From anikak at stanford.edu  Wed Aug  1 10:25:05 2007
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Wed, 01 Aug 2007 10:25:05 -0700
Subject: 2:30-6pm free tomorrow
Message-ID: <20070801102505.h6oz2njlx39c4kco@webmail.stanford.edu>




From bdai at stanford.edu  Wed Aug  1 19:38:39 2007
From: bdai at stanford.edu (Bing Dai)
Date: Wed, 01 Aug 2007 19:38:39 -0700
Subject: Session released tomorrow 7:30pm to 12am
Message-ID: <20070801193839.6gcps48d3kis8c8c@webmail.stanford.edu>

Sample won't be ready.


-- 
Bing Dai
Applied Physics Department
CISX B103, 420 Via Palou,
Stanford, CA 94305
(650) 723 4566


From bdai at stanford.edu  Wed Aug  1 19:37:04 2007
From: bdai at stanford.edu (Bing Dai)
Date: Wed, 1 Aug 2007 19:37:04 -0700
Subject: Session released tomorrow 7:30pm to 12am
Message-ID: <000001c7d4ae$03187140$5ba70c80@stanford60c572>

Sample won't be ready.

Thanks,
Bing



From koseki at stanford.edu  Thu Aug  2 14:49:20 2007
From: koseki at stanford.edu (Shinichi Koseki)
Date: Thu, 02 Aug 2007 14:49:20 -0700
Subject: Raith available from 8pm - 12pm today
Message-ID: <20070802144920.92no2u66zhgkks8s@webmail.stanford.edu>

Dear Raith users,

I could make an early start of my session.
So, I will release part of my original reservation.
The machine is available from 8-12pm.

regards,

Shinichi
koseki at stanford.edu


From fjaeckel at stanford.edu  Fri Aug  3 18:30:52 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Fri, 03 Aug 2007 18:30:52 -0700
Subject: raith free now til 9PM
Message-ID: <20070803183052.95xfmtn4mh440ksc@webmail.stanford.edu>



   --
Dr. rer. nat. Frank J?ckel
mail address:? ?Department of Chemistry, M/C 5080
? ? ? ? ? ? ? ? 333 Campus Drive
? ? ? ? ? ? ? ? mailbox #74
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
phone:? ? ? ? ? +1-650-724-4052/51 (office/lab)
fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74)
e-mail:? ? ? ? ?fjaeckel at stanford.edu
internet:? ? ? ?http://www.stanford.edu/~fjaeckel/
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From faraon at stanford.edu  Sat Aug  4 20:41:00 2007
From: faraon at stanford.edu (Andrei Faraon)
Date: Sat, 4 Aug 2007 20:41:00 -0700
Subject: Raith free tonight
Message-ID: <28d3ece90708042041r761aedeet5bc57efc520bcb89@mail.gmail.com>

Ilya Fushman just called me that it is impossible for him to come to
SNF tonight and honor his Raith reservation. He does not have access
to a computer so he can not cancel his reservation.

-- 
Andrei Faraon

Stanford University, Applied Physics
316 Via Pueblo Mall
Stanford, CA, 94305
Mobile: 650 714 7881
Office: 650 723 2279


From vsih at stanford.edu  Sat Aug  4 21:16:56 2007
From: vsih at stanford.edu (Vanessa Sih)
Date: Sat, 4 Aug 2007 21:16:56 -0700
Subject: Raith free tonight
In-Reply-To: <28d3ece90708042041r761aedeet5bc57efc520bcb89@mail.gmail.com>
References: <28d3ece90708042041r761aedeet5bc57efc520bcb89@mail.gmail.com>
Message-ID: <354289b40708042116rcd04f5cn99cc7bec4f5e160c@mail.gmail.com>

Reservation tonight taken.

Thanks,

Vanessa

On 8/4/07, Andrei Faraon <faraon at stanford.edu> wrote:
>
> Ilya Fushman just called me that it is impossible for him to come to
> SNF tonight and honor his Raith reservation. He does not have access
> to a computer so he can not cancel his reservation.
>
> --
> Andrei Faraon
>
> Stanford University, Applied Physics
> 316 Via Pueblo Mall
> Stanford, CA, 94305
> Mobile: 650 714 7881
> Office: 650 723 2279
>
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From renshen at stanford.edu  Sun Aug  5 13:44:30 2007
From: renshen at stanford.edu (Shen Ren)
Date: Sun, 5 Aug 2007 13:44:30 -0700
Subject: Software frozen
Message-ID: <628a66910708051344ue5817b8md14cd1d1be98bb2e@mail.gmail.com>

Software has been completely frozen on the Raith computer when I came in.
Windows Error message was popped up. Just restarted software, seems to be
fine. Cannot save last user's positionlist. Sorry for this..

-- 
Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University
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From xinranw at stanford.edu  Sun Aug  5 23:44:55 2007
From: xinranw at stanford.edu (Xinran Wang)
Date: Sun, 5 Aug 2007 23:44:55 -0700
Subject: raith free Tue 10am
Message-ID: <22ffcd060708052344y3863ab40ia4654a56dbe1fd0c@mail.gmail.com>

Sample wont' be ready.

Xinran
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From jwc at snf.stanford.edu  Mon Aug  6 11:15:44 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 06 Aug 2007 11:15:44 -0700
Subject: Comment raith SNF 2007-08-04 12:30:59: image shift 
Message-ID: <46B76550.5060102@snf.stanford.edu>

Hello Raith Users,

This is normally a problem when the L-REM module on the SEM side of the 
platform either becomes revoked by the application, or  often simply 
losses its default settings for control between the Electron Optics Card 
and the scanning functions to the LCD.  We only see this rarely.  If 
users see this problem please 'make a comment' to Coral.
It can be resolved by gracefully logging out on the SEM computer from 
the application and then from the Windows OS and then [ SHUT DOWN ] the 
computer and turn it back on. then log back on to the OS and the Column 
Control application.

The RAITH computer and Raith150.exe application does not have to be shut 
down and restarted.  But do ensure that REMCOM is back up and with 
communiation ports open once you start your operations again.

I will add this to a list of FAQ that will be coming out soon.

Best,

James Conway


xinranw at snf.stanford.edu wrote:
> I found the SEM shifts quite a lot when I changed the magnification. Asked by James to shut down the LEO computer and restart it (to reload the modules), and solved the problem. 
>
>   
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From faraon at stanford.edu  Mon Aug  6 11:28:08 2007
From: faraon at stanford.edu (Andrei Faraon)
Date: Mon, 6 Aug 2007 11:28:08 -0700
Subject: Raith free tomorrow 11pm to Wed 7am
Message-ID: <28d3ece90708061128q25b82ee6p4bea84451c963e0e@mail.gmail.com>

-- 
Andrei Faraon

Stanford University, Applied Physics
316 Via Pueblo Mall
Stanford, CA, 94305
Mobile: 650 714 7881
Office: 650 723 2279
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From jwc at snf.stanford.edu  Mon Aug  6 11:51:45 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 06 Aug 2007 11:51:45 -0700
Subject: Reminder of scheduled down time on RAITH 150 for Maintenance  on
 Wednesday August 8, 2007 and most prime time periods through Friday early
 afternoon. 
Message-ID: <46B76DC1.6040504@snf.stanford.edu>

*Greetings Raith Users *

We will be taking the RAITH system off line mid-week this week for 
periodic maintenance to:

   1. The water chiller cooling loop for the E/O Card and Electrostatic
      Lens, replacing the loaner NESLAB chiller with our repaired unit
      after normal maintenance.
   2. Inspecting and Cleaning the mounts and checking the Laser
      Interferometer Stage functionality and Piezo Leveling Post height
      and an inspection for wear.
   3. We will install and test a new Universal Sample Holder (USH) which
      has adjustable kinetic mounts to resolve issues we have recently
      experienced with the Standard Sample Holder.
      My measurements have determined that the sample holder we have is
      rapidly wearing out and we are seeking permanent solution to give
      us a level stage to mount our samples on for Ebeam exposures.
   4. With Mirwais Aktary from RAITH USA Inc., we will also be reviewing
      all the standard settings on the system, perform stitching and
      overlay test, and finally checking settings on many of the Manual
      and Automatic Write Field alignment functions for everyone.

*The RAITH system will go off line for Users starting at 10 AM WEDNESDAY 
AUGUST 8, 2007. It will come back on line for Users Friday about 2:00 PM:*

    We desire to minimize the impact of this down time so we hope to
    make the system available to Users overnight Wednesday after
    completing the cooling loop repairs.
    RAITH Field service and I will resume our work 10 AM Thursday
    morning  handling back the system to Users at approximately 7:00 PM
    and continuing with the schedule on Coral.
    Lastly I plan to perform the PCM and Qualification run on Friday
    Morning AUGUST 10, 2007 and hand the system back to Users when that
    exposure completes at ~ 2:00 PM.
    Users will need to be flexible with their session Start times and
    strive work cooperatively with everyone throughout this period. 
    Their are many opportunities for Users to 'Share the Ride'
    throughout this period.  See me if you have pressing deadlines for
    your work.

Thank you for your Support!

James Conway



pcm test    


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From anikak at stanford.edu  Tue Aug  7 10:42:39 2007
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Tue, 07 Aug 2007 10:42:39 -0700
Subject: Thursday 7p-10:30p released
Message-ID: <20070807104239.1ywha6bdsrb4www0@webmail.stanford.edu>




From fjaeckel at stanford.edu  Wed Aug  8 08:59:40 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Wed, 08 Aug 2007 08:59:40 -0700
Subject: finished early
Message-ID: <20070808085940.6in45h5eity8gokg@webmail.stanford.edu>



   --
Dr. rer. nat. Frank J?ckel
mail address:? ?Department of Chemistry, M/C 5080
? ? ? ? ? ? ? ? 333 Campus Drive
? ? ? ? ? ? ? ? mailbox #74
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
phone:? ? ? ? ? +1-650-724-4052/51 (office/lab)
fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74)
e-mail:? ? ? ? ?fjaeckel at stanford.edu
internet:? ? ? ?http://www.stanford.edu/~fjaeckel/
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From chandran at stanford.edu  Wed Aug  8 10:34:30 2007
From: chandran at stanford.edu (Anu Chandran)
Date: Wed, 8 Aug 2007 10:34:30 -0700
Subject: Cancelled reservation 7-10pm tomorrow
Message-ID: <ecc0293e0708081034ib05fcc4ydb372691de721733@mail.gmail.com>

Sorry for the late notice

-- 
Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851
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From rohank at stanford.edu  Wed Aug  8 18:03:50 2007
From: rohank at stanford.edu (Rohan D Kekatpure)
Date: Wed, 08 Aug 2007 18:03:50 -0700
Subject: raith free 9:00am-1:00p Thursday
Message-ID: <46BA67F6.3000707@stanford.edu>

Samples not ready.
apologies for the late notice
--rohan


From jwc at snf.stanford.edu  Wed Aug  8 19:05:16 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 08 Aug 2007 19:05:16 -0700
Subject: Raith is off line to users overnight...
Message-ID: <46BA765C.1030307@snf.stanford.edu>

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From mkoto at stanford.edu  Thu Aug  9 18:29:27 2007
From: mkoto at stanford.edu (mkoto at stanford.edu)
Date: Thu, 09 Aug 2007 18:29:27 -0700
Subject: Raith free 7:00-10:00am Friday
In-Reply-To: <46BA67F6.3000707@stanford.edu>
References: <46BA67F6.3000707@stanford.edu>
Message-ID: <20070809182927.1hhyt2hshqo8ksok@webmail.stanford.edu>

--- Sorry for the late notice

Makoto

***************************************************
    Makoto Koto            Visiting Scholar
  476 Lomita Mall  244 McCullough Building
  Stanford, CA 94305-4045
***************************************************


From jwc at snf.stanford.edu  Thu Aug  9 19:52:18 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 09 Aug 2007 19:52:18 -0700
Subject: Stanford Raith system is up for Users  --- **** README: Special Cautions
 using the Universal Sample Holder. ****
Message-ID: <46BBD2E2.7050700@snf.stanford.edu>

*Greetings Raith Users,*

I am relieved to report the planned repairs have been completed on schedule:

    * Neslab chiller was replaced with the old rebuilt unit.  Flow
      through the system cooling  is 2 liters per minute (.4 gpm)
    * The new Universal Sample Holder (USH) on loan from RAITH USA has
      been tested and the pallet is level to within 1 to 2 um across a
      90 mm axis in U and V.

*READ ME:

*
*Special Cautions prescribed for use of the Universal Sample Holder:*
*
*
The surface of this sample holder has a excellent surface finish and 
will allow precision placement and leveling of the USH to yield the 
optimal focus plane conditions for your EBL Writes.

ALL USERS SHOULD MOUNT THEIR SAMPLES AND HANDLE THIS ACCESSORY WITH 
GREAT CARE SO AS TO NOT SCRATCH OR DEFORM THE SURFACE.  ONLY TEFLON 
COATED SS OR PLASTIC TWEEZERS ARE TO BE USED WHEN LOADING SAMPLES. ALL 
SAMPLES ARE TO BE PLACED CAREFULLY DOWN ONTO THE USH AND WITHOUT SLIDING 
WAFERS, AND ESPECIALLY SMALLER CHIPS AND IRREGULAR SAMPLES, ACROSS THE 
USH'S SURFACE. PLEASE MAKE EVERY EFFORT POSSIBLE TO NOT SCRATCH THIS 
FIXTURE.

The older standard sample holder is on top of the system if you wish to 
use it for your writes if you cannot load onto the USH or do not wish to 
risk scratching it.

Several Qualification exposure  were completed on 300 nm 5% 950K PMMA 
and I will be performing a full PCM Qualification  on 100 nm resist 
tomorrow morning during the 10 AM - 2 PM session.  Todays exposure 
result passed qualification. Users desiring project or application 
support, or seeking further fine tuning or training, are welcome to join 
me and 'Share the Ride' during this session.

Thank you for your interest in Ebeam Technologies here at the SNF!

Good Evening,

James Conway
:-)


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From filip at stanford.edu  Fri Aug 10 12:17:22 2007
From: filip at stanford.edu (Filip Crnogorac)
Date: Fri, 10 Aug 2007 12:17:22 -0700
Subject: raith free 2-6pm
Message-ID: <20070810121722.y7ngmp1tprcokkkk@webmail.stanford.edu>

sample not ready (resist issues).
Apologies for late notice.
Filip





From panjun at stanford.edu  Fri Aug 10 16:24:26 2007
From: panjun at stanford.edu (Jun Pan)
Date: Fri, 10 Aug 2007 16:24:26 -0700
Subject: raith free 2-6pm
In-Reply-To: <20070810121722.y7ngmp1tprcokkkk@webmail.stanford.edu>
References: <20070810121722.y7ngmp1tprcokkkk@webmail.stanford.edu>
Message-ID: <00d001c7dba5$98209f30$bf2342ab@PAN>

Start my session from now.

-----Original Message-----
From: Filip Crnogorac [mailto:filip at stanford.edu] 
Sent: Friday, August 10, 2007 12:17 PM
To: raith at snf.stanford.edu
Subject: raith free 2-6pm

sample not ready (resist issues).
Apologies for late notice.
Filip






From ycjun at stanford.edu  Sat Aug 11 14:33:05 2007
From: ycjun at stanford.edu (Young Chul Jun)
Date: Sat, 11 Aug 2007 14:33:05 -0700
Subject: reservation released on Monday (1pm~)
Message-ID: <20070811143305.sej75qkckslwos84@webmail.stanford.edu>

Sample won't be ready by that time. Sorry for that..

- Y.C.



From anikak at stanford.edu  Sun Aug 12 12:50:04 2007
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Sun, 12 Aug 2007 12:50:04 -0700
Subject: tomorrow morning 3a-10a free
Message-ID: <20070812125004.gbhns2sxe6ko404o@webmail.stanford.edu>

Sorry for the late notice!


From xinranw at stanford.edu  Sun Aug 12 21:34:54 2007
From: xinranw at stanford.edu (Xinran Wang)
Date: Sun, 12 Aug 2007 21:34:54 -0700
Subject: raith free tomorrow 18:00
Message-ID: <22ffcd060708122134j109a4234x5236db5b5ba8418@mail.gmail.com>

Sample won't be ready, sorry for late notice.

Xinran
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From panjun at stanford.edu  Mon Aug 13 17:11:09 2007
From: panjun at stanford.edu (Jun Pan)
Date: Mon, 13 Aug 2007 17:11:09 -0700
Subject: Raith free Tuesday 10am
Message-ID: <005101c7de07$a08d9880$983242ab@PAN>

Sample cann't be ready.

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From jwc at snf.stanford.edu  Tue Aug 14 09:39:16 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 14 Aug 2007 09:39:16 -0700
Subject: Reminder TODAY: RAITH Group XXVIII  -- Intensive 4 day short course.
 August 14 - 17, 2007  TUESDAY - FRIDAY 10 AM - 6 PM  CIS 201
Message-ID: <46C1DAB4.2030509@snf.stanford.edu>

*Greetings RAITH Group XXVIII:

**
If you are listed in the To: section of this email you are confirmed to 
be in RAITH Group** XXVIII -- the RAITH** Four Day Basic Users Short Course.
Any RAITH user wishing to attend are also welcome if you desire a review 
of operations on the RAITH 150 system.
**
We wish to invite all interested parties to the Tuesday morning lecture 
session and demo layer one training following at 2 PM - 6 PM in the 
afternoon.
All are also welcome to attend as observers the other 'hands-on' 
sessions through the week.
*
*If you are listed in the To: section of this email:
*This is your final reminder and confirmation of your commitment for 
attending the RAITH Group XXVIII Training course to be held August 14 - 
17, 2007.
_*You are expected to attend all sessions in order to gain the 
experience and skills you will need to qualify on the RAITH 150 system.*

_Users are also encouraged to attend the *"Take a Spin with Me"* class 
covering Ebeam Resist handling procedures. 
<http://snf.stanford.edu/cgi-bin/ezmlm-cgi?2140:mss:536:200707:agkhofnoffhagokidiam>
Next class is to be scheduled in the week after your RAITH Class. There 
is a separate sign up for this class on the white board in my office at 
CIS 31.

Thank you for your interest in Electron Beam Technologies at the 
Stanford Nanofabrication Facility,

James Conway
Ebeam Technology Group
650-725-7075
---------------------------------

*   **RAITH Group** XXVI** Schedule: **   *

*Raith 150 Basic Users Training ? Intensive 4 Day Short Course*

*August 14 - 17, 2007 from 10 - 6 PM Tuesday through Friday.*

*The Plan of Action:
*We will start out with a half day of lecture in the morning Tuesday; 
quickly moving into entirely 'hands on' operations training through the 
remainder of the week.
We will break for lunch at various times, while the system is writing, 
so plan to be flexible with your other outside commitments.  You should 
have started working on your GDS II patterns and preparing PMMA on your 
substrates if you wish to write on your material. Please bring your 
patterns and materials to the 'Hands-On' sessions. Some afternoons we 
may also be able to finish earlier,  letting the system write on its own 
to the end of our reservations on the system.*
*

* Schedule:*
Tuesday August 14, 2007:
10:00 - 12:30   Session 1:  Basic Users Course Lecture  -- CIS-X 201
14:00 - 17:00  Session 2:  RAITH System Demonstration - Layer One -- 
EBEAM LAB CIS L104

Wednesday August 15, 2007:
10:00 - 12:30 Session 3:  RAITH System Demonstration - Layer Two: 
OVERLAY -- EBEAM LAB CIS L104
14:00 - 18:00 Session 4:  Hands On training session One -- EBEAM LAB CIS 
L104

Thursday August 16, 2007:
10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104
14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB 
CIS L104

Friday August 17, 2007:
10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS 
L104
14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS 
L104

Individual Qualification Sessions will be held after this class where 
you can demonstrate your skill on the system to me and gain your login 
to the system.


I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU 
HAVE NOT ALREADY RECEIVED ONE YET.
You can stop by my office hour and pick up a copy of these training 
materials during my daily office hour. (8:30 - 9:30 AM CIS 31) Just 
bring along a USB drive!

-------------------------------------------------------------------------------------------------------------------------------------------

RAITH Group XXVIII -- Date August 14 - 17, 2007
BASIC USER INTENSIVE FOUR DAY SHORT COURSE

 

1. Shulu Chen ?Erik? shuluc at stanford.edu <mailto:shuluc at stanford.edu> 
Coral:  shuluc Phone: 650-704-9284 cell

Plummer Group Project: 3D IC material recrystallization for devices.

?  

2. Mitsuru Toishi mitsuru1 at stanford.edu <mailto:mitsuru1 at stanford.edu> 
Coral: Sony-Toishi Phone: 650-862-7696

Vuckovic Group Project: Photonic Crystals with Quantum Dots single 
photonic emitter.

?

3.  Sangwon Lee   sangwon at stanford.edu <mailto:sangwon at stanford.edu> 
Coral: sangwon Phone: 650-804-4085

Dai Group Project:  CNT on Graphene substrates.

Working with Xinran Wang on his sessions.

 

4. Xuhui Sun sunxuhui at gmail.com <mailto:sunxuhui at gmail.com> Coral: 
Jeffsun Phone: 408-529-9206

Santa Clara University, Cary Yang, Project:  Carbon nanotube development 
? devices.

 








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From anikak at stanford.edu  Wed Aug 15 19:33:03 2007
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Wed, 15 Aug 2007 19:33:03 -0700
Subject: Will finish early on Raith
Message-ID: <20070815193303.a2v47v1shgn4sgk0@webmail.stanford.edu>

I'll most likely finish up around 8:30p (in about an hour)




From chandran at stanford.edu  Thu Aug 16 13:24:31 2007
From: chandran at stanford.edu (Anu Chandran)
Date: Thu, 16 Aug 2007 13:24:31 -0700
Subject: canceled slot tomorrow (15:30-20:00)
Message-ID: <ecc0293e0708161324n4b281b16l1a5024545d8d220b@mail.gmail.com>

sorry for the late notice.
sample not ready.


-- 
Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851
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From fjaeckel at stanford.edu  Fri Aug 17 19:36:40 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Fri, 17 Aug 2007 19:36:40 -0700
Subject: raith free
Message-ID: <20070817193640.5rfff7jqnk4go8gs@webmail.stanford.edu>



   semiautomatic alignment mark scan leads to repeated raith software crashes

   --
Dr. rer. nat. Frank J?ckel
mail address:? ?Department of Chemistry, M/C 5080
? ? ? ? ? ? ? ? 333 Campus Drive
? ? ? ? ? ? ? ? mailbox #74
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
phone:? ? ? ? ? +1-650-724-4052/51 (office/lab)
fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74)
e-mail:? ? ? ? ?fjaeckel at stanford.edu
internet:? ? ? ?http://www.stanford.edu/~fjaeckel/
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From ifushman at stanford.edu  Sat Aug 18 17:57:09 2007
From: ifushman at stanford.edu (Ilya Fushman)
Date: Sat, 18 Aug 2007 17:57:09 -0700
Subject: cannot make it to raith tonight
Message-ID: <bf3d86240708181757j64a4c853i29626051d85c248a@mail.gmail.com>

sorry. freed reservation.
-ilya

-- 
Ilya Fushman
Applied Physics
Stanford University
cvitae.org/ilya/
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From jwc at snf.stanford.edu  Mon Aug 20 11:23:34 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 20 Aug 2007 11:23:34 -0700
Subject: [Fwd: raith free]
Message-ID: <46C9DC26.5010206@snf.stanford.edu>

Good Morning,

If other Users are seeing similar problems on their logins please let me 
know.
This afternoon I will examine the file system and memory on the computer 
before I perform  a total backup of the system.

Thank you,


James Conway


-------- Original Message --------
Subject: 	raith free
Date: 	Fri, 17 Aug 2007 19:36:40 -0700
From: 	Frank Jaeckel <fjaeckel at stanford.edu>
To: 	Raith SNF Mailing list <raith at snf.stanford.edu>



semiautomatic alignment mark scan leads to repeated raith software crashes

-- 
Dr. rer. nat. Frank J?ckel
mail address:   Department of Chemistry, M/C 5080
                333 Campus Drive
                mailbox #74
                Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
                Stanford University, Stanford, CA 94305-5080
phone:          +1-650-724-4052/51 (office/lab)
fax:            +1-650-725-0259    (indicate mailbox #74)
e-mail:         fjaeckel at stanford.edu
internet:       http://www.stanford.edu/~fjaeckel/ 
<http://www.stanford.edu/%7Efjaeckel/>

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From xinranw at stanford.edu  Mon Aug 20 11:41:50 2007
From: xinranw at stanford.edu (Xinran Wang)
Date: Mon, 20 Aug 2007 11:41:50 -0700
Subject: raith free on Friday 10:30
Message-ID: <22ffcd060708201141o4f9e9dc1x31dcb9daf3ce6b34@mail.gmail.com>

I cancelled my reservation because I won't be on campus on friday.

Xinran
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From jwc at snf.stanford.edu  Mon Aug 20 12:16:55 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 20 Aug 2007 12:16:55 -0700
Subject: ANNOUNCEMENT:  "Take A Spin with Me" -- Ebeam Resist Handling Training
 on the Headway.  Wednesday AUGUST 22, 10:00  - 13:00
Message-ID: <46C9E8A7.2090108@snf.stanford.edu>

*
*
*    *
*ANNOUNCEMENT:  "Take A Spin with Me" --  Resist Handling Training on 
the Headway Coater.*

Greetings Ebeam Lab Users,

I will be conducting my bi-monthly *"Take A Spin with Me" *training 
class Wednesday AUGUST 22  from 10 AM  - 1 PM. There is a sign up sheet 
posted on the white board in my office if you desire to sign up in advance.

This is a great opportunity for you to get acquainted with the specific 
points to employ when working with our Ebeam  and Optical Resist 
materials in order to obtain high quality thin film coatings over your 
wafers for Electron Beam, Scanning Probe (SPL), and Optical 
Nano-Lithography. These applications need accurate control of polymer 
thickness  in order to obtain consistent high quality lithography results.

We will be conducting this training on the Headway2 Spin Coater and 
users attending this session will gain their qualification on this tool 
and also learn to perform thin film measurements on the Nanospec TFA 
measurement tool.
This is a working lab and you are expected to have your substrates ready 
to spin for this session.

Schedule of Events:

10 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL 
performing Pirhana substrate cleans and HF etching of the intrinsic 
native oxide on Silicon wafers.  All users are encouraged to have their 
substrates cleaned and ready to go for spinning by the session time; 
either coming out of the 150 degree Singe oven, or if you are working on 
oxides or nitrides, coming out of the YES HMDS Prime oven directly.

11:00 - 12:30 We can apply what ever Ebeam or Optical Resist system you 
desire for your work.

12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer

All interested parties are welcome to attend this session.
This is a Hands-On Lab Session  so please have your engineering 
materials and substrates clean and ready to coat on the Headway Spin 
Coater.  Please also review the Ebeam Resist Handling Procedures to 
familiarize yourself with this bench.

