue, 27 Jun 2006 15:49:06 -0700 Subject: raith free Wednesday 4pm to 8pm Message-ID: <1151448546.44a1b5e29c855@webmail.stanford.edu> Sample is not ready -hungtao From faraon at stanford.edu Tue Jun 27 15:52:10 2006 From: faraon at stanford.edu (Andrei Faraon) Date: Tue, 27 Jun 2006 15:52:10 -0700 Subject: raith free Wednesday 4pm to 8pm In-Reply-To: <1151448546.44a1b5e29c855@webmail.stanford.edu> References: <1151448546.44a1b5e29c855@webmail.stanford.edu> Message-ID: <28d3ece90606271552m37bc336fjc83357adec87d85d@mail.gmail.com> I took it, Thanks On 6/27/06, Hung-Tao Chou wrote: > > Sample is not ready -hungtao > > -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jun 30 08:35:12 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 30 Jun 2006 08:35:12 -0700 Subject: Run the Raith until Zeiss Field service arrives. Message-ID: <44A544B0.8070501@snf.stanford.edu> An HTML attachment was scrubbed... URL: