Loadlock error

Shen Ren renshen at stanford.edu
Mon Feb 19 20:50:33 PST 2007

Dear all,

I just got a loadlock error during unloading. Could anyone who know how to
clear this error call into the ebeam lab please? The number is 6507253673.
Thanks so much.

Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University
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