[Recovered !] Raith water flow failure and load lock error

Shinichi Koseki koseki at stanford.edu
Sat Aug 25 15:41:52 PDT 2007


Eear Raith users,

Now the turbo pump started after I click "retry"
on the load lock error window.
It seems that the normal unloading procedure is progressing.
Everything seems to be fine.

regards,

Shinichi


Quoting Shinichi Koseki <koseki at stanford.edu>:

> Dear Raith users,
>
> Now I tried to start my session, and I got the load lock error.
> I pushed down the lid of the load lock. But before the turbo pump
> started, there came a pop up window saying "The vacuum in the stage
> chamber is not ready." I clicked "retry", but it did not help.
> I also pushed a button on the turbo control.
>
> At 12:00 today, there seems to be a water flow error. (error 593
> on LEO), althogh it resumed after one hour. (warning 594)
>
> Does anyone know how I can recover the situation, and unload
> the previous user's (yiyang) sample ?
>
> Thanks for your help !
>
> Shinichi
> cell: 650-714-2105
> koseki at stanford.edu





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