From jwc at snf.stanford.edu  Thu Feb  1 10:44:10 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 01 Feb 2007 10:44:10 -0800
Subject: [Fwd: Raith Electron beam lithography training courses and workshops
 in 2007]
Message-ID: <45C234FA.9010500@snf.stanford.edu>

FYI:
EBL and Lithography training courses offered by RAITH GmbH in Dortmund, 
Germany.

Best,

James Conway


-------- Original Message --------
Subject: 	Raith Electron beam lithography training courses and workshops 
in 2007
Date: 	Thu, 1 Feb 2007 18:50:26 +0100
From: 	Rueckstein, Christel <CRueckstein at Raith.de>
To: 	<jwc at snf.stanford.edu>



*Dear Sir,*

 

We are pleased to offer you the following Raith lithography training 
courses and workshops in 2007.

 

*LTC - Electron beam lithography training courses*

 

1)     13^th ? 15^th March 2007

2)     11^th ? 13^th September 2007

 

The training course will be limited to 12 attendees.

_For lithography training course registration please click here_:

http://www.raith.com/index.php?xml=company%7CCourses%7CTraining+courses

 

*Litho workshops*

           

I:          08^th ? 09^th May 2007

            II:         12^th ? 13^th June 2007  

            III:        10^th ? 11^th   May 2007

            IV:        14^th ? 15^th June 2007

 

Each workshop will be limited to 6 attendees.

_For workshop registration please click here:_

http://www.raith.com/index.php?xml=company%7CCourses%7CWorkshops%7CRegistration

 

For further information please visit Raith web site http://www.raith.com/

* *

Location

Raith GmbH, Hauert 18, 44227 Dortmund, Germany

Phone: +49 (0)231 975 000 49

 

Fee

The registration fee is 1,160.00 Euro (incl. VAT) per workshop or 
training course. The fee includes lunches and one dinner. Expenses of 
accommodation are not included. Nevertheless, hotel accommodation is 
arranged by Raith.

 

Payment during the seminar: Any payment must be necessarily made in cash 
or bank transfer.

* *

We look forward to meeting you in Dortmund.

Mit freundlichen Gruessen / with best regards
Christel Rueckstein
Sales Assistant

Raith GmbH
Hauert 18
44227 Dortmund
Germany

phone :          +49 - 231 - 975000 - 33
Fax :            +49 - 231 - 975000 -   5
e-mail :         CRueckstein at raith.de
web :            http://www.raith.com <http://www.raith.com/>

 

 

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From jwc at snf.stanford.edu  Fri Feb  2 17:30:50 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 02 Feb 2007 17:30:50 -0800
Subject: Raith Policy -- The 16 minute rule 
In-Reply-To: <1170409681.45c308d160084@webmail.stanford.edu>
References: <1170409681.45c308d160084@webmail.stanford.edu>
Message-ID: <45C3E5CA.7000401@snf.stanford.edu>

Greetings Raith Users:

John Liu whom just qualified on the system posted a great question I 
wish to reiterate with all users working on the RAITH tool:

John Liu wrote:
> Hi James,
>
> I remember you saying that if we switched times with another user their was
> a way we should notify others. . . Was there a designated website for this
> purpose?
>
> Also, I have a question on the 16 minute rule. Another user ran from
> 9pm-12am Thursday after what I presume was a no show. . . The next user had
> a 10hour reservation today 12-10am but didn't show yet; however the enabled
> user has enough patterns to run into about 4am or later. Is it normal
> courtesy to give the enabled user lost opportunity until all his/her
> patterns are done writing?
>
> Thanks,
> John
James replied:

Please post all notifications, cancellations, and schedule changes and 
switches in the Coral schedule to Raith at snf.stanford.edu.

Good Question on the 16 minute rule: 

It is an acceptable practice to make a longer exposure position list 
than for your reservation session period, just in case the next user did 
not show up for his reservation -- or is simply running late coming onto 
the system.  I would expect that the user on the system would leave a 
note of at which position it is OK to abort his run if they desire to 
extend into the next session. 

However if he did not add additional reservation time to the schedule 
upon notice of the cancellation by the other user -- any user can make a 
reservation on CORAL and then abort his write in progress at that coral 
reservation sessions start time. That User should also post a email 
message to the list that they intend to take the session. If no one 
wants the system, as often occurs in the early morning hours, then the 
previous user could write until the next reservation's time.

Designed into this policy is that ALL USERS will share the opportunity 
to write equally if several users desire access within a long 
reservation window.
It is expected that all users will display a modicum of courtesy between 
Users working on the Raith Tool, and if possible, return the system 
early to the next user in the Coral Queue, or others if time remains 
within the previously canceled reservation slot.

If a user does not post a note on the tool, or send a email to the 
raith at snf.stanford.edu  indicating his wish to start late; then any user 
who wished to may enable the tool and use it for their exposures.  It is 
only upon that user's courtesy if they return the system to the previous 
user whom lost their reservation at minute 16 of the reserved session.  
He whom enables first has the tool.

Note:  that their are no time limits on the utilization of the RAITH 
tool -- just to reservations made for the tool in order to ensure fair 
and equal access to all qualified users on the tool within a ten day to 
two week period. Users whom are unable to make a reservation on the 
RAITH over a two week period should see me during my office hour and 
together we can seek solutions.

System us up and in fine condition.  Beam Current is near optimal values 
for normal exposure parameters.  Contamination dots in the 10 - 20 nm 
diameter range were obtained in qualification sessions today. Gun vacuum 
is in the 5.0E-010 Torr range.

Please play nicely together over the weekend!

James Conway




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From ifushman at stanford.edu  Fri Feb  2 17:53:00 2007
From: ifushman at stanford.edu (Ilya Fushman)
Date: Fri, 2 Feb 2007 17:53:00 -0800
Subject: starting my write eariler
Message-ID: <28bfad130702021753g7e22220dq3f28c629e5989bda@mail.gmail.com>

-ilya
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From bdai at stanford.edu  Sun Feb  4 22:46:40 2007
From: bdai at stanford.edu (Bing Dai)
Date: Sun,  4 Feb 2007 22:46:40 -0800
Subject: Raith Free 9:30am to 12:30pm tomorrow (Monday)
Message-ID: <1170658000.45c6d2d0ae3d1@webmail.stanford.edu>

Sorry for the late notice. Thanks.

-Bing


From fjaeckel at stanford.edu  Mon Feb  5 05:49:30 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Mon,  5 Feb 2007 05:49:30 -0800
Subject: error 65535
Message-ID: <1170683370.45c735ea5acd5@webmail.stanford.edu>

Hi experts out there,

just tried to unload previous users sample and got software error 65535
saying that there was an error during the previous loading/unloading
procedure. And sample won't unload. Restarting didn't help.

Any quick help is appreciated since I want to keep my session.

Thanks,
Frank

-- 
Dr. rer. nat. Frank J?ckel
mail address:   Department of Chemistry, M/C 5080
                333 Campus Drive
                mailbox #74
                Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
                Stanford University, Stanford, CA 94305-5080
phone:          +1-650-724-4052/51 (office/lab)
fax:            +1-650-725-0259    (indicate mailbox #74)
e-mail:         fjaeckel at stanford.edu
internet:       http://www.stanford.edu/~fjaeckel/


From fjaeckel at stanford.edu  Mon Feb  5 05:55:35 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Mon,  5 Feb 2007 05:55:35 -0800
Subject: Raith Free 9:30am to 12:30pm tomorrow (Monday)
In-Reply-To: <1170658000.45c6d2d0ae3d1@webmail.stanford.edu>
References: <1170658000.45c6d2d0ae3d1@webmail.stanford.edu>
Message-ID: <1170683735.45c73757b0407@webmail.stanford.edu>

Took it! In the hope that software error get cleared soon. fj

Quoting Bing Dai <bdai at stanford.edu>:

> Sorry for the late notice. Thanks.
>
> -Bing
>


-- 
Dr. rer. nat. Frank J?ckel
mail address:   Department of Chemistry, M/C 5080
                333 Campus Drive
                mailbox #74
                Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
                Stanford University, Stanford, CA 94305-5080
phone:          +1-650-724-4052/51 (office/lab)
fax:            +1-650-725-0259    (indicate mailbox #74)
e-mail:         fjaeckel at stanford.edu
internet:       http://www.stanford.edu/~fjaeckel/


From fjaeckel at stanford.edu  Mon Feb  5 07:48:36 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Mon,  5 Feb 2007 07:48:36 -0800
Subject: software error cleared
Message-ID: <1170690516.45c751d48dcb5@webmail.stanford.edu>

software error was cleared with JWC help over the phone. fj

-- 
Dr. rer. nat. Frank J?ckel
mail address:   Department of Chemistry, M/C 5080
                333 Campus Drive
                mailbox #74
                Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
                Stanford University, Stanford, CA 94305-5080
phone:          +1-650-724-4052/51 (office/lab)
fax:            +1-650-725-0259    (indicate mailbox #74)
e-mail:         fjaeckel at stanford.edu
internet:       http://www.stanford.edu/~fjaeckel/


From jwc at snf.stanford.edu  Tue Feb  6 09:27:41 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 06 Feb 2007 09:27:41 -0800
Subject: ANNOUNCEMENT:  "Take A Spin with Me" -- Ebeam Resist Handling Training
 on the Headway.  Tuesday November 14, 2006 10:00  - 13:00
Message-ID: <45C8BA8D.6000007@snf.stanford.edu>

*ANNOUNCEMENT:  "Take A Spin with Me" -- Ebeam Resist Handling Training 
on the Headway Coater 
<http://snf.stanford.edu/Process/Lithography/EBResist/EBResistHandling.html>.
*
Greetings Ebeam Lab Users,

I will be conducting my monthly *"Take A Spin with Me" *training class 
next Tuesday February 13, 2007 from 10 AM  - 1:00 PM.

This is a great opportunity for you to get acquainted with the specific 
points to employ when working with our Ebeam Resist materials in order 
to obtain high quality thin film coatings over your wafers for Electron 
Beam, Scanning Probe (SPL), and optical Nano-Lithography.
In these applications accurate control of Polymer thickness is important 
in order to obtain consistent high quality lithography results.

We will be conducting this training on the Headway2 spin coater and 
users attending this session will gain their qualification on this tool.

Schedule of Events:

10 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL 
performing Pirhana substrate cleans and HF etching of the intrinsic 
native oxide on Silicon wafers.  All users are encouraged to have their 
substrates cleaned and ready to go for spinning by the session time; 
either coming out of the 150 degree Singe oven, or if you are working on 
oxides or nitrides, coming out of the YES HMDS Prime oven.

11:00 - 12:30 We can apply what ever resist system you desire for your 
work.

12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer

All interested parties are welcome to attend this session.  No need to 
reply to this email -- just show up!

Thank you for your interest in Ebeam Technologies here at Stanford 
Nanofabrication Facility,

James W. Conway
Ebeam Technology Group
Stanford Nanofabrication Facility
650-725-7075  office hour M-F 8:30 - 9:30 AM CIS 31

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From dinhthuc at hotmail.com  Tue Feb  6 21:28:37 2007
From: dinhthuc at hotmail.com (danny T)
Date: Tue, 06 Feb 2007 21:28:37 -0800
Subject: Finished early.  Raith available for next User
Message-ID: <BAY106-F22DA020E3E91D32682A4D6CE9E0@phx.gbl>

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From jwc at snf.stanford.edu  Wed Feb  7 17:54:53 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 07 Feb 2007 17:54:53 -0800
Subject: finshed my session earliuer than expected because we 'shared the
 ride'
Message-ID: <45CA82ED.9080904@snf.stanford.edu>

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From zhangdw at stanford.edu  Thu Feb  8 15:12:24 2007
From: zhangdw at stanford.edu (Dawei)
Date: Thu, 8 Feb 2007 15:12:24 -0800
Subject: raith free now until 8pm, sorry for the late notice
Message-ID: <011001c74bd6$9781f6f0$0e8d0c80@zhangdw>

 

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From makarova at stanford.edu  Thu Feb  8 15:23:37 2007
From: makarova at stanford.edu (Maria Makarova)
Date: Thu, 8 Feb 2007 15:23:37 -0800
Subject: raith free now until 8pm, sorry for the late notice
In-Reply-To: <011001c74bd6$9781f6f0$0e8d0c80@zhangdw>
References: <011001c74bd6$9781f6f0$0e8d0c80@zhangdw>
Message-ID: <E6FDB6B3-AAD1-4A3C-9C00-2778DC88B492@stanford.edu>

I will take it.

Maria Makarova
Edward L. Ginzton Laboratory
Stanford University
(650) 723-2279




On Feb 8, 2007, at 3:12 PM, Dawei wrote:

>
>

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From anikak at stanford.edu  Sun Feb 11 14:56:43 2007
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Sun, 11 Feb 2007 14:56:43 -0800
Subject: finished half hour early
Message-ID: <1171234603.45cf9f2ba1009@webmail.stanford.edu>

I'm just unloading now...


From jwc at snf.stanford.edu  Wed Feb 14 19:18:34 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 14 Feb 2007 19:18:34 -0800
Subject: Problem RAITH SNF 2007-02-14 16:21:21: Standard sample holder not
 landing onto piezo post properly
Message-ID: <45D3D10A.3050300@snf.stanford.edu>

kevin or cole,

Hope to speak with you in the morning tomorrow.

I mapped both wafer height on the Std. Sample holder and the surface of 
the sample holder itself after driving the center of the wafer (0,0 UV) 
to 5 mm and see significant offsets from level despite using a 
calibrated center positions of the piezo post.  Up to 0.5 mm across the 
pallet.  I made some maps of heights from two different loads on the 
Std. Sample Holder.

Following up with phone with Kevin last Friday:
Yes I think we have a problem with P1 the fixed piezo post.

I have been troubleshooting some strange reports from users whom 
indicated that initially the Z drive was loosing its calibration; when 
in fact the sample holder may not be landing correctly onto the P mounts 
  or now more likely the jewel tip on P1 may have become damaged or 
simply worn itself out.

Also have been troubleshooting several reports of strange EBL results 
such as triangles and 100 nm squares being circular and not well defined 
. I suspected out of focus by users now I suspect the P1 Post.

Flatness of the Std. sample holder appears fine when placed on  machine 
plate gage. i.e., it doesn't rock or appear bent. But I don't have any 
dimensions or specs for this assembly to check to.

I have some SEM's of each post...  P1 looks really different that the 
others. cracked or worn on the periphery.






Problem RAITH SNF 2007-02-14 16:21:21: SUBJECT: Standard sample holder 
not landing onto piezo post properly.

Attention All RAITH Users:
PROBLEM ON RAITH: STANDARD SAMPLE HOLDER NOT LANDING ON KINETIC MOUNTS 
-- DAMAGED PIEZO POST...
I have been troubleshooting several user reports of irregularly shaped 
or poorly defined written structures on the exposures made since January 
11, 2007.  This issue has become more apparent through the month, and as 
we perform hi resolution measurements of our structures in SEM review 
written in early January.

I have observed several incidents of out of focus or poorly focused 
structures written at the extreme edges of wafers ( E.g., targets and 
SPLines @ 0, -45 UV :: 0 +45 UV) Within the normal +- 10 mm range I 
often write within, I also observed significant changes in working 
distance as I moved through this small range of positions.

Monday and today we made measurements of the surface of both a 100 mm 
wafer clipped to the standard sample holder and upon the Std. sample 
holder itself and have collected data that the holder is not landing 
precisely flat into the kinetic mounts.  The range of non-flatness is ~ 
0.500 mm!

Visual and SEM inspection of the ceramic balls and points or 'jewel' 
tips in the Piezo post yield information that indicated that Piezo one 
post ceramic ball may have become damaged and/or the point may be 
missing. All piezo post exhibit wear on their surfaces.

Users are requested to be vigilant of their actual working distances, 
and to report their WD data for specific positions across their samples 
and promptly report to this list if you see significant changes in WD as 
you move across your wafers greater than 250 um.
RAITH has been contacted last Friday and we will strive to correct this 
issue ASAP.
System is now in YELLOW Light Mode.
Thank you for your support!
James Conway




From kb at raithusa.com  Thu Feb 15 06:09:33 2007
From: kb at raithusa.com (Kevin Burcham)
Date: Thu, 15 Feb 2007 09:09:33 -0500
Subject: Problem RAITH SNF 2007-02-14 16:21:21: Standard sample holder not landing onto piezo post properly
In-Reply-To: <45D3D10A.3050300@snf.stanford.edu>
Message-ID: <000801c7510a$eb432f00$7201a8c0@KBLaptop>

James,

Could you send the images of the sample post?  You should be able to see the
piezo mounts in the CCD view to tell if the ball is missing or damaged.
When the sample holder is loaded, does it release smoothly from the robot
arm or is it jerky?

Another thought would be to check the inserts for the two other post, not
the fixed, and see if either of the screws to adjust the level of the holder
are loose; even slightly.  This could maybe cause a slight movement of the
holder and result in changes in WD.

Call when you can.

Regards,

Kevin

Dr. Kevin E. Burcham, Ph.D.
Applications Scientist
Raith USA, Inc.
2805 Veteran's Highway, Suite 23
Ronkonkoma, NY 11779
 
Telephone:  631.738.9500 X14
Facsimile:  631.738.2055
Email:  kb at raithusa.com

-----Original Message-----
From: James Conway [mailto:jwc at snf.stanford.edu] 
Sent: Wednesday, February 14, 2007 10:19 PM
To: raith at snf.stanford.edu
Cc: Kevin Burcham; Cole Loomis -- RAITH USA.
Subject: Problem RAITH SNF 2007-02-14 16:21:21: Standard sample holder not
landing onto piezo post properly

kevin or cole,

Hope to speak with you in the morning tomorrow.

I mapped both wafer height on the Std. Sample holder and the surface of 
the sample holder itself after driving the center of the wafer (0,0 UV) 
to 5 mm and see significant offsets from level despite using a 
calibrated center positions of the piezo post.  Up to 0.5 mm across the 
pallet.  I made some maps of heights from two different loads on the 
Std. Sample Holder.

Following up with phone with Kevin last Friday:
Yes I think we have a problem with P1 the fixed piezo post.

I have been troubleshooting some strange reports from users whom 
indicated that initially the Z drive was loosing its calibration; when 
in fact the sample holder may not be landing correctly onto the P mounts 
  or now more likely the jewel tip on P1 may have become damaged or 
simply worn itself out.

Also have been troubleshooting several reports of strange EBL results 
such as triangles and 100 nm squares being circular and not well defined 
. I suspected out of focus by users now I suspect the P1 Post.

Flatness of the Std. sample holder appears fine when placed on  machine 
plate gage. i.e., it doesn't rock or appear bent. But I don't have any 
dimensions or specs for this assembly to check to.

I have some SEM's of each post...  P1 looks really different that the 
others. cracked or worn on the periphery.






Problem RAITH SNF 2007-02-14 16:21:21: SUBJECT: Standard sample holder 
not landing onto piezo post properly.

Attention All RAITH Users:
PROBLEM ON RAITH: STANDARD SAMPLE HOLDER NOT LANDING ON KINETIC MOUNTS 
-- DAMAGED PIEZO POST...
I have been troubleshooting several user reports of irregularly shaped 
or poorly defined written structures on the exposures made since January 
11, 2007.  This issue has become more apparent through the month, and as 
we perform hi resolution measurements of our structures in SEM review 
written in early January.

I have observed several incidents of out of focus or poorly focused 
structures written at the extreme edges of wafers ( E.g., targets and 
SPLines @ 0, -45 UV :: 0 +45 UV) Within the normal +- 10 mm range I 
often write within, I also observed significant changes in working 
distance as I moved through this small range of positions.

Monday and today we made measurements of the surface of both a 100 mm 
wafer clipped to the standard sample holder and upon the Std. sample 
holder itself and have collected data that the holder is not landing 
precisely flat into the kinetic mounts.  The range of non-flatness is ~ 
0.500 mm!

Visual and SEM inspection of the ceramic balls and points or 'jewel' 
tips in the Piezo post yield information that indicated that Piezo one 
post ceramic ball may have become damaged and/or the point may be 
missing. All piezo post exhibit wear on their surfaces.

Users are requested to be vigilant of their actual working distances, 
and to report their WD data for specific positions across their samples 
and promptly report to this list if you see significant changes in WD as 
you move across your wafers greater than 250 um.
RAITH has been contacted last Friday and we will strive to correct this 
issue ASAP.
System is now in YELLOW Light Mode.
Thank you for your support!
James Conway



From jwc at snf.stanford.edu  Thu Feb 15 10:29:08 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 15 Feb 2007 10:29:08 -0800
Subject: schedule change announcement
Message-ID: <45D4A674.2050004@snf.stanford.edu>

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From jwc at snf.stanford.edu  Thu Feb 15 18:18:41 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 15 Feb 2007 18:18:41 -0800
Subject: [Fwd: Problem raith SNF 2007-02-15 17:43:49: Std sample holder out
 of level on Piezo post]
Message-ID: <45D51481.5050809@snf.stanford.edu>

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From anikak at stanford.edu  Sat Feb 17 09:33:00 2007
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Sat, 17 Feb 2007 09:33:00 -0800
Subject: Beam blanker logic state reversed
Message-ID: <1171733580.45d73c4c28928@webmail.stanford.edu>



Hi Raith Users,

Frank and I have run into the problem that the logic state on the beam
blanker is reversed, so when the beam says it's blanked it's not and vice
versa.  I seem to remember this happening recently and the answer was just
simply flipping a switch, but I've forgotten which one I should switch!  If
anyone can help, it'd be greatly appreciated.
I'll keep checking my e-mail (anikak at stanford.edu) or you can call the SNF
cleanroom phone: 355-3675

Thanks!!
-Anika


From fjaeckel at stanford.edu  Sat Feb 17 10:37:51 2007
From: fjaeckel at stanford.edu (Frank Jaeckel)
Date: Sat, 17 Feb 2007 10:37:51 -0800
Subject: Beam blanker logic state reversed
In-Reply-To: <1171733580.45d73c4c28928@webmail.stanford.edu>
References: <1171733580.45d73c4c28928@webmail.stanford.edu>
Message-ID: <1171737471.45d74b7f82afc@webmail.stanford.edu>

problem resolved with help from Ilya; just toggled beam switch on pattern
processor.

fj

Quoting Anika Kinkhabwala <anikak at stanford.edu>:

>
>
> Hi Raith Users,
>
> Frank and I have run into the problem that the logic state on the beam
> blanker is reversed, so when the beam says it's blanked it's not and vice
> versa.  I seem to remember this happening recently and the answer was
> just
> simply flipping a switch, but I've forgotten which one I should switch!
> If
> anyone can help, it'd be greatly appreciated.
> I'll keep checking my e-mail (anikak at stanford.edu) or you can call the
> SNF
> cleanroom phone: 355-3675
>
> Thanks!!
> -Anika
>


-- 
Dr. rer. nat. Frank J?ckel
mail address:   Department of Chemistry, M/C 5080
                333 Campus Drive
                mailbox #74
                Stanford University, Stanford, CA 94305-5080
street address: 369 North-South Mall, Stauffer I, Room 15
                Stanford University, Stanford, CA 94305-5080
phone:          +1-650-724-4052/51 (office/lab)
fax:            +1-650-725-0259    (indicate mailbox #74)
e-mail:         fjaeckel at stanford.edu
internet:       http://www.stanford.edu/~fjaeckel/


From renshen at stanford.edu  Mon Feb 19 20:50:33 2007
From: renshen at stanford.edu (Shen Ren)
Date: Mon, 19 Feb 2007 20:50:33 -0800
Subject: Loadlock error
Message-ID: <628a66910702192050i3b84e0dbj58387df464615d4e@mail.gmail.com>

Dear all,

I just got a loadlock error during unloading. Could anyone who know how to
clear this error call into the ebeam lab please? The number is 6507253673.
Thanks so much.


-- 
Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University
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From renshen at stanford.edu  Tue Feb 20 09:15:51 2007
From: renshen at stanford.edu (Shen Ren)
Date: Tue, 20 Feb 2007 09:15:51 -0800
Subject: Problem solved, next user can come in
Message-ID: <628a66910702200915g7a3db28dic06cd5029497090b@mail.gmail.com>

All,

Problem solved with Jame's kind help. Next user can come in and load sample.
I  am really sorry for the interruption.

-- 
Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University
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From chandran at gmail.com  Tue Feb 20 15:27:44 2007
From: chandran at gmail.com (anu chandran)
Date: Tue, 20 Feb 2007 15:27:44 -0800
Subject: done early. Raith is free now
Message-ID: <ecc0293e0702201527u34828dc3g5f248e9c5e61ab3f@mail.gmail.com>

-- 
Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851
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From jwc at snf.stanford.edu  Wed Feb 21 09:45:25 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 21 Feb 2007 09:45:25 -0800
Subject: Raith USA User Meeting at Three Beams Conference WED. May 30th, 2007
Message-ID: <45DC8535.4030406@snf.stanford.edu>

   <http://research.ihost.com/eipbn/>


Greetings Raith Users:

Raith 150 system users whom are planning to attend the Three Beams 
Conference aka Electron Ion Photon Beam Network 
<http://research.ihost.com/eipbn/> meeting may also wish to attend this 
RAITH Users meeting.  This is a great conference to discuss and network 
with other universities and industrial labs working with Beam Technologies.
Click on the banner above to go to the EIPBN website.

Best,

James Conway




-------- Original Message --------
Subject: 	Raith USA User Meeting
Date: 	Wed, 24 Jan 2007 10:00:22 -0500
From: 	Brian Whitehead <bw at raithusa.com>
To: 	'James Conway' <jwc at snf.stanford.edu>



Hello James Conway,

 

My name is Brian Whitehead and I am the new Raith USA Sales Engineer.  I 
am excited to be back in the world of nanotechnology after many years of 
selling semiconductor capital equipment. 

 

This email is to inform you about the Raith user meeting to be held at 
EIPBN 2007 in Denver, Colorado.  We will host dinner on Wednesday 
evening, May 30^th for all Raith customers who wish to attend.  In a few 
months I will send out the agenda and formal invitations.

 

Please look for us at the technical exhibits shown below; our first 
exhibit of 2007 is SPIE?s Advanced Lithography in San Jose at the end of 
February.  We will be featuring our new electron beam and ion beam 
lithography systems.

 

I look forward to meeting you. 

 

- Brian Whitehead

  Sales Engineer

  bw at raithusa.com <mailto:bw at raithusa.com>

  (631) 738-9500

  2805 Veteran?s Hwy., Suite 23

  Ronkonkoma, NY  11779

 

 

 

 

 

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From gthareja at stanford.edu  Thu Feb 22 03:17:44 2007
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Thu, 22 Feb 2007 03:17:44 -0800
Subject: raith available (3:00 am - onwards)
Message-ID: <1172143064.45dd7bd836678@webmail.stanford.edu>

cheers
G

-- 
Gaurav Thareja
Graduate Student
Solid State Electronics
Electrical Engineering
Stanford University
650-704-1029 (cell)
650-497-3556 (home)

"life is beautiful"


From jwc at snf.stanford.edu  Thu Feb 22 09:38:56 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 22 Feb 2007 09:38:56 -0800
Subject: Desperately Seeking to take any daytime cancellations next week Monday
 Tuesday Thursday Friday.
Message-ID: <45DDD530.5020908@snf.stanford.edu>

Greetings Raith Community:

Desperately Seeking to take any daytime cancellations next week Monday 
Tuesday Thursday afternoons or Friday morning.
Need more time on the system to catch up on tasking.

Please let me know if you intend to, or as the time approaches , cancel 
your RAITH writing session.

Thank you,

James Conway

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From jwc at snf.stanford.edu  Thu Feb 22 09:48:27 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 22 Feb 2007 09:48:27 -0800
Subject: Taking nominations for new RAITH Champions...
Message-ID: <45DDD76B.50208@snf.stanford.edu>

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From koshnick at stanford.edu  Fri Feb 23 15:59:59 2007
From: koshnick at stanford.edu (Nick Koshnick)
Date: Fri, 23 Feb 2007 15:59:59 -0800
Subject: Raith Free Monday (2/26) 4-10pm
Message-ID: <c7d5408d0702231559q63faed9eya48130ddaba5e8d4@mail.gmail.com>

4.5 hour session canceled.  Sorry for the late notice.


From gthareja at stanford.edu  Sun Feb 25 22:00:04 2007
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Sun, 25 Feb 2007 22:00:04 -0800
Subject: raith free tomorrow (2-4pm)
Message-ID: <1172469604.45e27764e6be6@webmail.stanford.edu>

old written samples yet to analyze. process not finished.

thanks
-gaurav

-- 
Gaurav Thareja
Graduate Student
Solid State Electronics
Electrical Engineering
Stanford University
650-704-1029 (cell)
650-497-3556 (home)

"life is beautiful"


From dinhthuc at hotmail.com  Mon Feb 26 07:19:01 2007
From: dinhthuc at hotmail.com (danny T)
Date: Mon, 26 Feb 2007 07:19:01 -0800
Subject: Raith Avail. on Tuesday evening from 9pm
Message-ID: <BAY106-F34EFD2893B598E3EC64F7FCE830@phx.gbl>

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From jwc at snf.stanford.edu  Mon Feb 26 12:00:10 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 26 Feb 2007 12:00:10 -0800
Subject: 2nd Announcement : Taking Nominations for New RAITH Champions...
 with Raith Champion List attachment
Message-ID: <45E33C4A.2000608@snf.stanford.edu>

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From faraon at stanford.edu  Mon Feb 26 20:34:32 2007
From: faraon at stanford.edu (Andrei Faraon)
Date: Mon, 26 Feb 2007 20:34:32 -0800
Subject: Raith free tomorrow 8am-10am
Message-ID: <28d3ece90702262034t1c770085n9dfb0213dbc4f5c@mail.gmail.com>

-- 
Andrei Faraon

Stanford University, Applied Physics
316 Via Pueblo Mall
Stanford, CA, 94305
Mobile: 650 714 7881
Office: 650 723 2279
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From zhangdw at stanford.edu  Tue Feb 27 03:14:39 2007
From: zhangdw at stanford.edu (Dawei)
Date: Tue, 27 Feb 2007 03:14:39 -0800
Subject: free from 1pm-6pm today, sample not ready
Message-ID: <000801c75a60$78a26f60$a68d0c80@zhangdw>

 

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From jwc at snf.stanford.edu  Tue Feb 27 10:10:09 2007
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 27 Feb 2007 10:10:09 -0800
Subject: ANNOUNCEMENT:  "Take A Spin with Me" -- Ebeam Resist Handling Training
 on the Headway.  Tuesday March 20, 2007 10:00  - 13:00
Message-ID: <45E47401.7010406@snf.stanford.edu>

*ANNOUNCEMENT:  "Take A Spin with Me" -- Ebeam Resist Handling Training 
on the Headway Coater.
*
Greetings Ebeam Lab Users,

I will be conducting my monthly *"Take A Spin with Me" *training class 
Tuesday March 20 from 10 AM  - 1 PM.
There is a sign up sheet posted on the white board in my office if you 
desire to sign up in advance.

This is a great opportunity for you to get acquainted with the specific 
points to employ when working with our Ebeam Resist materials in order 
to obtain high quality thin film coatings over your wafers for Electron 
Beam, Scanning Probe (SPL), and optical Nano-Lithography.
In these applications accurate control of polymer thickness is important 
in order to obtain consistent high quality lithography results.

We will be conducting this training on the Headway2 spin coater and 
users attending this session will gain their qualification on this tool.

Schedule of Events:

10 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL 
performing Pirhana substrate cleans and HF etching of the intrinsic 
native oxide on Silicon wafers.  All users are encouraged to have their 
substrates cleaned and ready to go for spinning by the session time; 
either coming out of the 150 degree Singe oven, or if you are working on 
oxides or nitrides, coming out of the YES HMDS Prime oven.

11:00 - 12:30 We can apply what ever resist system you desire for your 
work.

12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer

All interested parties are welcome to attend this session.  No need to 
reply to this email -- just show up!

Thank you for your interest in Ebeam Technologies here at Stanford 
Nanofabrication Facility,

James W. Conway
Ebeam Technology Group
Stanford Nanofabrication Facility
650-725-7075  office hour M-F 8:30 - 9:30 AM CIS 31

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From liwen.chang at stanford.edu  Wed Feb 28 00:02:44 2007
From: liwen.chang at stanford.edu (Li-Wen Chang)
Date: Wed, 28 Feb 2007 00:02:44 -0800
Subject: Raith free Wed. (2/28) 8pm-2am
Message-ID: <8ab79e460702280002n2e710da3v81bad1291121b3d0@mail.gmail.com>




From zhangy at stanford.edu  Wed Feb 28 00:37:42 2007
From: zhangy at stanford.edu (Yuan Zhang)
Date: Wed, 28 Feb 2007 00:37:42 -0800
Subject: Raith free Wed. (2/28) 8pm-2am
In-Reply-To: <8ab79e460702280002n2e710da3v81bad1291121b3d0@mail.gmail.com>
References: <8ab79e460702280002n2e710da3v81bad1291121b3d0@mail.gmail.com>
Message-ID: <1172651862.45e53f566c2b9@webmail.stanford.edu>

I took it. Thanks! And Thursday morning slot 7am-10am has been released.

Quoting Li-Wen Chang <liwen.chang at stanford.edu>:

> 
> 


Yuan Zhang
EE department