ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Wednesday AUGUST 22, 10:00 - 13:00

James Conway jwc at
Mon Aug 20 12:16:55 PDT 2007

*    *
*ANNOUNCEMENT:  "Take A Spin with Me" --  Resist Handling Training on 
the Headway Coater.*

Greetings Ebeam Lab Users,

I will be conducting my bi-monthly *"Take A Spin with Me" *training 
class Wednesday AUGUST 22  from 10 AM  - 1 PM. There is a sign up sheet 
posted on the white board in my office if you desire to sign up in advance.

This is a great opportunity for you to get acquainted with the specific 
points to employ when working with our Ebeam  and Optical Resist 
materials in order to obtain high quality thin film coatings over your 
wafers for Electron Beam, Scanning Probe (SPL), and Optical 
Nano-Lithography. These applications need accurate control of polymer 
thickness  in order to obtain consistent high quality lithography results.

We will be conducting this training on the Headway2 Spin Coater and 
users attending this session will gain their qualification on this tool 
and also learn to perform thin film measurements on the Nanospec TFA 
measurement tool.
This is a working lab and you are expected to have your substrates ready 
to spin for this session.

Schedule of Events:

10 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL 
performing Pirhana substrate cleans and HF etching of the intrinsic 
native oxide on Silicon wafers.  All users are encouraged to have their 
substrates cleaned and ready to go for spinning by the session time; 
either coming out of the 150 degree Singe oven, or if you are working on 
oxides or nitrides, coming out of the YES HMDS Prime oven directly.

11:00 - 12:30 We can apply what ever Ebeam or Optical Resist system you 
desire for your work.

12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer

All interested parties are welcome to attend this session.
This is a Hands-On Lab Session  so please have your engineering 
materials and substrates clean and ready to coat on the Headway Spin 
Coater.  Please also review the Ebeam Resist Handling Procedures to 
familiarize yourself with this bench.

Thank you for your interest in Ebeam Technologies here at Stanford 
Nanofabrication Facility,

James W. Conway
Ebeam Technology Group
Stanford Nanofabrication Facility
650-725-7075  office hour M-F 8:30 - 9:30 AM CIS 31

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