From anikak at stanford.edu Sun Apr 1 11:23:58 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Sun, 1 Apr 2007 11:23:58 -0700 Subject: raith free until 1:00pm Message-ID: <1175451838.460ff8be79d41@webmail.stanford.edu> finished early... From dkozak at ucsc.edu Sun Apr 1 18:10:03 2007 From: dkozak at ucsc.edu (Dmitry Alexander Kozak) Date: Sun, 01 Apr 2007 18:10:03 -0700 Subject: Raith free from 4:00Am to 8:00 Am Tomorrow Message-ID: Sorry, got very very sick in the middle of afternoon, don't want to risk the machine. Again, sorry for late notice Dmitry From jwc at snf.stanford.edu Mon Apr 2 14:13:25 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 02 Apr 2007 14:13:25 -0700 Subject: Problem raith SNF 2007-03-30 10:24:33: Stage piezo post heights are different cannot level samples across the std. ample holder Message-ID: <461171F5.1020107@snf.stanford.edu> An HTML attachment was scrubbed... URL: From gthareja at stanford.edu Tue Apr 3 00:50:26 2007 From: gthareja at stanford.edu (Gaurav Thareja) Date: Tue, 3 Apr 2007 00:50:26 -0700 Subject: raith free Wednesday (6:30-10:30pm) Message-ID: <1175586626.4612074264cad@webmail.stanford.edu> sorry for the late notice. i realized that I would not be on campus that day/ thanks -gaurav From jwc at snf.stanford.edu Tue Apr 3 13:48:19 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 03 Apr 2007 13:48:19 -0700 Subject: announcement of RAITH system unschedule time offline -- WED 1:00 - 8:00 PM - Thursday and possibly Friday AM TBD Message-ID: <4612BD93.3080001@snf.stanford.edu> Greetings RAITH Users: I have RAITH Field service arriving early afternoon tomorrow (WED.) and working with me through Thursday evening and possibly into Friday AM to resolve the piezo height issues that are preventing level landings of the Standard Sample Holder onto the X-Y Stage. Just able to obtain commitments from them that they will be here tomorrow a few moments ago, hence the very short notice in advance. Please plan accordingly -- we will take the system off line from users when they arrive in the Cleanroom and are ready to start our work. Users should strive to complete as much work as possible, and 'share the ride' to reduce Load Lock transfers in preparation for this downtime about 24 hours from now. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Apr 3 17:42:25 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 03 Apr 2007 17:42:25 -0700 Subject: [Fwd: Shutdown raith SNF 2007-04-03 15:50:02: Electron optics boards temperature exceeds limits -- system shut down for repairs] Message-ID: <4612F471.3080006@snf.stanford.edu> System is down and off line to users this evening. We are experiencing higher than normal temperatures in the E/O card cooling section. WE will flush and refill the cooling lines tomorrow and continue to address other service related issues on the tool. FYI: Andrei Faraon has my permission to troubleshoot the system overnight. Thank you, JWC -------- Original Message -------- Subject: Shutdown raith SNF 2007-04-03 15:50:02: Electron optics boards temperature exceeds limits -- system shut down for repairs Date: Tue, 3 Apr 2007 15:50:05 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Good afternoon: AT 15:10 hours we encountered a over temperature alarm on the WRATH SEM's Electron Optics card when it exceeded 35 degrees Celsius. I checked the temperature and flow at the NESLAB chiller and it is well controlled at 20 degrees Celsius. Flow however is reduced from previous setting and large clumps of material can be seem accumulating at the flow meter valve. System is now in shutdown mode until RAITH Field service can resolve this issue. RAITH field service is scheduled to arrive tomorrow mid day. Also attempted to reset the E/O card but it still is in alarm mode. System off line to users until further notice. James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Apr 4 09:31:08 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 04 Apr 2007 09:31:08 -0700 Subject: RAITH Field service will not be here until next week. repair will be performed by JWC Message-ID: <4613D2CC.3080209@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Apr 4 18:16:17 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 04 Apr 2007 18:16:17 -0700 Subject: Tomas In-Reply-To: <1175716936.9d447e80sikola@fme.vutbr.cz> References: <1175716936.9d447e80sikola@fme.vutbr.cz> Message-ID: <46144DE1.5000400@snf.stanford.edu> Hello Tom??, Raith Users and RAITH Field Service, I have flushed out the cooling loop from the NESLAB chiller to the RAITH E/O card and turbo pump on the RAITH system. Water flow is still restricted and only will flow at 0.8 LPM, just at small flow but more than a trickle. I gently reversed flushed and forward flushed the lines to remove the debris that had coagulated in the lines. It appears to be an oily substance, presumably white mineral oil. In addition I flushed out the chiller and supply tank with soapy water and then again flushed with DI through ten exchanges of clean water totaling 5 gallons. I then refilled the system and flushed out the old lines again with clean DI water. Total flush volume was around 12 gallons. I just started up the system -- but am not sure the mechanical pump has started properly that backs up the turbo pump. Current VAC status at 18:00 hours is the system is 'Waiting Turbo speed". Hopefully the system isolation valve and ion pump will start up normally as expected. I will resume in the morning to troubleshoot and bring the FE-Gun back up on line if possible. NO Users access to the system for EBL operations tonight. The FE-GUN is still down and vacuum will need time to recover. The computers are up and running if Users desire to review the new version 4 application, check their data, edit patterns, and prepare position list in preparation for when the system returns to normal status. I will update Noon tomorrow PDST. Thank you for your support! Good Evening, James Conway Tom?? ?IKOLA wrote: > James, > > O.K. It would be perfect. > > Best regards, > > Tomas > > -----Original Message----- > From: James Conway > To: Tom?? ?IKOLA > Date: Wed, 04 Apr 2007 11:59:59 -0700 > Subject: Re: Tomas > > I will need more time as I was buys with chemicals stores and disposal > this morning. > Check to see if I cam back in the Ebeam lab after 4 PM. > > JWC > > > Tom?? ?IKOLA wrote: > >> James, >> >> Thanks a lot. >> >> Tomas >> >> -----Original Message----- >> From: James Conway >> To: Tom?? ?IKOLA >> Date: Wed, 04 Apr 2007 09:06:43 -0700 >> Subject: Re: Tomas >> >> I should have the system back up and on line later this afternoon. >> RAITH Field service person was turned around at the border due to work >> visa issues.... >> >> Check with me later after lunch and we might be able to get you onto the >> system. >> >> Best, >> JWC >> >> >> Tom?? ?IKOLA wrote: >> >> >>> Hi James, >>> >>> I came today at five a.m. for my EBL session, did not read your email and unloaded the sample which was inside and ready. I hope I did not make any harm. Do you think there is a chance I can have my Friday early morning session? To complete my experiments (leaving on Thursday, next week) I would still need 4 - 5 hours of EB time. >>> >>> The required report: My exposition made on last Saturdayy was surprisingly good. I focused in the center of my 6x6 mm field and got a relatevely homogeneous exposition over this field (5% PMMA - 450K, 280 nm, dose 115). >>> >>> Regards, >>> >>> Tomas >>> >>> >>> >>> >> >> >> > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Apr 5 13:18:19 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Apr 2007 13:18:19 -0700 Subject: Raith Status 13:00 04-05-2007 -- SYSTEM is up and coming on line for users late this afternoon Message-ID: <4615598B.20807@snf.stanford.edu> Good Afternoon, Repairs to the cooling loop to the Neslab chiller have been completed and this problem is resolved. I started pumping on the system early this morning and I was able to start up the FE-Gun up at 10:30 AM. The system faulted in my attempt to startup the pumps late last night, possibly from the water flow/temp alarm that tripped before. This afternoon, I will be making some measurements and qualifying the tool for operation. We will also be doing an additional exposure with Tomas Sikola starting about 1:30 PM today. Users whom have not yet qualified on the new RAITH 150 version 4 may desire to make appointments with me for next week to review the changes in the operation procedures. Users can expect to resume the CORAL schedule queue from 17:00 today. * Users restricted to no higher than 10 keV acceleration voltage through early next week.* More as it happens, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Apr 5 13:19:22 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Apr 2007 13:19:22 -0700 Subject: Comment raith SNF 2007-04-05 13:15:39: Users restricted to no higher than 10 keV acceleration voltage through early next week. Message-ID: <461559CA.9@snf.stanford.edu> Greetings: Users restricted to no higher than 10 keV acceleration voltage through early next week. I am waiting for the Gun vacuum to return to previous levels before going up any higher. Best, JWC From jwc at snf.stanford.edu Thu Apr 5 13:37:23 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Apr 2007 13:37:23 -0700 Subject: System will go off line to users midday Tuesday for more test and adjustments to the Laser Interferometer Stage with RAITH Filed service. Message-ID: <46155E03.208@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Apr 5 17:16:44 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Apr 2007 17:16:44 -0700 Subject: [Fwd: Problem raith SNF 2007-04-05 17:03:29: qualification failed for stitching and out of plane focus] Message-ID: <4615916C.7020707@snf.stanford.edu> Greetings: System is up and available for all qualified Users. Qualification Failed and is out of normal specifications due to Write Field to Write Field Stitching. Stage leveling planarity issues continue with no change. Workaround: * Use the centered Piezo positions for your write. * Perform focus and WF alignment for each 10 X 10 mm area you are writing in. * Carefully inspect your EBL results BEFORE pattern transfer... * Users are requested to carefully examine their EBL results and document if possible any issues encountered and to report to this list.* Please report anything unusual you may encounter. Call James Conway if you run into problems over the weekend I will try to stay on the cell phone grid. (SMS IS GOOD!) James Conway FYI: I will be on vacation tomorrow Friday and next Monday for a brief holiday. Returning to SNF 10 AM Tuesday ... -------- Original Message -------- Subject: Problem raith SNF 2007-04-05 17:03:29: qualification failed for stitching and out of plane focus Date: Thu, 5 Apr 2007 17:03:30 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu QUALIFICATION FAILED. It failed for the same issues as before in the last 7 runs: Likely due to the large offset in the spot offset calibration resulting in errors during the WF alignment which then results in WF:WF stitching errors well beyond specifications. Std Sample holder on Piezo post is out of level planarity resulting in poor focus as you expose across a wafer. Possible exposure error: Unknown reason for a ~7.5 U and ~15 V shift in UV coordinate system for entire PLS written. May have been a error in setting up UV system on write job. I checked PLS and protocol log file and it has the correct positions in the PLS and LOGS. Try again next week after repairs to piezo post heights. Users are not to exceed 10 keV acceleration voltage. Users should call me if they have questions or observe anything unusual. JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From sanjah at stanford.edu Fri Apr 6 22:26:40 2007 From: sanjah at stanford.edu (Sanja Hadzialic) Date: Fri, 6 Apr 2007 22:26:40 -0700 Subject: water flow has failed Message-ID: <1175923600.46172b9063cc8@webmail.stanford.edu> Got error massage: Error number 593 - Water flow has failed on LEO SRV. From hideoiw at yahoo.co.jp Sat Apr 7 03:20:40 2007 From: hideoiw at yahoo.co.jp (=?ISO-2022-JP?B?GyRCNGRAJRsoQiAbJEI9KElXGyhC?=) Date: Sat, 7 Apr 2007 19:20:40 +0900 (JST) Subject: water flow has failed In-Reply-To: <1175923600.46172b9063cc8@webmail.stanford.edu> Message-ID: <20070407102040.31610.qmail@web3702.mail.tnz.yahoo.co.jp> A new message had come out: #594 -water flow resumed. But my sample could not be loaded. Error message said: pumping in chamber is not ready. --- Sanja Hadzialic wrote: > Got error massage: Error number 593 - Water flow has > failed on LEO SRV. > > From filip at stanford.edu Sat Apr 7 12:16:46 2007 From: filip at stanford.edu (Filip Crnogorac) Date: Sat, 7 Apr 2007 12:16:46 -0700 Subject: Raith free 2pm-6pm In-Reply-To: <20070407102040.31610.qmail@web3702.mail.tnz.yahoo.co.jp> References: <20070407102040.31610.qmail@web3702.mail.tnz.yahoo.co.jp> Message-ID: <1175973406.4617ee1e6ed04@webmail.stanford.edu> Quoting "岩瀬 秀夫" : > > A new message had come out: #594 -water flow resumed. > But my sample could not be loaded. > Error message said: pumping in chamber is not ready. > > > --- Sanja Hadzialic wrote: > > > Got error massage: Error number 593 - Water flow has > > failed on LEO SRV. > > > > > > -------------------------------------- Ph.D. Candidate, Stanford University Department of Electrical Engineering Center for Integrated Systems B-103, 420 Via Palou Stanford, CA 94305 From shinichikoseki at gmail.com Sat Apr 7 12:37:46 2007 From: shinichikoseki at gmail.com (Shinichi Koseki) Date: Sat, 7 Apr 2007 12:37:46 -0700 Subject: Raith free 2pm-6pm In-Reply-To: <1175973406.4617ee1e6ed04@webmail.stanford.edu> References: <20070407102040.31610.qmail@web3702.mail.tnz.yahoo.co.jp> <1175973406.4617ee1e6ed04@webmail.stanford.edu> Message-ID: <3b532e5a0704071237o7c0c1e3yb39be82ef3674fd0@mail.gmail.com> I'll take it. Thanks ! Would you please remove your name from coral ? Thanks! > Filip After that, I'll remove my 7-11pm slot. cheers, Shinichi On 4/7/07, Filip Crnogorac wrote: > Quoting "?? ??" : > > > > > A new message had come out: #594 -water flow resumed. > > But my sample could not be loaded. > > Error message said: pumping in chamber is not ready. > > > > > > --- Sanja Hadzialic wrote: > > > > > Got error massage: Error number 593 - Water flow has > > > failed on LEO SRV. > > > > > > > > > > > > > -------------------------------------- > Ph.D. Candidate, Stanford University > Department of Electrical Engineering > Center for Integrated Systems > B-103, 420 Via Palou > Stanford, CA 94305 > > From koshnick at stanford.edu Sat Apr 7 13:49:23 2007 From: koshnick at stanford.edu (Nick Koshnick) Date: Sat, 7 Apr 2007 13:49:23 -0700 Subject: Raith free 2pm-6pm In-Reply-To: <3b532e5a0704071237o7c0c1e3yb39be82ef3674fd0@mail.gmail.com> References: <20070407102040.31610.qmail@web3702.mail.tnz.yahoo.co.jp> <1175973406.4617ee1e6ed04@webmail.stanford.edu> <3b532e5a0704071237o7c0c1e3yb39be82ef3674fd0@mail.gmail.com> Message-ID: Greetings all, the Raith seems to be up and running fine once again. Somehow the system vacuum had risen up to about 1e-4 mbar, which caused the error. I pumped it out by going to Control Panel -> Vacuum. For some reason, it only worked on my second try, and then it took about 20 minutes to get down to an acceptable pressure (1.5e-5 for starting the load, and down to 3e-6 by the time I'd finished optimizing the beam.) On 4/7/07, Shinichi Koseki wrote: > I'll take it. Thanks ! > > Would you please remove your name from coral ? Thanks! > Filip > After that, I'll remove my 7-11pm slot. > > cheers, > > Shinichi > > > On 4/7/07, Filip Crnogorac wrote: > > Quoting "?? ??" : > > > > > > > > A new message had come out: #594 -water flow resumed. > > > But my sample could not be loaded. > > > Error message said: pumping in chamber is not ready. > > > > > > > > > --- Sanja Hadzialic wrote: > > > > > > > Got error massage: Error number 593 - Water flow has > > > > failed on LEO SRV. > > > > > > > > > > > > > > > > > > > > -------------------------------------- > > Ph.D. Candidate, Stanford University > > Department of Electrical Engineering > > Center for Integrated Systems > > B-103, 420 Via Palou > > Stanford, CA 94305 > > > > > From atsuhiro.kinoshita at toshiba.co.jp Tue Apr 10 09:32:32 2007 From: atsuhiro.kinoshita at toshiba.co.jp (Atsuhiro Kinoshita) Date: Tue, 10 Apr 2007 09:32:32 -0700 Subject: Raith free from 10:00 am to 12:30 pm Message-ID: <461BBC20.9010400@toshiba.co.jp> Sorry, sample has not ready. Sorry again for late notice. Atsuhiro -- Atsuhiro Kinoshita, Ph.D. Visiting Scholar Electrical Engineering, CISX-304, 420 Via Palou Mall Stanford University Stanford, CA 94305 - 4070 phone: (650) 725 - 0417 fax: (650) 725 - 0991 email: atsuhiro.kinoshita at toshiba.co.jp _________________________________________ From koseki at stanford.edu Tue Apr 10 10:00:07 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Tue, 10 Apr 2007 10:00:07 -0700 Subject: Raith free from 10:00 am to 12:30 pm References: <461BBC20.9010400@toshiba.co.jp> Message-ID: <000a01c77b91$b1a28140$231b40ab@nausicaa> I'll take it ! Thanks ! Shinichi ----- Original Message ----- From: "Atsuhiro Kinoshita" To: Sent: Tuesday, April 10, 2007 9:32 AM Subject: Raith free from 10:00 am to 12:30 pm > Sorry, sample has not ready. > Sorry again for late notice. > > Atsuhiro > > -- > > Atsuhiro Kinoshita, Ph.D. > Visiting Scholar > Electrical Engineering, > > CISX-304, 420 Via Palou Mall > Stanford University > Stanford, CA 94305 - 4070 > > phone: (650) 725 - 0417 > fax: (650) 725 - 0991 > email: atsuhiro.kinoshita at toshiba.co.jp > _________________________________________ > From jwconway at stanford.edu Tue Apr 10 16:52:54 2007 From: jwconway at stanford.edu (James Conway) Date: Tue, 10 Apr 2007 16:52:54 -0700 Subject: RAITH is off line to users for RAITH Field Service Message-ID: <1176249174.461c23569fc36@webmail.stanford.edu> Greetings Raith Users: Raith Field Service's Joe Klingfus is on site and will be working on the tool this evening and overnight. There will not be any access to the system for Users tonight or tomorrow daytime through 6 PM. Currently we are switching out some of the hardware to the turbo pump controller unit from the loaner unit, and starting measurements of our stage piezo post heights. This evening we will remove the shims that had been placed under the piezo post ceramic ball mounts on each piezo, and will attempt to measure reshim and relevel the post after further measurements using the SEM. Users can expect the system to remain off line for the next 24 hour period, with only a 50% possibility of obtaining access tomorrow evening and overnight. We are striving to minimize the impact that this down time will have on the Coral schedule and to all Users. Users are asked to be flexible in their scheduling during this period. Thank you for your support! James Conway - SNF Joe Klingfus - RAITH USA Inc. From jwc at snf.stanford.edu Thu Apr 12 10:05:44 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Apr 2007 10:05:44 -0700 Subject: ANNOUNCEMENT: RAITH Group XXVI -- Intensive 4 day short course. April 17 - 20, 2007 TUESDAY - FRIDAY 10 AM - 6 PM Message-ID: <461E66E8.90100@snf.stanford.edu> *Greetings RAITH Group XXVI: ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXIV**. If you are listed in the CC: section of this email; I still am in need of further information or a commitment from you, and hope to add you in the next class. Any RAITH user wishing to attend are also welcome if you desire a review of operations on the RAITH system. ** We wish to invite all interested parties to the Tuesday morning lecture session and demo layer one training following at 2 PM - 6 PM in the afternoon. All are also welcome to attend as observers the other 'hands-on' sessions through the week. All Users are encouraged to join any Raith Champion when they are on the system to gain further exposure to the system. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXIV Training course to be held April 17 - 20, 2007. The schedule follows along with a listing of Participants whom you will be working with as a Team. This will be an intensive four day workshop. _ *You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _*NOTE:* *_There are prerequisites you must complete before attending this class:_* You must have recent relevant SEM and LITHO experience before your can sit for this class. Please see me directly during my office hour if you have any questions. *Please bring examples of your best high resolution SEM work to the first class.** If you don't have intermediate SEM operations experience you will be dropped from this class. * Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. Next class is to be scheduled in the weeks after your RAITH Class. There is a separate sign up for this class on the white board in my office at CIS 31. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXVI** Schedule: ** * *Raith 150 Basic Users Training ? Intensive 4 Day Short Course* *April 17 - 20, 2007 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday April 17, 2007: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS-X 201 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday April 18, 2007: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday April 19, 2007: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday April 20, 2007: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where- you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can stop by my office hour and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM CIS 31) ------------------------------------------------------------------------------------------------------------------------------------------- *RAITH Group XXVI Date April 17 ?20, 2007 BASIC USER INTENSIVE FOUR DAY SHORT COURSE.* 1. Leili Baghaei Rad leili at stanford.edu Coral: leili Pease Group Project: Digital reconstruction of SEM Images. 2. Susan Clark sclark4 at stanford.edu Coral: sclark4 Yamamoto Group Project: Mesa and waveguide on Qdot. InAs 3. Kosar Baghbani Parizi kosarb at stanford.edu Coral: kosarb Nishi Group Project: Bio-FET on SOI. 4. Vanessa Sih vsih at stanford.edu Coral: vsih Vuckovic Group Project: Photonic Crystals in Si. 5. Byoung Il bilee at stanford.edu Coral: bilee H.S. Phillip Wong Group Project: Non-Volatile Memory Project. 6. Justin White whitejs at stanford.edu Coral: whitejs Brongersma Group Project: surface plasmon enhanced detectors. Observers in this class in preparation for RAITH Group XXVII: 7. Kyeongran Yoo raneeyoo at stanford.edu Coral: raneeyoo Phillip Wong Group, Project: moving channel MEMS Device 8. J. Brian Leen bleen at stanford.edu Coral: bleen Hesselink Group Project: C Apertures for optical confinement. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 384 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Apr 12 10:13:20 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Apr 2007 10:13:20 -0700 Subject: ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday April 24, 2007 10:00 - 13:00 Message-ID: <461E68B0.2000407@snf.stanford.edu> *ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway Coater. * Greetings Ebeam Lab Users, I will be conducting my monthly *"Take A Spin with Me" *training class Tuesday April 24 from 10 AM - 1 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway2 spin coater and users attending this session will gain their qualification on this tool. Schedule of Events: 10 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users are encouraged to have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven. 11:00 - 12:30 We can apply what ever resist system you desire for your work. I plan to work with several types of PMMA. 12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. No need to reply to this email -- just sign up and show up! Thank you for your interest in Ebeam Technologies here at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Apr 12 10:24:21 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Apr 2007 10:24:21 -0700 Subject: Still in need of qualification for version 4? Please attend the afternoon session of the next Raith Basic Users Class. Tuesday April 17, 2007 2 - 6 PM. Ebeam lab Message-ID: <461E6B45.50806@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Sat Sunrise Pan.jpg Type: image/jpeg Size: 183427 bytes Desc: not available URL: From gyzhang at stanford.edu Fri Apr 13 13:46:15 2007 From: gyzhang at stanford.edu (gyzhang at stanford.edu) Date: Fri, 13 Apr 2007 13:46:15 -0700 Subject: Raith time released tomorrow 10AM-2PM Message-ID: <20070413134615.lb0ha0ajv53k8scg@webmail.stanford.edu> Samples' not ready. GY From fjaeckel at stanford.edu Fri Apr 13 13:51:28 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Fri, 13 Apr 2007 13:51:28 -0700 Subject: Raith time released tomorrow 10AM-2PM In-Reply-To: <20070413134615.lb0ha0ajv53k8scg@webmail.stanford.edu> References: <20070413134615.lb0ha0ajv53k8scg@webmail.stanford.edu> Message-ID: <20070413135128.49vn8x5gcos0s00c@webmail.stanford.edu> took it and released tonight 7-12 PM Quoting gyzhang at stanford.edu: > Samples' not ready. > GY -- Dr. rer. nat. Frank J?ckel mail address:? ?Department of Chemistry, M/C 5080 ? ? ? ? ? ? ? ? 333 Campus Drive ? ? ? ? ? ? ? ? mailbox #74 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 phone:? ? ? ? ? +1-650-724-4052/51 (office/lab) fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74) e-mail:? ? ? ? ?fjaeckel at stanford.edu internet:? ? ? ?http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwconway at stanford.edu Fri Apr 13 15:56:51 2007 From: jwconway at stanford.edu (jwconway at stanford.edu) Date: Fri, 13 Apr 2007 15:56:51 -0700 Subject: RAITH is in qualification -- coral schedule resumes at 17:00 hours Message-ID: <20070413155651.mbzz0k9yr9wssooo@webmail.stanford.edu>

Greetings RAITH Users:

We have effected repairs to the RAITH piezo post by shimming up piezo post 2 and 3 in order to allow the stage planarity to be within the range of the piezo post movement and accomplish a leveled writing plane.?The centered piezo positions render a level? 100 mm wafer?measuring across?the entire wafer to within?20 um in our test today.?Several other subsystems have been tested and repaired concurrent to this work. The vacuum controller was also rebuilt with the good components between two controller selected and built into one unit. Joe Klingfus with RAITH USA and myself have been working night and day all week to complete this work before the weekend.?

The?shot spot offset calibration has been adjusted. Contamination dot shots are placed in the center of the write field properly. Dot diameter is less than 20 nm at 10 kV 30 um aperture.

Currently I am writing the PCM Qualification run and performing additional calibrations and measurements to?collect data on repeatability and system performance.

We wish to resume the RAITH Coral?schedule at?or about 22:00 hours today.
If Users are flexible we should be able to catch up to the schedule over the weekend.

Users severely negatively impacted by the delays we experienced this month and facing closing deadlines?should see me during my office hours next week to coordinate how they are to come back onto the system.

Thank you for your support!

James Conway

From jwc at snf.stanford.edu Fri Apr 13 20:39:48 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Apr 2007 20:39:48 -0700 Subject: RAITH STATUS 20:30 hours Friday --- Raith 150 returns to service... Message-ID: <46204D04.7070300@snf.stanford.edu> *Greetings Raith Community:* Joe Klingfus and myself completed adjustments to the piezo post in the Laser Interferometer Stage and the stage can now level wafers on the Std Sample Holder using the level wafer routine. Users can elect to either use the centered piezo positions or level the actual wafer or chip so that your writes will be in proper focus. We will be continuing to collect data through the next week to confirm and evaluate the repeatability of the sample holder landing properly onto the Laser Interferometer Stage. Adjustments were made yesterday to the Post positions for Sample Holder exchange. ********************************************************************************************************************** *Users are requested to very carefully perform their write field alignments after a final focus measurement adjustment to the stage coordinates and to monitor both the total delta focus between points on your across your wafer or chip. Users should also carefully inspect your patterns before pattern transfer. Please report your results to this email list.* ********************************************************************************************************************** We have determined that what I had interpreted as stitching issues in previous qualification runs was actually related to the Zoom U, V values obtained during align write field calibration, and this may have been due to settings in the dynamic compensation module and other settings on the machine. This resulted in write fields slightly smaller and larger that specified during the writing of the tool for various levels of defocus in the wafer writing plane. We are continuing to check all parameters to normal defaults per se, and will continue our testing during the RAITH Basic Users Class scheduled for next week. *Users can now operate the system up to 25 keV acceleration voltage *as the gun vacuum has returned to the mid E-010 Torr levels as previous planned. If users encounter any strange phenomenon or application behavior they should contact me on my cell phone anytime through the weekend. Thank you for your support! James Conway SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: From fjaeckel at stanford.edu Sat Apr 14 10:05:34 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Sat, 14 Apr 2007 10:05:34 -0700 Subject: chips on holder Message-ID: <20070414100534.c13x1iobmx44swgo@webmail.stanford.edu> I found three small chips on the sample holder but no box to put them in nor indication whom they belong to. So if you miss them come and pick them up. -- Dr. rer. nat. Frank J?ckel mail address:? ?Department of Chemistry, M/C 5080 ? ? ? ? ? ? ? ? 333 Campus Drive ? ? ? ? ? ? ? ? mailbox #74 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 phone:? ? ? ? ? +1-650-724-4052/51 (office/lab) fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74) e-mail:? ? ? ? ?fjaeckel at stanford.edu internet:? ? ? ?http://www.stanford.edu/~fjaeckel/[1] Links: ------ [1] http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Apr 16 16:24:04 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 16 Apr 2007 16:24:04 -0700 Subject: REMINDER: Tomorrow is the RAITH Group XXVI Basic Users class - Four Day Short Course. Starts in CIS 201 at 10:00 AM Tuesday. Message-ID: <46240594.3050602@snf.stanford.edu> * Greetings This is your reminder that tomorrow is the RAITH Group XXVI Basic Users class - Four Day Short Course. CIS 201 at 10:00 AM Tuesday. If you are listed in the To: section of this email you are confirmed to be in RAITH Group XXIV. If you are listed in the CC: section of this email; I still am in need of further information or a commitment from you, and hope to add you in the next class. Any RAITH user wishing to attend are also welcome if you desire a review of operations on the RAITH system. We wish to invite all interested parties to the Tuesday morning lecture session and demo layer one training following at 2 PM - 6 PM in the afternoon. All are also welcome to attend as observers the other 'hands-on' sessions through the week. All Users are encouraged to join any Raith Champion when they are on the system to gain further exposure to the system. *If you are listed in the To: section of this email: *This is your final reminder and confirmation of your commitment for attending the RAITH Group XXIV Training course to be held April 17 - 20, 2007. The schedule follows along with a listing of Participants whom you will be working with as a Team. This will be an intensive four day workshop. _ *You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _*NOTE:* *_There are prerequisites you must complete before attending this class:_* You must have recent relevant SEM and LITHO experience before your can sit for this class. Please see me directly during my office hour if you have any questions. *Please bring examples of your best high resolution SEM work to the first class and be prepared to introduce your project to the group. * Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. Next class is April 24, 2007 10 - 1 PM after your RAITH Class. There is a separate sign up for this class on the white board in my office at CIS 31. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * ** **RAITH Group **XXVI* *Schedule: ** ** **Raith 150 Basic Users Training -- Intensive 4 Day Short Course** **April 17 - 20, 2007 from 10 - 6 PM Tuesday through Friday.** **The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* **Schedule:* Tuesday April 17, 2007: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- *CIS-X 201* 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- *EBEAM LAB CIS L104** *Wednesday April 18, 2007: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104* *Thursday April 19, 2007: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104* *Friday April 20, 2007: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104* *Individual Qualification Sessions will be held after this class where- you can demonstrate your skill on the system to me and gain your login to the system.* * I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can stop by my office hour and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM CIS 31) -------------------------------------------------------------------------------------------------------------------------------------------* *RAITH Group XXVI Date April 17 --20, 2007 BASIC USER INTENSIVE FOUR DAY SHORT COURSE.* *1.* *Leili Baghaei Rad **leili at stanford.edu ** Coral: leili * Pease Group Project: Digital reconstruction of SEM Images. *2. Kosar Baghbani Parizi kosarb at stanford.edu Coral: kosarb* **Nishi Group Project: Bio-FET on SOI.* * *?** * *3. Vanessa Sih vsih at stanford.edu Coral: vsih Vuckovic Group Project: Photonic Crystals in Si.* *?** * **5. Justin White whitejs at stanford.edu Coral: whitejs Brongersma Group Project: surface plasmon enhanced detectors. ** *6. **Xiao Zhang yngweiz at stanford.edu Coral: yngweiz * *Nishi Group Project: metal gates * **Observers:** *7. J. Brian Leen bleen at stanford.edu Coral: bleen Hesselink Group Project: C Apertures for optical confinement.* *8. Senyo Dogbe senyod at gmail.com Coral: sdogbe Chuck Shaper mxl... Project: Molecular Transfer Nanolithography* * * * * * * * * * * * * * * * * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From ifushman at stanford.edu Tue Apr 17 10:43:42 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Tue, 17 Apr 2007 10:43:42 -0700 Subject: taking the time slot on the raith Message-ID: -ilya -- Ilya Fushman Applied Physics Stanford University cvitae.org/ilya/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From anikak at stanford.edu Wed Apr 18 18:35:16 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Wed, 18 Apr 2007 18:35:16 -0700 Subject: Friday morning free 2:30am-9:30am Message-ID: <20070418183516.avdlry0158o4sww4@webmail.stanford.edu> Samples won't be ready... From koseki at stanford.edu Wed Apr 18 20:00:09 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Wed, 18 Apr 2007 20:00:09 -0700 Subject: Friday morning free 2:30am-9:30am References: <20070418183516.avdlry0158o4sww4@webmail.stanford.edu> Message-ID: <001101c7822e$d76b7a00$231b40ab@nausicaa> I'll take it ! Thanks. Shinichi ----- Original Message ----- From: "Anika Kinkhabwala" To: Sent: Wednesday, April 18, 2007 6:35 PM Subject: Friday morning free 2:30am-9:30am > Samples won't be ready... > From kdegreve at stanford.edu Fri Apr 20 01:34:51 2007 From: kdegreve at stanford.edu (kdegreve at stanford.edu) Date: Fri, 20 Apr 2007 01:34:51 -0700 Subject: raith free until 2.30 am In-Reply-To: References: Message-ID: <20070420013451.i59h1ywnhp5wsw8c@webmail.stanford.edu> ...finished early. Best regards, Kristiaan. From hideoiw at yahoo.co.jp Fri Apr 20 10:49:42 2007 From: hideoiw at yahoo.co.jp (=?ISO-2022-JP?B?GyRCNGRAJRsoQiAbJEI9KElXGyhC?=) Date: Sat, 21 Apr 2007 02:49:42 +0900 (JST) Subject: raith free from 6.30 am tomorrow In-Reply-To: <20070420013451.i59h1ywnhp5wsw8c@webmail.stanford.edu> Message-ID: <20070420174942.43377.qmail@web3711.mail.tnz.yahoo.co.jp> I have done what I scheduled. I cancelled this slot. Hideo -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Fri Apr 20 16:05:27 2007 From: mtang at snf.stanford.edu (Mary Tang) Date: Fri, 20 Apr 2007 16:05:27 -0700 Subject: Shutdown raith SNF 2007-04-20 13:03:52: failure of Image acquisition board on RAITH Message-ID: <46294737.5080609@snf.stanford.edu> /Subject:/ Re: Shutdown raith SNF 2007-04-20 13:03:52: failure of Image acquisition board on RAITH /From:/ jwc at snf.stanford.edu /Date:/ Fri, 20 Apr 2007 15:50:03 -0700 ------------------------------------------------------------------------ GREETINGS: I was unable to regain the Image acquisition board and it appears that an IC has burned or lost some functionality. Users will be unable to perform write field alignments. System may be usable for some users whom work and write within one write field. For those users whom must have suitbale WF:WF stitching you may try to use either your previous values or input into the align write field dialog box the values that we used last night. Please be sure to set your WD to the same WD we wrote at. Users should carefully inspect their patterns before proceding with pattern transfer. SYS. in yellow light mode for the weekend. James Conway From koseki at stanford.edu Fri Apr 20 16:36:16 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Fri, 20 Apr 2007 16:36:16 -0700 Subject: raith free from 6.30 pm - 11:30pm tonight References: <20070420174942.43377.qmail@web3711.mail.tnz.yahoo.co.jp> Message-ID: <002901c783a4$b0fe00a0$231b40ab@nausicaa> I need wide write field. Hope someone can use the slot. regards, Shinichi > /From:/ jwc at snf.stanford.edu > /Date:/ Fri, 20 Apr 2007 15:50:03 -0700 > ------------------------------------------------------------------------ > > GREETINGS: > I was unable to regain the Image acquisition board and it appears that an IC has burned > or lost some functionality. > Users will be unable to perform write field alignments. > System may be usable for some users whom work and write within one write field. For > those users whom must have suitbale WF:WF stitching you may try to use either your previous > values or input into the align write field dialog box the values that we used last night. > Please be sure to set your WD to the same WD we wrote at. > Users should carefully inspect their patterns before proceding with pattern transfer. > SYS. in yellow light mode for the weekend. > James Conway > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From ifushman at stanford.edu Fri Apr 20 17:14:02 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Fri, 20 Apr 2007 17:14:02 -0700 Subject: James' Write field setting are for the 30 micron aperture Message-ID: Hi All, James asked me to let people know that the settings he left on the board are for the 30 micron aperture. -ilya -- Ilya Fushman Applied Physics Stanford University cvitae.org/ilya/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From faraon at stanford.edu Fri Apr 20 21:53:12 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Fri, 20 Apr 2007 21:53:12 -0700 Subject: Raith Allign Write Field seems to work fine Message-ID: <28d3ece90704202153m476b6333k1c26a75b65005493@mail.gmail.com> I was on the tool this evening and the Allign Write Field procedure went smoothly. I think that the tool works fine now. Maybe there was some software problem. I did not develop my patterns to see if they came out fine. -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From faraon at stanford.edu Sun Apr 22 11:16:00 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Sun, 22 Apr 2007 11:16:00 -0700 Subject: Taking englund's reservation Message-ID: <28d3ece90704221116ic9fbd74wbc9964ebdcb201a4@mail.gmail.com> I will take the Raith time reserved by englund because he could not come to the cleanroom this morning. -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sanjah at stanford.edu Mon Apr 23 12:11:16 2007 From: sanjah at stanford.edu (sanjah at stanford.edu) Date: Mon, 23 Apr 2007 12:11:16 -0700 Subject: Raith free Wed 12:30-14:30 Message-ID: <20070423121116.zn5xcll0cukg480k@webmail.stanford.edu> Filip is going to use the first half of my reservation and I'll use his. Sanja :~) From fjaeckel at stanford.edu Mon Apr 23 18:47:07 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Mon, 23 Apr 2007 18:47:07 -0700 Subject: released Tue 8-12AM Message-ID: <20070423184707.tkkplbyvkruoksws@webmail.stanford.edu> sample won't be ready, sorry for the late notice -- Dr. rer. nat. Frank J?ckel mail address:? ?Department of Chemistry, M/C 5080 ? ? ? ? ? ? ? ? 