From dinhthuc at hotmail.com Mon May 1 22:00:48 2006 From: dinhthuc at hotmail.com (danny T) Date: Tue, 02 May 2006 05:00:48 +0000 Subject: Raith Free Tuesday 3am to 8am Message-ID: An HTML attachment was scrubbed... URL: From ryantu at stanford.edu Mon May 1 23:23:15 2006 From: ryantu at stanford.edu (Ryan Tu) Date: Mon, 01 May 2006 23:23:15 -0700 Subject: Cancel 9am-1pm on Tuesday Message-ID: Didn't want to, but sample cannot be prepared in time. Enjoy! Thanks, Ryan From rmstolt at gmail.com Tue May 2 16:42:54 2006 From: rmstolt at gmail.com (Randy Stoltenberg) Date: Tue, 2 May 2006 16:42:54 -0700 Subject: Raith free Wed 3am Message-ID: <8769af0c0605021642m762cd957m5be2918d32cf67ab@mail.gmail.com> samples not ready -- Randy Stoltenberg Ph.D. Student, Department of Chemistry Stanford University Stauffer III, Room 15 381 North South Mall Stanford, CA 94305 randalls at stanford.edu From panjun at stanford.edu Tue May 2 16:55:36 2006 From: panjun at stanford.edu (Jun Pan) Date: Tue, 2 May 2006 16:55:36 -0700 Subject: Raith free 9:30pm today Message-ID: <1146614136.4457f17884d33@webmail.stanford.edu> I cannot coat the resist since Laurel is down. From xinranw at stanford.edu Tue May 2 17:44:55 2006 From: xinranw at stanford.edu (Xinran Wang) Date: Tue, 2 May 2006 17:44:55 -0700 Subject: reservation cancelled tomorrow 7-9am, sample cannot be ready Message-ID: <22ffcd060605021744w15ce0e13xf3b8b6de7cd43f78@mail.gmail.com> Sorry for the late notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Fri May 5 02:15:07 2006 From: xinranw at stanford.edu (Xinran Wang) Date: Fri, 5 May 2006 02:15:07 -0700 Subject: raith free from 14:00-16:00 Message-ID: <22ffcd060605050215w65fcea58r4b5f28ab326b2802@mail.gmail.com> Got a time slot yesterday and don't need this session any more. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmstolt at gmail.com Mon May 8 11:45:28 2006 From: rmstolt at gmail.com (Randy Stoltenberg) Date: Mon, 8 May 2006 11:45:28 -0700 Subject: Finished early Message-ID: <8769af0c0605081145r5a175a67s9b83feb0d56d7fec@mail.gmail.com> -- Randy Stoltenberg Ph.D. Student, Department of Chemistry Stanford University Stauffer III, Room 15 381 North South Mall Stanford, CA 94305 randalls at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From ryantu at stanford.edu Mon May 8 16:28:12 2006 From: ryantu at stanford.edu (Ryan Tu) Date: Mon, 8 May 2006 16:28:12 -0700 Subject: Finished early. Free until 7pm Message-ID: <1147130892.445fd40c7abcd@webmail.stanford.edu> From ycjun at stanford.edu Mon May 8 21:01:07 2006 From: ycjun at stanford.edu (Young Chul Jun) Date: Mon, 8 May 2006 21:01:07 -0700 Subject: Raith free from 9pm Message-ID: <1147147267.4460140325392@webmail.stanford.edu> Finished early. From zhangy at stanford.edu Tue May 9 00:21:58 2006 From: zhangy at stanford.edu (Yuan Zhang) Date: Tue, 09 May 2006 00:21:58 -0700 Subject: raith free 6pm-10pm Tuesday afternoon Message-ID: <6.2.1.2.2.20060509002008.054c8780@zhangy.pobox.stanford.edu> conflict with my midterms. Sorry for the late notice. Yuan From arvisun at stanford.edu Tue May 9 16:14:33 2006 From: arvisun at stanford.edu (arvind sundaramurthy) Date: Tue, 09 May 2006 16:14:33 -0700 Subject: Removed Reservation from 9am-12pm Wednesday Message-ID: <6.0.1.1.2.20060509161341.034b36f0@arvisun.pobox.stanford.edu> From jwc at snf.stanford.edu Tue May 9 19:03:08 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 09 May 2006 19:03:08 -0700 Subject: READ ME Changes made to the Z motor speed comtrols to correct problems encountererd over weekend. -- LOG IN TO THE LOGBOOK! Message-ID: <446149DC.6040909@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue May 9 19:13:28 2006 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 09 May 2006 19:13:28 -0700 Subject: READ ME -- ALL USERS MUST LOG INTO THE PAPER LOGBOOK AND TO CORAL. Message-ID: <44614C48.7050902@snf.stanford.edu> An HTML attachment was scrubbed... URL: From makarova at stanford.edu Thu May 11 08:46:49 2006 From: makarova at stanford.edu (Maria Makarova) Date: Thu, 11 May 2006 08:46:49 -0700 Subject: reservation removed from 5:30 to 8:30 today Message-ID: <81F4935E-E2D2-4A56-B500-0114676ECC0F@stanford.edu> Samples not ready. From arvisun at stanford.edu Thu May 11 10:23:58 2006 From: arvisun at stanford.edu (Arvind Sundaramurthy) Date: Thu, 11 May 2006 10:23:58 -0700 Subject: Raith Done early. Free till noon. Message-ID: <1147368238.4463732e4fd59@webmail.stanford.edu> From jhemanth at stanford.edu Thu May 11 17:42:56 2006 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Thu, 11 May 2006 17:42:56 -0700 Subject: Unable to unload sample due to lab shutdown Message-ID: <000001c6755d$0342b6f0$0100000a@jhemanthibm1> I am not able to unload my sample from Ratih due to the lab shutdown. Could the next user please remove my 3 samples and put it in the box kept next to the load lock door? Thanks, Hemanth Jagannathan PhD Candidate Department of Electrical Engineering Stanford University, CA Phone :(O)(650)-725-0417; (C) (650)-380-2105 e-mail: jhemanth at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From dinhthuc at hotmail.com Thu May 11 23:47:49 2006 From: dinhthuc at hotmail.com (danny T) Date: Fri, 12 May 2006 06:47:49 +0000 Subject: Raith not working Message-ID: An HTML attachment was scrubbed... URL: From rmstolt at gmail.com Sun May 14 07:59:40 2006 From: rmstolt at gmail.com (Randy Stoltenberg) Date: Sun, 14 May 2006 07:59:40 -0700 Subject: Raith free 9am - 1pm Message-ID: <446745DC.60008@stanford.edu> Frank Jaeckel requested that I send this email on his behalf. -- Randy Stoltenberg randalls at stanford.edu Cell: (650) 796-4527 From faraon at stanford.edu Sun May 14 16:01:42 2006 From: faraon at stanford.edu (Andrei Faraon) Date: Sun, 14 May 2006 16:01:42 -0700 (PDT) Subject: raith free today 5pm - 7:30pm Message-ID: Sorry for the very late notice. Andrei Faraon Dept. of Applied Physics, 316 Via Pueblo Mall Stanford University Stanford, CA 94305-4090 650 497 3857 From kimsangb at stanford.edu Mon May 15 11:01:56 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Mon, 15 May 2006 11:01:56 -0700 Subject: raith free from 2:00pm to 7:00pm Message-ID: <000001c67849$a7a4d0e0$a9b50c80@anavel> My sample is not ready. Sorry for late notice. If you reserved some time later this week and want to take the time slot from 2:00pm to 7:00pm today, please let me know so that I can change to that time. Thanks! SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From fjaeckel at stanford.edu Mon May 15 11:10:21 2006 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Mon, 15 May 2006 11:10:21 -0700 Subject: took it Re: raith free from 2:00pm to 7:00pm In-Reply-To: <000001c67849$a7a4d0e0$a9b50c80@anavel> References: <000001c67849$a7a4d0e0$a9b50c80@anavel> Message-ID: <1147716621.4468c40da7607@webmail.stanford.edu> > If you reserved some time later this week and want to take the time slot > from 2:00pm to 7:00pm today, please let me know so that I can change to > that > time. Thanks! > took it and released next week wednesday 5.30AM-10AM. fj -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu and frank_jaeckel at web.de From rohank at stanford.edu Tue May 16 18:23:32 2006 From: rohank at stanford.edu (Rohan D. Kekatpure) Date: Tue, 16 May 2006 18:23:32 -0700 Subject: Raith free from 16:00-19:00 tomorrow. Message-ID: <6.0.1.1.2.20060516182311.01e9bac0@rohank.pobox.stanford.edu> From lmoore.email at gmail.com Tue May 16 18:24:01 2006 From: lmoore.email at gmail.com (Lindsay Moore) Date: Tue, 16 May 2006 18:24:01 -0700 Subject: Raith free from 16:00-19:00 tomorrow. In-Reply-To: <6.0.1.1.2.20060516182311.01e9bac0@rohank.pobox.stanford.edu> References: <6.0.1.1.2.20060516182311.01e9bac0@rohank.pobox.stanford.edu> Message-ID: <4dfce5b30605161824g85ec42ft42bc3d319b70bb98@mail.gmail.com> i'll take it! On 5/16/06, Rohan D. Kekatpure wrote: > > > From edo at stanford.edu Wed May 17 23:44:11 2006 From: edo at stanford.edu (Edo Waks) Date: Wed, 17 May 2006 23:44:11 -0700 Subject: raith free 12:00-6:00 am Message-ID: <1147934651.446c17bbd1e18@webmail.stanford.edu> From jwc at snf.stanford.edu Thu May 18 08:34:30 2006 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 May 2006 08:34:30 -0700 Subject: NOTICE OF SYSTEM DOWNTIME FOR REPAIRS TO THE Z MOTOR AND RACK IN RAITH 150 STAGE. OFFLINE TO USES 5-24 pm TO NOON 5/26 Message-ID: <446C9406.70209@snf.stanford.edu> Good Morning Raith Users: This is your advanced notice that I will be taking the RAITH 150 system off line from Users at some point next WED. afternoon for repairs and replacement of the Z Motor, and if necessary the Z rack and sliders on the Laser Interferometer Stage. We will take the system off line upon arrival of RAITH Field service at some time Wednesday afternoon May 24. We hope that we can complete these repairs, followed by testing and qualifying the system for your use by Noon Friday May 26, 2006. Users should adjust their processing plans accordingly. Please see me during my daily office hour should you have any questions or concerns. Thank you for your support! James Conway Ebeam Lab. From jwc at snf.stanford.edu Thu May 18 08:48:04 2006 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 May 2006 08:48:04 -0700 Subject: maN-2403 alert :: Changes in sensitivity of the resist reported by several users. Message-ID: <446C9734.5090206@snf.stanford.edu> Greetings and Good Morning, On May 1st we received a new batch of Microchem maN-2403 that appears to have slightly different exposure dose characteristic than the previous batches of material purchased. This week I have had two different users report to me that the dose to cross link the negative tone resist has decreased significantly. The resolution of the material appears to be unchanged and for all other purposes it is same as with previous batches. Doses to cross link 100 nm features is now in the 60 - 90 uC/cm sq. range in my initial test down from the 120 to 150 uC/cm sq. range. Users working on this material are encouraged to carefully characterize the dose used for your exposure on your patterns and report your results back to the raith at snf.stanford.edu email list. I will expose reference samples I have retained of the old batch along with newly prepared samples of the new batch at some point next week before we take the system off line for repairs next Thursday. I need your results to compare to my own and we can then update the MaN 2403 process sheet. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: blutextb.gif Type: image/gif Size: 569 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Ma-N 2403 Process.doc Type: application/msword Size: 20480 bytes Desc: not available URL: From kimsangb at stanford.edu Sun May 21 00:33:51 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Sun, 21 May 2006 00:33:51 -0700 Subject: raith problem? Message-ID: <006101c67ca8$e7d78910$a9b50c80@anavel> Dear raith users, Somebody left a note that says "raith is not working". Could you tell me what kind of problem it has? I can not develop any patterns I exposed on Thursday(5/18) and I am wondering whether it is related to the problem it has right now. Thanks, SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at stanford.edu Mon May 22 15:42:17 2006 From: rcrane at stanford.edu (Dick Crane) Date: Mon, 22 May 2006 15:42:17 -0700 Subject: Smoke detector test 5/25 Message-ID: <44723E49.2040901@stanford.edu> Ebeam area users, The fire inspection office will be conducting a smoke detector test in rooms L103, L104, and L105 (ebeam area) at 0730 on Thursday, May 25. The test will require some of the floor tiles to be removed for access to the smoke detector. Your quiet enjoyment of this space may be disrupted for up to a half hour. Sorry for the inconvenience, Dick From open4891 at stanford.edu Tue May 23 15:33:34 2006 From: open4891 at stanford.edu (Hideo Iwase) Date: Tue, 23 May 2006 15:33:34 -0700 Subject: Raith free from 5:30am tomorrow Message-ID: <1148423614.44738dbeea27e@webmail.stanford.edu> Hi All, The reservation from 5:30am tomorrow is canceled. Sorry for late notice. Sample is not ready. Hideo From jwconway at stanford.edu Wed May 24 18:30:10 2006 From: jwconway at stanford.edu (James Conway) Date: Wed, 24 May 2006 18:30:10 -0700 Subject: Raith continues on line through 9 - 10 AM THURSDAY. Message-ID: <1148520610.447508a29922c@webmail.stanford.edu> Greetings Raith Users: Typical of Raith Field Service on visits to SNF in the past they did not show up this afternoon as expected. I received a SMS message late this afternoon and am still expecting a call! I have tested the system this afternoon and ran into no problems with the Z- motor other than it takes quite a long time to go through the Z stage moves. NO errors encountered in the last five load lock cycles. So Then... My current write should be finished about 20:00 hours or 8 PM. Please let it complete the position list as it is a matrix experiment. The system will continue to be available to Users until RAITH Field Service shows up at some point tomorrow. I expect them to be here between 9 and 10 AM tomorrow. Users willing to come onto the system later this evening just need to place a reservation and enable the system on CORAL. User Lorry had a reservation 18:00 - ? and did not show, and I have removed my Maintenance reservation through 9 AM tomorrow. My apologizes for the disruption to your scheduling and work. Thank you all for your continued support! James W. Conway From jwconway at stanford.edu Thu May 25 18:52:01 2006 From: jwconway at stanford.edu (James Conway) Date: Thu, 25 May 2006 18:52:01 -0700 Subject: Raith Z motor repairs completed. System available 2 - 9 AM FRI and beyond. Message-ID: <1148608321.44765f418415c@webmail.stanford.edu> Greetings Raith Users: We have completed the repairs to the Z motor and finished testing the motor control modules on the RAITH XYZ Stage. Currently we are testing the system and performing normal routine adjustments to the E/O card returning the system to normal settings and eliminating all evident shifts in the Mag amplifier, aperture and Stigmator centering functions. 10 kV 30 um aperture min resolution is 4 nm. Beam waist is < 2 nm. 20 kv 30 um aperture min resolution is 2 nm. 5 mm WD. I have removed my maintenance reservations for overnight and seek users whom wish access to the system to sign up on CORAL. The system is currently available from 2 AM to 9 AM Friday Morning. Jhemanth has the system 10 PM to 2 AM but may complete his work before that end time. Karen Tedesco will be working with me 9 AM - 12 Noon and I will perform final system checks during that time. If all goes well the system will be up and available to all users over the holiday weekend. Thank you for your support! James From jwc at snf.stanford.edu Fri May 26 09:16:14 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 26 May 2006 09:16:14 -0700 Subject: Users are requested to be sure to record your parameters in the RAITH Operations Logbook. Message-ID: <447729CE.1060308@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 26 09:19:45 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 26 May 2006 09:19:45 -0700 Subject: James will be away at Three Beams May 30 - June 3 FAQ: HOW to get help on the RAITH System during your session -- "Who are your gonna call" Message-ID: <44772AA1.3010800@snf.stanford.edu> FAQ: HOW to get help on the RAITH System during your session -- "Who are your gonna call" FAQ: SYSTEM PROBLEMS: "WHO ARE YOU GOING TO CALL" Greetings: I will be away all of next week attending Three Beams and I wish to remind everyone that we have set into place a hierarchical structure on what to do and whom to call if you encounter problems on the RAITH 150 system during my absence' or for those times I am not be available by cell phone. I will be available by phone at 415-412-4825 by voice mail and SMS text messaging. I will respond at my earliest opportunity. I normally will call the Ebeam Lab several times daily through the course of the week. For Example: * You encounter a LOAD LOCK Error 4 on the system and cannot complete the Load/ Unload cycle without an administrator login. * The pumps or system hardware are not working normally and the logic may have become reversed. * Beam Blanking Logic is reversed due to an RAITH150.exe application crash when the beam was unblanked... 1. If I am available, try to call me on my cell and I will walk you through the Recovery procedures. 001-415-412-4825 2. Try to contact a RAITH Champion: Luigi Scaccabarozzi gigi at snf.stanford.edu at 1-650-725-6970 Arvind Sundaramurthy arvisun at stanford.edu 1-650- 450-0475 Ryan Tu ryantu at stanford.edu 1-650-799-6492 Mark Topinka mtopinka at stanford.edu 1-650-387-6049 3. Contact a RAITH USA Application Support Specialist: Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com 218-483-1267 4. For Major Hardware issues and all emergencies with the LEO or RAITH Hardware: Contact the RAITH USA Field Service Manager, Cole Loomis cl at raithusa.com (631) 738-9500 or Kevin Burcham kb at raithusa.com also at the Main Raith USA line (631) 738-9500 Finally unless it is a catastrophic failure and the system becomes unsafe or in the least terrifying to operate -- please avoid placing the system into RED LIGHT Mode when I am away. ALWAYS report all errors and comments to to the CORAL 'Make Comments' or 'Report Problem' section so it gets logged into our tracking system. To quote John Shott, "Its not a problem until it is reported to CORAL." Many thanks to the many Raith Champions whom have come forward and offered to cover for me during my absence! Thank you all for your support! James Conway Ebeam Technology Group Stanford Nanofabrication Facility. 650-725-7075 cell 415-412-4825 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From panjun at stanford.edu Sat May 27 18:32:51 2006 From: panjun at stanford.edu (Jun Pan) Date: Sat, 27 May 2006 18:32:51 -0700 Subject: Raith free 14:00-20:00 tomorrow Message-ID: <20060528013251.493214C865@smtp3.stanford.edu> Raith free 14:00-20:00 tomorrow Sunday Sample not ready From yiyangg at stanford.edu Sun May 28 09:38:21 2006 From: yiyangg at stanford.edu (Yiyang Gong) Date: Sun, 28 May 2006 09:38:21 -0700 Subject: Done early on raith, free 9:40 to 11am In-Reply-To: References: Message-ID: <1148834301.4479d1fd4ef62@webmail.stanford.edu> From tedescokaren at yahoo.fr Mon May 29 13:33:01 2006 From: tedescokaren at yahoo.fr (karen tedesco) Date: Mon, 29 May 2006 20:33:01 +0000 (GMT) Subject: Raith free until 4.30pm Message-ID: <20060529203301.20819.qmail@web25504.mail.ukl.yahoo.com> Finished early -------------- next part -------------- An HTML attachment was scrubbed... URL: From lmoore.email at gmail.com Mon May 29 16:55:05 2006 From: lmoore.email at gmail.com (Lindsay Moore) Date: Mon, 29 May 2006 16:55:05 -0700 Subject: Raith free until 6:30pm Message-ID: <4dfce5b30605291655l59965fcch423ad28a737226bd@mail.gmail.com> started early, finished early. Lindsay From lmoore.email at gmail.com Tue May 30 13:26:51 2006 From: lmoore.email at gmail.com (Lindsay Moore) Date: Tue, 30 May 2006 13:26:51 -0700 Subject: Raith free midnight -3am tonight Message-ID: <4dfce5b30605301326i3720ead4n11374b39a42baef1@mail.gmail.com> i deleted my reservation.