curing pmma

Filip Crnogorac filip at
Fri Jun 8 15:47:20 PDT 2007

Hi Raith users,

does anyone have experience with curing PMMA resist to achieve greater  
etch resistance? I heard of people using DUV (240nm) exposure for  
15min to harden the PMMA. Any info would be helpful.



Ph.D. Candidate, Stanford University
Department of Electrical Engineering
Center for Integrated Systems
B-103, 420 Via Palou
Stanford, CA 94305

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