From xinranw at stanford.edu Mon Oct 1 16:12:37 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Mon, 1 Oct 2007 16:12:37 -0700 Subject: reservation canceled from Tuesday 23:00 Message-ID: <22ffcd060710011612t76f704ael892b811040c25b1e@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Oct 2 10:56:15 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 02 Oct 2007 10:56:15 -0700 Subject: ANNOUNCEMENT: RAITH Group XXIX -- Intensive 4 day short course. October 16 - 19, 2007 TUESDAY - FRIDAY 10 AM - 6 PM Message-ID: <4702863F.2080201@snf.stanford.edu> *Greetings RAITH Group XXIX: ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXIX -- the next RAITH** Four Day Basic User Short Course. If you are listed in the CC: section of this email; I still am in need of further information or a commitment from you, and hope to add you in the next class. Any RAITH user wishing to attend are also welcome if you desire a review of operations on the RAITH 150 system. ** We wish to invite all interested parties to the Tuesday morning lecture session from 10:00 AM - 12:30 PM, and the following Demo Layer One training from 2 PM - 6 PM in the afternoon. All are also welcome to attend as observers the other 'hands-on' sessions through the week. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXIX Training course to be held October 16 - 19, 2007. _*You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. I am next holding this class on October 9th and 23rd from 10:15 - 1 PM in the SNF cleanroom. There is a separate sign up for this class on the white board in my office at CIS 31. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXIX **Schedule: ** * *Raith 150 Basic Users Training -- Intensive 4 Day Short Course* *October 16 - 9, 2007 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday October 16, 2007: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS-X 201 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday October 17, 2007: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday October 18, 2007: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday October 19, 2007: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can stop by my office hour and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM CIS 31) Just bring along a USB drive! ------------------------------------------------------------------------------------------------------------------------------------------- *RAITH Group XXIX Date **October 16 - 9, 2007** BASIC USER INTENSIVE FOUR DAY SHORT COURSE. tentative class listing due to pending certification of pre-requisites completed. * * * 1. Linyou Cao linyouc at stanford.edu Coral: linyoucao Brongersma Group Project: Surface Plasmon Devices on Au Nanoparticles. -- SEMHITACHI Training -- TAKE A SPIN WITH ME 2. prabhu arumugam auprabhu at yahoo.com Group: UCSC Project: ___________________ -- SEMHITACHI Training -- TAKE A SPIN WITH ME 3. Byoungil Lee bilee at stanford.edu Coral: bilee H.S. Phillip Wong Project: Non-volatile Memory cell on cross-point contacts. -- SEMHITACHI Training -- TAKE A SPIN WITH ME 4. Dany Ly-Gagnon dalyx at stanford.edu Coral: dalyx David Miller group, Project: Nano-metallic enhanced opto-electronic devices. -- SEMHITACHI Training -- TAKE A SPIN WITH ME Observers in this Class (2 max.) 5. Salman Latif slatif at stanford.edu Coral: slatif David Miller Group, Project: Nano-metallic enhanced opto-electronic devices. 6. Jesse Lu jesselu at stanford.edu Coral: jesselu Vuckovic Group Project: Group IV 2D Photonic Crystals 7. Jonathan Rivnay rivnay at gmail.com Coral: rivnay Phone: Salleo Group Project: Phase separation of semiconducting polymers on patterned surfaces -- -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 384 bytes Desc: not available URL: From jwconway at stanford.edu Wed Oct 3 17:08:12 2007 From: jwconway at stanford.edu (jwconway at stanford.edu) Date: Wed, 03 Oct 2007 17:08:12 -0700 Subject: NO SHOW on the RAITH system is available for the next to enable on CORAL Message-ID: <20071003170812.e7i6r8e00kskw08c@webmail.stanford.edu> Good Afternoon Raith Users: I did not see the reserved user in the lab this afternoon. Either the next user, if available, or ANY RAITH User may now come onto the system. First one to enable gets the tool. Coral schedule shows gyzhang at 19:00 Come on down.... James Conway From renshen at stanford.edu Mon Oct 8 13:14:13 2007 From: renshen at stanford.edu (Shen Ren) Date: Mon, 8 Oct 2007 13:14:13 -0700 Subject: Tool Available to next user Message-ID: <628a66910710081314i38266637qc304aa630667a241@mail.gmail.com> Previous user doesn't show up. Tool is available to the next user (ytcheng) or whoever want to come. nest user starts from 1400. By courtesy of JWC. -- Best wishes, Shen Ren Department of Electrical Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From mpovinel at stanford.edu Mon Oct 8 15:50:07 2007 From: mpovinel at stanford.edu (Michelle Povinelli) Date: Mon, 8 Oct 2007 15:50:07 -0700 Subject: reservation released, free Tuesday 8am--2pm Message-ID: From anikak at stanford.edu Mon Oct 8 15:55:13 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Mon, 08 Oct 2007 15:55:13 -0700 Subject: 10:30-1:30p tomorrow taken Message-ID: <20071008155513.pk3za9y328gkk048@webmail.stanford.edu> From jwc at snf.stanford.edu Mon Oct 8 17:18:53 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 08 Oct 2007 17:18:53 -0700 Subject: Reminder for Tomorrow: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday October 09 and 23, 2007 from 10:15 - 13:00 Message-ID: <470AC8ED.4080102@snf.stanford.edu> *ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater.* Greetings SNF Lab Users, I will be conducting my bi-monthly *"Take A Spin with Me" *training class Tuesday October 09 and 23, 2007 from *10:15* AM - 1 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. These applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater and users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. Schedule of Events: *10:15* - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:30 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. _*This is a Hands-On Lab Session so please have your substrates clean and ready to coat on the Headway Coater. *_ Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Oct 9 09:02:41 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 09 Oct 2007 09:02:41 -0700 Subject: Cancellinygmy raith session for Friday October 12, 2007 from 10 - 14:00 Message-ID: <470BA621.9070005@snf.stanford.edu> An HTML attachment was scrubbed... URL: From yueruilu at stanford.edu Thu Oct 11 23:32:11 2007 From: yueruilu at stanford.edu (Yuerui Lu) Date: Thu, 11 Oct 2007 23:32:11 -0700 Subject: raith cancelled Sat. from 19:30pm to midnight Message-ID: Sample not ready. Sorry -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Oct 12 11:01:02 2007 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Fri, 12 Oct 2007 18:01:02 +0000 Subject: James is out of the office today Message-ID: <1198205424-1192212033-cardhu_decombobulator_blackberry.rim.net-560305985-@bxe008.bisx.prod.on.blackberry> Hello James is out of the office today, but is available by cell phone should you run into problems on the systems. Have a nice weekend James Conway Sent via BlackBerry by AT&T From koseki at stanford.edu Fri Oct 12 22:55:30 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Fri, 12 Oct 2007 22:55:30 -0700 Subject: Raith free 0-5am on Sun Message-ID: <000701c80d5d$a9ba0800$231b40ab@nausicaa> Dear users, I'll use the machine tonight, and I release my reservation tomorrow night. Combined with the cancellation of another user, Raith is free from 20:30pm to 5am tomorrow night. best, Shinichi From xinranw at stanford.edu Sun Oct 14 03:12:18 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Sun, 14 Oct 2007 03:12:18 -0700 Subject: exchange time with zhangy sunday Message-ID: <22ffcd060710140312w681d49caua2b20dfa46f0da96@mail.gmail.com> I will exchange my morning time with zhuangy so she will come on the tool at 11am and I will start at 3pm. Thanks, Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Sun Oct 14 16:14:43 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Sun, 14 Oct 2007 16:14:43 -0700 Subject: raith done early Message-ID: <22ffcd060710141614q14aec89o95ae83410059aa64@mail.gmail.com> I will finish before 5pm today so next user can come early. I also deleted my session on Monday from 17:30 because my next sample won't be ready. Thanks, Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Oct 15 15:18:22 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 15 Oct 2007 15:18:22 -0700 Subject: REMINDER starting tomorrow: RAITH Group XXIX -- Intensive 4 day short course. October 16 - 19, 2007 TUESDAY - FRIDAY 10 AM - 6 PM Message-ID: <4713E72E.90403@snf.stanford.edu> *Greetings RAITH Group XXIX: ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXIX -- the next RAITH** Four Day Basic User Short Course. If you are listed in the CC: section of this email; I still am in need of further information or a commitment from you, and hope to add you in the next class. Any RAITH user wishing to attend is also welcome if you desire a review of operations on the RAITH 150 system. ** We wish to invite all interested parties to the Tuesday morning lecture session from 10:00 AM - 12:30 PM, and the following Demo Layer One training from 2 PM - 6 PM in the afternoon. All are also welcome to attend as observers the other 'hands-on' sessions through the week. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXIX Training course to be held October 16 - 19, 2007. _*You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. I am next holding this class on October 9th and 23rd from 10:15 - 1 PM in the SNF cleanroom. There is a separate sign up for this class on the white board in my office at CIS 31. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXIX **Schedule: ** * *Raith 150 Basic Users Training -- Intensive 4 Day Short Course* *October 16 - 9, 2007 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday October 16, 2007: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS-X 201 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday October 17, 2007: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday October 18, 2007: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday October 19, 2007: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can stop by my office hour and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM CIS 31) Just bring along a USB drive! ------------------------------------------------------------------------------------------------------------------------------------------- *RAITH Group XXIX Class Listing Date October 16 - 19, 2007 BASIC USER INTENSIVE FOUR DAY SHORT COURSE.* 1. Linyou Cao linyouc at stanford.edu Coral: linyoucao Brongersma Group Project: Surface Plasmon Devices on Au Nanoparticles. 2. Byoungil Lee bilee at stanford.edu Coral: bilee H.S. Phillip Wong Project: Non-volatile Memory cell on cross-point contacts. 3. Dany Ly-Gagnon dalyx at stanford.edu Coral: dalyx David Miller group, Project: Nano-metallic enhanced opto-electronic devices. 4. Salman Latif slatif at stanford.edu Coral: slatif David Miller Group, Project: Nano-metallic enhanced opto-electronic devices. 5. Kathryn Todd kathrynt at stanford.edu Coral: kathrynt David Gold Haber-Gordon Group Project: patterning 30-50 nm etch masks on graphene in order to fabricate nanoribbons. Observers in this Class: 6. Jesse Lu jesselu at stanford.edu Coral: jesselu Vuckovic Group Project: Group IV 2D Photonic Crystals Working with Maria Mackarova. 7. Aaron Hryciw (reshoe ph.) ahryciw at stanford.edu Coral: ahryciw Brongersma Group Project: Silicon Nano-structures based Plasmonic devices. 8. Linjie Zhou ecezhoulj at gmail.com Coral: ljzhou Ben Yoo Group UCDavis Project: Silicon Photonics waveguides and resonators. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 384 bytes Desc: not available URL: From faraon at stanford.edu Mon Oct 15 15:41:51 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Mon, 15 Oct 2007 15:41:51 -0700 Subject: raith free today from 5:30pm-8pm Message-ID: <28d3ece90710151541n4e82d839x3264efac87a075a8@mail.gmail.com> Sample is not ready. Sorry for the late notice. -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From lwchang at stanford.edu Tue Oct 16 10:57:31 2007 From: lwchang at stanford.edu (Li-Wen Chang) Date: Tue, 16 Oct 2007 10:57:31 -0700 Subject: Raith free tonight 22:30-5:00 Message-ID: <8ab79e460710161057r15135830v6ed53136c71f1a14@mail.gmail.com> From kocabas at stanford.edu Wed Oct 17 05:28:29 2007 From: kocabas at stanford.edu (S. Ekin Kocabas) Date: Wed, 17 Oct 2007 05:28:29 -0700 Subject: Raith is locked Message-ID: <20071017052829.14aw3bducc404ok0@webmail.stanford.edu> Good Morning/Night, I came to the lab to find out that there was a load lock error in one of the previous sessions. Here's what I get when I try to load the sample. 'There were errors on the last procedure. Please verify first.' [Hit OK] 'Error 212 - MoverRobotArmIn' 'Error 213 - MoveRobotArmOut' 'Error 212 - MoverRobotArmIn' [Hit Reset] 'Cannot Reset Access Denied' To prevent frustration among users, I'd strongly suggest emailing to the list in addition to putting a comment on coral in the case of a problem. I'm canceling my session. Ekin From jwc at snf.stanford.edu Wed Oct 17 19:39:09 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 17 Oct 2007 19:39:09 -0700 Subject: [Fwd: Problem raith SNF 2007-10-17 19:28:45: E/O card too hot water flow failing] Message-ID: <4716C74D.2070403@snf.stanford.edu> Greetings Raith Users The water flow to the RAITH system is now very low and the system is in a critical state. See message below... Users are requested to call me immediately if there is a problem encountered. System is currently up in Yellow light mode and Users are working on the system through the evening and morning. I will attempt to get a RAITH service person here early next week if the system remains up for use until then. Thank you for your support! James Conway -------- Original Message -------- Subject: Problem raith SNF 2007-10-17 19:28:45: E/O card too hot water flow failing Date: Wed, 17 Oct 2007 19:28:46 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Good Evening, Numerous I/O problems on LEO computer with alarms and errors in vacuum sensing and E/O card likely related to the poor water flow. The system was reset twice -- once in yellow button standby mode and second by using the red button reset manually. I then brought up the vacuum system pumping on the RAITH chamber Turbo and then the Ion pumps followed by a service run up of the FE-GUN. I expect this system will come down hard in the next few hours to days if the water flow does not improve. Current temp of E/O card at system is 38 degrees C. Flow is below 0.1 lpm. System is currently up and available to users. Please call me if the system vents or the gun shuts down. We never sleep, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From anikak at stanford.edu Thu Oct 18 06:57:06 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Thu, 18 Oct 2007 06:57:06 -0700 Subject: Raith is down until James comes in at least Message-ID: <20071018065706.fmrv1uvvz4ooo8kg@webmail.stanford.edu> Came in and I'm getting a loadlock error. The previous user put a note on coral, but I would also like to ask that people send an e-mail when the system is shutdown... -Anika From jwc at snf.stanford.edu Thu Oct 18 09:13:19 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 18 Oct 2007 09:13:19 -0700 Subject: RAITH Class Canceled today -- RAITH system down and off line to all Users. Water cooling loop issues still to be resolved. Message-ID: <4717861F.9050000@snf.stanford.edu> *Greetings RAITH Group XXIX and RAITH Users: * The Raith system will be off line for all Users to effect repairs to the water cooling loop going to the Electron Optics Card and other sub-systems that require water cooling in the System. Todays RAITH Group XXIX class is canceled for today. I will send out an announcement at days end or very early tomorrow morning if we can continue the class tomorrow. My apologizes to the interruption to your schedules and research. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Oct 19 09:40:03 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 19 Oct 2007 09:40:03 -0700 Subject: RAITH Class Canceled today -- RAITH system down and off line to all Users. Water cooling loop issues still to be resolved. Message-ID: <4718DDE3.4020009@snf.stanford.edu> * Greetings RAITH Group XXIX and RAITH Users: * The Raith system will remain off line for all Users to effect repairs to the water cooling loop going to the Turbo pump section and other sub-systems that require water cooling in the System. Todays RAITH Group XXIX class is canceled for today. However you are all encouraged to work as a team or individually to make use of the off line RAITH software to continue your training on the GDS II editor and generate your test and device patterns for when we resume the class. Meanwhile I am going to make an effort to clear the blockages in the current turbo pump and will make a best effort at getting the system back up for Users this weekend. A new replacement Turbo pump is being shipped to me for Monday delivery from New York. I will take the system off line from users to install the new pump on Monday afternoon. I will send out an announcement at days end regarding status of the system for this weekend. System is currently in RED light mode on Coral. My apologizes to the interruption to your schedules and research. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Oct 19 17:36:36 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 19 Oct 2007 17:36:36 -0700 Subject: RAITH is back up for Users. Message-ID: <47194D94.8020202@snf.stanford.edu> Greetings Raith Community, I have made a best effort to resolve the cooling pump issues primarily related to the cooling jacket in the Turbo pump becoming clogged with scale and particulate debris. I purged the system of bubbles and checked for leaks and all looks good. While flow initially was pegged at over 2.8 liters per minute it has fallen to the original value of 1.6 lpm we obtained shortly after the last system flush several months ago. It is my expectation that this will get us through some period of time; but likely did not address all issues related to the RAITH system cooling loop. I am going to schedule downtime for maintenance with RAITH field service at the earliest opportunity. Users will note that emission levels are slightly below where they were two days ago -- but this will steadily increase as Gun section vacuum decreases and emission levels stabilize to optimal values. I/O and E/O functions have been tested and Users will not have any problems they encountered Tuesday evening if they carefully follow the Load Lock procedures. BE SURE TO HOLD THE Load Lock DOOR DOWN! I re-homed all positions for the LIStage and updated the recorded positions of the Faraday cups back to the Std. Sample Holder defaults. I tested the SEM functions and have performed an EBL write that is exposing as I write this email. Users should attempt to complete as much EBL work as possible before we take the system down for more repairs and maintenance at some point next week. RAITH Fields Service has been requested to come on site as soon as possible. Special Thanks to Dmitry Kozak and the other users whom assisted me during this difficult period. Thank you for your support! James Conway -------- Original Message -------- Subject: Re: Problem raith SNF 2007-10-19 16:04:52: FE-GUN run up in progress. Date: Fri, 19 Oct 2007 17:05:48 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu full system check out completed. preliminary qualification write in progress. FE-Gun will take a day or so to reach deep vacuum and optimal emission levels. Ready for next user after 18:00 hours turbo pump and cooling loop will need flushing and exchange next week. Raith field service requested... JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From gyzhang at stanford.edu Mon Oct 22 12:28:37 2007 From: gyzhang at stanford.edu (Guangyu Zhang) Date: Mon, 22 Oct 2007 12:28:37 -0700 Subject: Raith free tonight 5:30-9:30PM Message-ID: <20071022122837.xaaddoa62ocwkk0o@webmail.stanford.edu> Sample is not ready. Raith session tonight 5:30-9:30PM released, will delete the reservation on coral later... Guangyu From koseki at stanford.edu Mon Oct 22 13:19:01 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Mon, 22 Oct 2007 13:19:01 -0700 Subject: Raith free tonight 5:30-9:30PM References: <20071022122837.xaaddoa62ocwkk0o@webmail.stanford.edu> Message-ID: <002201c814e8$c9086d40$231b40ab@nausicaa> Thanks. I'll take it ! Shinichi ----- Original Message ----- From: "Guangyu Zhang" To: "Raith SNF Mailing list" Sent: Monday, October 22, 2007 12:28 PM Subject: Raith free tonight 5:30-9:30PM > Sample is not ready. Raith session tonight 5:30-9:30PM released, will > delete the reservation on coral later... > Guangyu > From jwc at snf.stanford.edu Tue Oct 23 17:59:56 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 23 Oct 2007 17:59:56 -0700 Subject: New bottle of 2% 950K MW PMMA in anisole -- from same batch as the previous bottle to be finished up... Message-ID: <471E990C.40101@snf.stanford.edu> Congratulations 2% 950K PMMA Users: Usage of this expensive material is significantly less than for the same quarter a year ago. The last batch of 2% 950K MW PMMA in anisole in bottle No 2 of 250 ml volume lasted nearly six months! A year ago we went through this much in three to four weeks. Users have changed how they handle this material and by using syringes to dispense this polymer we are wasting much less material as before. * Thank you for helping SNF reduce our cost of engineering materials!* I have just stocked a new 250 ml bottle from the same batch lot (Microchem Lot. 060050394 bottle No 3.) Please use up the remaining material left in the old bottle before opening the next. I spun films with that bottle this morning and the polymer is just fine and will render excellent thin films using the Headway. (100 nm thin films: 1600 - 1620 rpm for 30 seconds -- 200 degrees bake 2 minutes hotplate. All samples had less than 1% sigma thickness. Typically 1015 - 1025 angstroms ...) Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Oct 25 13:12:08 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 25 Oct 2007 13:12:08 -0700 Subject: I will be on the RAITH system today. Feel free to join me if you are free this afternoon 1 - 6 PM Message-ID: <4720F898.2060902@snf.stanford.edu> * Greetings RAITH Group XXIX I will be working on the RAITH system this afternoon and you are welcome to join me for this session. Will be continuing exposures started yesterday working on HSQ a negative tone resist system. The exposures will be performed at 20, 25, and 30 keV if time allows. This is a good opportunity to see how the system is set up for an exposure at higher acceleration voltages using the other Secondary Electron Detector and upon semi-conducting substrates to add to the challenge. Will also be able to answer any questions you may have once the exposure starts. (Est. about 4:30 - 5:00 PM.) Thank you, James Conway * -------------- next part -------------- An HTML attachment was scrubbed... URL: From fjaeckel at stanford.edu Fri Oct 26 08:15:56 2007 From: fjaeckel at stanford.edu (Frank Jaeckel) Date: Fri, 26 Oct 2007 08:15:56 -0700 Subject: finished early at 8.30AM Message-ID: <20071026081556.rzg5lqdfs4g8s40w@webmail.stanford.edu> -- Dr. rer. nat. Frank J?ckel mail address:? ?Department of Chemistry, M/C 5080 ? ? ? ? ? ? ? ? 333 Campus Drive ? ? ? ? ? ? ? ? mailbox #74 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 street address: 369 North-South Mall, Stauffer I, Room 15 ? ? ? ? ? ? ? ? Stanford University, Stanford, CA 94305-5080 phone:? ? ? ? ? +1-650-724-4052/51 (office/lab) fax:? ? ? ? ? ? +1-650-725-0259? ? (indicate mailbox #74) e-mail:? ? ? ? ?fjaeckel at stanford.edu internet:? ? ? ?http://www.stanford.edu/~fjaeckel/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangli at stanford.edu Fri Oct 26 11:55:40 2007 From: zhangli at stanford.edu (Li Zhang) Date: Fri, 26 Oct 2007 11:55:40 -0700 Subject: time swithing Message-ID: <66aaf8f30710261155j38b7a411g8b710dcff34113c@mail.gmail.com> Just for your reference, I swithed my reservation on Sunday night with user Koseki's reservation tonight. -- Li --------------------------------------- Li Zhang Dai's Group Department of Chemistry Stanford University --------------------------------------- .oooO ( ) Oooo. \ ( ( ) \ ) ) / Life is good, ( / it's just not easy. -------------- next part -------------- An HTML attachment was scrubbed... URL: From gyzhang at stanford.edu Fri Oct 26 16:06:23 2007 From: gyzhang at stanford.edu (Guangyu Zhang) Date: Fri, 26 Oct 2007 16:06:23 -0700 Subject: Next user can come... Message-ID: <20071026160623.ky4txffifk84ss84@webmail.stanford.edu> Started earlier, my exposure will finish around 4:15PM. Next user can come to use it then... Guangyu From koseki at stanford.edu Fri Oct 26 18:20:47 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Fri, 26 Oct 2007 18:20:47 -0700 Subject: Raith free Sat night 21:30- Message-ID: <001001c81837$9a912310$231b40ab@nausicaa> Sorry that sample won't be ready. regards, Shinichi From xinranw at stanford.edu Fri Oct 26 21:59:04 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Fri, 26 Oct 2007 21:59:04 -0700 Subject: raith free Sunday 12:30pm Message-ID: <22ffcd060710262159q49060709h4991da77d3562f1@mail.gmail.com> I won't need so much time for my exposure. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From gyzhang at stanford.edu Mon Oct 29 10:43:49 2007 From: gyzhang at stanford.edu (Guangyu Zhang) Date: Mon, 29 Oct 2007 10:43:49 -0700 Subject: Raith free from 1:30-4:30PM Message-ID: <20071029104349.qesx9gxq9co4kcg0@webmail.stanford.edu> Sample's not ready, sorry for the late release... Guangyu From gyzhang at stanford.edu Mon Oct 29 10:43:50 2007 From: gyzhang at stanford.edu (Guangyu Zhang) Date: Mon, 29 Oct 2007 10:43:50 -0700 Subject: Raith free from 1:30-4:30PM Message-ID: <20071029104350.b0exxanjdw4kogco@webmail.stanford.edu> Sample's not ready, sorry for the late release... Guangyu From ytcheng at stanford.edu Mon Oct 29 11:14:34 2007 From: ytcheng at stanford.edu (ytcheng at stanford.edu) Date: Mon, 29 Oct 2007 11:14:34 -0700 Subject: Raith free from 1:30-4:30PM In-Reply-To: <20071029104350.b0exxanjdw4kogco@webmail.stanford.edu> References: <20071029104350.b0exxanjdw4kogco@webmail.stanford.edu> Message-ID: <20071029111434.rc9x93etc48o4og8@webmail.stanford.edu> I will keep working with raith until 3:30pm. Thank you. Yao-Te Quoting Guangyu Zhang : > Sample's not ready, sorry for the late release... > Guangyu From jwc at snf.stanford.edu Mon Oct 29 14:32:13 2007 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 29 Oct 2007 13:32:13 -0800 Subject: ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday November 06 and 20th, 2007 from 10:15 - 12:30 Message-ID: <4726515D.9090503@snf.stanford.edu> * ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater.* Greetings SNF Lab Users, I will be conducting my bi-monthly *"Take A Spin with Me" *training class Tuesday October 09 and 23, 2007 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Schedule of Events: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: vlsi_wafer.jpg Type: image/jpeg Size: 49030 bytes Desc: not available URL: From lwchang at stanford.edu Mon Oct 29 22:32:22 2007 From: lwchang at stanford.edu (Li-Wen Chang) Date: Mon, 29 Oct 2007 22:32:22 -0700 Subject: Raith free from 10:30pm onwards Message-ID: <8ab79e460710292232h3997bdbpaecb0b205c83f3d7@mail.gmail.com> sorry for the late notice From lmoore.email at gmail.com Tue Oct 30 19:07:34 2007 From: lmoore.email at gmail.com (Lindsay Moore) Date: Tue, 30 Oct 2007 19:07:34 -0700 Subject: Raith free 9:30-midnight tonight Message-ID: <4dfce5b30710301907r30c9054dic384fd2bb330fc1b@mail.gmail.com> i'm not feeling well. sorry for late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Wed Oct 31 12:03:49 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Wed, 31 Oct 2007 12:03:49 -0700 Subject: raith done early, free until 2pm Message-ID: <22ffcd060710311203x596673beu58a2f836442da117@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Oct 31 15:29:57 2007 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 31 Oct 2007 14:29:57 -0800 Subject: User Bubble did not show up for his raith session -- YTCHEN enabled the tool and now has the session time and may hsare it wil me... Message-ID: <472901E5.3070709@snf.stanford.edu> An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Wed Oct 31 16:42:33 2007 From: ytcheng at stanford.edu (ytcheng at stanford.edu) Date: Wed, 31 Oct 2007 16:42:33 -0700 Subject: raith is free until 6:30pm In-Reply-To: <472901E5.3070709@snf.stanford.edu> References: <472901E5.3070709@snf.stanford.edu> Message-ID: <20071031164233.e39mumua7sws0c00@webmail.stanford.edu> finished early From anikak at stanford.edu Wed Oct 31 18:46:16 2007 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Wed, 31 Oct 2007 18:46:16 -0700 Subject: started early, raith now available Message-ID: <20071031184616.3ot4gd3afksssggk@webmail.stanford.edu>