Thank you for your interest in Ebeam Technologies here at Stanford 
Nanofabrication Facility,

James W. Conway
Ebeam Technology Group
Stanford Nanofabrication Facility
650-725-7075  office hour M-F 8:30 - 9:30 AM CIS 31

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From koseki at stanford.edu  Mon Aug 20 18:59:25 2007
From: koseki at stanford.edu (Shinichi Koseki)
Date: Mon, 20 Aug 2007 18:59:25 -0700
Subject: Raith free Wed 0am-
Message-ID: <000701c7e396$e6831ba0$231b40ab@nausicaa>

Sorry, but the sample won't be available.

cheers,

Shinichi


From fjaeckel at stanford.edu  Tue Aug 21 09:23:17 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Tue, 21 Aug 2007 09:23:17 -0700
Subject: raith free, samples are charging
Message-ID: <20070821092317.woxj56gl0e9wgkwk@webmail.stanford.edu>



   --
Dr. rer. nat. Frank J?ckel
mail address:? ?Department of Chemistry, M/C 5080
? ? ? ? ? ? ? ? 333 Campus Drive
? ? ? ? ? ? ? ? mailbox #74
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
phone:? ? ? ? ? +1-650-724-4052/51 (office/lab)
fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74)
e-mail:? ? ? ? ?fjaeckel at stanford.edu
internet:? ? ? ?http://www.stanford.edu/~fjaeckel/[1]

Links:
------
[1] http://www.stanford.edu/~fjaeckel/

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From jwc at snf.stanford.edu  Wed Aug 22 09:54:44 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 22 Aug 2007 09:54:44 -0700
Subject: Moving my session to 2 - 6 PM today WED 8-22-07
Message-ID: <46CC6A54.2010406@snf.stanford.edu>

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From fjaeckel at stanford.edu  Wed Aug 22 19:55:18 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Wed, 22 Aug 2007 19:55:18 -0700
Subject: will finish early raith free from 20.15
Message-ID: <20070822195518.yfak4w2s7ym80s0k@webmail.stanford.edu>



   --
Dr. rer. nat. Frank J?ckel
mail address:? ?Department of Chemistry, M/C 5080
? ? ? ? ? ? ? ? 333 Campus Drive
? ? ? ? ? ? ? ? mailbox #74
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080
phone:? ? ? ? ? +1-650-724-4052/51 (office/lab)
fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74)
e-mail:? ? ? ? ?fjaeckel at stanford.edu
internet:? ? ? ?http://www.stanford.edu/~fjaeckel/[1]

Links:
------
[1] http://www.stanford.edu/~fjaeckel/

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From koseki at stanford.edu  Sat Aug 25 15:32:29 2007
From: koseki at stanford.edu (Shinichi Koseki)
Date: Sat, 25 Aug 2007 15:32:29 -0700
Subject: Raith water flow failure and load lock error
Message-ID: <20070825153229.zcrz8r0nn1go4csg@webmail.stanford.edu>

Dear Raith users,

Now I tried to start my session, and I got the load lock error.
I pushed down the lid of the load lock. But before the turbo pump
started, there came a pop up window saying "The vacuum in the stage
chamber is not ready." I clicked "retry", but it did not help.
I also pushed a button on the turbo control.

At 12:00 today, there seems to be a water flow error. (error 593
on LEO), althogh it resumed after one hour. (warning 594)

Does anyone know how I can recover the situation, and unload
the previous user's (yiyang) sample ?

Thanks for your help !

Shinichi
cell: 650-714-2105
koseki at stanford.edu



From koseki at stanford.edu  Sat Aug 25 15:41:52 2007
From: koseki at stanford.edu (Shinichi Koseki)
Date: Sat, 25 Aug 2007 15:41:52 -0700
Subject: [Recovered !] Raith water flow failure and load lock error
In-Reply-To: <20070825153229.zcrz8r0nn1go4csg@webmail.stanford.edu>
References: <20070825153229.zcrz8r0nn1go4csg@webmail.stanford.edu>
Message-ID: <20070825154152.10un6t8o1mxw44og@webmail.stanford.edu>

Eear Raith users,

Now the turbo pump started after I click "retry"
on the load lock error window.
It seems that the normal unloading procedure is progressing.
Everything seems to be fine.

regards,

Shinichi


Quoting Shinichi Koseki <koseki at stanford.edu>:

> Dear Raith users,
>
> Now I tried to start my session, and I got the load lock error.
> I pushed down the lid of the load lock. But before the turbo pump
> started, there came a pop up window saying "The vacuum in the stage
> chamber is not ready." I clicked "retry", but it did not help.
> I also pushed a button on the turbo control.
>
> At 12:00 today, there seems to be a water flow error. (error 593
> on LEO), althogh it resumed after one hour. (warning 594)
>
> Does anyone know how I can recover the situation, and unload
> the previous user's (yiyang) sample ?
>
> Thanks for your help !
>
> Shinichi
> cell: 650-714-2105
> koseki at stanford.edu




From koseki at stanford.edu  Sat Aug 25 16:54:05 2007
From: koseki at stanford.edu (Shinichi Koseki)
Date: Sat, 25 Aug 2007 16:54:05 -0700
Subject: no TV/Inlens image shown
In-Reply-To: <20070825153229.zcrz8r0nn1go4csg@webmail.stanford.edu>
References: <20070825153229.zcrz8r0nn1go4csg@webmail.stanford.edu>
Message-ID: <20070825165405.y32kak8rbvxs88k8@webmail.stanford.edu>

Dear Raith users,

Sorry I have another problem.
I cannot see anything as the TV and Inlense image,
so the machine is not in the usable condition.

I rebooted both the computers, but the situation does
not change. When I started the LEO software, the log says
"L-REM is not responding". Is it related to this situation ?

Again, I need help if you know how I can recover.
Please call me 650-714-2105
I give up the rest of my session today (~8pm).

Sorry for making a trouble. Hope someone can help me.

Thanks,

Shinichi
cell: 650-714-2105
koseki at stanford.edu




Quoting Shinichi Koseki <koseki at stanford.edu>:

> Dear Raith users,
>
> Now I tried to start my session, and I got the load lock error.
> I pushed down the lid of the load lock. But before the turbo pump
> started, there came a pop up window saying "The vacuum in the stage
> chamber is not ready." I clicked "retry", but it did not help.
> I also pushed a button on the turbo control.
>
> At 12:00 today, there seems to be a water flow error. (error 593
> on LEO), althogh it resumed after one hour. (warning 594)
>
> Does anyone know how I can recover the situation, and unload
> the previous user's (yiyang) sample ?
>
> Thanks for your help !
>
> Shinichi
> cell: 650-714-2105
> koseki at stanford.edu




From mpovinel at stanford.edu  Sun Aug 26 17:19:20 2007
From: mpovinel at stanford.edu (mpovinel at stanford.edu)
Date: Sun, 26 Aug 2007 17:19:20 -0700
Subject: Raith status
In-Reply-To: <20070825154152.10un6t8o1mxw44og@webmail.stanford.edu>
References: <20070825153229.zcrz8r0nn1go4csg@webmail.stanford.edu>
	<20070825154152.10un6t8o1mxw44og@webmail.stanford.edu>
Message-ID: <20070826171920.lt43tm3gfq05cww8@webmail.stanford.edu>

I shut down and restarted the Leo and Raith computers and now the  
videoscope is working fine.

However, I got a vacuum pump error and was unable to load the sample.

When I chose "Load Sample," a dialog box immediately popped up saying  
"The vacuum in the stage chamber is not ready. Please start pumping  
and, if ready, press RETRY." Pushing retry gives the same error.

Michelle

Quoting Shinichi Koseki <koseki at stanford.edu>:

> Eear Raith users,
>
> Now the turbo pump started after I click "retry"
> on the load lock error window.
> It seems that the normal unloading procedure is progressing.
> Everything seems to be fine.
>
> regards,
>
> Shinichi
>
>
> Quoting Shinichi Koseki <koseki at stanford.edu>:
>
>> Dear Raith users,
>>
>> Now I tried to start my session, and I got the load lock error.
>> I pushed down the lid of the load lock. But before the turbo pump
>> started, there came a pop up window saying "The vacuum in the stage
>> chamber is not ready." I clicked "retry", but it did not help.
>> I also pushed a button on the turbo control.
>>
>> At 12:00 today, there seems to be a water flow error. (error 593
>> on LEO), althogh it resumed after one hour. (warning 594)
>>
>> Does anyone know how I can recover the situation, and unload
>> the previous user's (yiyang) sample ?
>>
>> Thanks for your help !
>>
>> Shinichi
>> cell: 650-714-2105
>> koseki at stanford.edu




From xinranw at stanford.edu  Sun Aug 26 21:51:08 2007
From: xinranw at stanford.edu (Xinran Wang)
Date: Sun, 26 Aug 2007 21:51:08 -0700
Subject: released tomorrow 15:00
Message-ID: <22ffcd060708262151n958ea08nd925a463daf8dcba@mail.gmail.com>

Sample won't be ready. Sorry for late notice.

Xinran
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From dkozak at ucsc.edu  Mon Aug 27 18:29:53 2007
From: dkozak at ucsc.edu (Dmitry Alexander Kozak)
Date: Mon, 27 Aug 2007 18:29:53 -0700
Subject: cancelled res. Wed 2-7 AM
Message-ID: <web-57878416@tin.ucsc.edu>

Sorry, have to cancel my reservation Wed 2-7 Am
Sample won't be ready.


Dmitry


From koseki at stanford.edu  Mon Aug 27 18:40:41 2007
From: koseki at stanford.edu (Shinichi Koseki)
Date: Mon, 27 Aug 2007 18:40:41 -0700
Subject: cancelled res. Wed 2-7 AM
References: <web-57878416@tin.ucsc.edu>
Message-ID: <000601c7e914$71b1bd80$231b40ab@nausicaa>

I'll take it ! Thanks.

Shinichi

----- Original Message ----- 
From: "Dmitry Alexander Kozak" <dkozak at ucsc.edu>
To: <raith at snf.stanford.edu>
Sent: Monday, August 27, 2007 6:29 PM
Subject: cancelled res. Wed 2-7 AM


> Sorry, have to cancel my reservation Wed 2-7 Am
> Sample won't be ready.
> 
> 
> Dmitry
>


From zhangdw at stanford.edu  Mon Aug 27 19:10:05 2007
From: zhangdw at stanford.edu (Dawei)
Date: Mon, 27 Aug 2007 19:10:05 -0700
Subject: reseavation cancelled on Tues from 9:30-11:30AM
Message-ID: <000001c7e918$8d0aa340$698f0c80@zhangdw>

Sorry for the late notice.

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From jwc at snf.stanford.edu  Tue Aug 28 10:43:24 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 28 Aug 2007 10:43:24 -0700
Subject: Problem raith SNF 2007-08-25 16:48:05: No TV / Inlens image and
 how to recover...
Message-ID: <46D45EBC.5080908@snf.stanford.edu>

Greetings Raith Users:

We have seen this issue surface several times through the course of the 
last week and rarely in the past.

This is normally a result of the L-REM SEM control module on the SEM 
computer not registering with the LEO server upon user login and 
application launch.

To recover from this issue you should gracefully exit the application 
and shut down the Windows 2000 OS, allow ten seconds after the SEM 
computer screens turns black, and then press the front panel power 
button to power up the SEM PC.  The RAITH PC  and the RAITH150.exe 
application DO NOT have to be shut down or exited.  But be sure that REM 
CON on the SEM computer has its communication channel open to allow 
communications between the computers. 

If this does not repair the problems please contact James Conway. You 
can also refer to FAQ No. 3: How to Reinstall Detectors to the LEO 
Configuration File" listed in the beginning of the RAITH 150 Notebook 
No. Three.  You will need to obtain a password to access this 
configuration page.

I am continuing to evaluate this problem closely to determine the root 
cause of this intermittent problem.  Users are requested to call me 
immediately if this occurs during your day time RAITH session.

Thank you,

James Conway



koseki at snf.stanford.edu wrote:
> No TV / Inlens image are obtained. The starting up log of the LEO-SRV says "L-REM is not responding".
>
>   
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From zhangy at stanford.edu  Tue Aug 28 14:38:47 2007
From: zhangy at stanford.edu (Yuan Zhang)
Date: Tue, 28 Aug 2007 14:38:47 -0700
Subject: Raith free 6-11pm today
Message-ID: <20070828143847.qa0lsnkxtndws00s@webmail.stanford.edu>

Samples won't be ready. Sorry for the late notice.

-Yuan

Yuan Zhang
EE department



From xinranw at stanford.edu  Tue Aug 28 22:55:20 2007
From: xinranw at stanford.edu (Xinran Wang)
Date: Tue, 28 Aug 2007 22:55:20 -0700
Subject: raith reservation
Message-ID: <22ffcd060708282255k7935c2b6l446b3d2ae4470eec@mail.gmail.com>

I released my session tomorrow 13:00 to 14:30 and Thu 15:30 to 16:30 since I
finished my writing just now using previous user's time left.

Xinran
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From bdai at stanford.edu  Wed Aug 29 11:04:33 2007
From: bdai at stanford.edu (Bing Dai)
Date: Wed, 29 Aug 2007 11:04:33 -0700
Subject: Raith Free 6pm to 9pm today
Message-ID: <000001c7ea67$0df1f400$0ba70c80@stanford60c572>

I did my exposure by using yesterday's session. Sorry for the late
notice.

Thanks,
Bing



From jwc at snf.stanford.edu  Wed Aug 29 16:37:18 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 29 Aug 2007 16:37:18 -0700
Subject: ANNOUNCEMENT:  "Take A Spin with Me" -- Ebeam Resist Handling Training
 on the Headway.  Tuesday  September 11 and 25th 2007 from 10:00  - 13:00
Message-ID: <46D6032E.2020403@snf.stanford.edu>

*ANNOUNCEMENT:  "Take A Spin with Me" -- Resist Handling Training on the 
Headway Coater.*

Greetings Ebeam Lab Users,

I will be conducting my bi-monthly *"Take A Spin with Me" *training 
class Tuesday September 11 and 25th, 2007 from 10 AM  - 1 PM. There is a 
sign up sheet posted on the white board in my office if you desire to 
sign up in advance.

This is a great opportunity for you to get acquainted with the specific 
points to employ when working with our Ebeam or Optical Resist materials 
in order to obtain high quality thin film coatings over your wafers for 
Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. These 
applications accurate control of polymer thickness is important in order 
to obtain consistent high quality lithography results.

We will be conducting this training on the Headway Spin Coater and users 
attending this session will gain their qualification on this tool and 
also learn to perform thin film measurements on the Nanospec TFA 
measurement tool.

Schedule of Events:

10 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL 
performing Pirhana substrate cleans and HF etching of the intrinsic 
native oxide on Silicon wafers.  All users are encouraged to have their 
substrates cleaned and ready to go for spinning by the session time; 
either coming out of the 150 degree Singe oven, or if you are working on 
oxides or nitrides, coming out of the YES HMDS Prime oven directly.

11:00 - 12:30 We can apply what ever Ebeam or Optical Resist system you 
desire for your work.

12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer

All interested parties are welcome to attend this session.
This is a Hands-On Lab Session  so please have you substrates clean and 
ready to coat on the Headway Spin Coater.
Thank you for your interest in Ebeam Technologies here at Stanford 
Nanofabrication Facility,

James W. Conway
Ebeam Technology Group
Stanford Nanofabrication Facility
650-725-7075  office hour M-F 8:30 - 9:30 AM CIS 31
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From mkoto at stanford.edu  Thu Aug 30 21:13:53 2007
From: mkoto at stanford.edu (mkoto at stanford.edu)
Date: Thu, 30 Aug 2007 21:13:53 -0700
Subject: raith free tomorrow 4am to 7am
Message-ID: <20070830211353.cxkra9rhk0o8o40s@webmail.stanford.edu>

Sample won't be ready.
Sorry for late notice.

Makoto

***************************************************
    Makoto Koto            Visiting Scholar
  476 Lomita Mall  244 McCullough Building
  Stanford, CA 94305-4045
***************************************************


From anikak at stanford.edu  Fri Aug 31 07:48:34 2007
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Fri, 31 Aug 2007 07:48:34 -0700
Subject: started early, raith free 12-1:30p today
Message-ID: <20070831074834.67o3lcytcwkss4gg@webmail.stanford.edu>