Etching Silicon on Pieces
S. Ekin Kocabas
kocabas at stanford.edu
Sun Jun 10 13:25:20 PDT 2007
Dear Raith Users,
I would like to be able to etch silicon on SOI pieces. While I'm waiting
for the SOI wafers to arrive, I'm testing the process flow with full
silicon wafers. I have used P5000 to etch silicon on full wafers, and
the results look alright. Which tools do you use to do silicon etching
on pieces with PMMA on them? What kind of problems do you face?
I'd appreciate any information you can provide. If you could reply to my
email ( kocabas at stanford.edu ), I'll compile the answers in a nice form
and send it to the Raith list.
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