From mpovinel at stanford.edu Fri Jan 5 13:40:37 2007 From: mpovinel at stanford.edu (Michelle Povinelli) Date: Fri, 5 Jan 2007 13:40:37 -0800 Subject: Raith reservation released for 3pm-on Message-ID: <4a80035736bdecf4d44f4fed6b94dbee@stanford.edu> Sample not ready. Sorry for the late notice. Michelle From jwconway at stanford.edu Mon Jan 8 16:20:11 2007 From: jwconway at stanford.edu (James Conway) Date: Mon, 8 Jan 2007 16:20:11 -0800 Subject: RAITH Status : System will be availble to RAITH Champion Users Tuesday at 6 PM... Message-ID: <1168302011.45a2dfbbcd44c@webmail.stanford.edu> Happy New Year 2007 to the Raith Community, We are in the process of bringing up the RAITH system and will continue to be off line to users while we are running in the FE-Gun overnight. Working with Zeiss and RAITH USA field service tonight and tomorrow we are performing some preventative maintenance and testing of the Laser Interferometer Stage, Piezo support posts, and the Nelab cooling system loops to the System. We hope to have the system available for RAITH Champion Users tomorrow evening after 18:00 hours and should have the system fully qualified by the end of the day Wednesday. All other users may schedule for anytime after 18:00 hours Wednesday. Users with reservations before this time should remove their CORAL reservation and reschedule. Please refer to my previous message in the archives to review the plan still in place: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?160:mss:1840:200612:gpchngmolfcpmnodaoec Thank you for your support! James Conway From jwc at snf.stanford.edu Wed Jan 10 15:05:55 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 10 Jan 2007 15:05:55 -0800 Subject: Urgent request for windows NT 2000 assistance on the RAITH Computer Message-ID: <45A57153.5040203@snf.stanford.edu> Greetings Raith Community: Progress was made this week in bringing up the system and getting the stage and loader issues resolved and I am nearly ready to qualify the system... Now I have encountered significant problems with the RAITH PC after rebooting the system this morning. It appears that I have a necessary file /*ntoskernal.exe*/ that has become corrupted. This prevents me from getting the OS up for further testing or operations of the RAITH system. * Are there any Windows NT 2000 OS experts in the house? Please come on down and help me resolve this matter. * Thank you for your support, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jan 10 17:21:01 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 10 Jan 2007 17:21:01 -0800 Subject: RAITH STATUS 5 PM - system continues to be off line to users... Message-ID: <45A590FD.5040906@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jan 10 20:02:48 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 10 Jan 2007 20:02:48 -0800 Subject: RAITH STATUS 8 pm WED... WINDOWS Y2k OS RECOVERED AND NOW DEFRAGING DRIVES. QUALIFICATION TOMORROW AM Message-ID: <45A5B6E8.70008@snf.stanford.edu> Greetings: RAITH STATUS 8 pm WED... WINDOWS Y2K OS RECOVERED AND NOW DEFRAGING DRIVES. QUALIFICATION TOMORROW AM I hope to return to users queue in the afternoon. Maintain your reservations... more to follow after qualification. Good Night, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jan 11 18:14:39 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 11 Jan 2007 18:14:39 -0800 Subject: RAITH system passes qualification and is up and on line for users. PLEASE READ ALL... Message-ID: <45A6EF0F.1040307@snf.stanford.edu> *Greetings Raith Community:* The RAITH 150 Ebeam system has passed it qualification run superbly with excellent Electron Beam Lithography structures having been written. High Power Visual Microscope inspection at 200, 500, 1000X using Polarized Light exhibits excellent write field to write field stitching with no visible breaks in the vernier patterns. Overlay alignment exposures to previously written patterns on wafer 08222006_16, which was also used to re-qualify the system after downtime in December, also shows no breaks in the overlaid pattern structures. I have saved all the default aperture and gun alignment settings and the Write Field Alignment Zoom, Shift, and Rotations values to the system database. Users can be comfortable to accept these settings when prompted by the system after Load Lock exchanges have completed as a good starting point for your EBL operations. SHORT CONTAMINATION DOTS MEASURE 10 - 11 nm. LEFT HAND MOUSE BUTTON DOTS MEASURE 22 - 25 nm. IMAGE RIPPLE FROM VIBRATION IS LESS THAN 4 nm THIS MORNING. DOSE TO CLEAR for 107 nm 2% 950K PMMA in Anisole is 110 to 115 uC/cm**2. Optimized dose for single pixel lines is 330 - 360 pC/cm I have written a number of pattens that I will need to SEM and plan to develop ebeam scan measurement files to measure the sub 100 nm features. I will attempt to complete these task next week during cancellations on the system. _*PLEASE READ ALL OF THESE NOTICES:*_ UNTIL FURTHER NOTICE *ALL USERS ARE RESTRICTED TO 10 keV AND BELOW ACCELERATION VOLTAGE* WHILE WE ALLOW THE GUN TO RUN IN AND THE GUN VACUUM PRESSURES TO FALL TO THE MID E-10 TORR LEVEL. I WILL START ELEVATED ACC. VOLTAGE TESTING LATER NEXT WEEK. *I REQUEST THAT ALL USERS WORKING ON THE SYSTEM THIS WEEK AND NEXT TO PLEASE POST A BRIEF SUMMARY OF THEIR RESULTS OBTAINED ON THE SYSTEM* TO CERTIFY MY RESULTS AND TO IDENTIFY ANY OTHER ISSUES TO ADDRESS ON THE SYSTEM. * _OUTSTANDING ISSUES TO BE RESOLVED:_* *ZEISS SMT FIELD SERVICE CONCERNS:* THE PRIMARY REASON FOR THE DELAY IN THE STARTUP AND QUALIFICATION WAS THAT ZEISS SMT DID NOT HONOR COMMITMENTS THEY HAD MADE FOR THURSDAY LAST WEEK TO PERFORM THE STARTUP OF THE SYSTEM. MONDAY THEY SHOWED UP TO PERFORM THIS WORK WHICH THEN DELAYED WORK RAITH FIELD SERVICE WAS TO PERFORM MONDAY. THIS WORK WAS COMPLETED IN A MARATHON OF TASKING BY JOEL FRIDMANN AND MYSELF MONDAY THROUGH LATE TUESDAY. FINALLY A LOSS OF THE RAITH PC OPERATING SYSTEM BOOT FUNCTION TOOK ALL OF YESTERDAY TO RESOLVE. ZEISS FIELD SERVICE HAS NOT YET RETURNED TO COMPLETE ADJUSTMENTS TO THE MAG. AMPLIFIER CENTERING AND STIGMATION SECTION CENTERING FUNCTIONS OF THE SEM AS PROMISED. THEY HAVE NOT RESPONDED TO MY EMAILS OR CALLS. SO USERS MAY SEE SHIFTS IN THE POSITION OF THE SEM IMAGE WHEN YOU ARE ADJUSTING STIGMATION AT HIGH MAGNIFICATION. [BE SURE TO PERFORM YOUR APERTURE ALIGNMENT CAREFULLY AND COMPLETELY BEFORE MOVING TO STIGMATION TO AVOID CONFUSION.] *FE-GUN EMISSION LEVELS:* WE WILL BE RAISING THE EXTRACTION VOLTAGE AND POSSIBLY FILAMENT CURRENT TO INCREASE EMISSION OF THE FE-GUN TO LEVELS WE NORMALLY HAVE HAD IN THE PAST AND TO OPTIMAL SETTINGS FOR EBEAM LITHOGRAPHY. NOTE: THEIR IS SOME DEEPER SCRATCHES IN THE SURFACE OF THE STD.SAMPLE HOLDER. ALL USERS ARE REQUESTED TO BE CAREFUL LOADING THEIR SUBSTRATES INTO THE SYSTEM AND TO EMPLOY PLASTIC / FRP OR TEFLON COATED TWEEZERS TO PERFORM THE FINAL POSITIONING OF THEIR SAMPLES. *AVOID CONTAMINATION TO THE SYSTEM:* *ALL USERS SHOULD BE VIGILANT TO AVOID ADDING CONTAMINANTS TO THE SYSTEM *BY CHANGING THEIR GLOVES AFTER THEY OPEN THE LOAD LOCK DOOR BEFORE REMOVING THE STD. SAMPLE HOLDER. NO WAXES, EPOXIES, GREASES, OR CARBON TAPE OTHER THAN SPECTRA-PURE CARBON DOTS ARE TO BE INTRODUCED IN TO THE SYSTEM. *ALL SUBSTRATES SHOULD BE SOFT BAKED AT 90 DEGREES OR ABOVE FOR 2 MINUTES BEFORE LOADING INTO THE SYSTEM. *PLEASE CONTACT ME DURING MY OFFICE HOUR IF YOU HAVE ANY QUESTIONS, PROBLEMS, OR CONCERNS. THANK YOU FOR YOUR SUPPORT DURING THE COURSE OF THIS DIFFICULT START UP FOR THE NEW YEAR. LETS PUSH THE LIMITS OF WHAT WE CAN DO ON THE SYSTEM IN 2007! ALL THE VERY BEST TO EVERYONE IN THE NEW YEAR, JAMES CONWAY * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jan 12 16:02:21 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 12 Jan 2007 16:02:21 -0800 Subject: ANNOUNCEMENT: RAITH Group XXIV -- Intensive 4 day short course. January 23 -26, 2007 TUESDAY - FRIDAY 10 AM - 6 PM Message-ID: <45A8218D.3020400@snf.stanford.edu> *Greetings RAITH Group X XIV: Due to many challenges on the start up of the RAITH system after the break, I have made a decision to push back the RAITH Class by one week to allow users working on the system to catch up on their work before we take the system over for the class. ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXIV**. If you are listed in the CC: section of this email; I still am in need of further information or a commitment from you, and hope to add you in the next class. Any RAITH user wishing to attend are also welcome if you desire a review of operations on the RAITH system. ** We wish to invite all interested parties to the Tuesday morning lecture session and demo layer one training following at 2 PM - 6 PM in the afternoon. All are also welcome to attend as observers the other 'hands-on' sessions through the week. All Users are encouraged to join any Raith Champion when they are on the system to gain further exposure to the system. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXIV Training course to be held January 23 -26, 2007. The schedule follows along with a listing of Participants whom you will be working with as a Team. This will be an intensive four day workshop. _ *You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _*NOTE:* *_There are prerequisites you must complete before attending this class:_* You must have recent relevant SEM and LITHO experience before your can sit for this class. Please see me directly during my office hour if you have any questions. *Please bring examples of your best high resolution SEM work to the first class.** If you don't have intermediate SEM operations experience you will be dropped from this class. * Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. Next class is to be scheduled in the weeks after your RAITH Class. There is a separate sign up for this class on the white board in my office at CIS 31. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXIV** Schedule: ** * *Raith 150 Basic Users Training ? Intensive 4 Day Short Course* *January 23 -26, 2007 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday January 23, 2007: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS-X 201 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday January 24, 2007: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday January 25, 2007: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday January 26, 2007: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where- you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can stop by my office hour and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM CIS 31) ------------------------------------------------------------------------------------------------------------------------------------------- *PARTICIPANTS IN RAITH GROUP XXIV**:* 1. Anu Chandran chandran at stanford.edu Coral: anu Brongersma Group Project: Tunnel Junction Plasmonic device 2. Gaurav Thareja Coral: gthareja at stanford.edu Nishi Group Project: Silicon Pillars for devices. 3. Jong-Hwa Baek Coral: ______ Ben Yoo Group, UCDAVIS Project: Photonic Crystal devices. 4. Paul Leu pleu at stanford.edu Coral: pleu Paul McIntyer Group: Project: Ge Nanowires 5. John Liu sqliu at stanford.edu Coral: sqliu Brongersma Group Project: plasmonics. 6. Anika Kinkhabwala anikak at stanford.edu Coral: anikak WE Moerner Group Project: nano-photonics bowtie for optical enhancement. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 384 bytes Desc: not available URL: From mpovinel at stanford.edu Sat Jan 13 15:33:39 2007 From: mpovinel at stanford.edu (Michelle Lynn Povinelli) Date: Sat, 13 Jan 2007 15:33:39 -0800 Subject: Raith free through 2:30am Message-ID: <1168731219.45a96c53eb15f@webmail.stanford.edu> From faraon at stanford.edu Mon Jan 15 11:28:35 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Mon, 15 Jan 2007 11:28:35 -0800 Subject: Raith problem Message-ID: <28d3ece90701151128u295a5433o155c7c74b9b31f13@mail.gmail.com> Hello, The vacuum in the stage chamber is not low enough, so the current user can not unload his sample. I think the vacuum became bad because there was a water flow failure at 6:28 in the morning (water flow resumed at 7:28) which may have caused a shut down of the pumps that maintain the vacuum. For the moment I put the Raith in red mode, because neither me or the Raith champions know how to solve this problem. Regards, -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ycjun at stanford.edu Tue Jan 16 15:59:18 2007 From: ycjun at stanford.edu (Young Chul Jun) Date: Tue, 16 Jan 2007 15:59:18 -0800 Subject: Raith free from tomorrow 7pm Message-ID: <1168991958.45ad66d6bdaf7@webmail.stanford.edu> Sample is not yet ready. Sorry for late notice.. - Y.C. From jwc at snf.stanford.edu Wed Jan 17 11:16:49 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 17 Jan 2007 11:16:49 -0800 Subject: Great Raith Quesion: Any Suggestions for SEM Imaging at High EHT? In-Reply-To: <1166336016.4584e0103b672@webmail.stanford.edu> References: <45832A51.1040007@snf.stanford.edu> <1166336016.4584e0103b672@webmail.stanford.edu> Message-ID: <45AE7621.8020501@snf.stanford.edu> Bing Dai wrote: Hi James, I tried to do exposure under 25keV, Aperture 30 tonight but the noise was so high that I couldn't even find the latex spheres, which were very easy to locate under lower EHTs like 10keV. I also noticed that the aperture was very dark under emission mode/scan speed 9, although it was centered in Gun Alignment. I also tried 25keV, aperture 20 but the gun alignment was even worse, the center aperture nearly totally dark. So do you have any suggestions for adjusting brightness/contrast and doing focus/alignment under high EHT? Thanks a lot. Bing Dai Greetings Bing Dai, This is an excellent question and will share my response with the greater RAITH community too! The RAITH's In-Lens Ultra High Efficiency detector does not have very good performance above 20 keV acceleration voltage! More likely you will need to use the normal Secondary Electron detector called SE in the detector selection panel. This is simply a scintillation phosphor disk and a photo-multiplier tube hooked to the back of it. It has much lower point to point resolution than the other In-lens SE detector but will perform better at higher acceleration voltages. (20 keV and Up...) Another issue to keep in mind is that at higher acceleration voltages you have a greater penetration depth of the Electron beam into, and in this case through the latex spheres and into the substrate below. This gives information on the material (Z contrast) but at a loss of some of the surface or topographic contrast signal in the image. Finally note that the latex spheres are simply hydrocarbons, made mostly of polystyrene, and as such they have relatively little electron scattering cross section resulting in very low secondary electron yield to the detectors and reducing the signal to noise levels in the SE detectors. HINT for Users: My normal practice is to burn a long contamination shot dot then carefully focus and stigmate on this feature. I can then burn smaller contamination dots easily; often by reducing the SEM magnification, which increases the field of view, assisting in out-gassing a suitable volume of hydrocarbons from the resist to aid in contamination dot formation. Hoping that this information is useful to you. Maybe other Users will wish to expand and add on this thread? Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From lsmoore at stanford.edu Wed Jan 17 11:39:53 2007 From: lsmoore at stanford.edu (Lindsay Moore) Date: Wed, 17 Jan 2007 11:39:53 -0800 Subject: Great Raith Quesion: Any Suggestions for SEM Imaging at High EHT? In-Reply-To: <45AE7621.8020501@snf.stanford.edu> References: <45832A51.1040007@snf.stanford.edu> <1166336016.4584e0103b672@webmail.stanford.edu> <45AE7621.8020501@snf.stanford.edu> Message-ID: <4dfce5b30701171139q6e8f7b8fva683dab5b42c805@mail.gmail.com> James, Bing, et al, When I do writes at 30kV and find that I am having some imaging problems, I do 2 rounds of alignment and focusing using the same aperture: one at 10kV and then again at 30kV. I initially ramp the beam to 10kV and drive around to locate the stage positions of the latex spheres or other objects that I want to focus on. I do the initial focus and alignment, writing down the stage positions of the features. I then ramp up to 30kV, and since I am in almost perfect focus already, and I know the stage positions of the features, it is much easier to find them and do the penultimate focus and alignments. My final step is to burn a very small contamination dot and focus and align on that. As James mentioned, I use the SE detector for this. Alternatively, it might be worthwhile to add a lithography step where you write a pattern on your chip corner that you metallize and use for focus and alignment. It is much easier to image metal at 30kV. (keep in mind if you do this that you are focusing on the chip surface and not the resist surface, so you will need to make a dose array on a chip where you focus on a metallized chip surface if you want to get the finest features.) Lindsay On 1/17/07, James Conway wrote: > > Bing Dai wrote: > > Hi James, > > I tried to do exposure under 25keV, Aperture 30 tonight but the noise was so > high that I couldn't even find the latex spheres, which were very easy to > locate under lower EHTs like 10keV. I also noticed that the aperture was very > dark under emission mode/scan speed 9, although it was centered in Gun > Alignment. I also tried 25keV, aperture 20 but the gun alignment was even > worse, the center aperture nearly totally dark. > > So do you have any suggestions for adjusting brightness/contrast and doing > focus/alignment under high EHT? Thanks a lot. > > Bing Dai > > > Greetings Bing Dai, > This is an excellent question and will share my response with the greater > RAITH community too! > > The RAITH's In-Lens Ultra High Efficiency detector does not have very good > performance above 20 keV acceleration voltage! More likely you will need to > use the normal Secondary Electron detector called SE in the detector > selection panel. This is simply a scintillation phosphor disk and a > photo-multiplier tube hooked to the back of it. It has much lower point to > point resolution than the other In-lens SE detector but will perform better > at higher acceleration voltages. (20 keV and Up...) > > Another issue to keep in mind is that at higher acceleration voltages you > have a greater penetration depth of the Electron beam into, and in this case > through the latex spheres and into the substrate below. This gives > information on the material (Z contrast) but at a loss of some of the > surface or topographic contrast signal in the image. > > Finally note that the latex spheres are simply hydrocarbons, made mostly > of polystyrene, and as such they have relatively little electron scattering > cross section resulting in very low secondary electron yield to the > detectors and reducing the signal to noise levels in the SE detectors. > > > HINT for Users: > My normal practice is to burn a long contamination shot dot then carefully > focus and stigmate on this feature. I can then burn smaller contamination > dots easily; often by reducing the SEM magnification, which increases the > field of view, assisting in out-gassing a suitable volume of hydrocarbons > from the resist to aid in contamination dot formation. > > Hoping that this information is useful to you. Maybe other Users will wish > to expand and add on this thread? > > Thank you, > > James Conway > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jan 18 19:03:49 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Jan 2007 19:03:49 -0800 Subject: Off RAITH SYSTEM EARLIER THAN PLANNED -- system is available for next users... Message-ID: <45B03515.5070802@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jan 19 12:02:15 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 19 Jan 2007 12:02:15 -0800 Subject: RAITH STATUS: Users can now operate the RAITH system up to but not to exceed 20 keV Message-ID: <45B123C7.3000408@snf.stanford.edu> An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Sat Jan 20 10:19:15 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Sat, 20 Jan 2007 10:19:15 -0800 Subject: Raith free now to 1pm Message-ID: <1169317155.45b25d234d6c7@webmail.stanford.edu> Sample is not ready. Yuan Zhang EE department From fjaeckel at stanford.edu Mon Jan 22 09:06:15 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Mon, 22 Jan 2007 09:06:15 -0800 Subject: released WED 6-8.30PM Message-ID: <1169485575.45b4ef077ccc0@webmail.stanford.edu> -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu internet: http://www.stanford.edu/~fjaeckel/ From ifushman at stanford.edu Wed Jan 24 01:18:46 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Wed, 24 Jan 2007 01:18:46 -0800 Subject: beam blanker issue finished early Message-ID: <28bfad130701240118u4a3d0f30x5be25251b33b417c@mail.gmail.com> can't align writefield because the logic on the beam blanker is flipped. no more time to write anything meaningful. next user can have this. -------------- next part -------------- An HTML attachment was scrubbed... URL: From sikola at fme.vutbr.cz Wed Jan 24 13:21:16 2007 From: sikola at fme.vutbr.cz (Tom=?ISO-8859-2?Q?=E1=B9_=A9IKOLA?=) Date: Wed, 24 Jan 2007 22:21:16 +0100 Subject: Raith free today since 6pm till 9pm Message-ID: <1169673676.89281e00sikola@fme.vutbr.cz> From jwconway at stanford.edu Wed Jan 24 18:33:50 2007 From: jwconway at stanford.edu (James Conway) Date: Wed, 24 Jan 2007 18:33:50 -0800 Subject: Blanker issuese resolved this morning. System is now available! Message-ID: <1169692430.45b8170ecc63c@webmail.stanford.edu> Greetings RAITH community, Blanker issues were resolved first thing today. Raith system is up and in fine shape for writing. The right hand switch on the ELPHY plus pattern generater was found switched to 'down' position which places the system in BEAM 'on' state. Normally this is for testing by field service people. Users in the Ebeam LAB! Please don't flip the switches, you impact other peoples work. System is now avaible for your use! Jun Pan did not show up for his 18:00 session -- system is now available to the next user whom enables coral from in the Lab. Good Evening, James Conway From xinranw at stanford.edu Wed Jan 24 23:43:50 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Wed, 24 Jan 2007 23:43:50 -0800 Subject: session finished earlier Message-ID: <22ffcd060701242343r653ce63aw17331e604169cb7@mail.gmail.com> My write has already finished, next user may come on the system now. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From fjaeckel at stanford.edu Fri Jan 26 13:19:14 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Fri, 26 Jan 2007 13:19:14 -0800 Subject: released Sunday 9-11 AM Message-ID: <1169846354.45ba70522c5c4@webmail.stanford.edu> -- Dr. rer. nat. Frank J?ckel mail address: Department of Chemistry, M/C 5080 333 Campus Drive mailbox #74 Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 Stanford University, Stanford, CA 94305-5080 phone: +1-650-724-4052/51 (office/lab) fax: +1-650-725-0259 (indicate mailbox #74) e-mail: fjaeckel at stanford.edu internet: http://www.stanford.edu/~fjaeckel/ From bdai at stanford.edu Fri Jan 26 20:45:15 2007 From: bdai at stanford.edu (Bing Dai) Date: Fri, 26 Jan 2007 20:45:15 -0800 Subject: Raith Free For Next User Message-ID: <1169873115.45bad8db7ec95@webmail.stanford.edu> Finished early. Thanks. -Bing From ifushman at stanford.edu Sun Jan 28 13:16:00 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Sun, 28 Jan 2007 13:16:00 -0800 Subject: taking zhangdw slot Message-ID: <28bfad130701281316s7a0e4e9ei6a05d729b870ff5c@mail.gmail.com> -ilya -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Sun Jan 28 21:30:16 2007 From: bdai at stanford.edu (Bing Dai) Date: Sun, 28 Jan 2007 21:30:16 -0800 Subject: Raith Free Now Message-ID: <1170048616.45bd8668d4b6c@webmail.stanford.edu> Next user (englund) didn't show up. -Bing From dkozak at ucsc.edu Mon Jan 29 16:14:18 2007 From: dkozak at ucsc.edu (Dmitry Alexander Kozak) Date: Mon, 29 Jan 2007 16:14:18 -0800 Subject: Done early Message-ID: Hello, done 2 hours before end of time. Next user? Problem: could not get any SEM image. Could see camera view, but no SEM. Re-loaded both programs several times, still no change. Is it just my account or did anyone else had the same problem? Dmitry From jwc at snf.stanford.edu Wed Jan 31 09:39:34 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 31 Jan 2007 09:39:34 -0800 Subject: Please return the RAITH Off Line software dongles to James Conway Message-ID: <45C0D456.1000802@snf.stanford.edu> Greetings: Please return the RAITH Off Line software dongles to James Conway immediately. Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Wed Jan 31 11:58:18 2007 From: bdai at stanford.edu (Bing Dai) Date: Wed, 31 Jan 2007 11:58:18 -0800 Subject: Raith free for next user Message-ID: <1170273498.45c0f4da63f25@webmail.stanford.edu> Finished early. Thanks. -Bing