Etching Silicon on Pieces

S. Ekin Kocabas kocabas at
Sun Jun 10 13:25:20 PDT 2007

Dear Raith Users,

I would like to be able to etch silicon on SOI pieces. While I'm waiting 
for the SOI wafers to arrive, I'm testing the process flow with full 
silicon wafers. I have used P5000 to etch silicon on full wafers, and 
the results look alright. Which tools do you use to do silicon etching 
on pieces with PMMA on them? What kind of problems do you face?

I'd appreciate any information you can provide. If you could reply to my 
email ( kocabas at ), I'll compile the answers in a nice form 
and send it to the Raith list.

Thank you,


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