From yueruilu at stanford.edu Tue May 1 01:15:11 2007 From: yueruilu at stanford.edu (Yuerui Lu) Date: Tue, 1 May 2007 01:15:11 -0700 Subject: reservation Thursday 11:00am to 1:00pm released Message-ID: <9dc2cbc0705010115h44137450r8dc86266ed670ebb@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu May 3 11:04:40 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 03 May 2007 11:04:40 -0700 Subject: It's Performance review time ... please send in your comments. Message-ID: <463A2438.6050904@snf.stanford.edu> *Greetings Ebeam and RAITH Users working at SNF:* Over the last year I have endeavored to engage fully with all whom approached me for assistance and help on their projects while working in the Ebeam Lab. Within this effort I have worked to created Community within the researcher groups working on Ebeam tools so together we can advance our skills and fabrication capabilities in and ongoing collaborative effort. . It has been much to my pleasure to work with the great diversity of micro and nano-technology projects, and with so many people from all around the world here at the Stanford Nanofabrication Facility. So I have a favor to ask of you. It is coming up to my annual Performance Review time again. If you were happy with my level of engagement on your projects, and in particular the RAITH training class you attended in the last year, could you please be so kind to send a brief email to Mary Tang and also 'CC' Paul Rissman with your comments. Mary Tang mtang at stanford.edu and Paul Rissman rissman at snf.stanford.edu So very often they only hear complaints from people, and it is only very rarely do they hear from persons whom are pleased with their work that it gets reported to management. However if you are unhappy with my work in any way I would request you would also send me a email and state why so that I can improve in the future. All the very best in your research here at the Stanford Nanofabrication Facility. Thank you for your support! James Conway Ebeam Lab - SNF. 001-650-725-7075 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From yiyangg at stanford.edu Thu May 3 19:30:39 2007 From: yiyangg at stanford.edu (yiyangg at stanford.edu) Date: Thu, 03 May 2007 19:30:39 -0700 Subject: taking free raith now Message-ID: <20070503193039.tglfzlormkw84oog@webmail.stanford.edu> I have started now and plan to work through my reservation. Yiyang From zhangy at stanford.edu Fri May 4 17:14:56 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 4 May 2007 17:14:56 -0700 Subject: Raith start early Message-ID: <20070505001450.388094C2CF@smtp3.stanford.edu> The tool is available now, so I'll start early. Thanks! -------------- next part -------------- An HTML attachment was scrubbed... URL: From kdegreve at stanford.edu Sat May 5 02:35:31 2007 From: kdegreve at stanford.edu (kdegreve at stanford.edu) Date: Sat, 05 May 2007 02:35:31 -0700 Subject: loadlock error In-Reply-To: <462F94AB.7080101@snf.stanford.edu> References: <462F94AB.7080101@snf.stanford.edu> Message-ID: <20070505023531.p9b461wh1yosg4w4@webmail.stanford.edu> Dear colleagues, I'm encountering a loadlock error trying to unload samples. After entering the robot arm, the message 'error 212 - move robotarm in' appeared; I followed the instructions to manually remove the robotarm from the system (which worked, the robotarm did get out), but then two other messages appeared: 'error 213 - move robotarm out' and 'error 214 - close valve'. The same procedure to manually remove the robotarm kept on reappearing. I've tried calling James for the past few hours, but either his phone is off, or he doesn't have cell phone reception. Could anybody who knows how to resolve this problem, please call me at 650 283 0803? Many thanks and best regards, Kristiaan. From kdegreve at stanford.edu Sat May 5 03:11:08 2007 From: kdegreve at stanford.edu (kdegreve at stanford.edu) Date: Sat, 05 May 2007 03:11:08 -0700 Subject: loadlock error unresolved - system down, status yellow In-Reply-To: <20070505023531.p9b461wh1yosg4w4@webmail.stanford.edu> References: <462F94AB.7080101@snf.stanford.edu> <20070505023531.p9b461wh1yosg4w4@webmail.stanford.edu> Message-ID: <20070505031108.1tpjf11t5o4cok04@webmail.stanford.edu> Dear colleagues, due to a loadlock error, and after consultation with Ilya Fushman (James Conway could not be reached) the system is down until further notice. The status has been switched to yellow. My apologies for the inconvenience, Kristiaan. From ifushman at stanford.edu Sat May 5 12:20:22 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Sat, 5 May 2007 12:20:22 -0700 Subject: loadlock error unresolved - system down, status yellow In-Reply-To: <20070505031108.1tpjf11t5o4cok04@webmail.stanford.edu> References: <462F94AB.7080101@snf.stanford.edu> <20070505023531.p9b461wh1yosg4w4@webmail.stanford.edu> <20070505031108.1tpjf11t5o4cok04@webmail.stanford.edu> Message-ID: Load Lock error cleared with James' help. I won't use my reservation, so the next user can come on. James requests that if anyone encounters errors, they should be reported to him. -ilya On 5/5/07, kdegreve at stanford.edu wrote: > > Dear colleagues, > > due to a loadlock error, and after consultation with Ilya Fushman > (James Conway could not be reached) the system is down until further > notice. The status has been switched to yellow. > > My apologies for the inconvenience, > > Kristiaan. > -- Ilya Fushman Applied Physics Stanford University cvitae.org/ilya/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From kdegreve at stanford.edu Sat May 5 12:29:51 2007 From: kdegreve at stanford.edu (Kristiaan De Greve) Date: Sat, 5 May 2007 12:29:51 -0700 Subject: loadlock error unresolved - system down, status yellow In-Reply-To: References: <462F94AB.7080101@snf.stanford.edu> <20070505023531.p9b461wh1yosg4w4@webmail.stanford.edu> <20070505031108.1tpjf11t5o4cok04@webmail.stanford.edu> Message-ID: <3EE8DBB0553644078E840DE85C8DE233@consigliere> Ok, I'll take it, thanks a bunch for your help! Kristiaan. ----- Original Message ----- From: Ilya Fushman To: kdegreve at stanford.edu Cc: raith at snf.stanford.edu Sent: Saturday, May 05, 2007 12:20 PM Subject: Re: loadlock error unresolved - system down, status yellow Load Lock error cleared with James' help. I won't use my reservation, so the next user can come on. James requests that if anyone encounters errors, they should be reported to him. -ilya On 5/5/07, kdegreve at stanford.edu wrote: Dear colleagues, due to a loadlock error, and after consultation with Ilya Fushman (James Conway could not be reached) the system is down until further notice. The status has been switched to yellow. My apologies for the inconvenience, Kristiaan. -- Ilya Fushman Applied Physics Stanford University cvitae.org/ilya/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From faraon at stanford.edu Sat May 5 20:49:59 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Sat, 5 May 2007 20:49:59 -0700 Subject: Raith free until 4am Message-ID: <28d3ece90705052049tbc0c70aqd08024c7a99db368@mail.gmail.com> Dirk Englund just called me that he will not be able to make it to the cleanroom tonight. Raith is available for the next user. -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Sat May 5 23:42:24 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Sat, 5 May 2007 23:42:24 -0700 Subject: Raith free Sunday 10am-3pm Message-ID: <20070506064216.6082A4BE0B@smtp3.stanford.edu> Sample not ready. Sorry for the late notice. -Yuan -------------- next part -------------- An HTML attachment was scrubbed... URL: From shinichikoseki at gmail.com Sun May 6 09:37:16 2007 From: shinichikoseki at gmail.com (Shinichi Koseki) Date: Sun, 6 May 2007 09:37:16 -0700 Subject: Raith free Sunday 10am-3pm In-Reply-To: <20070506064216.6082A4BE0B@smtp3.stanford.edu> References: <20070506064216.6082A4BE0B@smtp3.stanford.edu> Message-ID: <3b532e5a0705060937t6bebb1f1kea40fb5c3929934f@mail.gmail.com> I'll take it. Thanks. Shinichi On 5/5/07, Yuan Zhang wrote: > > > > Sample not ready. Sorry for the late notice. > > > > -Yuan From panjun at stanford.edu Sun May 6 14:37:27 2007 From: panjun at stanford.edu (panjun at stanford.edu) Date: Sun, 06 May 2007 14:37:27 -0700 Subject: raith free 3pm today Message-ID: <20070506143727.hgpenbed0i5ss4gs@webmail.stanford.edu> Sample can't be ready. From jwc at snf.stanford.edu Mon May 7 12:11:36 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 07 May 2007 12:11:36 -0700 Subject: Advertisement: Share the Ride? Message-ID: <463F79E8.70900@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: pathwaystosuccess.jpg Type: image/jpeg Size: 52351 bytes Desc: not available URL: From ahazeghi at stanford.edu Mon May 7 12:13:51 2007 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 7 May 2007 12:13:51 -0700 Subject: will start late Message-ID: <20070507191350.6EBFD4BDE7@smtp2.stanford.edu> Will start at 17:30, current user can use the system until then. Thanks, Arash ---------------------------------------------------------------------- Arash Hazeghi PhD Candidate, Stanford Center for Integrated Systems, CIS-X 300, 420 via Palou Mall Stanford, CA, 94305 phone: +1(650) 725-0418 http://www.stanford.edu/~ahazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From kdegreve at stanford.edu Mon May 7 12:49:12 2007 From: kdegreve at stanford.edu (Kristiaan De Greve) Date: Mon, 7 May 2007 12:49:12 -0700 Subject: raith free 6-9.30 pm tomorrow (Tuesday) In-Reply-To: <463F79E8.70900@snf.stanford.edu> Message-ID: <000401c790e0$c99e7e70$582242ab@Methusalem> . samples won't get ready in time. My apologies for the late notice. Best regards, Kristiaan. -------------- next part -------------- An HTML attachment was scrubbed... URL: From anikak at stanford.edu Mon May 7 12:53:34 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Mon, 07 May 2007 12:53:34 -0700 Subject: raith free 6-9.30 pm tomorrow (Tuesday) In-Reply-To: <000401c790e0$c99e7e70$582242ab@Methusalem> References: <000401c790e0$c99e7e70$582242ab@Methusalem> Message-ID: <20070507125334.5j5nmyp177cwwccs@webmail.stanford.edu> I'll take it. Thanks! Quoting Kristiaan De Greve : > . samples won't get ready in time. My apologies for the late notice. > > Best regards, > > Kristiaan. > From ahazeghi at stanford.edu Mon May 7 19:54:27 2007 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 7 May 2007 19:54:27 -0700 Subject: Raith free for next user Message-ID: <0B8E7A2A-8DE7-4C66-8045-2B091B408769@stanford.edu> System will be available for next user in ~ 20 minutes. Arash ------------------------------------------------------------------------ -- Arash Hazeghi PhD Candidate Stanford Center for Integrated Systems, 420 Via Palou Mall, CIS-X 300 tel: 650-725-0418 mobile: 650-353-1866 http://www.stanford.edu/~ahazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Mon May 7 20:01:28 2007 From: bdai at stanford.edu (Bing Dai) Date: Mon, 07 May 2007 20:01:28 -0700 Subject: Raith free for next user In-Reply-To: <0B8E7A2A-8DE7-4C66-8045-2B091B408769@stanford.edu> References: <0B8E7A2A-8DE7-4C66-8045-2B091B408769@stanford.edu> Message-ID: <20070507200128.593665eu6z1ckwgw@webmail.stanford.edu> I'll be there in 15 minutes. Thanks! Bing Quoting Arash Hazeghi : > System will be available for next user in ~ 20 minutes. > > Arash > > > ------------------------------------------------------------------------ -- > Arash Hazeghi > > PhD Candidate > Stanford Center for Integrated Systems, > 420 Via Palou Mall, CIS-X 300 > tel: 650-725-0418 > mobile: 650-353-1866 > http://www.stanford.edu/~ahazeghi -- Bing Dai Applied Physics Department CISX B103, 420 Via Palou, Stanford, CA 94305 (650) 723 4566 From bdai at stanford.edu Mon May 7 23:36:27 2007 From: bdai at stanford.edu (Bing Dai) Date: Mon, 07 May 2007 23:36:27 -0700 Subject: Raith free for next user In-Reply-To: <0B8E7A2A-8DE7-4C66-8045-2B091B408769@stanford.edu> References: <0B8E7A2A-8DE7-4C66-8045-2B091B408769@stanford.edu> Message-ID: <20070507233627.gem7sxjpil9cgg4o@webmail.stanford.edu> Will be available within next 15 minutes. Thanks. Bing From anikak at stanford.edu Wed May 9 08:46:40 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Wed, 09 May 2007 08:46:40 -0700 Subject: Finished early on Raith Message-ID: <20070509084640.316cpyl65twks4sw@webmail.stanford.edu> Ready for next user to load. From jwc at snf.stanford.edu Wed May 9 09:26:45 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 09 May 2007 09:26:45 -0700 Subject: Finished early on Raith In-Reply-To: <20070509084640.316cpyl65twks4sw@webmail.stanford.edu> References: <20070509084640.316cpyl65twks4sw@webmail.stanford.edu> Message-ID: <4641F645.8070203@snf.stanford.edu> We will take it -- Many thanks!!!! :-) :-) :-) Anu Chandran and I will come onto the system early today. Anika Kinkhabwala wrote: > Ready for next user to load. From vsih at stanford.edu Wed May 9 21:09:44 2007 From: vsih at stanford.edu (Vanessa Sih) Date: Wed, 9 May 2007 21:09:44 -0700 Subject: Raith ready for next user Message-ID: <002101c792b9$0b3646e0$21a2d4a0$@edu> Finished write early. -------------- next part -------------- An HTML attachment was scrubbed... URL: From panjun at stanford.edu Thu May 10 10:01:10 2007 From: panjun at stanford.edu (Jun Pan) Date: Thu, 10 May 2007 10:01:10 -0700 Subject: raith free 20:00 tonight Message-ID: <001101c79324$cf53f480$6401a8c0@PAN> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu May 10 10:04:21 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 10 May 2007 10:04:21 -0700 Subject: MEETING ANNOUNCEMENT: Presentation on the new RAITH IONLiNE Nano FIB System on Thursday May 24, 2007 11:00 to 12:00 CIS 201 Message-ID: <46435095.9080201@snf.stanford.edu> *Meeting Announcement for Introduction of the RAITH ionLiNE -- Advanced Focused Ion-beam Nanofabrication Instrument. * * *Brian Whitehead with RAITH USA Inc. will be here at SNF to introduce the new *RAITH ionLiNE *system to interested Users. This meeting will be held Thursday May 24, 2007 from 11:00 to 12:00 Noon in CIS 201. Everyone is welcome to attend this presentation. Thank you, James Conway Stanford Nanofabrication Facility *Abstract: * */ionLiNE/ - a New Tool Concept for Nanofabrication* *Authors: *Jason E. Sanabia, Sven Bauerdick, and Lars Bruchhaus The Raith /ionLiNE/ is an advanced focused ion-beam nanofabrication instrument designed and characterized to meet lithography tool standards. The unique components are the patented NanoFIB column, the ELPHY pattern generator, the laser interferometer stage, and a complete lithography software package, all integrated into one system to enable advanced ion-beam patterning. The ion-beam source and column produce the beam stability required for automated advanced lithography. With a small beam diameter and nominal beam tails, the focused ion-beam offers high lateral selectivity, enabling fabricated feature sizes of 10 nanometers and below. Exposures are made in a variety of scan modes using a high speed 16-bit pattern generator. The pattern generator technology enables nanosecond ion dose control and 3D grey level patterning. For applications covering areas larger than a single exposure field, the laser interferometer stage provides positioning resolution of 1 nm. With these unique features, the /ionLiNE /delivers critical lithography specifications, such as stitching and overlay accuracies. The lithography software permits the generation or import of complex patterns in the widely accepted GDSII data format, job automation for overnight patterning without user interaction, automated dose control, metrology, and automated focus control /via/ height sensing schemes. Fixed Beam Moving Stage (FBMS), a zero stitching error writing mode for the seamless exposure of extended structures, completes the advanced patterning of the /ionLiNE/. Additional options, such as a gas-injection system and nanomanipulators, can be added to allow unique nanofabrication and nanoengineering capabilities. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Raith ionLiNE.pdf Type: application/x-pdf Size: 513567 bytes Desc: not available URL: From koseki at stanford.edu Thu May 10 10:28:08 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Thu, 10 May 2007 10:28:08 -0700 Subject: raith free 20:00 tonight References: <001101c79324$cf53f480$6401a8c0@PAN> Message-ID: <002401c79328$9365b680$231b40ab@nausicaa> I'll take from 18:00 ! Thanks, Shinichi ----- Original Message ----- From: Jun Pan To: raith at snf.stanford.edu Sent: Thursday, May 10, 2007 10:01 AM Subject: raith free 20:00 tonight -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Fri May 11 15:55:00 2007 From: bdai at stanford.edu (Bing Dai) Date: Fri, 11 May 2007 15:55:00 -0700 Subject: Raith free for next user Message-ID: <20070511155500.2bxq54hlhsdckgow@webmail.stanford.edu> will be available in 15 minutes. Bing From zhangy at stanford.edu Fri May 11 18:55:16 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 11 May 2007 18:55:16 -0700 Subject: Raith free from now on till 11pm Message-ID: <20070512015503.ADD564C64F@smtp3.stanford.edu> Sample is charging too much and the contrast of SEM is too bad. Could not focus on my patterns. -------------- next part -------------- An HTML attachment was scrubbed... URL: From yngweiz at stanford.edu Fri May 11 19:55:56 2007 From: yngweiz at stanford.edu (yngweiz at stanford.edu) Date: Fri, 11 May 2007 19:55:56 -0700 Subject: reservation before 10:00pm saturday cancelled Message-ID: <20070511195556.t9jkoe1wh6kg8448@webmail.stanford.edu> sorry i could not begin it on time tomorrow,so 8:00pm-10:00pm saturday free now. From kocabas at stanford.edu Sun May 13 11:59:09 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Sun, 13 May 2007 11:59:09 -0700 Subject: Raith free btw Sunday May 13, 12:00-14:00 Message-ID: Too much dry etch. Can't see any patterns on the wafer, no use to do a second e-beam layer... Ekin -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Sun May 13 13:40:19 2007 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Sun, 13 May 2007 13:40:19 -0700 Subject: Released Mondat 5/14 Message-ID: <20070513204012.478474C519@smtp1.stanford.edu> Grabbed a slot with James on Friday, next batch not ready, releasing my Monday reservation 15-18:30PM Enjoy Arash ---------------------------------------------------------------------- Arash Hazeghi PhD Candidate, Stanford Center for Integrated Systems, CIS-X 300, 420 via Palou Mall Stanford, CA, 94305 phone: +1(650) 725-0418 http://www.stanford.edu/~ahazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 14 13:19:02 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 14 May 2007 13:19:02 -0700 Subject: Notice: Rleasing RAITH reservation for Thursday May 24, 2007 from 1 - 6 PM Message-ID: <4648C436.20900@snf.stanford.edu> An HTML attachment was scrubbed... URL: From yiyangg at stanford.edu Mon May 14 13:27:21 2007 From: yiyangg at stanford.edu (yiyangg at stanford.edu) Date: Mon, 14 May 2007 13:27:21 -0700 Subject: Notice: Rleasing RAITH reservation for Thursday May 24, 2007 from 1 - 6 PM In-Reply-To: <4648C436.20900@snf.stanford.edu> References: <4648C436.20900@snf.stanford.edu> Message-ID: <20070514132721.xd4ftgy56jwogggs@webmail.stanford.edu> I will take it whenever James releases it. Yiyang Quoting James Conway : > Greetings RAITH Users: > > I am releasing my RAITH reservation for Thursday May 24, 2007 from 1 > - 6 PM and it is available to other Users. > > Time conflict existed with another presentation and moved my > reservation to Friday May 25, 9:00 AM to 2:00 PM for User: WING CATS. > > Thank you for your support! > > James Conway > > From ycjun at stanford.edu Tue May 15 18:20:16 2007 From: ycjun at stanford.edu (Young Chul Jun) Date: Tue, 15 May 2007 18:20:16 -0700 Subject: Raith finished early Message-ID: <20070515182016.9pvsofmnybcwcc4s@webmail.stanford.edu> Raith finished early. (And next user seems to cancel his reservation) So, it's open to anyone.. - Y.C. From shinichikoseki at gmail.com Tue May 15 18:40:21 2007 From: shinichikoseki at gmail.com (Shinichi Koseki) Date: Tue, 15 May 2007 18:40:21 -0700 Subject: Raith finished early In-Reply-To: <20070515182016.9pvsofmnybcwcc4s@webmail.stanford.edu> References: <20070515182016.9pvsofmnybcwcc4s@webmail.stanford.edu> Message-ID: <3b532e5a0705151840m588e8abbv245de5f5b4e65b80@mail.gmail.com> Thanks ! I wil use it. Shinichi On 5/15/07, Young Chul Jun wrote: > Raith finished early. (And next user seems to cancel his reservation) > So, it's open to anyone.. > > - Y.C. > > From anikak at stanford.edu Wed May 16 11:08:15 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Wed, 16 May 2007 11:08:15 -0700 Subject: Will finish early - Raith free at 11:45a Message-ID: <20070516110815.5g57f31mko0kkoc0@webmail.stanford.edu> From jwc at snf.stanford.edu Wed May 16 11:15:48 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 16 May 2007 11:15:48 -0700 Subject: MAY BE STARTING MY SESSION A FEW MINUTES LATE Message-ID: <464B4A54.7010303@snf.stanford.edu> An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Wed May 16 14:49:32 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Wed, 16 May 2007 14:49:32 -0700 Subject: raith free midnight Message-ID: <22ffcd060705161449g6c9176a7mf21a63dcce477b46@mail.gmail.com> sample not ready. sorry for late notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From anikak at stanford.edu Thu May 17 11:54:11 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Thu, 17 May 2007 11:54:11 -0700 Subject: Raith free from 5am-10am tomorrow Message-ID: <20070517115411.39ye2x5hakwowsw4@webmail.stanford.edu> Took a later session that day. Yay for sleeping in! From chandran at stanford.edu Thu May 17 14:32:56 2007 From: chandran at stanford.edu (Anu Chandran) Date: Thu, 17 May 2007 14:32:56 -0700 Subject: Released Slot tomorrow 1:30pm-6:00pm Message-ID: Previous run results look excellent. Need time to work on those. Anu -- Anu Chandran Materials Science & Engineering 476 Lomita Mall,McCullough Building Stanford CA 94305-4045 T:6507236466 Lab T:6507234874 Office F:6507249851 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu May 17 19:34:02 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 17 May 2007 19:34:02 -0700 Subject: 2nd ANNOUNCEMENT: Presentation on the new RAITH IONLiNE Nano FIB System on Thursday May 24, 2007 11:00 to 12:00 CIS 201 Message-ID: <464D109A.5030201@snf.stanford.edu> *Meeting Announcement for Introduction of the RAITH ionLiNE -- Advanced Focused Ion-beam Nanofabrication Instrument. * * *Brian Whitehead with RAITH USA Inc. will be here at SNF to introduce the new *RAITH ionLiNE *system to interested Users. This meeting will be held Thursday May 24, 2007 from 11:00 to 12:00 Noon in CIS 201. Everyone is welcome to attend this presentation. Thank you, James Conway Stanford Nanofabrication Facility *Abstract: * */ionLiNE/ - a New Tool Concept for Nanofabrication* *Authors: *Jason E. Sanabia, Sven Bauerdick, and Lars Bruchhaus The Raith /ionLiNE/ is an advanced focused ion-beam nanofabrication instrument designed and characterized to meet lithography tool standards. The unique components are the patented NanoFIB column, the ELPHY pattern generator, the laser interferometer stage, and a complete lithography software package, all integrated into one system to enable advanced ion-beam patterning. The ion-beam source and column produce the beam stability required for automated advanced lithography. With a small beam diameter and nominal beam tails, the focused ion-beam offers high lateral selectivity, enabling fabricated feature sizes of 10 nanometers and below. Exposures are made in a variety of scan modes using a high speed 16-bit pattern generator. The pattern generator technology enables nanosecond ion dose control and 3D grey level patterning. For applications covering areas larger than a single exposure field, the laser interferometer stage provides positioning resolution of 1 nm. With these unique features, the /ionLiNE /delivers critical lithography specifications, such as stitching and overlay accuracies. The lithography software permits the generation or import of complex patterns in the widely accepted GDSII data format, job automation for overnight patterning without user interaction, automated dose control, metrology, and automated focus control /via/ height sensing schemes. Fixed Beam Moving Stage (FBMS), a zero stitching error writing mode for the seamless exposure of extended structures, completes the advanced patterning of the /ionLiNE/. Additional options, such as a gas-injection system and nanomanipulators, can be added to allow unique nanofabrication and nanoengineering capabilities. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Raith ionLiNE.pdf Type: application/x-pdf Size: 513567 bytes Desc: not available URL: From bdai at stanford.edu Sat May 19 16:53:05 2007 From: bdai at stanford.edu (Bing Dai) Date: Sat, 19 May 2007 16:53:05 -0700 Subject: Raith free from 5pm today Message-ID: <20070519165305.l0l3iqc8ye1w0wog@webmail.stanford.edu> finished early. Thanks, Bing From englund at stanford.edu Sat May 19 18:25:59 2007 From: englund at stanford.edu (englund at stanford.edu) Date: Sat, 19 May 2007 18:25:59 -0700 Subject: Raith - will start early In-Reply-To: <464D109A.5030201@snf.stanford.edu> References: <464D109A.5030201@snf.stanford.edu> Message-ID: <20070519182559.wzmomft90bjwckc8@webmail.stanford.edu> I'm starting now since it's open until my reservation at 9:30. -Dirk From liwen.chang at stanford.edu Mon May 21 17:16:57 2007 From: liwen.chang at stanford.edu (Li-Wen Chang) Date: Mon, 21 May 2007 17:16:57 -0700 Subject: Raith released on Wed. (5/23) 9am-1pm Message-ID: <8ab79e460705211716j445d053ctb5bd07499c54de67@mail.gmail.com> From jwc at snf.stanford.edu Tue May 22 10:08:20 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 22 May 2007 10:08:20 -0700 Subject: New phone for James -- update your numbers. Message-ID: <46532384.9080606@snf.stanford.edu> An HTML attachment was scrubbed... URL: From anikak at stanford.edu Tue May 22 11:29:11 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Tue, 22 May 2007 11:29:11 -0700 Subject: Finished early, ready for next user to load Message-ID: <20070522112911.pxql63o2ok4o4s8c@webmail.stanford.edu> From jwc at snf.stanford.edu Tue May 22 13:12:30 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 22 May 2007 13:12:30 -0700 Subject: ANNOUNCEMENT: Presentation on the new RAITH IONLiNE Nano FIB System on Thursday May 24, 2007 11:00 to 12:00 CIS 201 Message-ID: <46534EAE.6080708@snf.stanford.edu> *Meeting Announcement for Introduction of the RAITH ionLiNE -- Advanced Focused Ion-beam Nanofabrication Instrument. * * *Brian Whitehead with RAITH USA Inc. will be here at SNF to introduce the new *RAITH ionLiNE *system to interested Users. This meeting will be held Thursday May 24, 2007 from 11:00 to 12:00 Noon in CIS 201. Everyone is welcome to attend this presentation. Thank you, James Conway Stanford Nanofabrication Facility *Abstract: * */ionLiNE/ - a New Tool Concept for Nanofabrication* *Authors: *Jason E. Sanabia, Sven Bauerdick, and Lars Bruchhaus The Raith /ionLiNE/ is an advanced focused ion-beam nanofabrication instrument designed and characterized to meet lithography tool standards. The unique components are the patented NanoFIB column, the ELPHY pattern generator, the laser interferometer stage, and a complete lithography software package, all integrated into one system to enable advanced ion-beam patterning. The ion-beam source and column produce the beam stability required for automated advanced lithography. With a small beam diameter and nominal beam tails, the focused ion-beam offers high lateral selectivity, enabling fabricated feature sizes of 10 nanometers and below. Exposures are made in a variety of scan modes using a high speed 16-bit pattern generator. The pattern generator technology enables nanosecond ion dose control and 3D grey level patterning. For applications covering areas larger than a single exposure field, the laser interferometer stage provides positioning resolution of 1 nm. With these unique features, the /ionLiNE /delivers critical lithography specifications, such as stitching and overlay accuracies. The lithography software permits the generation or import of complex patterns in the widely accepted GDSII data format, job automation for overnight patterning without user interaction, automated dose control, metrology, and automated focus control /via/ height sensing schemes. Fixed Beam Moving Stage (FBMS), a zero stitching error writing mode for the seamless exposure of extended structures, completes the advanced patterning of the /ionLiNE/. Additional options, such as a gas-injection system and nanomanipulators, can be added to allow unique nanofabrication and nanoengineering capabilities. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Raith ionLiNE.pdf Type: application/x-pdf Size: 513567 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed May 23 19:01:32 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 23 May 2007 19:01:32 -0700 Subject: ANNOUNCEMENT: Presentation on the new RAITH IONLiNE Nano FIB System on Thursday May 24, 2007 11:00 to 12:00 CIS 201 Message-ID: <4654F1FC.7090703@snf.stanford.edu> *Meeting Announcement for Introduction of the RAITH ionLiNE -- Advanced Focused Ion-beam Nanofabrication Instrument. * * *Brian Whitehead with RAITH USA Inc. will be here at SNF to introduce the new *RAITH ionLiNE *system to interested Users. This meeting will be held Thursday May 24, 2007 from 11:00 to 12:00 Noon in CIS 201. Everyone is welcome to attend this presentation. Thank you, James Conway Stanford Nanofabrication Facility *Abstract: * */ionLiNE/ - a New Tool Concept for Nanofabrication* *Authors: *Jason E. Sanabia, Sven Bauerdick, and Lars Bruchhaus The Raith /ionLiNE/ is an advanced focused ion-beam nanofabrication instrument designed and characterized to meet lithography tool standards. The unique components are the patented NanoFIB column, the ELPHY pattern generator, the laser interferometer stage, and a complete lithography software package, all integrated into one system to enable advanced ion-beam patterning. The ion-beam source and column produce the beam stability required for automated advanced lithography. With a small beam diameter and nominal beam tails, the focused ion-beam offers high lateral selectivity, enabling fabricated feature sizes of 10 nanometers and below. Exposures are made in a variety of scan modes using a high speed 16-bit pattern generator. The pattern generator technology enables nanosecond ion dose control and 3D grey level patterning. For applications covering areas larger than a single exposure field, the laser interferometer stage provides positioning resolution of 1 nm. With these unique features, the /ionLiNE /delivers critical lithography specifications, such as stitching and overlay accuracies. The lithography software permits the generation or import of complex patterns in the widely accepted GDSII data format, job automation for overnight patterning without user interaction, automated dose control, metrology, and automated focus control /via/ height sensing schemes. Fixed Beam Moving Stage (FBMS), a zero stitching error writing mode for the seamless exposure of extended structures, completes the advanced patterning of the /ionLiNE/. Additional options, such as a gas-injection system and nanomanipulators, can be added to allow unique nanofabrication and nanoengineering capabilities. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Raith ionLiNE.pdf Type: application/x-pdf Size: 513567 bytes Desc: not available URL: From chandran at stanford.edu Wed May 23 19:35:11 2007 From: chandran at stanford.edu (Anu Chandran) Date: Wed, 23 May 2007 19:35:11 -0700 Subject: Cancelled session thursday (6:30pm-10:30pm) Message-ID: -- Anu Chandran Materials Science & Engineering 476 Lomita Mall,McCullough Building Stanford CA 94305-4045 T:6507236466 Lab T:6507234874 Office F:6507249851 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ycjun at stanford.edu Thu May 24 15:24:12 2007 From: ycjun at stanford.edu (Young Chul Jun) Date: Thu, 24 May 2007 15:24:12 -0700 Subject: Raith finished early Message-ID: <20070524152412.1qc29l48vvkgk4sw@webmail.stanford.edu> Raith is now available to others. - Y.C. From faraon at stanford.edu Thu May 24 16:01:07 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Thu, 24 May 2007 16:01:07 -0700 Subject: Raith finished early In-Reply-To: <20070524152412.1qc29l48vvkgk4sw@webmail.stanford.edu> References: <20070524152412.1qc29l48vvkgk4sw@webmail.stanford.edu> Message-ID: <28d3ece90705241601x253be22bl5efc10bd4703776d@mail.gmail.com> Thanks, I will start my session earlier. Andrei On 5/24/07, Young Chul Jun wrote: > > Raith is now available to others. > > - Y.C. > > -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From yueruilu at stanford.edu Fri May 25 02:42:48 2007 From: yueruilu at stanford.edu (Yuerui Lu) Date: Fri, 25 May 2007 02:42:48 -0700 Subject: raith free Fri 2:00pm to 4:00pm Message-ID: done earlier -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 25 09:15:38 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 25 May 2007 09:15:38 -0700 Subject: cancelling my reservation on RAITH for 0900 to 1400 hours system is available through 16:00 hours today. Message-ID: <46570BAA.9030705@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 25 10:46:32 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 25 May 2007 10:46:32 -0700 Subject: All ebeam resist stocked into cleanroom, please use up the open bottles before the next bottle. Message-ID: <465720F8.5060205@snf.stanford.edu> *Greetings Ebeam Resist User:* I just checked and restocked all the Ebeam resist in the cleanroom in preparation for the long holiday weekend. Please be diligent and be sure to use up the remaining volumes of resist in the old bottles first before opening the new bottles. They are all from the same batch lot numbers and what is left works fine! I was using it this week. Please note there are now two blends of the 5% PMMA formulated in anisole in the cabinet: 1. The Standard *5% 495K* Molecular Weight (MW) PMMA in ANISOLE. 2. Introducing for evaluation purposes a new blend from MICROCHEM of *5% 950K* MW PMMA in ANISOLE. This is a new material in the lab and has similar contrast and performance to the 2% blends. I ran some trials on this material this last month and am pleased with the results. Once I get some lift off and RIE etching test completed I will post the process sheet that I am developing. All the other resist are stocked and ready for your usage. Should users need more resist during the time I am gone next week -- please see Mahnaz or David Cala for access. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 25 11:01:35 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 25 May 2007 11:01:35 -0700 Subject: James will be away at Three Beams May 30 - June 3 FAQ: HOW to get help on the RAITH System during your session -- "Who are your gonna call" Message-ID: <4657247F.8010704@snf.stanford.edu> *FAQ 06 : HOW to get help on the RAITH System during your session -- "Who are your gonna call"* *FAQ 06 : SYSTEM PROBLEMS: "WHO ARE YOU GOING TO CALL"* *Greetings Raith Users:* I will be away all of next week attending Three Beams and I wish to remind everyone that we have set into place a hierarchical structure on what to do and whom to call if you encounter problems on the RAITH 150 system during my absence' or for those times I am not be available by cell phone. I will be available by phone at 415-412-4825 by voice mail and SMS text messaging. I will respond at my earliest opportunity. I normally will call the Ebeam Lab several times daily through the course of the week. For Example: * You encounter a LOAD LOCK Error on the system and cannot complete the Load/ Unload cycle without an administrator login. * The pumps or system hardware are not working normally and the logic may have become reversed. 1. If I am available, try to call me on my cell and I will walk you through the Recovery procedures. 001-415-412-4825 2. Try to contact any RAITH Champion: * Ilya Fushman ifushman at stanford.edu 650-804-1058 * Andrei Faraon faraon at stanford.edu 650-714-7881 * Xinran Wang xinranw at gmail.com 650-796-4743 * Jun Pan panjun at stanford.edu 650-353-6588 3. Contact a RAITH USA Application Support Specialist: Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com 218-483-1267 4. For Major Hardware issues and all emergencies with the RAITH Hardware: Contact the RAITH USA Field Service Manager, Cole Loomis cl at raithusa.com (631) 738-9500 or Kevin Burcham kb at raithusa.com also at the Main Raith USA line (631) 738-9500 Finally unless it is a catastrophic failure and the system becomes unsafe or in the least terrifying to operate -- please avoid placing the system into RED LIGHT Mode when I am away. ALWAYS report all errors and comments to to the CORAL 'Make Comments' or 'Report Problem' section so it gets logged into our tracking system. To quote John Shott, "Its not a problem until it is reported to CORAL." Many thanks to the many Raith Champions whom have come forward and offered to cover for me during my absence! Thank you all for your support! James Conway Ebeam Technology Group Stanford Nanofabrication Facility. 650-725-7075 cell 415-412-4825 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 25 12:19:54 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 25 May 2007 12:19:54 -0700 Subject: I will be away attaending Three Beams and will not be responding to email on snf email host during this time Message-ID: <465736DA.5020809@snf.stanford.edu> An HTML attachment was scrubbed... URL: From faraon at stanford.edu Sat May 26 12:19:47 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Sat, 26 May 2007 12:19:47 -0700 Subject: raith available for next user Message-ID: <28d3ece90705261219u216ea71ewef5eb5e8b15d7194@mail.gmail.com> -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From anikak at stanford.edu Sun May 27 17:20:16 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Sun, 27 May 2007 17:20:16 -0700 Subject: Raith free, 7p-10p tomorrow (monday) Message-ID: <52AF4121-60AB-4EE3-B8E1-B2D96FFF1B1A@stanford.edu> I will release the reservation tomorrow morning (when I'm near a PC). Sorry for the late notice! From sanjah at stanford.edu Sun May 27 17:30:19 2007 From: sanjah at stanford.edu (Sanja Hadzialic) Date: Sun, 27 May 2007 17:30:19 -0700 Subject: Raith free, 7p-10p tomorrow (monday) In-Reply-To: <52AF4121-60AB-4EE3-B8E1-B2D96FFF1B1A@stanford.edu> References: <52AF4121-60AB-4EE3-B8E1-B2D96FFF1B1A@stanford.edu> Message-ID: <20070527173019.zuzywsij0i88gk40@webmail.stanford.edu> I'll take it! Sanja :~) Quoting Anika Kinkhabwala : > I will release the reservation tomorrow morning (when I'm near a PC). > Sorry for the late notice! From kocabas at stanford.edu Tue May 29 16:13:00 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Tue, 29 May 2007 16:13:00 -0700 Subject: Raith Free 8-11am, Wed, May 30th Message-ID: <465CB37C.3090702@stanford.edu> From xinranw at stanford.edu Wed May 30 14:58:59 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Wed, 30 May 2007 14:58:59 -0700 Subject: raith free 21:00 to 23:00 Message-ID: <22ffcd060705301458s3007f3c2uce7d020a81a0081e@mail.gmail.com> My sample will be delayed. I might be a little late for my 23:00 session, but I will start before 23:30. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From yngweiz at stanford.edu Wed May 30 15:43:50 2007 From: yngweiz at stanford.edu (yngweiz at stanford.edu) Date: Wed, 30 May 2007 15:43:50 -0700 Subject: raith free from 4:00pm In-Reply-To: <20070530154104.s35umfq045s8w0cw@webmail.stanford.edu> References: <22ffcd060705301458s3007f3c2uce7d020a81a0081e@mail.gmail.com> <20070530154104.s35umfq045s8w0cw@webmail.stanford.edu> Message-ID: <20070530154350.3cxrr0d707wwwkg8@webmail.stanford.edu> Sorry because sample is not ready........... From ifushman at stanford.edu Wed May 30 22:58:09 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Wed, 30 May 2007 22:58:09 -0700 Subject: reservation removed raith free 1 am - 8 am Message-ID: sorry can't make it. -ilya -- Ilya Fushman Applied Physics Stanford University cvitae.org/ilya/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Wed May 30 23:01:52 2007 From: kimsangb at stanford.edu (SangBum Kim) Date: Wed, 30 May 2007 23:01:52 -0700 Subject: raith free SAT 5:30AM to 10AM Message-ID: <000f01c7a349$2f398f70$a9b50c80@sangbumhome> Finished today. -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Thu May 31 00:23:10 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Thu, 31 May 2007 00:23:10 -0700 Subject: Raith free 8am-12p Message-ID: <20070531072310.545754C2E8@smtp2.stanford.edu> Sample not ready. Sorry for the late notice. -Yuan -------------- next part -------------- An HTML attachment was scrubbed... URL: From ceggiman at stanford.edu Thu May 31 00:31:42 2007 From: ceggiman at stanford.edu (Christoph Eggimann) Date: Thu, 31 May 2007 00:31:42 -0700 Subject: Raith free 8am-12p In-Reply-To: <20070531072310.545754C2E8@smtp2.stanford.edu> References: <20070531072310.545754C2E8@smtp2.stanford.edu> Message-ID: <9885628C-7715-48BD-B993-FB83910B07FE@stanford.edu> I'll take it starting from 8.30, thx Chris Am 31.05.2007 um 00:23 schrieb Yuan Zhang: > Sample not ready. Sorry for the late notice. > > > > -Yuan > > From ifushman at stanford.edu Thu May 31 00:41:52 2007 From: ifushman at stanford.edu (Ilya Fushman) Date: Thu, 31 May 2007 00:41:52 -0700 Subject: raith write: will take it till 8:30 after all Message-ID: -ilya -- Ilya Fushman Applied Physics Stanford University cvitae.org/ilya/ -------------- next part -------------- An HTML attachment was scrubbed... URL: