From kocabas at stanford.edu Sun Dec 2 10:54:02 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Sun, 02 Dec 2007 10:54:02 -0800 Subject: Raith Free Today (Sunday Dec 2) 14-19, tomorrow (Monday Dec 3) 8-9 Message-ID: <4752FF4A.5060403@stanford.edu> I just realized that P5000 was down. I should've checked earlier. There's not much point for me to do EBL at this stage. Sorry about the late notice. Ekin From raneeyoo at stanford.edu Sun Dec 2 11:30:18 2007 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Sun, 02 Dec 2007 11:30:18 -0800 Subject: Raith Free Today (Sunday Dec 2) 14-19, tomorrow (Monday Dec 3) 8-9 In-Reply-To: <4752FF4A.5060403@stanford.edu> References: <4752FF4A.5060403@stanford.edu> Message-ID: <20071202113018.j55am36kg00sgk4k@webmail.stanford.edu> i will take it thanks Quoting "S. Ekin Kocabas" : > I just realized that P5000 was down. I should've checked earlier. > There's not much point for me to do EBL at this stage. > > Sorry about the late notice. > > Ekin From anikak at stanford.edu Mon Dec 3 10:49:57 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Mon, 03 Dec 2007 10:49:57 -0800 Subject: 8:30am-1p tomorrow free Message-ID: <20071203104957.njunkupggkwo08gg@webmail.stanford.edu> From ifushman at stanford.edu Mon Dec 3 11:11:10 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Mon, 3 Dec 2007 11:11:10 -0800 Subject: 8:30am-1p tomorrow free In-Reply-To: <20071203104957.njunkupggkwo08gg@webmail.stanford.edu> References: <20071203104957.njunkupggkwo08gg@webmail.stanford.edu> Message-ID: taken. On Dec 3, 2007 10:49 AM, Anika Kinkhabwala wrote: > > -- Ilya Fushman Applied Physics Stanford University cvitae.org/ilya/ From vsih at stanford.edu Mon Dec 3 17:25:26 2007 From: vsih at stanford.edu (Vanessa Sih) Date: Mon, 3 Dec 2007 17:25:26 -0800 Subject: Raith free tonight 8-10pm Message-ID: <354289b40712031725n1e06e2e4ne81b97a30062e81c@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Mon Dec 3 22:00:14 2007 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Mon, 03 Dec 2007 22:00:14 -0800 Subject: I will be late to my session but I NEED it. 10pm session. In-Reply-To: <354289b40712031725n1e06e2e4ne81b97a30062e81c@mail.gmail.com> References: <354289b40712031725n1e06e2e4ne81b97a30062e81c@mail.gmail.com> Message-ID: <20071203220014.pgh1zl36680ogs8w@webmail.stanford.edu> Dear All, I will be late for my late session less than 30min today because urgent deadline file preparing. Definitely, I need it. Please let me use this session. thanks, Kyeongran From jwc at snf.stanford.edu Tue Dec 4 09:44:03 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 04 Dec 2007 09:44:03 -0800 Subject: REMINDER: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday December 4, 2007 from 10:15 - 12:30 Message-ID: <475591E3.3080809@snf.stanford.edu> *ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater.* Greetings SNF Lab Users, I will be conducting my bi-monthly *"Take A Spin with Me" *training class Tuesday December 4, 2007 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Schedule of Events: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Dec 4 14:23:16 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 04 Dec 2007 14:23:16 -0800 Subject: Read Me: Warning for ALL USERS on the HEADWAY2 coater. Be sure to return bottles to solvent storage and also be sure to clean spinner chucks after use. In-Reply-To: <4755CE2B.8050909@stanford.edu> References: <4755CE2B.8050909@stanford.edu> Message-ID: <4755D354.3040406@snf.stanford.edu> *Greetings All Headway Users:* *This goes out as a specific warning to all Ebeam Resist Users and not just Optical Lithography Users! Please make sure you return the PMMA supply bottles to the yellow cabinets provided in the rear chase. * I have have had a number of evening, and even a few early morning, calls telling me they are out of resist when in fact the material is either on the Headway deck or left in the Carts. *ALL USERS WORKING ON HEADWAY are responsible to clean the chucks and wipe down the deck of the bench after EVERY USE.* If you find a dirty or contaminated chucks -- go ahead, clean then too. If you find grossly contaminated chuck(s) you cannot remove by solvent cleaning and/or resist residues on the WBMISCRES bench decks, please 'make a comment' on CORAL. Users having difficulties in completely stripping residues off the Headway Chucks should see Mario or James for assistance. Thank you for your support! James Conway SNF Mahnaz Mansourpour wrote: > > Hello all, > > > We found total of I think 6 bottles of resist sitting on the bench > this morning. Mario cleaned up as usual. I like to remind you that > we are not suppose to store bottles on the bench. Please take them > back as soon as you are done with the chemical bottle that you are using. > Secondly, CLEAN UP THE CHUCKS, I am getting many complains from lab > members and staffs. > > Consider this email as last warning. > > mahnaz > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: vlsi_wafer.jpg Type: image/jpeg Size: 49030 bytes Desc: not available URL: From zhangy at stanford.edu Wed Dec 5 00:52:12 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Wed, 05 Dec 2007 00:52:12 -0800 Subject: Raith free now till 4am Message-ID: <20071205005212.3791juw57owk8wog@webmail.stanford.edu> Sample not working well. Have to stop using it. -Yuan Yuan Zhang EE department From jwc at snf.stanford.edu Wed Dec 5 09:52:52 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 05 Dec 2007 09:52:52 -0800 Subject: Please return all RAITH off line dongles to me Message-ID: <4756E574.1060709@snf.stanford.edu> Greetings Xinran and Ekin and possibly other RAITH Users: Please return all RAITH off line dongles to me so ASAP. Just place then on my desk at the bottom tray of my monitor... Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Dec 5 11:31:51 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 05 Dec 2007 11:31:51 -0800 Subject: Please remove all samples from the Ebeam Lab Pass Through by Friday December 14th. Message-ID: <4756FCA7.4000506@snf.stanford.edu> Greetings Ebeam Lab Users: Please be sure to remove all samples from the Ebeam Lab Pass Through Box by Friday December 14th, 2007. I will be cleaning out this box the following week and all items found will be considered DONATED and/or will be discarded at time of cleaning. All Users are reminded that this area is for engineering materials and 'work in progress' only and should not be used for sample storage. I am also seeking Quartz and SOI substrates for my research work and would happily accept your donations with pleasure. Thank you for your support of the Ebeam Lab, James Conway Paul Jerabek -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 45777 bytes Desc: not available URL: From raneeyoo at stanford.edu Wed Dec 5 13:21:33 2007 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Wed, 05 Dec 2007 13:21:33 -0800 Subject: raith released Friday 2-6am Message-ID: <20071205132133.w6k1jhoc0s08cwkw@webmail.stanford.edu> Raith has been released on Friday from 2 to 6am since I took Tuesday open slot. thanks, Kyeongran From jwc at snf.stanford.edu Thu Dec 6 12:04:44 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 06 Dec 2007 12:04:44 -0800 Subject: raith as imaging tool? In-Reply-To: <4dfce5b30712052017s60bb358wd048f4abc0df1139@mail.gmail.com> References: <4dfce5b30712052017s60bb358wd048f4abc0df1139@mail.gmail.com> Message-ID: <475855DC.5050706@snf.stanford.edu> Good Afternoon RAITH Users: We have no policy against using the RAITH as a SEM or metrology measurement tool. Any qualified User may utilize his or her reservation session time on the system for any purpose within the tools capability. The Raith is a full feature metrology and digital imaging system in addition to being an Electron Beam writer. It is designed to be used for manual and semi-automated to fully automated image, mask or EBL pattern inspection and verification. It is also one of the highest resolution Scanning Electron Microscopes here at Stanford, and possibly the only tool calibrated to NIST traceable standards that is checked regularly. As of last Friday the electron beam waist at 10 keV using the 30 um aperture is less than 2 nm with a gage of 0.3 - 0.5 nm using a prickly Au on carbon resolution standard. This exceeds the manufacturer's specification by a factor of Two! (Raith's Factory acceptance spec. is less than 2 nm at 20 keV and less than 4 nm at 10 keV.) That sample is mounted on the SEM stud on the Std. Sample Holder feel free to explore it and use it in your work on the tool. However you bring to light a important point regarding the Coral Reservations and the Raith community honoring each others Raith reservation session times! My expectation of All Users is this: If you have a reservation for the current time slot, for example 1 to 6 PM, then this is your time to be on the tool. It is expected that you would yield the tool to the next user upon their arrival in the lab and optimally within a15 minute window on either side of the end of the previous users session. (i.e., 5:45 - 6:15) If the next reserved user doesn't show up before the current session ends they may extend into the next reservation time slot -- but must begin to unload their sample when that next User arrives. However please note we do have a specific policy for persons whom do not show up for their sessions on time called 'The 16 Minute Rule'. That policy states if at 'Minute 16' after a reservation on Coral starts and that User has not show up for the session in the lab, or sent an email to the raith list, and/or posted a note on the tool that they intend to use the session; they have lost their reservation as it has expired at 16 minutes after the session began. Then 'he who is enabled', or the first user to enable the tool on CORAL, has the session through the end of the reservation time slot. It is simply upon his or her courtesy to return the tool to the User whom lost their session, or to the next User reserved on coral, if their tasking is completed before the session times ends. It is expected of all Users working on the Raith tool would strive to work cooperatively together with all other Users and to expedite the hand-offs between sessions slots at the times indicated on the Coral reservations smoothly. Users are reminded that there are _no limits on utilization of the tool just a limit on the amount of time you can reserve the RAITH tool on CORAL_. This was decided by the Raith Community in 2006 to allow fair and equal access to all Users to make a reservation on the tool within a reasonable amount of time. In my understanding within a 10 to 14 day horizon. However if you are on the RAITH tool when it is free and you have enabled on Coral naturally, but do not have a current reservation on coral, then any User can fill the slot on Coral reservations and that User can request the person to vacate the tool upon their arrival immediately. SNF Staff and management are also currently seeking solutions to fulfill the need for High Resolution Scanning Electron Microscopy and metrology tooling here at the Stanford Nanofabrication Facility: * We recently had Hitachi High Technologies America Field Service, formerly Hitachi Instruments, perform a complete Preventative Maintenance routine on the Hitachi S-4160 Field Emission SEM that we call /SEM4160. /This tools brightness and resolution are now close to manufacturers specifications. Users returning to this tool will rapidly note the improved resolution and imaging capability when using it. We have also performed adjustments to the X-Y stage to reduce the stage drift and over travel movement and added a Quartz PCI Digital Imaging acquisition package to this system. If you have not been on this tool in some time my suggestion would be to come back in and try it out, you may find it suitable for much of your SEM needs. * For the last year Paul Rissman and I have been engaged with Hitachi High Technologies America towards identifying and obtaining a donation of a newer Digital Scanning Electron Microscope. Thus is to meet the metrology needs of all lab members working at SNF, but in particular to support the effort on the ASML stepper. This effort has started slowly, mainly in discussions with contacts at Hitachi in our personal networks at conferences and exhibitions, and hope to place as a donation a newer instrument into SNF sometime in 2008. During the next Ebeam Town Hall Meeting, to be held in the New Year, we can open for discussion modifications to reservations and usage policies on the RAITH tool. I would also encourage all Users to participate in discussions of this nature on the raith at snf.stanford.edu mail list. Everyones opinion is valuable to me and to SNF management. Your work and success are important to all of us here. Finally I would request of All Users to please engage in a bit more courtesy and diligent effort when coming on and off the tool to do so promptly at the end of their reservation's time or when they have completed tasking early. With the recent hardware and software upgrade that was donated by RAITH GMBH and RAITH USA this year, and the great increase in speed and throughput achieved, we now have much more capacity on the tool than previously. If everyone checked the protocol files for their write time record, they would know exactly how long it takes to run their exposures, and this would certainly increase the opportunity for all users to get more work completed on the tool. Currently the tool often sits unattended after an exposure ends waiting for the next User to arrive and start their session. Much opportunity would be gained if Users worked together more closely. Should we require Users to be present at the end of an exposure and to unload as soon as it is completed? Your opinions and suggestions are invited, please respond to the raith e-mail list only. Thank you for your support! James Conway A Raith User wrote: > Hi James, > Since when is it considered acceptable to use the Raith as an SEM? > The other SEM just sits free and unused all the time, whereas I've > noticed that a lot of people have been sneaking in SEM time on the > Raith, sometimes between sessions, which delays reserved users while > they wait for the SEMers sample to unload. Every time I have used the > Raith in the last month I have had to wait for the previous user for > at least 15 minutes. I am currently sitting and waiting for some guy > who thought he'd get in a quick SEM session to unload his sample. > Sorry for griping, but i think that the Raith wouldn't be so > overbooked if people would stop using it for imaging. > > user name deleted by JWC. -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Thu Dec 6 12:55:49 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Thu, 6 Dec 2007 12:55:49 -0800 Subject: raith done early, free until 14;30 Message-ID: <22ffcd060712061255l5cebb99cra22aeff6750a57ae@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Thu Dec 6 21:41:07 2007 From: krivoire at stanford.edu (krivoire at stanford.edu) Date: Thu, 06 Dec 2007 21:41:07 -0800 Subject: robot arm error; raith not usable right now Message-ID: <20071206214107.5z2gqvcyo84ggggc@webmail.stanford.edu> Hi all, I encountered an error tonight when loading my sample. The robot arm did not reach the inner position correctly. I followed the instructions that came up to manually move the robot arm back out, but the error still appears, and I do not have access to reset it (and I have not been able to get in contact with James). Raith is not usable until James resets this error, so I am putting the tool in red light mode. Sorry for the inconvenience. Kelley From jwc at snf.stanford.edu Fri Dec 7 09:05:07 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 07 Dec 2007 09:05:07 -0800 Subject: Please return the RAITH Dongle to me ASAP Message-ID: <47597D43.4050708@snf.stanford.edu> Xinran and other RAITH Users: Whomever has the raith dongle please return it to me ASAP. Thank you, James -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Dec 7 18:30:45 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 07 Dec 2007 18:30:45 -0800 Subject: [Fwd: Shutdown raith SNF 2007-12-07 18:14:42: need a second replacement loader belt] Message-ID: <475A01D5.5040104@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Red-ball.gif Type: image/gif Size: 384 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon Dec 10 15:14:12 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 10 Dec 2007 15:14:12 -0800 Subject: Raith will be off line for users through Wednesday AM for repairs. Message-ID: <475DC844.2040706@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Dec 11 11:54:56 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 11 Dec 2007 11:54:56 -0800 Subject: Raith Holiday Shutdown Schedule and Maintenance Plan Message-ID: <475EEB10.6030805@snf.stanford.edu> *RIE polymeric micro-pillar formation during RIE etch... Greetings Raith User Community:* We will be starting our Holiday shutdown and annual RAITH Preventative Maintenance activities 7 AM Wednesday December 19th, no student access to the cleanroom or the Ebeam Lab after this time. *1. Action required by Friday December 14, 2007: Users are reminded to clean out all of their samples from the Ebeam Lab Pass Through by the end of the Day Friday December 14, 2007:* All materials left in the dry box after Tuesday December 18th will be discarded and/or considered donations to the Lab. I am happily accepting donations of quality Quartz, SOI, and GaAs substrates preferably sized to 100 mm wafers. Please also take a minute to assist us to clean up the Ebeam Lab by removing all extra engineering materials and wiping down the equipment. Just five minutes of help from each of you is all I ask... *2. Action required by Tuesday December 18, 2007: All Users should back up their project, GDSII pattern and position list files to another host or medium as a precaution before the RAITH visit. I will have backed up the entire file system for the RAITH and LEO computers by the end of this week, but you should NOT depend on my backups to secure your work!* * Wednesday December 19, 2007:* * *Notice: All Ebeam Lab users should be out of the lab and cleanroom at 7 AM!* * RAITH USA Field Service Manager Cole Loomis will arrive to perform the complete Annual Preventive Service routine including a complete SEM column clean with FE-GUN and aperture replacements. In addition we will address several outstanding service and maintenance issues related to the Cooling Water loop, replace the main chamber turbo pump with a new turbo pump, and check out the leveling on all the sample fixtures. We will then complete the PM by starting a 200 hour bake out of the column. We performed a similar extended bake out last year which resulted in optimal Gun section vacuum levels and provided us with a clean environment for the Gun to operate. Through the last year we have not had any downtime related to the FE-Gun and EHT power supplies and vacuum has been maintained in the upper to middle -010 Torr range. *Friday January 4th, 2008:* * RAITH USA Field Service arrives and brings up the FE-Gun and RAITH 150 Platform and performs mechanical test of the Load Lock transfer arm and electrical test on the system. 24 hours of FE-Gun operation are required before checking and final adjustments can be performed. * After 24 hours or more of Beam Time: All normal SEM E/O card adjustments including Field Orthogonality and magnification range and stigmation amplifier centering functions check and alignments. The second Days adjustments may be deferred to the following Monday... * Monday January 7th, 2007:* * 10 - 11 AM Raith performs final system adjustments as required. * 11 AM - 6 PM James W. Conway performs the RAITH Qualification and PCM test procedures following the template in RAITH Notebook NO. Two, including factory acceptance testing for maximum SEM Imaging Resolution and test Write Field to Write Field and Overlay Layer One to Layer Two Stitching test on 100 nm PMMA reference films on Silicon. * 6 PM to 6 AM January 8th, 2007 Raith Operations restricted to RAITH Champions only. Users test the system and report any noted changes or problems encountered. *Tuesday January 8th, 2007: * * 6 AM to 10 AM: The system will be available for all Users at all levels of skill resuming the Coral reservation schedule. * Users seeking specific application support and training assistance during the first week of operations should schedule these sessions with James Conway before the December Shutdown. This plan is much the same plans as in years past and some flexibility in the schedule will be required to adapt to changing circumstances as they arise. Hoping everyone will have a Safe and Joyous Holiday Season! Thank you all for your continuing support through the last year! James Conway Ebeam Lab SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 137344 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 3888 bytes Desc: not available URL: From toecutter4ranger at gmail.com Thu Dec 13 20:16:02 2007 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Fri, 14 Dec 2007 04:16:02 +0000 Subject: RAITH is up! Message-ID: <1821365889-1197605690-cardhu_decombobulator_blackberry.rim.net-552651410-@bxe134.bisx.prod.on.blackberry> Evening, RAITH is up! Load Lock has been tested and is ready to go. RAITH champions only tonight or call me. JWC Sent via BlackBerry by AT&T From jwc at snf.stanford.edu Fri Dec 14 09:07:32 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 14 Dec 2007 09:07:32 -0800 Subject: RAITH is up! Message-ID: <4762B854.9070902@snf.stanford.edu> Greetings RAITH Users: The Raith system is back up -- all systems and modules have been tested -- and emission at optimal beam currents for the normal apertures. Users may use any acceleration voltage from 500 volts through 30 keV. It is requested that all Users with sessions remaining through next Wednesday morning strive to include space and time for those users whose work was delayed by the downtime so that everyone that has a urgent need to complete their work before shutdown can have some write time. I am going to 'Share the Ride' on the reservation I have this morning through 3 PM, we are loading at 10:00 AM. Special Thanks to RAITH Champion Shinichi Koseki whom assisted us in testing the system overnight. Thank you for your support during this difficult period, James Conway -------- Original Message -------- Subject: Re: RAITH is up! Date: Fri, 14 Dec 2007 03:23:42 -0800 From: Shinichi Koseki Reply-To: koseki at stanford.edu To: James Conway References: <1804794219-1197619160-cardhu_decombobulator_blackberry.rim.net-1250746946- at bxe134.bisx.prod.on.blackberry> <3b532e5a0712140002j563a3b01wccdb9033ac4a9c6f at mail.gmail.com> Hi James, I think the machine is great ! I did not encounter any problem. The beam currents are... 30um-->0.1968nA, 10um-->0.01411nA I used the machine from 12pm to 8am. Thanks, Shinichi koseki at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Sat Dec 15 10:06:09 2007 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Sat, 15 Dec 2007 10:06:09 -0800 Subject: share raith time today 18:00-24:00? Message-ID: <20071215100609.qt0liz0seck8wwok@webmail.stanford.edu> Hello! If you are interested in sharing my raith time today from 18:00-24:00, please let me know. thanks, Kyeongran From bilee at stanford.edu Sat Dec 15 10:22:33 2007 From: bilee at stanford.edu (Byoungil Lee) Date: Sat, 15 Dec 2007 10:22:33 -0800 Subject: share raith time today 18:00-24:00? References: <20071215100609.qt0liz0seck8wwok@webmail.stanford.edu> Message-ID: <002d01c83f47$75c1eb50$946040ab@BILEEOFFICE> I will take the "sharing session" offered by Kyeongran. Thank you, Byoungil ----- Original Message ----- From: "Kyeongran Yoo" To: "Raith SNF Mailing list" Sent: Saturday, December 15, 2007 10:06 AM Subject: share raith time today 18:00-24:00? > Hello! > > If you are interested in sharing my raith time today from 18:00-24:00, > please let me know. > > thanks, > Kyeongran > From linyouc at stanford.edu Mon Dec 17 04:45:27 2007 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Mon, 17 Dec 2007 04:45:27 -0800 Subject: Raith time today 7:30-13:00 released Message-ID: <20071217044527.s66up4zuckwkwcs0@webmail.stanford.edu> Sorry for the short notice. Linyou -- Linyou Cao PhD candidate Department of Materials Science and Engineering Brongersma Group Stanford University From jwc at snf.stanford.edu Tue Dec 18 17:05:51 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 18 Dec 2007 17:05:51 -0800 Subject: Problem raith SNF 2007-12-18 16:53:31: load problems resurface -- Transfer arm encoder errors at inner position Message-ID: <47686E6F.8050709@snf.stanford.edu> *Notice to ALL USERS remaining in the Coral queue before tomorrow's Holiday shutdown:* *System is going off line with the completion of XINRANW's exposures this evening. *This morning we encountered new problems similar to problems encountered last week when the LL transfer arm reaches the inner exchange position causing load lock errors that are unrecoverable by operators. Sorry to the interruption of your last minute research plans. CORAL schedule should likely resume in the New Year on Monday January 7, 2008 18:00 hours for raith champions and Tuesday January 8, 2008 14:00 hours for all qualified Users. Please see me during tomorrows office hour if you have any questions. Thank you, James Conway -------- Original Message -------- Subject: Problem raith SNF 2007-12-18 16:53:31: load problems resurface -- Transfer arm encoder errors at inner position Date: Tue, 18 Dec 2007 16:53:31 -0800 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Good Afternoon Users: We are encountering transfer arm encoder issues resulting in errors at the Load Lock transfer arm inner position. I manually loaded xinrans Wangs sample using the raith service login... At the end of XINRAN's exposure the system will go off line to users for the holiday shutdown. Apologizes to the interruption to the schedule and your research mission. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: reindeer_waltz.gif Type: image/gif Size: 37166 bytes Desc: not available URL: