Loadlock error

Shen Ren renshen at stanford.edu
Mon Feb 19 20:50:33 PST 2007


Dear all,

I just got a loadlock error during unloading. Could anyone who know how to
clear this error call into the ebeam lab please? The number is 6507253673.
Thanks so much.


-- 
Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University
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