jwc at snf.stanford.edu
Thu Mar 16 14:37:27 PST 2006
Thank you for your testimonial!
The EBTH meeting resulted in a recommendation that we make this resist
part of our standard resist available in the Lab.
We will continue storing the MaN 2403 as we have been until this bottle
is used up. After that time we will start stocking a small supply in the
Ebeam resist containment in the upper shelf of the left hand solvent
All the best,
Rohan D. Kekatpure wrote:
> Dear James,
> I am sorry that I was not able to get in touch with you after the
> EBEAM town hall meeting which focused on ma-N 2403. I just wanted to
> confirm that I would be using this material extensively for my optical
> device fabrication. I have found this material very easy to handle
> compared to what I have heard about other chemically amplified
> resists. My primary interest in using this material is as an etch mask
> for fabricating single mode waveguides at 700 nm. To date it has given
> me very good selectivity in an oxide etch process (1:2 or more; 1:3 is
> I know that you have been trying hard to get to standardize this
> material, but in case someone needs direct user feedback, I will be
> happy to provide it.
> Thanks for your help
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