From jwc at snf.stanford.edu Fri Nov 2 16:23:12 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 02 Nov 2007 15:23:12 -0800 Subject: New bottles of PMMA in the cleanroom solvent storage -- BUT PLEASE USE UP THE OLDER BOTTLES FIRST! Message-ID: <472BB160.202@snf.stanford.edu> Greetings PMMA Users: I have just stocked new bottles of 5% and 9% PMMA into the solvent cabinet. Last week I brought in a new bottle of 2% 950K. Please use up the last remaining volume of the old bottle(s) before you open the new bottles. I used the 2% 950K PMMA - A in the old bottle this last Tuesday and it spins fine and to the thicknesses in the spin speed (f) thickness plots on the resist process suite website. Users should also note that there are different molecular weights for the 5% PMMA. Our default is the 5% 495K MW PMMA in Anisole. I also have a batch of 5% 950K PMMA in Anisole that is an evaluation lot. I was able to get very nice results with this material. Users working in dual layer resist systems for metal liftoff will still want to use the 5% 495K MW PMMA blend. Thank you for your support! James Conway SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Nov 2 17:31:44 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 02 Nov 2007 16:31:44 -0800 Subject: RAITH STATUS for Friday November 2, 2007 16:25 hours -- James will be off the cell phone grid some of Saturday day. Message-ID: <472BC170.9020505@snf.stanford.edu> An HTML attachment was scrubbed... URL: From panjun at stanford.edu Fri Nov 2 20:15:00 2007 From: panjun at stanford.edu (Jun Pan) Date: Fri, 2 Nov 2007 20:15:00 -0700 Subject: Raith ready for the next user Message-ID: <008f01c81dc7$b87f0a50$833342ab@PAN> -------------- next part -------------- An HTML attachment was scrubbed... URL: From koseki at stanford.edu Fri Nov 2 22:11:18 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Fri, 2 Nov 2007 22:11:18 -0700 Subject: Raith free this weekend night Message-ID: <000301c81dd7$f73f3cf0$04000100@nausicaa> Sample is not ready. Raith is free - 22:00- on Sat - 20:30- on Sun Thanks, Shinichi From yiyangg at stanford.edu Fri Nov 2 22:35:57 2007 From: yiyangg at stanford.edu (Yiyang Gong) Date: Fri, 02 Nov 2007 22:35:57 -0700 Subject: Raith free this weekend night In-Reply-To: <000301c81dd7$f73f3cf0$04000100@nausicaa> References: <000301c81dd7$f73f3cf0$04000100@nausicaa> Message-ID: <472C08BD.2050704@stanford.edu> I have moved back my reservation. Raith seems free from 4pm. Yiyang Shinichi Koseki wrote: > Sample is not ready. Raith is free > - 22:00- on Sat > - 20:30- on Sun > > Thanks, > > Shinichi From xinranw at stanford.edu Sat Nov 3 11:23:53 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Sat, 3 Nov 2007 11:23:53 -0700 Subject: raith free Sun 10:30 Message-ID: <22ffcd060711031123p41de9b22ufe53e4abb3d16a6c@mail.gmail.com> Sample won't be ready. Sorry for late notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsora at stanford.edu Sat Nov 3 17:07:14 2007 From: kimsora at stanford.edu (Sora Kim) Date: Sat, 03 Nov 2007 17:07:14 -0700 Subject: Raith is free for the next user. Message-ID: <20071103170714.pj828l92o8o0w844@webmail.stanford.edu> My sample is turned out to be not good enough for doing SEM. Sorry for late notice. Sora From lwchang at stanford.edu Sat Nov 3 22:35:13 2007 From: lwchang at stanford.edu (Li-Wen Chang) Date: Sat, 3 Nov 2007 22:35:13 -0700 Subject: Swap raith timewith use zhangy Message-ID: <8ab79e460711032235p48c225c5m77ba29b4f0c07f@mail.gmail.com> Hi, Just for your reference, I'll swap raith reservations tomorrow and Monday with user zhangy. Thanks, Li-Wen From kimsora at stanford.edu Sun Nov 4 17:45:23 2007 From: kimsora at stanford.edu (Sora Kim) Date: Sun, 4 Nov 2007 17:45:23 -0800 Subject: removed reservation from 9:30pm to 11:30pm Message-ID: <004701c81f4d$87ea4800$cb3342ab@GoSora> An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Sun Nov 4 19:27:05 2007 From: krivoire at stanford.edu (krivoire at stanford.edu) Date: Sun, 04 Nov 2007 19:27:05 -0800 Subject: raith free until 23:30, chip left on holder Message-ID: <20071104192705.su67h90e0w844ckc@webmail.stanford.edu> I took free time on raith this afternoon, so I am canceling my session from 20:30-21:30. The user with the session scheduled before me also seems to have canceled, as has the user with the session after me, so raith is now free until 23:30. Also, I found a chip in the cross section mount on the sample holder. If it's yours, I left in next to the raith in a 1 inch round sample holder. Kelley From jwc at snf.stanford.edu Mon Nov 5 17:00:41 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 05 Nov 2007 17:00:41 -0800 Subject: reminder: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday November 06 and 20th, 2007 from 10:15 - 12:30 Message-ID: <472FBCB9.6020403@snf.stanford.edu> * REMINDER: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. We start at 10:15 on wbnonmetal... * Greetings SNF Lab Users, I will be conducting my bi-monthly *"Take A Spin with Me" *training class Tuesday November 06 and 20th, 2007 from *10:15 AM - 12:30 PM*. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Schedule of Events: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 49030 bytes Desc: not available URL: From kimsora at stanford.edu Tue Nov 6 06:27:29 2007 From: kimsora at stanford.edu (Sora Kim) Date: Tue, 06 Nov 2007 06:27:29 -0800 Subject: raith reservation canceled from 6:30am to 8am. Message-ID: <20071106062729.iom59qj9ws4ogcs8@webmail.stanford.edu> Sample is not good enough for doing SEM. Sorry for the late notice. Sora From jwc at snf.stanford.edu Tue Nov 6 12:16:08 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 06 Nov 2007 12:16:08 -0800 Subject: WINGCAT RAITH session cancelling. Handing off session to User KOCABAS whom is on the system doing manual overlay write. Message-ID: <4730CB88.2020105@snf.stanford.edu> An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Tue Nov 6 14:40:15 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Tue, 6 Nov 2007 14:40:15 -0800 Subject: Raith free tonight 11pm-3am (Wednesday) Message-ID: <20071106223957.4AE554CCBE@smtp2.stanford.edu> Sample won't be ready. Sorry for the late notice. -Yuan -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Tue Nov 6 14:48:41 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Tue, 06 Nov 2007 14:48:41 -0800 Subject: Raith free tonight 11pm-3am (Wednesday) In-Reply-To: <20071106223957.4AE554CCBE@smtp2.stanford.edu> References: <20071106223957.4AE554CCBE@smtp2.stanford.edu> Message-ID: <20071106144841.stp8pgb4gc0swwws@webmail.stanford.edu> Hi, Sorry for the confusion, but I still need it. Thanks. -Yuan Quoting Yuan Zhang : > Sample won't be ready. Sorry for the late notice. > > > > -Yuan > > Yuan Zhang EE department From kocabas at stanford.edu Tue Nov 6 17:18:29 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Tue, 6 Nov 2007 17:18:29 -0800 Subject: Raith is ready for the next user Message-ID: I'm done with Raith. Ekin From zhangli at stanford.edu Wed Nov 7 15:33:15 2007 From: zhangli at stanford.edu (Li Zhang) Date: Wed, 7 Nov 2007 15:33:15 -0800 Subject: raith free Friday 1:30 to 4:00pm Message-ID: <66aaf8f30711071533le88204cid454fc6a268276d@mail.gmail.com> I won't be able to use it. Thanks. -- Li --------------------------------------- Li Zhang Dai's Group Department of Chemistry Stanford University --------------------------------------- .oooO ( ) Oooo. \ ( ( ) \ ) ) / Life is good, ( / it's just not easy. -------------- next part -------------- An HTML attachment was scrubbed... URL: From yiyangg at stanford.edu Wed Nov 7 22:20:42 2007 From: yiyangg at stanford.edu (Yiyang Gong) Date: Wed, 07 Nov 2007 22:20:42 -0800 Subject: I have taken mitsuru's slot right now In-Reply-To: <20071104192705.su67h90e0w844ckc@webmail.stanford.edu> References: <20071104192705.su67h90e0w844ckc@webmail.stanford.edu> Message-ID: <4732AABA.9010304@stanford.edu> Thanks, Yiyang From ytcheng at stanford.edu Thu Nov 8 14:31:28 2007 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Thu, 8 Nov 2007 14:31:28 -0800 Subject: Raith free 6pm-10pm tonight Message-ID: Sorry for the late notice. Yao-Te From linyouc at stanford.edu Thu Nov 8 20:43:57 2007 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Thu, 08 Nov 2007 20:43:57 -0800 Subject: Done earlier. Raith is now available for next user. Message-ID: <20071108204357.atq2fn0ao0gg4gwk@webmail.stanford.edu> -- Linyou Cao PhD student Department of Materials Science and Engineering Brongersma Group Stanfor University From kimsora at stanford.edu Fri Nov 9 14:21:02 2007 From: kimsora at stanford.edu (Sora Kim) Date: Fri, 09 Nov 2007 14:21:02 -0800 Subject: I will be late by 10 min. Message-ID: <20071109142102.wlgjc3ebkw8kwo8c@webmail.stanford.edu> I am going to use Raith from 2:40 to 4pm. (My reservation is from 2:30pm to 4pm) Sora From panjun at stanford.edu Sat Nov 10 08:56:11 2007 From: panjun at stanford.edu (Jun Pan) Date: Sat, 10 Nov 2007 08:56:11 -0800 Subject: free 2pm Message-ID: <008501c823ba$98f34c70$dd3d42ab@PAN> -------------- next part -------------- An HTML attachment was scrubbed... URL: From vsih at stanford.edu Sat Nov 10 09:07:39 2007 From: vsih at stanford.edu (Vanessa Sih) Date: Sat, 10 Nov 2007 09:07:39 -0800 Subject: switching Raith reservation times on Monday Message-ID: <354289b40711100907w34cf0c56w10c750145350a7b3@mail.gmail.com> Linyou and I are switching reservation times on Monday. He will have the Raith from noon to 5 pm, and I will have the Raith from 5 to 10 pm. Thanks, Vanessa From kimsora at stanford.edu Sat Nov 10 16:15:29 2007 From: kimsora at stanford.edu (Sora Kim) Date: Sat, 10 Nov 2007 16:15:29 -0800 Subject: canceled reservations on Sunday Message-ID: <20071110161529.44dp24lw4k404s0g@webmail.stanford.edu> 9:30am - 11am 8:30pm - 10pm SEM4160 is good enough for SEM. Sora From linyouc at stanford.edu Sat Nov 10 18:00:24 2007 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Sat, 10 Nov 2007 18:00:24 -0800 Subject: Cancel reservation today 19:00-22:00 Message-ID: <20071110180024.j9lv0cckggw4wssg@webmail.stanford.edu> Sample not ready. linyou -- Linyou Cao PhD student Department of Materials Science and Engineering Brongersma Group Stanfor University From lwchang at stanford.edu Mon Nov 12 10:58:55 2007 From: lwchang at stanford.edu (Li-Wen Chang) Date: Mon, 12 Nov 2007 10:58:55 -0800 Subject: Raith free 19:30pm-12:00am Tue.(11/13) Message-ID: <8ab79e460711121058n2e980402t1393087af4ac141b@mail.gmail.com> From zhangy at stanford.edu Mon Nov 12 11:02:49 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Mon, 12 Nov 2007 11:02:49 -0800 Subject: Raith free 19:30pm-12:00am Tue.(11/13) In-Reply-To: <8ab79e460711121058n2e980402t1393087af4ac141b@mail.gmail.com> References: <8ab79e460711121058n2e980402t1393087af4ac141b@mail.gmail.com> Message-ID: <20071112110249.lah8fkue8k8osgkk@webmail.stanford.edu> I took it. Thanks. Quoting Li-Wen Chang : > > Yuan Zhang EE department From raneeyoo at stanford.edu Tue Nov 13 03:06:05 2007 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Tue, 13 Nov 2007 03:06:05 -0800 Subject: raith is free from 12am-5:30am on 11/14 Message-ID: <20071113030605.d5dvxh42gwo0wck8@webmail.stanford.edu> samples are not ready From jwc at snf.stanford.edu Tue Nov 13 10:53:03 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 13 Nov 2007 10:53:03 -0800 Subject: CANCELING THIS SESSION : "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday November 20th, 2007 from 10:15 - 12:30 CANCELED Message-ID: <4739F28F.6070705@snf.stanford.edu> * THIS SESSION HAS BEEN CANCELED. JAMES CONWAY WILL BE OFF SITE LATER THIS WEEK. ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater.* Greetings SNF Lab Users, I will be conducting my bi-monthly *"Take A Spin with Me" *training class Tuesday November 06 and 20th, 2007 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Schedule of Events: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 49030 bytes Desc: not available URL: From jwc at snf.stanford.edu Tue Nov 13 11:33:40 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 13 Nov 2007 11:33:40 -0800 Subject: FAQ NO 6: HOW to get help on the RAITH System during your session -- "Who are your gonna call" Message-ID: <4739FC14.8040304@snf.stanford.edu> *Good Morning Raith Users: *Starting tomorrow and continuing through November 26, 2007 I will be away from SNF on personal business away from the Bay area. During this time I will be off the cell phone grid at times and you will be unable to reach me by cell phone for support on the Raith 150 system. I will respond to all voice mail left on my phone as soon as I am able to at 415-412-4825. All PMMA's have been stock in sufficient supplies to last through this period. Please use these expensive engineering materials frugally and if we run out please see Mahnaz Mansourpour or David Cala to obtain the next bottle of materials. Please enlist the aid of your local Raith Champions for assistance on the tool should you run into any problems whatsoever. Below and attached I have the Raith FAQ No. 6,* *How to Get Help - "WHO ARE YOU GOING TO CALL" and the Raith Champion list and email addresses. Please play nicely together and work to maximize throughput on the system while I am away. Thank you for your support! James Conway _______________________________________________________________________________________________________________________________________________ *RAITH FAQ NO 6: RAITH SYSTEM PROBLEMS: How to Get Help - "WHO ARE YOU GOING TO CALL" * * * *Greetings Raith Users:** *I wish to remind everyone that we have set into place a hierarchical structure on what to do and whom to call if you encounter problems on the RAITH 150 system during my absence, or for those times I am not be available by cell phone. * For Example:* ? You encounter a LOAD LOCK ERROR on the system and cannot ? continue the Load or Unload cycle without an administrator login and support. ? The pumps or system hardware are not working normally and the ? logic may have become reversed. ? Beam Blanking Logic is reversed due to an RAITH150.exe ? application crash when the beam was unblanked in your software panel ... 1. If I am available, try to call me on my cell phone and I will walk you through the Recovery procedures. My number is 001-415-412-4825. Be sure to leave Voice Mail if I don't answer! 2. Try then to contact a RAITH Champion: Ilya Fushman ifushman at stanford 650-804-1058 Jun Pan panjun at stanford.edu 1-650-353-6588 Dirk Englund englund at stanford.edu 1-650-450-3829 3. Contact a RAITH USA Application Support Specialist: Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com 1-218-483-1267 4. For Major Hardware issues and all emergencies with the LEO or RAITH Hardware: Contact the RAITH USA Field Service Manager, Cole Loomis cl at raithusa.com (631) 738-9500 or Kevin Burcham kb at raithusa.com at the same number RAITH USA. Please be careful with the system during my absence! All the Best, James Conway Stanford Nanofabrication Facility. Cell 415-412-4825 jwc at snf.stanford.edu *Thank you all for your support!* James Conway Ebeam Technology Group Stanford Nanofabrication Facility. Cell 415-412-4825 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Nov 13 11:37:04 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 13 Nov 2007 11:37:04 -0800 Subject: JWC is cancellng all his RAITH sessions through Thanksgiving. Message-ID: <4739FCE0.2050409@snf.stanford.edu> Greetings RAITH Community: As that I will be out of the office later this week and next on personal business -- I will be canceling my RAITH sessions and will reschedule for a later time period. This is announcement to all users that these session will open up on CORAL in a few minutes of time. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From lsmoore at stanford.edu Tue Nov 13 18:40:30 2007 From: lsmoore at stanford.edu (Lindsay Moore) Date: Tue, 13 Nov 2007 18:40:30 -0800 Subject: raith free now. Message-ID: <4dfce5b30711131840hc11d184h36ce1ff123eebe2a@mail.gmail.com> finished early -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Wed Nov 14 13:28:17 2007 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Wed, 14 Nov 2007 13:28:17 -0800 Subject: Raith free 2pm-6pm Message-ID: Sample is not ready. Sorry for the late notice. Yao-Te From sunxuhui at gmail.com Wed Nov 14 14:14:04 2007 From: sunxuhui at gmail.com (Xuhui Sun) Date: Wed, 14 Nov 2007 14:14:04 -0800 Subject: Raith free 2:00PM-6:00PM Message-ID: Sample cannot be ready by that time. Jeff From kocabas at stanford.edu Thu Nov 15 09:22:35 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Thu, 15 Nov 2007 09:22:35 -0800 Subject: Tomorrow (Fri, Nov-16) 9-14 Free Message-ID: I thought I had reserved for Thursday and planned accordingly.. But my reservation was on Friday 9-14... That slot is free now. Ekin From krivoire at stanford.edu Thu Nov 15 09:32:01 2007 From: krivoire at stanford.edu (Kelley Rivoire) Date: Thu, 15 Nov 2007 09:32:01 -0800 Subject: Tomorrow (Fri, Nov-16) 9-14 Free In-Reply-To: References: Message-ID: <18d3aabd0711150932q29aee1c3pc20434773c22996f@mail.gmail.com> I switched my afternoon slot to morning, so Raith is now free tomorrow 14:30-18:00. Kelley On Nov 15, 2007 9:22 AM, S. Ekin Kocabas wrote: > I thought I had reserved for Thursday and planned accordingly.. But my > reservation was on Friday 9-14... That slot is free now. > > Ekin > -------------- next part -------------- An HTML attachment was scrubbed... URL: From linyouc at stanford.edu Thu Nov 15 16:39:34 2007 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Thu, 15 Nov 2007 16:39:34 -0800 Subject: Done earlier. Raith is free till 6:00pm Message-ID: <20071115163934.jctje926684sg4so@webmail.stanford.edu> Done earlier. Linyou -- Linyou Cao PhD student Department of Materials Science and Engineering Brongersma Group Stanfor University From koseki at stanford.edu Thu Nov 15 16:46:10 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Thu, 15 Nov 2007 16:46:10 -0800 Subject: Done earlier. Raith is free till 6:00pm References: <20071115163934.jctje926684sg4so@webmail.stanford.edu> Message-ID: <000f01c827ea$14c36780$231b40ab@nausicaa> I'll take it ! Thanks ! Shinichi ----- Original Message ----- From: To: Sent: Thursday, November 15, 2007 4:39 PM Subject: Done earlier. Raith is free till 6:00pm > Done earlier. > > Linyou > > -- > Linyou Cao > PhD student > Department of Materials Science and Engineering > Brongersma Group > Stanfor University > From kimsora at stanford.edu Sat Nov 17 10:59:25 2007 From: kimsora at stanford.edu (Sora Kim) Date: Sat, 17 Nov 2007 10:59:25 -0800 Subject: Done early Message-ID: <20071117105925.hvdq9gf3wgcwc8g8@webmail.stanford.edu> Free for the next user. Sora From kimsora at stanford.edu Sun Nov 18 08:42:53 2007 From: kimsora at stanford.edu (Sora Kim) Date: Sun, 18 Nov 2007 08:42:53 -0800 Subject: canceled reservation from 9:30- 11am Message-ID: <20071118084253.i4v42l2tc0wggc4w@webmail.stanford.edu> Sample is not ready. Sorry for late notice. Sora From linyouc at stanford.edu Sun Nov 18 12:15:59 2007 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Sun, 18 Nov 2007 12:15:59 -0800 Subject: Cancel reservation 11:00-13:00 Message-ID: <20071118121559.9zn9s46okk4wc08c@webmail.stanford.edu> Sample not ready Linyou -- Linyou Cao PhD student Department of Materials Science and Engineering Brongersma Group Stanfor University From xinranw at stanford.edu Mon Nov 19 18:11:21 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Mon, 19 Nov 2007 18:11:21 -0800 Subject: raith free Friday 14:00 Message-ID: <22ffcd060711191811u76d5467k43715ddfe150651f@mail.gmail.com> Sample won't be ready by then. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsora at stanford.edu Tue Nov 20 00:39:19 2007 From: kimsora at stanford.edu (Sora Kim) Date: Tue, 20 Nov 2007 00:39:19 -0800 Subject: cancel reservation from 4:30am to 6:30am on Tuesday Message-ID: <20071120003919.nmf6fmrqko4ww0g4@webmail.stanford.edu> Sample is not ready. Sorry for late notice. Sora From fjaeckel at stanford.edu Tue Nov 20 18:03:37 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Tue, 20 Nov 2007 18:03:37 -0800 Subject: raith free tomorrow 6-9.30AM Message-ID: <20071120180337.kfln6ipdkwo0csog@webmail.stanford.edu> sorry for the late notice -- Dr. rer. nat. Frank J?ckel mail address:? ?Department of Chemistry, M/C 5080 ? ? ? ? ? ? ? ? 333 Campus Drive ? ? ? ? ? ? ? ? mailbox #74 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 phone:? ? ? ? ? +1-650-724-4052/51 (office/lab) fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74) e-mail:? ? ? ? ?fjaeckel at stanford.edu internet:? ? ? ?http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From kocabas at stanford.edu Wed Nov 21 11:09:48 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Wed, 21 Nov 2007 11:09:48 -0800 Subject: Water Cooling Problem - Solved - Raith is now free Message-ID: Hi, This morning, when I came to load my sample I saw that there was a water cooling error last night at 23:30. With James' and Ilya's help, the problem is now solved and the machine is operational. However, I don't have enough time left for the tedious overlay alignment, so I'm canceling my session btw 9:30-14:00 today. Below is a log of events that took place. Ekin Raith Computer: During the last stich field there was a break down of the gun. See protocol file for time. SEM Computer - Leo Server: 20-11-2007 23:30 Error number 593: Water flow has failed 21-11-2007 00:30 Warning number 594: Water flow resumed Water temp OK Water flow OK Clicked Reset overheat OK Raith Computer Unload sample The vacuum in the chamber is not ready Please start pumping and if ready hit RETRY SEM Control - Vacuum - Pump Initially gun vacuum 1.5E-9 Torr System vacuum - Grayed out and shows 7.4E-7 Torr After some time it said - Vacuum status - At air?? Gun vacuum is still at 1.5E-9 I pressed 'pump' again Vac status - Waiting Turbo speed Raith Computer Advanced Load Lock Last Error: Error3 Check vacuum SEM Computer System Vacuum - Grayed out Gun Vacuum - 1.6E-9 Torr Vent inh = none Vac status = at air Column chamber valve = closed EHT vac ready = yes Column pumping = ready Contacted James Conway and Ilya Fushman With the help of James, cleared the Load Lock Error Pump level resumed Could not see the CCD camera, restarted the LEO Machine, CCD Camera now works -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsora at stanford.edu Thu Nov 22 11:02:33 2007 From: kimsora at stanford.edu (Sora Kim) Date: Thu, 22 Nov 2007 11:02:33 -0800 Subject: Done early Message-ID: <20071122110233.kbpb2py8issws0go@webmail.stanford.edu> Ready for the next user. Sora From kimsora at stanford.edu Fri Nov 23 10:34:49 2007 From: kimsora at stanford.edu (Sora Kim) Date: Fri, 23 Nov 2007 10:34:49 -0800 Subject: free for the next user Message-ID: <20071123103449.zg6tsacjk0080s0s@webmail.stanford.edu> My samples have some problems. I decided to use SEM4160. Sorry for late notice. Sora From kimsora at stanford.edu Sat Nov 24 08:24:58 2007 From: kimsora at stanford.edu (Sora Kim) Date: Sat, 24 Nov 2007 08:24:58 -0800 Subject: cancel reservation from 11:00 - noon. Message-ID: <20071124082458.9in7rjghic8s48c4@webmail.stanford.edu> Sora From zhangy at stanford.edu Sun Nov 25 08:44:22 2007 From: zhangy at stanford.edu (Yuan Zhang) Date: Sun, 25 Nov 2007 08:44:22 -0800 Subject: Raith free from 10am to 3pm today Message-ID: <20071125164408.E04404C05D@smtp3.stanford.edu> Bad sample. Won't be able to use the time slot. Yuan -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Sun Nov 25 10:32:19 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Sun, 25 Nov 2007 10:32:19 -0800 Subject: raith free Monday from 17:00 Message-ID: <22ffcd060711251032n6af333cqe5c8aa10590c037e@mail.gmail.com> sample was broken during other processes. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From anikak at stanford.edu Mon Nov 26 10:45:14 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Mon, 26 Nov 2007 10:45:14 -0800 Subject: two sessions released this week Message-ID: <20071126104514.qfovdkl2tc8kc40g@webmail.stanford.edu> tuesday 9a-1p and wednesday 6p-10p now free. enjoy! From raneeyoo at stanford.edu Mon Nov 26 10:50:44 2007 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Mon, 26 Nov 2007 10:50:44 -0800 Subject: two sessions released this week In-Reply-To: <20071126104514.qfovdkl2tc8kc40g@webmail.stanford.edu> References: <20071126104514.qfovdkl2tc8kc40g@webmail.stanford.edu> Message-ID: <20071126105044.ac0igja4mcok44go@webmail.stanford.edu> I will take wednesday session. thanks, kyeongran Quoting Anika Kinkhabwala : > tuesday 9a-1p and wednesday 6p-10p now free. enjoy! From joshuar at stanford.edu Mon Nov 26 10:57:57 2007 From: joshuar at stanford.edu (Josh Ratchford) Date: Mon, 26 Nov 2007 10:57:57 -0800 Subject: two sessions released this week In-Reply-To: <20071126104514.qfovdkl2tc8kc40g@webmail.stanford.edu> References: <20071126104514.qfovdkl2tc8kc40g@webmail.stanford.edu> Message-ID: I'll take 9-10 on Tuesday. On Nov 26, 2007 10:45 AM, Anika Kinkhabwala wrote: > tuesday 9a-1p and wednesday 6p-10p now free. enjoy! > -------------- next part -------------- An HTML attachment was scrubbed... URL: From fjaeckel at stanford.edu Mon Nov 26 11:54:57 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Mon, 26 Nov 2007 11:54:57 -0800 Subject: finished early raith free from 12PM Message-ID: <20071126115457.iryhbpa1p44cks84@webmail.stanford.edu> -- Dr. rer. nat. Frank J?ckel mail address:? ?Department of Chemistry, M/C 5080 ? ? ? ? ? ? ? ? 333 Campus Drive ? ? ? ? ? ? ? ? mailbox #74 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 phone:? ? ? ? ? +1-650-724-4052/51 (office/lab) fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74) e-mail:? ? ? ? ?fjaeckel at stanford.edu internet:? ? ? ?http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Mon Nov 26 12:02:00 2007 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Mon, 26 Nov 2007 12:02:00 -0800 Subject: finished early raith free from 12PM In-Reply-To: <20071126115457.iryhbpa1p44cks84@webmail.stanford.edu> References: <20071126115457.iryhbpa1p44cks84@webmail.stanford.edu> Message-ID: <2EE66B7D-5667-43DA-8923-299C18B4472F@stanford.edu> Thank you. I will start my session from 12:30pm. Yao-Te On Nov 26, 2007, at 11:54 AM, Frank Jaeckel wrote: > -- > Dr. rer. nat. Frank J?ckel > mail address: Department of Chemistry, M/C 5080 > 333 Campus Drive > mailbox #74 > Stanford University, Stanford, CA 94305-5080 > street address: 369 North-South Mall, Stauffer I, Room 15 > Stanford University, Stanford, CA 94305-5080 > phone: +1-650-724-4052/51 (office/lab) > fax: +1-650-725-0259 (indicate mailbox #74) > e-mail: fjaeckel at stanford.edu > internet: http://www.stanford.edu/~fjaeckel/ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kocabas at stanford.edu Mon Nov 26 12:11:07 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Mon, 26 Nov 2007 12:11:07 -0800 Subject: Tue 9-13 & Thu 22 - Fri 3 Free Message-ID: I've just seen the email by Josh. I'm canceling the session that I just reserved for tomorrow as well as the one on Thursday night at 10pm. Ekin On Nov 26, 2007 10:57 AM, Josh Ratchford wrote: > I'll take 9-10 on Tuesday. > > > On Nov 26, 2007 10:45 AM, Anika Kinkhabwala wrote: > > > tuesday 9a-1p and wednesday 6p-10p now free. enjoy! > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From shinichikoseki at gmail.com Thu Nov 29 08:09:43 2007 From: shinichikoseki at gmail.com (Shinichi Koseki) Date: Thu, 29 Nov 2007 08:09:43 -0800 Subject: Raith problems Message-ID: <3b532e5a0711290809i2a9c741qd24ddc55d8058d7b@mail.gmail.com> >From the last night, some problems are ongoing. 1. mitsuru1 wrote on the log sheet "Error: Vacuum is not ready" 2. bilee wrote on the coral "When I tried to load the sample, it showed an error massege saying that the vaccum in the stage is bad. I could not use the tool due to this problem." 3. When I started the Raith program, I got Error Digital Pattern Generator popup windonw saying "Digital Pattern GENerator is not ready ! Demo mode enabled " After rebooting both the Raith and LEO computer, this problem was resolved and the Raith program started normally. 4. When I loaded the sample, the turbo pump took about 1min to start (usually it's just 5 sec) 5. ETH running up takes long time ~ 5min. Until the voltage finally reached to 10kV, I got popup window 3 times saying Error Raith 150 "It is not possible to set the voltage !" I hit "retry" and waited. Otherwise, it seems to be fine. I could start my writing normally. Now, the vacuum parameters are System Vacuum: 3x10^(-6) Gun Vacuum: 1x10^(-9) Vacuum Status: ready best, Shinichi From shinichikoseki at gmail.com Thu Nov 29 08:11:27 2007 From: shinichikoseki at gmail.com (Shinichi Koseki) Date: Thu, 29 Nov 2007 08:11:27 -0800 Subject: Raith time swap notice Message-ID: <3b532e5a0711290811t9f193a4x5b3f43e25911dc14@mail.gmail.com> I and kimsora swapped the time. Today I will use the machine until 12pm. >From 12-1pm, kimsora uses. Thanks, Shinichi From sunxuhui at gmail.com Thu Nov 29 21:36:59 2007 From: sunxuhui at gmail.com (Xuhui Sun) Date: Thu, 29 Nov 2007 21:36:59 -0800 Subject: 12/3 (Monday) afternoon 1:00pm-6:00pm free Message-ID: Sample cannot be ready at that time. Jeff From raneeyoo at stanford.edu Thu Nov 29 21:58:49 2007 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Thu, 29 Nov 2007 21:58:49 -0800 Subject: 12/3 (Monday) afternoon 1:00pm-6:00pm free In-Reply-To: References: Message-ID: <20071129215849.v5shsuu56o4g0ok8@webmail.stanford.edu> I will take it. thanks, Kyeongran Quoting Xuhui Sun : > Sample cannot be ready at that time. > > Jeff > From dalyx at stanford.edu Thu Nov 29 22:01:51 2007 From: dalyx at stanford.edu (Dany-Sebastien Ly-Gagnon) Date: Thu, 29 Nov 2007 22:01:51 -0800 Subject: Fwd: 12/3 (Monday) afternoon 1:00pm-6:00pm free In-Reply-To: <7f014b6b0711292144p5755cb86r49cfd707ffcae7b1@mail.gmail.com> References: <7f014b6b0711292144p5755cb86r49cfd707ffcae7b1@mail.gmail.com> Message-ID: <7f014b6b0711292201u13254c2dk113291bd882325f6@mail.gmail.com> oops... that email didn't go to the list. Sorry about the inconvenience. Dany ---------- Forwarded message ---------- From: Dany-Sebastien Ly-Gagnon Date: Nov 29, 2007 9:44 PM Subject: Re: 12/3 (Monday) afternoon 1:00pm-6:00pm free To: Xuhui Sun I'd like to use that slot. Thanks, -- Dany On Nov 29, 2007 9:36 PM, Xuhui Sun wrote: > Sample cannot be ready at that time. > > Jeff > From jwc at snf.stanford.edu Fri Nov 30 11:23:56 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 30 Nov 2007 11:23:56 -0800 Subject: ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday December 4, 2007 from 10:15 - 12:30 Message-ID: <4750634C.20603@snf.stanford.edu> *ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater.* Greetings SNF Lab Users, I will be conducting my bi-monthly *"Take A Spin with Me" *training class Tuesday December 4, 2007 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Schedule of Events: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Nov 30 11:27:09 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 30 Nov 2007 11:27:09 -0800 Subject: I will be coming onto the system -- JWC Message-ID: <4750640D.7000607@snf.stanford.edu> An HTML attachment was scrubbed... URL: