From gyzhang at stanford.edu  Fri Sep  1 14:37:52 2006
From: gyzhang at stanford.edu (Guangyu Zhang)
Date: Fri,  1 Sep 2006 14:37:52 -0700
Subject: Raith time released from 19:30 to 21:30 tonight.
In-Reply-To: <1156799130.44f35a9a887ab@webmail.stanford.edu>
References: <000f01c6cae3$63278880$a9b50c80@anavel> <1156799130.44f35a9a887ab@webmail.stanford.edu>
Message-ID: <1157146672.44f8a8303381c@webmail.stanford.edu>



From xinranw at stanford.edu  Fri Sep  1 23:53:45 2006
From: xinranw at stanford.edu (Xinran Wang)
Date: Fri, 1 Sep 2006 23:53:45 -0700
Subject: raith finish early, next user may come now
Message-ID: <22ffcd060609012353t22287569m179136523fa56710@mail.gmail.com>


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From gyzhang at stanford.edu  Tue Sep  5 12:55:21 2006
From: gyzhang at stanford.edu (Guangyu Zhang)
Date: Tue,  5 Sep 2006 12:55:21 -0700
Subject: Raith free from 3pm-5pm
Message-ID: <1157486121.44fdd629408f6@webmail.stanford.edu>

Sample is not ready, sorry for the late notice.


From kimsangb at stanford.edu  Wed Sep  6 13:43:28 2006
From: kimsangb at stanford.edu (SangBum Kim)
Date: Wed, 6 Sep 2006 13:43:28 -0700
Subject: raith free from 2:00PM tp 4:00PM
Message-ID: <000e01c6d1f5$1bd9d050$a9b50c80@anavel>

Sorry for late notice

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From gyzhang at stanford.edu  Wed Sep  6 15:34:55 2006
From: gyzhang at stanford.edu (Guangyu Zhang)
Date: Wed,  6 Sep 2006 15:34:55 -0700
Subject: Raith down
In-Reply-To: <000e01c6d1f5$1bd9d050$a9b50c80@anavel>
References: <000e01c6d1f5$1bd9d050$a9b50c80@anavel>
Message-ID: <1157582095.44ff4d0f5339d@webmail.stanford.edu>

Hi all,
I just noticed that the Raith is down when i came into the raith room. The
power is off for both colum and the beam controllers. I don't know what
happened.
My time is from 4pm to 7pm, and i don't want it.
Guangyu


Quoting SangBum Kim <kimsangb at stanford.edu>:

> Sorry for late notice
>
>




From hungtao at stanford.edu  Wed Sep  6 15:48:18 2006
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Wed,  6 Sep 2006 15:48:18 -0700
Subject: Raith free Thursday 2-6pm
Message-ID: <1157582898.44ff5032cd0a1@webmail.stanford.edu>

Sample is not ready.
-Hungtao


From rcrane at stanford.edu  Thu Sep  7 15:14:26 2006
From: rcrane at stanford.edu (Dick Crane)
Date: Thu, 07 Sep 2006 15:14:26 -0700
Subject: system stabilizing
Message-ID: <450099C2.7060407@stanford.edu>

Raith users,

I have been working with Cole Loomis of Raith to perform a cold turn-on. 
The system has responded well vacuum wise and the gun is now on. 
Extractor current is 20% low and will need to stabilize overnight. I 
will check it Friday morning at 0615. Assuming extractor current has 
risen to 249uA, I will then need a superuser to declare the tool to be 
operational. Any helpers?

An unanswered question is still on the table: How did the main power 
safety disconnect switch (the red handled throw switch on the wall near 
the entry door) come to be turned off and why? Any suggestions?

I suspect the tool will be up tomorrow morning.

Thanks for your patience,

Dick
5-3665



From ryantu at stanford.edu  Fri Sep  8 11:32:04 2006
From: ryantu at stanford.edu (Ryan Tu)
Date: Fri,  8 Sep 2006 11:32:04 -0700
Subject: Raith ready for next user
Message-ID: <1157740324.4501b72417e3c@webmail.stanford.edu>

Dear All,

Not a full qualification, but the system seems to be performing normally.  I
have tested the beam at only 10kV with 10um and 30um apertures.  Stage is
now unloaded for the next available user.  Thanks to Dick Crane for helping
bring the system back up.

Ryan



From gyzhang at stanford.edu  Fri Sep  8 15:40:58 2006
From: gyzhang at stanford.edu (Guangyu Zhang)
Date: Fri,  8 Sep 2006 15:40:58 -0700
Subject: Raith finished earlier, ready for next user
In-Reply-To: <1157740324.4501b72417e3c@webmail.stanford.edu>
References: <1157740324.4501b72417e3c@webmail.stanford.edu>
Message-ID: <1157755258.4501f17a70d45@webmail.stanford.edu>

Raith works ok, but beam current is lower, ~0.012nA for 10kV/10um right now
compared with ~0.019nA before.


From gyzhang at stanford.edu  Fri Sep  8 16:46:05 2006
From: gyzhang at stanford.edu (Guangyu Zhang)
Date: Fri,  8 Sep 2006 16:46:05 -0700
Subject: Raith down
In-Reply-To: <1157755258.4501f17a70d45@webmail.stanford.edu>
References: <1157740324.4501b72417e3c@webmail.stanford.edu> <1157755258.4501f17a70d45@webmail.stanford.edu>
Message-ID: <1157759165.450200bdb5940@webmail.stanford.edu>

Hi all,
The raith is down due to load loak problem. Following is what i have done
during unloading my sample out,
A message appeared when unloading my sample, says:
1. "It is not possible to reach the inner robot arm."
Click OK, and next the messages says
2. "Mannual procedure to bring the robot arm back in its outer possition.
Please, follow the instructions"
Click Ok, and the next messages is
3. "Press the T-button on the Joystick"
Press it, click OK,
4. "Move the robot arm with the joystck as far as possible to the outer
possition"
Move the T possible to zero, and click OK,
5. "Outer position reached! Press X- and Y- button on the joystick"
Press the X- and Y- button and click OK,
Then, No messages appeared, and the load and unload button on 'Navigator
exchange' becomes red and unusable.

I tried to call James and can't reach him. So, i just leave my sample still
in the chamber and shut down the raith untill someone knows how to solve
this problem.
Guangyu


From jwc at snf.stanford.edu  Mon Sep 11 11:32:41 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 11 Sep 2006 11:32:41 -0700
Subject: System is coming bacl up and I wish to work with you on your RAITH
 session today..
Message-ID: <4505ABC9.2020303@snf.stanford.edu>


Hello Li Zhang,

I see you are next on the CORAL schedule to use the RAITH 150.
The system has been brought back up.

I would like to work with you on your session to confirm that all 
features are functional and that the system is within performance 
specifications.
Will be coming into the Lab at 13:00 to 13:15 hours and will be ready to 
load at this time.

If you do not wish to run the system this afternoon I will perform the 
normal system qualifications as per the system qualification template we 
have establish last year.
RSVP or just meet me in the SNF Cleanroom at 13:00 - 13:15 hours today.

Thank you,

James Conway





From jwc at snf.stanford.edu  Mon Sep 11 11:54:37 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 11 Sep 2006 11:54:37 -0700
Subject: Shutdown raith SNF 2006-09-08 16:37:43: sample can't be unloaded
Message-ID: <4505B0ED.9090204@snf.stanford.edu>

Greetings Raith Users:

This user was running the service.nav and not the exchange.nav procedure!!!

Users are strictly notified that they are NOT to perform emergency 
recovery or other service.nav procedures on their own without having 
either Raith Field Service or James Conway on the phone.

This is very dangerous as that all service and safety interlocks are in 
manual mode. Questions that the system software ask must be verified 
before next steps.
It is very easy to damage the interferometer mirrors, the robot transfer 
arm, or other hardware if you make a mistake in command sequence within 
this operation module.  Just don't do it.


Thank you,

James Conway




gyzhang at snf.stanford.edu wrote:

>A message appeared when unloading my sample, says: 
>1. "It is not possible to reach the inner robot arm."
>Click OK, and next the messages says
>2. "Mannual procedure to bring the robot arm back in its outer possition. Please, follow the instructions"
>Click Ok, and the next messages is
>3. "Press the T-button on the Joystick"
>Press it, click OK,
>4. "Move the robot arm with the joystck as far as possible to the outer possition"
>Move the T possible to zero, and click OK,
>5. "Outer position reached! Press X- and Y- button on the joystick"
>Press the X- and Y- button and click OK,
>Then, No messages appeared, and the load and unload button on 'Navigator exchange' becomes red and unusable.
>So, i leave my sample still in the chamber and shut down the raith untill someone knows how to solve this problem. 
>
>  
>
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From jwc at snf.stanford.edu  Mon Sep 11 12:02:08 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 11 Sep 2006 12:02:08 -0700
Subject: User whom threw the High Voltage Knife switch to the power on the
 RAITH::  please see me during my office hour.
Message-ID: <4505B2B0.2020907@snf.stanford.edu>


Greetings Raith Community:

At some point late last week a lab member whom entered the Ebeam Lab 
actuated the high voltage power knife switch by the ebeam lab door 
completely shutting down the RAITH 150 system.  This shut down the gun 
and performed a partial vent of the system chamber taking this system 
off line and unoperational for the subsequent users.

Will the User whom actuated this switch, or if you know of whom did 
this, please come and see me during my office hour.   I would like to 
know why and how this difficult to actuate switch was tripped.

Thank you for your support!

James Conway
Ebeam Lab.
650-725-7075  office hour 8:30 - 9:30 AM M-F




From zhangli at stanford.edu  Mon Sep 11 12:03:38 2006
From: zhangli at stanford.edu (Li Zhang)
Date: Mon, 11 Sep 2006 12:03:38 -0700
Subject: System is coming bacl up and I wish to work with you on your RAITH session today..
In-Reply-To: <4505ABC9.2020303@snf.stanford.edu>
References: <4505ABC9.2020303@snf.stanford.edu>
Message-ID: <1158001418.4505b30a7882a@webmail.stanford.edu>

James,

I am not gonna use the session and I just canceled it. Thanks.

-- 
Best Wishes,

Li Zhang
Department of Chemistry
Stanford University


Quoting James Conway <jwc at snf.stanford.edu>:

> 
> Hello Li Zhang,
> 
> I see you are next on the CORAL schedule to use the RAITH 150.
> The system has been brought back up.
> 
> I would like to work with you on your session to confirm that all 
> features are functional and that the system is within performance 
> specifications.
> Will be coming into the Lab at 13:00 to 13:15 hours and will be ready to 
> load at this time.
> 
> If you do not wish to run the system this afternoon I will perform the 
> normal system qualifications as per the system qualification template we 
> have establish last year.
> RSVP or just meet me in the SNF Cleanroom at 13:00 - 13:15 hours today.
> 
> Thank you,
> 
> James Conway
> 
> 
> 
> 


From jwc at snf.stanford.edu  Mon Sep 11 12:12:53 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 11 Sep 2006 12:12:53 -0700
Subject: System is coming bacl up and I wish to work with you on your
 RAITH session today..
In-Reply-To: <1158001418.4505b30a7882a@webmail.stanford.edu>
References: <4505ABC9.2020303@snf.stanford.edu> <1158001418.4505b30a7882a@webmail.stanford.edu>
Message-ID: <4505B535.8020207@snf.stanford.edu>

Fine -- I will take the session. Thank you for giving me the time.

Users interested in a refresher or more exposure to the system are
welcome to join me after 13:15 hours.

Thank you for your support!

James Conway


Li Zhang wrote:

>James,
>
>I am not gonna use the session and I just canceled it. Thanks.
>
>  
>



From jwc at snf.stanford.edu  Tue Sep 12 10:07:45 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 12 Sep 2006 10:07:45 -0700
Subject: FWD: Raith Lithography training course and workshops 2006 in Dortmund,
 Germany
Message-ID: <4506E961.60502@snf.stanford.edu>

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From hansj at stanford.edu  Tue Sep 12 10:33:27 2006
From: hansj at stanford.edu (Shu-Jen Han)
Date: Tue, 12 Sep 2006 10:33:27 -0700
Subject: raith is ready for the next user now
Message-ID: <1158082407.4506ef679767e@webmail.stanford.edu>





From mtopinka at stanford.edu  Tue Sep 12 10:46:06 2006
From: mtopinka at stanford.edu (Mark Topinka)
Date: Tue, 12 Sep 2006 10:46:06 -0700
Subject: oops- raith free now to 2pm
Message-ID: <6.2.5.6.2.20060912104513.03165f68@stanford.edu>

sorry, thought raith was still red lighted...



From hungtao at stanford.edu  Tue Sep 12 16:37:39 2006
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Tue, 12 Sep 2006 16:37:39 -0700
Subject: raith free til 6pm
Message-ID: <1158104259.450744c32a56f@webmail.stanford.edu>

finish earlier -Hungtao


From ifushman at stanford.edu  Wed Sep 13 09:48:38 2006
From: ifushman at stanford.edu (Ilya Fushman)
Date: Wed, 13 Sep 2006 09:48:38 -0700
Subject: slot open thurs at 9
Message-ID: <28bfad130609130948t1ae99e4m44caa5c199d95b85@mail.gmail.com>

have to be somewhere else. sorry.
-ilya


From jwc at snf.stanford.edu  Wed Sep 13 11:43:10 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 13 Sep 2006 11:43:10 -0700
Subject: Comment raith SNF 2006-09-12 17:41:12: Users requested to report
 their EBL results to raith@snf.stanford.edu
Message-ID: <4508513E.3090009@snf.stanford.edu>

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From jwc at snf.stanford.edu  Wed Sep 13 12:11:58 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 13 Sep 2006 12:11:58 -0700
Subject: raith ok for 30kV?
In-Reply-To: <000c01c6d754$8aaac570$6400a8c0@toshibalaptop>
References: <000c01c6d754$8aaac570$6400a8c0@toshibalaptop>
Message-ID: <450857FE.3090101@snf.stanford.edu>

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From jwc at snf.stanford.edu  Wed Sep 13 18:08:58 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 13 Sep 2006 18:08:58 -0700
Subject: Comment raith SNF 2006-09-13 17:34:21: excellent stitching and resolution
 on qualification test 9112006
Message-ID: <4508ABAA.60402@snf.stanford.edu>

Greetings Raith Community:
We achieved excellent stitching and resolution on qualification test 
EXPOSURE 9112006 AFTER the system was brought up.

Stitching offsets WF to WF is better than the measurement gage of the 
LEO SEM at < 5 nm.  Single Pixel Lines display superb line edge 
roughness once dose to clear the film is reached.

James Conway



From bryane at stanford.edu  Thu Sep 14 22:09:11 2006
From: bryane at stanford.edu (Bryan Ellis)
Date: Thu, 14 Sep 2006 22:09:11 -0700
Subject: Raith free 10am-3pm tomorrow
Message-ID: <22cc95d90609142209s5cbc1ddbqde8b0624e75de7f3@mail.gmail.com>

My samples aren't ready.  Sorry for the late notice.

Bryan
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From jwc at snf.stanford.edu  Fri Sep 15 08:52:18 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 15 Sep 2006 08:52:18 -0700
Subject: Raith free 10am-3pm tomorrow
In-Reply-To: <22cc95d90609142209s5cbc1ddbqde8b0624e75de7f3@mail.gmail.com>
References: <22cc95d90609142209s5cbc1ddbqde8b0624e75de7f3@mail.gmail.com>
Message-ID: <450ACC32.8030709@snf.stanford.edu>

James here -

I will take this session to catch up on maintenance items outstanding. 
Should be finished about 12:30 if hemmanth wishes to start early.


Thank you for the time,

JWC


Bryan Elise wrote:

> My samples aren't ready.  Sorry for the late notice.
>
> Bryan




From jwc at snf.stanford.edu  Fri Sep 15 13:10:29 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 15 Sep 2006 13:10:29 -0700
Subject: Comment raith SNF 2006-09-15 10:25:03: 120 um Gun alignment out of
 specification.
Message-ID: <450B08B5.3010202@snf.stanford.edu>

I have called Raith USA Inc. and asked them to put in a service request 
with Zeiss SMT.
I have a reservation next Friday on CORAL to perform this routine and to 
check other items on the system as well.

Thank you for your support!

James Conway


-------- Original Message --------
Subject: 	Comment raith SNF 2006-09-15 10:25:03: 120 um Gun alignment 
out of specification.
Date: 	Fri, 15 Sep 2006 10:25:04 -0700
From: 	jwc at snf.stanford.edu
To: 	raith-pcs at snf.stanford.edu



Good Morning,
User Topinka and DGG group reported that the 120 um Gun alignment settings were approaching the limits of the adjustment range.
Today I checked this out and determined that we may need to perform a mechanical gun realignment before we can properly align the 120 um aperture Gun alignment setting properly.
This may or may not have been resultant from last week's Power drop to the system -- but likely just a normal consequence of running in the FE-GUN.
(Current time on FE Gun -s 1537 hours emission time.)

Note: After the recent FE_GUN tip exchange ZEISS Field Service DID NOT return to complete the final aperture and gun alignments.  The was no further response to our request at that time.  2 phone calls were left unanswered.  I called RAITH USA today and requested they schedule a service visit for us on next Friday to perform adjustments and update the system settings. (Joel at RAITH USA Inc.)

Best,

James Conway


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From jwc at snf.stanford.edu  Fri Sep 15 13:25:00 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 15 Sep 2006 13:25:00 -0700
Subject: RAith Session Today
In-Reply-To: <000501c6d902$9d4b2f30$0100000a@jhemanthibm1>
References: <000501c6d902$9d4b2f30$0100000a@jhemanthibm1>
Message-ID: <450B0C1C.4000001@snf.stanford.edu>

Great -- that will leave time for my exposure to complete.  I was 
running a bit late too as I bit off more than I could complete within 
the time allowed.
Thank you,

JWC


Hemanth Jagannathan wrote:

> HI James,
>  
>     Thanks for the mail earlier today. I am running a bit late on my 
> samples and will start my e-beam session at 2:30pm today.
>  
> Regards,
>  
> Hemanth
>  
>  
>
> ********************************************************
>
> Hemanth Jagannathan
> PhD Candidate
> Department of Electrical Engineering
> Stanford University, CA
> Phone :(O)(650)-725-0417; (C) (650)-380-2105
> e-mail: jhemanth at stanford.edu <mailto:jhemanth at stanford.edu>
>
> ********************************************************
>
>     -----Original Message-----
>     From: James Conway [mailto:jwc at snf.stanford.edu]
>     Sent: Friday, September 15, 2006 1:10 PM
>     To: Raith SNF Mailing list
>     Cc: Cole Loomis -- RAITH USA.; Joseph Klingfus
>     Subject: Comment raith SNF 2006-09-15 10:25:03: 120 um Gun
>     alignment out of specification.
>
>     I have called Raith USA Inc. and asked them to put in a service
>     request with Zeiss SMT.
>     I have a reservation next Friday on CORAL to perform this routine
>     and to check other items on the system as well.
>
>     Thank you for your support!
>
>     James Conway
>
>
>     -------- Original Message --------
>     Subject: 	Comment raith SNF 2006-09-15 10:25:03: 120 um Gun
>     alignment out of specification.
>     Date: 	Fri, 15 Sep 2006 10:25:04 -0700
>     From: 	jwc at snf.stanford.edu
>     To: 	raith-pcs at snf.stanford.edu
>
>
>
>Good Morning,
>User Topinka and DGG group reported that the 120 um Gun alignment settings were approaching the limits of the adjustment range.
>Today I checked this out and determined that we may need to perform a mechanical gun realignment before we can properly align the 120 um aperture Gun alignment setting properly.
>This may or may not have been resultant from last week's Power drop to the system -- but likely just a normal consequence of running in the FE-GUN.
>(Current time on FE Gun -s 1537 hours emission time.)
>
>Note: After the recent FE_GUN tip exchange ZEISS Field Service DID NOT return to complete the final aperture and gun alignments.  The was no further response to our request at that time.  2 phone calls were left unanswered.  I called RAITH USA today and requested they schedule a service visit for us on next Friday to perform adjustments and update the system settings. (Joel at RAITH USA Inc.)
>
>Best,
>
>James Conway
>
>    
>
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From okilic at stanford.edu  Fri Sep 15 14:13:33 2006
From: okilic at stanford.edu (Onur Kilic)
Date: Fri, 15 Sep 2006 14:13:33 -0700
Subject: Moved Sat reservation to Wed
Message-ID: <1158354813.450b177d643cf@webmail.stanford.edu>

Chips not ready. Moved my Staurday 4:30 AM reservation to Wednesday.

Onur

-- 
Onur Kilic
PhD Candidate
Applied Physics
Stanford University
http://onurkilic.com





From jhemanth at stanford.edu  Fri Sep 15 14:51:02 2006
From: jhemanth at stanford.edu (Hemanth Jagannathan)
Date: Fri, 15 Sep 2006 14:51:02 -0700
Subject: Raith free from now to 8pm
Message-ID: <000701c6d911$0a124a00$0100000a@jhemanthibm1>

Hello Fellow Raith Users,
 
    I observed some mis-alignment in my previous e-beam and hence will not
be able to use my reservation today. I have removed my reservation on Coral.
Could the next user please unload James's wafer from the system and then
start their write?
 
Thanks,
 
Hemanth
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From hungtao at stanford.edu  Sun Sep 17 13:29:51 2006
From: hungtao at stanford.edu (Hung-Tao Chou)
Date: Sun, 17 Sep 2006 13:29:51 -0700
Subject: Raith free 8am-11am tomorrow
Message-ID: <1158524991.450db03f6ba03@webmail.stanford.edu>

My sample is not ready.  Sorry for the late notice.

Hungtao


From jwc at snf.stanford.edu  Tue Sep 19 16:44:32 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 19 Sep 2006 16:44:32 -0700
Subject: Shutdown raith SNF 2006-09-19 16:06:22: RAITH System off line for
 BAKE OUT OF GUN. Previous water flow problems vented system chamber. elevated
 Gun pressures observed
Message-ID: <451080E0.3080408@snf.stanford.edu>

Raith Users:

Raith system will be off line overnight while we bake out the Gun 
section of the system to address the elevated Gun section pressures at 
Gun startup while recovering from the Water flow problems. We will then 
continue to evaluate the problems encountered this afternoon.
I will update the news list when we have a better estimate of when we 
come back up.

Thank you,

James Conway


-------- Original Message --------
Subject: 	Shutdown raith SNF 2006-09-19 16:06:22: RAITH System off line 
for BAKE OUT OF GUN
Date: 	Tue., 19 Sep 2006 16:06:23 -0700
From: 	jwc at snf.stanford.edu
To: 	raith-pcs at snf.stanford.edu


Raith Users

 Several water flow and elevated water temperature events this afternoon caused an automatic vent of the system chamber to air after a 1 hour time out.  I was unable to troubleshoot and effect repairs to the NESLAB chiller before the time out initiatedm (60 minutes). 200 - 500 ml of  H20 was added to the chiller today to bring up to normal 'full' level. Water flow cannot be verified to volume-- but water is flowing.
The Gun pressures are elevated and the FE-Gun trips off when we bring it up due to sudden increases in Gun section pressures.
RAITH Field Service suggest performing a overnight bake out and will initiate a service request with ZEISS SMT in the morning.
I expect to have this system back up and available to users tomorrow afternoon or evening at best. 
Never a dull moment!
Thank you for your support!
James Conway


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From jwc at snf.stanford.edu  Wed Sep 20 15:19:50 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 20 Sep 2006 15:19:50 -0700
Subject: Raith system continues down time Zeiss was unable to come in today.
Message-ID: <4511BE86.5030903@snf.stanford.edu>

Greetings Raith Users,

I have been unable to bring the system back up on my own and I was not 
able to get Zeiss Field Service to come into Stanford today.
The engineer that had been expected to come into today to work with me 
was redirected to another site on Zeiss's management decision.

This is typical of the support we have had with Zeiss in the past, 
specifically with them not showing up in a timely manner for 
appointments made.
I am very disappointed in Zeiss Field Service response to this series of 
events this week.

Thank you for your support!

James Conway






From jwc at snf.stanford.edu  Fri Sep 22 15:56:45 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 22 Sep 2006 15:56:45 -0700
Subject: Raith Update :: System will remain down and out of service through
 Monday afternoon.
Message-ID: <45146A2D.4030002@snf.stanford.edu>

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From jwc at snf.stanford.edu  Tue Sep 26 11:36:33 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 26 Sep 2006 11:36:33 -0700
Subject: Stanford RAITH 150 EBL system will continue to be down.  Please remove
 and reschedule coral reservations through THURSDAY 6 PM.
Message-ID: <45197331.2000705@snf.stanford.edu>

Good Morning Raith Users:

Carl Zeiss SMT whom provides service for our RAITH 150 has been 
non-responsive and unable to supply us with sub-system board(s) needed 
to further troubleshoot and effect repairs on our RAITH 150 system. 
I have not seen and heard from any Zeiss representatives since Friday 
and several of my calls have been shunted to voice mail.  Several 
parties have been trading voice mails with me without any progress.

Biggest Issue:  They do not have the parts in the USA to repair our system.
The system will remain SHUT DOWN and offline to all users until these 
repairs are completed.

This morning I asked George Lanzarotta of RAITH USA Inc. to escalate 
this issue and inform ZEISS Management in Oberkocken, Germany of this 
situation with hopes of expediting both the needed parts and a RAITH 
Field Service engineer with suitable skills to return the tools to 
service as soon as  possible.

All Users are requested to remove their existing coral reservations and 
reschedule for any slot after  6 PM Thursday for RAITH Champions only, 
and after 6 PM Friday for all other Users on the system. 
I do not currently have a definitive date or time that I can now certify 
that the system will be back up for your use.

Raith USA Inc. and myself are doing everything humanly possible to 
return this tools to service during this week.

My apologies for the interruption and delay to your research that this 
down time has caused everyone working on the system.

Thank you for your support!

James Conway


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From jwconway at stanford.edu  Thu Sep 28 15:48:43 2006
From: jwconway at stanford.edu (James Conway)
Date: Thu, 28 Sep 2006 15:48:43 -0700
Subject: James Conway will be away from SNF Friday through Monday 10-09-06
Message-ID: <1159483723.451c514b229fe@webmail.stanford.edu>


Greetings Raith Users and SNF Process Staff Group:

The RAITH 150 system remains 'off line' and in 'shut down' red light mode
while RAITH USA Field Service Engineer Jason Sanabia and Zeiss SMT Field
Service engineer Mike Santomango continue to troubleshoot and effect
repairs to the RAITH system. At this time I still do not have an estimate
when the system will return to service. All parties are doing their very
best to bring this system up. A number of problems were encountered on
several sub-system modules as we wirk our way through the system.

Our Raith Champions will be in charge of the system after Jason Sanabia,
whom is currently on site at SNF, returns the system to Users.  It is
requested that available Raith Champions help and assist Jason Sanabia with
qualification and exposure testing on the tool when the system comes back
up. Please feel free to stop by the Ebeam Lab and introduce yourselves.


James Conway will be away from the office from 16:00 hours today through
10:00 hours on Monday October 09, 2006 in order to address a Family Life
event that is currently transpiring. I hope to return to SNF Monday October
09, 2006 about 10 AM.
You should be able to reach me on my cell phone from today through Monday
afternoon and then again after Wednesday evening. Please leave a voicemail,
or send me SMS, if you need assistance or have questions. My office hour
times are best to contact me.

Thank you for your support,

James W. Conway

replies to jwc at snf.stanford.edu






From jwc at snf.stanford.edu  Thu Sep 28 16:19:56 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 28 Sep 2006 16:19:56 -0700
Subject: FAQ NO 6: HOW to get help on the RAITH System during your session
 -- "Who are your gonna call"
Message-ID: <451C589C.9080201@snf.stanford.edu>

Good Morning Raith Users:

Starting now through 10-09-06  I will be away from SNF  During this time 
I will be on and off the cell phone grid and you may be unable to reach 
me by cell phone for support on the Raith 150 system.    I will respond 
to all voice mail left on my phone as soon as I am able to.

Please enlist the aid of your local Raith Champions for assistance on 
the tool should you run into any problems whatsoever.

Below and attached I have the Raith FAQ No. 6, How to Get Help - "WHO 
ARE YOU GOING TO CALL" and the Raith Champion list and email addresses.

Please play nicely together and work to maximize throughput on the 
system while I am away when it returns to service.

Thank you for your support!

James Conway




---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
RAITH FAQ NO 6:
RAITH SYSTEM PROBLEMS:
How to Get Help - "WHO ARE YOU GOING TO CALL"

Greetings Raith Users:
I wish to remind everyone that we have set into place a hierarchical 
structure     on what to do and whom to call if you encounter problems 
on the RAITH 150 system
during my absence, or for those times I am not be available by cell phone.
 
  For Example:
 
* You encounter a LOAD LOCK ERROR on the system and cannot
* continue the Load or Unload cycle without an administrator login and 
support.
* The pumps or system hardware are not working normally and the
* logic may have become reversed.
* Beam Blanking Logic is reversed due to an RAITH150.exe
* application crash when the beam was unblanked in your software panel ...

1. If I am available, try to call me on my cell phone and I will walk 
you through the Recovery procedures. My number is 001-415-412-4825.
    Be sure to leave Voice Mail if I don't answer!


2. Try then to contact a RAITH Champion:
    Arvind Sundaramurthy arvisun at stanford.edu 1-650- 450-0475
    Ryan Tu ryantu at stanford.edu 1-650-799-6492
    Jun Pan panjun at stanford.edu 1-650-353-6588
    Hemanth Jagannathan jhemanth at stanford.edu 1-650-380-2105

 
3.    Contact a RAITH USA Application Support Specialist:
        Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com 
1-218-483-1267
 
4.  For Major Hardware issues and all emergencies with the LEO or RAITH 
Hardware:
    Contact the RAITH USA Field Service Manager, Cole Loomis 
cl at raithusa.com
    (631) 738-9500 or Kevin Burcham <kb at raithusa.com> same number at 
RAITH USA.




Thank you all for your support!


James Conway
Ebeam Technology Group
Stanford Nanofabrication Facility.
Cell 415-412-4825
jwc at snf.stanford.edu


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