333 Campus Drive ? ? ? ? ? ? ? ? mailbox #74 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 phone:? ? ? ? ? +1-650-724-4052/51 (office/lab) fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74) e-mail:? ? ? ? ?fjaeckel at stanford.edu internet:? ? ? ?http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Tue Apr 24 12:41:26 2007 From: bdai at stanford.edu (Bing Dai) Date: Tue, 24 Apr 2007 12:41:26 -0700 Subject: Session Released 4:30pm to 8:30pm Message-ID: <20070424124126.i15g88hd6y4oocw0@webmail.stanford.edu> Sample not ready. Thanks. From jwc at snf.stanford.edu Wed Apr 25 10:33:50 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 25 Apr 2007 10:33:50 -0700 Subject: Dose for 5% PMMA E-beam In-Reply-To: References: Message-ID: <462F90FE.7030902@snf.stanford.edu> Hello Arash and Ebeam and RAITH Users: On the HL-700 at 30 kV I have found 320 - 340 uC/cm**2 works well for patterns to 100 nm. Below that dimension you will have to increase your dose markedly. On the Raith at 10 kV just this week using 5% 950K PMMA - A, Raith Group XXVI has found 140 uC/cm**2 to be a bit too high and 120 uC/cm**2 just a bit too low for area features to ~ 100 nm. Single pixel lines are in the 360 - 420 uC/cm range. Note that currently their are two blends of 5% PMMA in anisole: Our normal 5% 495K MW PMMA - A and currently I am testing a batch of 5% 950K MW PMMA-A which is also in the Ebeam resist tub. Users are encouraged to report their dose determinations to the email lists to aid new users coming onto the system. You may also wish to review other user's doses reported in the RAITH operations log book. There is much information to be gleaned from this data. Best, James Conway Arash Hazeghi wrote: > Hello, > I am wondering if anyone has used 5% PMMA-A recently with good > results. I'd be happy to know what your dose was. last time I used the > system with .dos=340 my pattern was severely overexposed. > > Thanks, > Arash > > > > > > -------------------------------------------------------------------------- > > Arash Hazeghi > > > PhD Candidate > > Stanford Center for Integrated Systems, > > 420 Via Palou Mall, CIS-X 300 > > tel: 650-725-0418 > > mobile: 650-353-1866 > > http://www.stanford.edu/group/nanoelectronics/index.htm > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Apr 25 10:49:31 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 25 Apr 2007 10:49:31 -0700 Subject: Cancelling RAITH session Friday May 4, 10 - 2 PM for Dick Cranes Retirement Luncheon. Message-ID: <462F94AB.7080101@snf.stanford.edu> Greetings Raith Users: I have just released my Coral Raith reservation for 10 - 2 PM Friday May 4, 2007 so that I may attend Dick Crane's Retirement Luncheon and BBQ. The RAITH session is up for grabs on Coral!!!!! Best to you all through your day! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Sat Sunrise Pan.jpg Type: image/jpeg Size: 183427 bytes Desc: not available URL: From jwconway at stanford.edu Wed Apr 25 11:43:25 2007 From: jwconway at stanford.edu (jwconway at stanford.edu) Date: Wed, 25 Apr 2007 11:43:25 -0700 Subject: System is available through 14:30 hours for any user Message-ID: <20070425114325.ba5n18csq48wssgk@webmail.stanford.edu> Good Morning, No one is on the tool presently. System is available through 14:30 hours for any user... Come on down... James Conway From sukruekinkocabas at stanford.edu Sun Apr 29 11:02:47 2007 From: sukruekinkocabas at stanford.edu (S. Ekin Kocabas) Date: Sun, 29 Apr 2007 11:02:47 -0700 Subject: Monday April 30th, 14-19 Slot Empty Message-ID: <4634DDC7.3050802@stanford.edu> Monday April 30th, 14-19 Slot Empty Sub-ideal sample conditions... Ekin -------------- next part -------------- A non-text attachment was scrubbed... Name: smime.p7s Type: application/x-pkcs7-signature Size: 5218 bytes Desc: S/MIME Cryptographic Signature URL: From sanjah at stanford.edu Sun Apr 29 20:44:32 2007 From: sanjah at stanford.edu (sanjah at stanford.edu) Date: Sun, 29 Apr 2007 20:44:32 -0700 Subject: Raith available Message-ID: <20070429204432.ed1kfoseg8vwcwsg@webmail.stanford.edu> the user supposed to be using it hasn't showed up yet... Sanja :~) From sanjah at stanford.edu Sun Apr 29 21:27:49 2007 From: sanjah at stanford.edu (sanjah at stanford.edu) Date: Sun, 29 Apr 2007 21:27:49 -0700 Subject: Raith available In-Reply-To: <20070429204432.ed1kfoseg8vwcwsg@webmail.stanford.edu> References: <20070429204432.ed1kfoseg8vwcwsg@webmail.stanford.edu> Message-ID: <20070429212749.x1179xp3kdwccwo0@webmail.stanford.edu> Quoting sanjah at stanford.edu: > the user supposed to be using it hasn't showed up yet... > > Sanja :~) From sanjah at stanford.edu Sun Apr 29 21:27:49 2007 From: sanjah at stanford.edu (sanjah at stanford.edu) Date: Sun, 29 Apr 2007 21:27:49 -0700 Subject: Raith available In-Reply-To: <20070429204432.ed1kfoseg8vwcwsg@webmail.stanford.edu> References: <20070429204432.ed1kfoseg8vwcwsg@webmail.stanford.edu> Message-ID: <20070429212749.hvsm6ixrvk84ggck@webmail.stanford.edu> Quoting sanjah at stanford.edu: > the user supposed to be using it hasn't showed up yet... > > Sanja :~) From sanjah at stanford.edu Sun Apr 29 21:28:16 2007 From: sanjah at stanford.edu (sanjah at stanford.edu) Date: Sun, 29 Apr 2007 21:28:16 -0700 Subject: Raith available In-Reply-To: <20070429204432.ed1kfoseg8vwcwsg@webmail.stanford.edu> References: <20070429204432.ed1kfoseg8vwcwsg@webmail.stanford.edu> Message-ID: <20070429212816.devla61sruo00wow@webmail.stanford.edu> Thanks, I have started early. Yiyang Quoting sanjah at stanford.edu: > the user supposed to be using it hasn't showed up yet... > > Sanja :~) From fjaeckel at stanford.edu Mon Apr 30 08:58:10 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Mon, 30 Apr 2007 08:58:10 -0700 Subject: fjaeckel will use session but 20 min late Message-ID: <20070430085810.fl3wbexdflni8csk@webmail.stanford.edu> Going to be in 20 min later, but I will use the session. -- Dr. rer. nat. Frank J?ckel mail address:? ?Department of Chemistry, M/C 5080 ? ? ? ? ? ? ? ? 333 Campus Drive ? ? ? ? ? ? ? ? mailbox #74 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 phone:? ? ? ? ? +1-650-724-4052/51 (office/lab) fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74) e-mail:? ? ? ? ?fjaeckel at stanford.edu internet:? ? ? ?http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From sanjah at stanford.edu Mon Apr 30 14:59:21 2007 From: sanjah at stanford.edu (sanjah at stanford.edu) Date: Mon, 30 Apr 2007 14:59:21 -0700 Subject: Raith finished early - available for next user Message-ID: <20070430145921.22uyuiw24ab0o4gw@webmail.stanford.edu> From dinhthuc at hotmail.com Mon Apr 30 17:49:39 2007 From: dinhthuc at hotmail.com (danny T) Date: Mon, 30 Apr 2007 17:49:39 -0700 Subject: Raith will be available at 6pm today Message-ID: An HTML attachment was scrubbed... URL: